公开(公告)号：US07591625B2

公开(公告)日：2009-09-22

申请号：US12076160

申请日：2008-03-14

申请人： Hirofumi Minami ,  Kazuhiro Fujimura

发明人： Hirofumi Minami ,  Kazuhiro Fujimura

IPC分类号： H01L21/68

CPC分类号： B25J9/1065 ,  H01L21/67742 ,  Y10S414/13 ,  Y10S414/139

摘要： A carrying device which can prevent an object to be carried from being contaminated with dust and carry the object to a correct position. The present invention is constructed by first and second parallelogram linkages. The second parallelogram linkage is formed by using a link of the first parallelogram linkage, has four sides with an equal length, and is linearly extended or retracted along a linear guide. Links of the first parallelogram linkage and links of the second parallelogram linkage are configured to rotate while being in a restrained state of 90° at pivots of both ends of the common link of the first and second parallelogram linkage, respectively. An arm is provided at a pivot of an end of a link opposed to the link of the first parallelogram linkage such that the arm rotates in a restrained state of 90° relative to the link.

摘要翻译： 能够防止被携带物被灰尘污染并携带物体到正确位置的携带装置。 本发明由第一和第二平行四边形连接构成。 第二平行四边形连杆通过使用第一平行四边形连杆的连杆形成，具有相等长度的四个边，并且沿直线导轨线性延伸或缩回。 第一平行四边形连杆和第二平行四边形连杆的连杆的连接被配置为分别在第一和第二平行四边形连杆的公共连杆的两端的枢轴处于90°的约束状态下旋转。 臂设置在与第一平行四边形连杆的连杆相对的端部的枢轴处，使得臂相对于连杆以约90°的约束状态旋转。

公开(公告)号：US20080226430A1

公开(公告)日：2008-09-18

申请号：US12076160

申请日：2008-03-14

申请人： Hirofumi Minami ,  Kazuhiro Fujimura

发明人： Hirofumi Minami ,  Kazuhiro Fujimura

IPC分类号： H01L21/677

CPC分类号： B25J9/1065 ,  H01L21/67742 ,  Y10S414/13 ,  Y10S414/139

摘要： A carrying device which can prevent an object to be carried from being contaminated with dust and carry the object to a correct position. The present invention is constructed by first and second parallelogram linkages. The second parallelogram linkage is formed by using a link of the first parallelogram linkage, has four sides with an equal length, and is linearly extended or retracted along a linear guide. Links of the first parallelogram linkage and links of the second parallelogram linkage are configured to rotate while being in a restrained state of 90° at pivots of both ends of the common link of the first and second parallelogram linkage, respectively. An arm is provided at a pivot of an end of a link opposed to the link of the first parallelogram linkage such that the arm rotates in a restrained state of 90° relative to the link.

摘要翻译： 能够防止被携带物被灰尘污染并携带物体到正确位置的携带装置。 本发明由第一和第二平行四边形连接构成。 第二平行四边形连杆通过使用第一平行四边形连杆的连杆形成，具有相等长度的四个边，并且沿直线导轨线性延伸或缩回。 第一平行四边形连杆和第二平行四边形连杆的连杆的连接被配置为分别在第一和第二平行四边形连杆的公共连杆的两端的枢轴处于90°的约束状态下旋转。 臂设置在与第一平行四边形连杆的连杆相对的端部的枢轴处，使得臂相对于连杆以约90°的约束状态旋转。

公开(公告)号：US09193067B2

公开(公告)日：2015-11-24

申请号：US13384903

申请日：2010-07-20

申请人： Kazuhiro Fujimura ,  Hirofumi Minami

发明人： Kazuhiro Fujimura ,  Hirofumi Minami

IPC分类号： F16H1/46 ,  B25J9/10 ,  F16H37/04 ,  H01L21/677

CPC分类号： B25J9/102 ,  F16H1/06 ,  F16H1/28 ,  F16H1/46 ,  F16H37/041 ,  H01L21/67742

摘要： A rotation-transmitting mechanism capable of obtaining a high deceleration ratio in a small number of stages, and a conveying apparatus and driving apparatus using the rotation-transmitting mechanism are provided. In one form, a rotation-transmitting mechanism includes an inner rotating body and an outer rotating body arranged coaxially with the inner rotating body. Further, the rotation-transmitting mechanism includes a driving rotating body and rotating body arranged on an input side (lower stage), and two planetary rotating bodies arranged on an output side (upper stage). When the driving rotating body is rotated by a motor on the input side, the two planetary rotating bodies revolve around the inner rotating body while rotating on the output side. At this time, the planetary rotating bodies revolve very slowly around the inner rotating body.

摘要翻译： 提供一种能够在少量级中获得高减速比的旋转传递机构，以及使用旋转传递机构的传送装置和驱动装置。 在一种形式中，旋转传递机构包括与内部旋转体同轴设置的内部旋转体和外部旋转体。 此外，旋转传递机构包括设置在输入侧（下层）上的驱动旋转体和旋转体，以及设置在输出侧（上段）的两个行星旋转体。 当驱动旋转体通过输入侧的电动机旋转时，两个行星旋转体在输出侧旋转的同时围绕内旋转体旋转。 此时，行星旋转体围绕内旋转体旋转非常缓慢。

公开(公告)号：US20120251287A1

公开(公告)日：2012-10-04

申请号：US13384903

申请日：2010-07-20

申请人： Kazuhiro Fujimura ,  Hirofumi Minami

发明人： Kazuhiro Fujimura ,  Hirofumi Minami

IPC分类号： F16H1/28 ,  B25J11/00

CPC分类号： B25J9/102 ,  F16H1/06 ,  F16H1/28 ,  F16H1/46 ,  F16H37/041 ,  H01L21/67742

摘要： A rotation-transmitting mechanism capable of obtaining a high deceleration ratio in a small number of stages, and a conveying apparatus and driving apparatus using the rotation-transmitting mechanism are provided. In one form, a rotation-transmitting mechanism includes an inner rotating body and an outer rotating body arranged coaxially with the inner rotating body. Further, the rotation-transmitting mechanism includes a driving rotating body and rotating body arranged on an input side (lower stage), and two planetary rotating bodies arranged on an output side (upper stage). When the driving rotating body is rotated by a motor on the input side, the two planetary rotating bodies revolve around the inner rotating body while rotating on the output side. At this time, the planetary rotating bodies revolve very slowly around the inner rotating body.

摘要翻译： 提供一种能够在少量级中获得高减速比的旋转传递机构，以及使用旋转传递机构的传送装置和驱动装置。 在一种形式中，旋转传递机构包括与内部旋转体同轴设置的内部旋转体和外部旋转体。 此外，旋转传递机构包括设置在输入侧（下层）上的驱动旋转体和旋转体，以及设置在输出侧（上段）的两个行星旋转体。 当驱动旋转体通过输入侧的电动机旋转时，两个行星旋转体在输出侧旋转的同时围绕内旋转体旋转。 此时，行星旋转体围绕内旋转体旋转非常缓慢。

公开(公告)号：US20130129462A1

公开(公告)日：2013-05-23

申请号：US13812745

申请日：2011-07-25

申请人： Hirofumi Minami ,  Kazuhiro Musha

发明人： Hirofumi Minami ,  Kazuhiro Musha

IPC分类号： B65G47/92

CPC分类号： B65G47/92 ,  H01L21/67742 ,  H01L21/67748 ,  H01L21/6831

摘要： [Object] To provide a wafer conveyance method and a wafer conveyance system that are able to quickly transfer a wafer without losing positional accuracy.[Solving Means] Using an electrostatic chuck mechanism in the holding of a wafer (W) by the holding surface (210) of a conveyance robot, the wafer (W) is transferred from a supporting surface (303) to the holding surface (210) in the state where an electrostatic attraction force is generated at the holding surface (210). As a result, since it is possible to hold the wafer by means of the electrostatic attraction force starting immediately after the wafer (W) has been transferred to the holding surface (210), it is possible to rapidly execute a wafer (W) conveying operation and thus it is possible to reduce the conveying time of the wafer between processing chambers.

摘要翻译： 本发明提供能够在不损失位置精度的情况下快速转印晶片的晶片输送方法和晶片输送系统。 [解决方案]使用静电卡盘机构，通过输送机器人的保持面（210）保持晶片（W），将晶片（W）从支撑面（303）转移到保持面（210） ）在保持面（210）处产生静电吸引力的状态。 结果，由于可以通过在晶片（W）已经被转移到保持表面210之后立即开始的静电吸引力来保持晶片，所以可以快速地执行晶片（W）输送 因此可以减少处理室之间的晶片的输送时间。

公开(公告)号：US08382421B2

公开(公告)日：2013-02-26

申请号：US12564572

申请日：2009-09-22

申请人： Kazuhiro Musha ,  Hirofumi Minami ,  Kenji Ago ,  Takashi Asaishi ,  Toshio Koike

发明人： Kazuhiro Musha ,  Hirofumi Minami ,  Kenji Ago ,  Takashi Asaishi ,  Toshio Koike

IPC分类号： B25J18/00

CPC分类号： B25J9/107 ,  B25J9/042 ,  B25J9/102 ,  B25J9/104 ,  H01L21/67742 ,  Y10T74/20305

摘要： A compact transport apparatus that does not cause pollution to its environment is provided. In a transport apparatus according to a first aspect of the present invention, an installation area of the apparatus is small because first and second rotary shafts are arranged concentrically, and a dead center escaping mechanism has a simple structure with a small thickness. Since a connecting portion of a hand portion can be made thin, an opening of a gate valve through which the hand portion is inserted can be reduced. As a result, it becomes difficult for dust inside a transport chamber to enter a processing chamber. A second aspect of the present invention is directed to a spaced dual shaft-type transport apparatus. Although the lengths of first arms provided at rotating shafts may differ from the lengths of second arms provided between the first arms and a substrate supporting portion, the apparatus is free from malfunction even when the lengths thereof differ because the transmission of a rotative force of a dead center escaping mechanism is released at a position except at a dead center in the present invention.

摘要翻译： 提供一种不会对其环境造成污染的紧凑型运输装置。 在本发明的第一方面的输送装置中，由于第一旋转轴和第二旋转轴同心地配置，所以装置的安装面积小，死角逸出机构的结构简单。 由于可以使手部的连接部分变薄，所以可以减少插入手部的闸阀的开口。 结果，传送室内的灰尘难以进入处理室。 本发明的第二方面涉及一种间隔开的双轴型输送装置。 虽然设置在旋转轴上的第一臂的长度可以不同于设置在第一臂和基板支撑部之间的第二臂的长度，但是即使其长度不同，该装置也不会发生故障，因为它的传播力 在本发明的除死点以外的位置释放死点移除机构。

公开(公告)号：US20090173278A1

公开(公告)日：2009-07-09

申请号：US11989670

申请日：2007-02-23

申请人： Yasuzou Tanaka ,  Junpei Yuyama ,  Mitsuru Yahagi ,  Hirofumi Minami

发明人： Yasuzou Tanaka ,  Junpei Yuyama ,  Mitsuru Yahagi ,  Hirofumi Minami

IPC分类号： B05C13/00

CPC分类号： H01L21/682 ,  G03F7/70716 ,  G03F7/70791 ,  G03F7/70975

摘要： To obtain a stage apparatus that can be divided for land transportation and can properly treat a substrate to be treated, the present invention provides a stage apparatus including a substrate holding plane which holds a substrate to be treated W, a pair of guide frames (13X) oppositely disposed with the substrate holding plane sandwiched therebetween, a gantry (13Y) which extends over the pair of guide frames (13X) and which is movably held by the pair of guide frames (13X), and a substrate treatment unit (14) which is disposed on the gantry (13Y). The guide frames (13X) each are composed of a connected structure of a main frame portion (15A) which forms a moving path (work region R1) of the gantry (13Y) necessary for the substrate treatment unit (14) to perform a substrate treatment, and a sub frame portion (15B) which is connected to one end portion or both end portions in a longitudinal direction of the main frame portion (15A) and which forms a moving path to a non-work position (non-work region R2) of the gantry (13Y).

摘要翻译： 为了获得可以分割用于陆路运输并且可以适当地处理待处理的基板的台架装置，本发明提供了一种台架装置，其包括保持要处理的基板W的基板保持平面，一对引导框架（13X ），所述台架（13Y）在所述一对引导框架（13X）上延伸并且被所述一对引导框架（13X）可移动地保持;以及基板处理单元， 其设置在台架（13Y）上。 引导框架（13X）各自由形成基板处理单元（14）所需的台架（13Y）的移动路径（工作区域R1）的主框架部分（15A）的连接结构构成，以执行基板 处理，以及子框架部分（15B），其连接到主框架部分（15A）的纵向方向上的一个端部或两个端部，并且形成到非工作位置的移动路径（非工作区域 R2）（13Y）。

公开(公告)号：US20050286993A1

公开(公告)日：2005-12-29

申请号：US11167584

申请日：2005-06-28

申请人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

IPC分类号： B25J9/06 ,  B25J9/10

CPC分类号： B25J9/1065 ,  H01L21/67742 ,  Y10T74/20305 ,  Y10T74/20329

摘要： A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby transporting an object to be transported in a transport unit to a correct position. The transport apparatus includes: a housing having an airtight structure; first to third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft; permanent magnets arranged at predetermined positions of the first to third driving shafts, respectively; and electromagnetic coils provided in the housing to correspond to the respective permanent magnets. Driving currents are supplied to the electromagnetic coils based on predetermined information, so as to move the first to third driving shafts. The object to be transported is transported by first and second linkages fixed to the first to third driving shafts.

摘要翻译： 一种能够将旋转马达的旋转驱动力适当地传递到运送臂并能够正确地检测旋转驱动轴的旋转角度的输送装置，由此将运送单元中运送的物体运送到正确的位置。 输送装置包括：具有气密结构的壳体; 第一至第三驱动轴，其设置在所述壳体中以能够围绕预定同轴旋转轴独立地旋转; 永磁体分别设置在第一至第三驱动轴的预定位置; 以及设置在壳体中以对应于各个永磁体的电磁线圈。 基于规定的信息，向电磁线圈提供驱动电流，以使第一至第三驱动轴移动。 要被运送的物体被固定在第一至第三驱动轴上的第一和第二连杆传送。

公开(公告)号：US20100146762A1

公开(公告)日：2010-06-17

申请号：US12710759

申请日：2010-02-23

申请人： Yasuzo TANAKA ,  Junpei Yuyama ,  Mitsuru Yahagi ,  Hirofumi Minami ,  Makoto Takahashi ,  Shinya Ito

发明人： Yasuzo TANAKA ,  Junpei Yuyama ,  Mitsuru Yahagi ,  Hirofumi Minami ,  Makoto Takahashi ,  Shinya Ito

IPC分类号： B23P19/00

CPC分类号： B41J2/14 ,  B41J2002/14362 ,  Y10T29/49778 ,  Y10T29/4978 ,  Y10T29/49817 ,  Y10T29/49895 ,  Y10T29/49899

摘要： An assembling method that is high in assembly accuracy and easily performed at the actual installation site is provided. In this method, the sub base plates on the sub mounting tables are aligned with respect to a main base plate on a main mounting table at a temporary installation site, and the state thereof is maintained. Then, the main mounting table and the sub mounting tables are separated from each other to be transferred to the actual installation site, and the positioning state is restored at the actual installation site. Since a positional alignment can be performed at the temporary installation site, the work required at the actual installation site can be reduced. Furthermore, since a fine adjustment can be performed at the actual installation site, the accuracy in the positional alignment can be improved.

摘要翻译： 提供了一种装配精度高且在实际安装地点容易执行的组装方法。 在该方法中，副安装台上的副底板在临时安装位置的主安装台上相对于主基板对准，并且保持其状态。 然后，主安装台和副安装台彼此分离，传送到实际安装地点，并在实际安装地点恢复定位状态。 由于可以在临时安装地点进行位置对准，因此可以减少实际安装地点所需的工作。 此外，由于可以在实际安装地点进行微调，可以提高位置对准的精度。

公开(公告)号：US20050232744A1

公开(公告)日：2005-10-20

申请号：US11095649

申请日：2005-04-01

申请人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

IPC分类号： B25J9/06 ,  B25J9/10 ,  B25J13/00 ,  B25J17/00 ,  B65G49/07 ,  B66C23/00 ,  H01L21/00 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687

CPC分类号： H01L21/68707 ,  B25J9/107 ,  Y10T74/20305

摘要： A transport apparatus includes first and second linkages. The first linkage includes first and third arms that can be rotated around a coaxial rotary shaft of first through third driving shafts coaxially arranged, and transports a first carrier. The second linkage includes a second arm and the third arm that can be rotated around the coaxial rotary shaft of the first through third driving shafts, and transports a second carrier. The first and second linkages are arranged to allow the first and second carriers to move beyond the coaxial rotary shaft of the first through third driving shafts without interfering with each other.

摘要翻译： 输送装置包括第一和第二连杆。 第一连杆机构包括第一和第三臂，其可以围绕同轴布置的第一至第三驱动轴的同轴旋转轴旋转，并且运送第一行星架。 第二连杆机构包括可绕第一至第三驱动轴的同轴旋转轴旋转的第二臂和第三臂，并且运送第二行星架。 第一和第二连杆被布置成允许第一和第二托架移动超过第一至第三驱动轴的同轴旋转轴而不会彼此干涉。