公开(公告)号：US07451647B2

公开(公告)日：2008-11-18

申请号：US11539743

申请日：2006-10-09

申请人： Kazuhiro Matsuhisa ,  Koji Fukumoto ,  Masaya Nagata ,  Atsuhito Yasui

发明人： Kazuhiro Matsuhisa ,  Koji Fukumoto ,  Masaya Nagata ,  Atsuhito Yasui

IPC分类号： G01P15/13

CPC分类号： G01P15/0888 ,  G01C19/56 ,  G01P15/08

摘要： A MEMS sensor driving device drives a MEMS sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, and an oscillator which is supported by another end of the elastic member in a suspended state over the surface of the substrate and which is displaceable for the substrate. The MEMS sensor driving device includes a detecting unit for detecting an oscillation of the oscillator, and a feedback unit for amplifying a signal representing the oscillation detected by the detecting unit and inputting the amplified signal as a driving signal to the MEMS sensor.

摘要翻译： MEMS传感器驱动装置驱动MEMS传感器，其包括设置在基板的表面上的支撑件，具有连接到支撑件的一端的弹性构件，以及振动器，该弹性构件以悬挂状态被支撑在弹性构件的另一端上 该基板的表面并且可移动到该基板。 MEMS传感器驱动装置包括用于检测振荡器的振荡的检测单元和用于放大表示由检测单元检测到的振荡的信号并将放大的信号作为驱动信号输入到MEMS传感器的反馈单元。

公开(公告)号：US07469603B2

公开(公告)日：2008-12-30

申请号：US10595430

申请日：2004-10-20

申请人： Masaya Nagata ,  Hiroshi Nishitake ,  Koji Fukumoto ,  Kazuhiro Matsuhisa ,  Atsuhito Yasui

发明人： Masaya Nagata ,  Hiroshi Nishitake ,  Koji Fukumoto ,  Kazuhiro Matsuhisa ,  Atsuhito Yasui

IPC分类号： G01L3/02

CPC分类号： G01C19/5712

摘要： An angular velocity detector using a vibrator made of an annular thin film. The detector also has electrodes arranged ingeniously to have high detection sensitivity for angular velocities. The detector can detect angular velocities in two axial directions simultaneously. The detector has support portions (1105), (1106) which are formed over a first substrate (1123) and poised above the surface of the first substrate (1100) at a certain spacing therefrom. Resilient support bodies are supported to the support portions and include outer springs (1102) and inner springs (1103). A vibrator (1101) is mounted via the resilient support. An exciting means consisting of a magnet (1124) and an exciting electrode (1108) excites the vibrator to vibrate in a certain direction of vibrations. When the vibrator (1101) is excited to vibrate in the direction of vibrations by the exciting means and an angular velocity acts from the outside, a displacement detection means consisting of a detection electrode (1109) and electrodes (1120) detects the displacement of the vibrator (1101) in a direction perpendicular to the direction of vibrations in response to the angular velocity. The vibrator (1101) or an angular velocity detection portion including the vibrator (1101) is electromagnetically driven to vibrate.

摘要翻译： 一种使用由环形薄膜制成的振动器的角速度检测器。 检测器还具有巧妙地设置为具有高的角速度检测灵敏度的电极。 检测器可同时检测两个轴向的角速度。 检测器具有形成在第一基板（1123）上并且以与其一定间隔从第一基板（1100）的表面上方定位的支撑部分（1106）。 弹性支撑体支撑在支撑部分上并且包括外弹簧（1102）和内弹簧（1103）。 振动器（1101）经由弹性支撑件安装。 由磁体（1124）和激励电极（1108）组成的激励装置激励振动器在某个振动方向上振动。 当激励振动器（1101）被激励装置振动的方向振动并且角速度从外部作用时，由检测电极（1109）和电极（1120）组成的位移检测装置检测位移检测装置 振动器（1101）在垂直于振动方向的方向上响应于角速度。 振动器（1101）或包括振动器（1101）的角速度检测部分被电磁驱动以振动。

公开(公告)号：US20070151332A1

公开(公告)日：2007-07-05

申请号：US10595430

申请日：2004-10-20

申请人： Masaya Nagata ,  Hiroshi Nishitake ,  Koji Fukumoto ,  Kazuhiro Matsuhisa ,  Atsuhito Yasui

发明人： Masaya Nagata ,  Hiroshi Nishitake ,  Koji Fukumoto ,  Kazuhiro Matsuhisa ,  Atsuhito Yasui

IPC分类号： G01M1/00

CPC分类号： G01C19/5712

摘要： An angular velocity detector using a vibrator made of an annular thin film. The detector also has electrodes arranged ingeniously to have high detection sensitivity for angular velocities. The detector can detect angular velocities in two axial directions simultaneously. The detector has support portions (1105), (1106) which are formed over a first substrate (1123) and poised above the surface of the first substrate (1100) at a certain spacing therefrom. Resilient support bodies are supported to the support portions and include outer springs (1102) and inner springs (1103). A vibrator (1101) is mounted via the resilient support. An exciting means consisting of a magnet (1124) and an exciting electrode (1108) excites the vibrator to vibrate in a certain direction of vibrations. When the vibrator (1101) is excited to vibrate in the direction of vibrations by the exciting means and an angular velocity acts from the outside, a displacement detection means consisting of a detection electrode (1109) and electrodes (1120) detects the displacement of the vibrator (1101) in a direction perpendicular to the direction of vibrations in response to the angular velocity. The vibrator (1101) or an angular velocity detection portion including the vibrator (1101) is electromagnetically driven to vibrate.

摘要翻译： 一种使用由环形薄膜制成的振动器的角速度检测器。 检测器还具有巧妙地设置为具有高的角速度检测灵敏度的电极。 检测器可同时检测两个轴向的角速度。 检测器具有形成在第一基板（1123）上并且以与其一定间隔从第一基板（1100）的表面上方定位的支撑部分（1106）。 弹性支撑体支撑在支撑部分上并且包括外弹簧（1102）和内弹簧（1103）。 振动器（1101）经由弹性支撑件安装。 由磁体（1124）和激励电极（1108）组成的激励装置激励振动器在某个振动方向上振动。 当激励振动器（1101）被激励装置振动的方向振动并且角速度从外部作用时，由检测电极（1109）和电极（1120）组成的位移检测装置检测位移检测装置 振动器（1101）在垂直于振动方向的方向上响应于角速度。 振动器（1101）或包括振动器（1101）的角速度检测部分被电磁驱动以振动。

公开(公告)号：US20070089512A1

公开(公告)日：2007-04-26

申请号：US11539743

申请日：2006-10-09

申请人： Kazuhiro Matsuhisa ,  Koji Fukumoto ,  Masaya Nagata ,  Atsuhito Yasui

发明人： Kazuhiro Matsuhisa ,  Koji Fukumoto ,  Masaya Nagata ,  Atsuhito Yasui

IPC分类号： G01P15/00

CPC分类号： G01P15/0888 ,  G01C19/56 ,  G01P15/08

摘要： A MEMS sensor driving device drives a MEMS sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, and an oscillator which is supported by another end of the elastic member in a suspended state over the surface of the substrate and which is displaceable for the substrate. The MEMS sensor driving device includes a detecting unit for detecting an oscillation of the oscillator, and a feedback unit for amplifying a signal representing the oscillation detected by the detecting unit and inputting the amplified signal as a driving signal to the MEMS sensor.

摘要翻译： MEMS传感器驱动装置驱动MEMS传感器，其包括设置在基板的表面上的支撑件，具有连接到支撑件的一端的弹性构件，以及振动器，该弹性构件以悬挂状态被支撑在弹性构件的另一端上 该基板的表面并且可移动到该基板。 MEMS传感器驱动装置包括用于检测振荡器的振荡的检测单元和用于放大表示由检测单元检测到的振荡的信号并将放大的信号作为驱动信号输入到MEMS传感器的反馈单元。

公开(公告)号：US07578186B2

公开(公告)日：2009-08-25

申请号：US11761680

申请日：2007-06-12

申请人： Kazuhiro Matsuhisa

发明人： Kazuhiro Matsuhisa

IPC分类号： G01C19/56 ,  G01P9/04 ,  G01P15/125

CPC分类号： G01C19/56 ,  Y10T29/49002

摘要： An inertial sensor and a fabrication method of an inertial sensor are provided. An inertial sensor includes: an elastic support whose one end is supported by a support part disposed on a substrate; an oscillator which is supported by the other end of the elastic support as it is separated from the substrate; and a displacement detecting part which detects a displacement of the oscillator to output a signal, wherein the oscillator is formed with one or both of a groove and a through hole in a direction in parallel with a drive direction of the oscillator.

摘要翻译： 提供惯性传感器和惯性传感器的制造方法。 惯性传感器包括：弹性支撑件，其一端由设置在基板上的支撑部分支撑; 振动器，当所述弹性支撑件与所述基板分离时由所述弹性支撑件的另一端支撑; 以及位移检测部，其检测所述振荡器的位移以输出信号，其中所述振荡器在与所述振荡器的驱动方向平行的方向上形成有沟槽和通孔中的一个或两个。

公开(公告)号：US20080236279A1

公开(公告)日：2008-10-02

申请号：US11761680

申请日：2007-06-12

申请人： Kazuhiro Matsuhisa

发明人： Kazuhiro Matsuhisa

IPC分类号： G01C19/00

CPC分类号： G01C19/56 ,  Y10T29/49002

摘要： An inertial sensor and a fabrication method of an inertial sensor are provided. An inertial sensor includes: an elastic support whose one end is supported by a support part disposed on a substrate; an oscillator which is supported by the other end of the elastic support as it is separated from the substrate; and a displacement detecting part which detects a displacement of the oscillator to output a signal, wherein the oscillator is formed with one or both of a groove and a through hole in a direction in parallel with a drive direction of the oscillator.

摘要翻译： 提供惯性传感器和惯性传感器的制造方法。 惯性传感器包括：弹性支撑件，其一端由设置在基板上的支撑部分支撑; 振动器，当所述弹性支撑件与所述基板分离时由所述弹性支撑件的另一端支撑; 以及位移检测部，其检测所述振荡器的位移以输出信号，其中所述振荡器在与所述振荡器的驱动方向平行的方向上形成有沟槽和通孔中的一个或两个。

公开(公告)号：US20070001250A1

公开(公告)日：2007-01-04

申请号：US11465345

申请日：2006-08-17

申请人： Kazuhiro Matsuhisa

发明人： Kazuhiro Matsuhisa

IPC分类号： H01L29/84

CPC分类号： H03H9/02259 ,  H03H3/0072 ,  H03H9/2463 ,  H03H2009/02511 ,  Y10T29/5313 ,  Y10T29/53204 ,  Y10T29/53209 ,  Y10T29/53213 ,  Y10T29/53274

摘要： A micromachine successfully reduced in parasitic capacity between input and output electrodes, and having an oscillator configured as ensuring a high S/N ratio under operation at higher frequencies is disclosed. The micromachine comprises an insulating layer formed on a substrate; a first electrode for signal input formed on the insulating layer; a second electrode for signal output formed on the insulating layer; and an oscillator electrode formed as being opposed with the first electrode and the second electrode and as being spaced therefrom by an air gap, wherein the insulating layer has a groove formed therein at least between the first electrode and the second electrode.

摘要翻译： 公开了一种微机械装置，其成功地减小了输入和输出电极之间的寄生电容，并且具有配置为确保在较高频率下工作时的高S / N比的振荡器。 微机械包括形成在基板上的绝缘层; 在绝缘层上形成用于信号输入的第一电极; 在绝缘层上形成用于信号输出的第二电极; 以及形成为与所述第一电极和所述第二电极相对并且与气隙隔开的振荡电极，其中所述绝缘层至少在所述第一电极和所述第二电极之间形成有沟槽。

公开(公告)号：US07617593B2

公开(公告)日：2009-11-17

申请号：US11465345

申请日：2006-08-17

申请人： Kazuhiro Matsuhisa

发明人： Kazuhiro Matsuhisa

IPC分类号： B23P19/00

CPC分类号： H03H9/02259 ,  H03H3/0072 ,  H03H9/2463 ,  H03H2009/02511 ,  Y10T29/5313 ,  Y10T29/53204 ,  Y10T29/53209 ,  Y10T29/53213 ,  Y10T29/53274

摘要： A micromachine successfully reduced in parasitic capacity between input and output electrodes, and having an oscillator configured as ensuring a high S/N ratio under operation at higher frequencies is disclosed. The micromachine comprises an insulating layer formed on a substrate; a first electrode for signal input formed on the insulating layer; a second electrode for signal output formed on the insulating layer; and an oscillator electrode formed as being opposed with the first electrode and the second electrode and as being spaced therefrom by an air gap, wherein the insulating layer has a groove formed therein at least between the first electrode and the second electrode.

摘要翻译： 公开了一种微机械装置，其成功地减小了输入和输出电极之间的寄生电容，并且具有配置为确保在较高频率下工作时的高S / N比的振荡器。 微机械包括形成在基板上的绝缘层; 在绝缘层上形成用于信号输入的第一电极; 在绝缘层上形成用于信号输出的第二电极; 以及形成为与所述第一电极和所述第二电极相对并且与气隙隔开的振荡电极，其中所述绝缘层至少在所述第一电极和所述第二电极之间形成有沟槽。

公开(公告)号：US07102268B2

公开(公告)日：2006-09-05

申请号：US10835769

申请日：2004-04-30

申请人： Kazuhiro Matsuhisa

发明人： Kazuhiro Matsuhisa

IPC分类号： H02N1/00

CPC分类号： H03H9/02259 ,  H03H3/0072 ,  H03H9/2463 ,  H03H2009/02511 ,  Y10T29/5313 ,  Y10T29/53204 ,  Y10T29/53209 ,  Y10T29/53213 ,  Y10T29/53274

摘要： A micromachine successfully reduced in parasitic capacity between input and output electrodes, and having an oscillator configured as ensuring a high S/N ratio under operation at higher frequencies is disclosed. The micromachine comprises an insulating layer formed on a substrate; a first electrode for signal input formed on the insulating layer; a second electrode for signal output formed on the insulating layer; and an oscillator electrode formed as being opposed with the first electrode and the second electrode and as being spaced therefrom by an air gap, wherein the insulating layer has a groove formed therein at least between the first electrode and the second electrode.