摘要:
An apparatus of manufacturing a light emitting element having a plurality of layers including an organic layer on a substrate to be processed is disclosed. The apparatus includes a plurality of process chambers to which the substrate to be processed is transferred in series, wherein the plurality of process chambers are substantially linearly connected to one another and wherein adjacent two of the process chambers are filled with gas that does not react with a layer on the substrate to be processed when the substrate to be processed is transferred between the two process chambers.
摘要:
A substrate process apparatus that forms a light emitting device configured with an organic layer including a light emitting layer on a substrate to be processed, the organic layer being formed between a first electrode and a second electrode, includes an organic layer forming apparatus wherein the organic layer is formed on the first electrode formed on the substrate to be processed; an electrode forming apparatus wherein the second electrode is formed on the organic layer; and an etching apparatus wherein the organic layer is etched.
摘要:
Disclosed is a light-emitting device including a first electrode; a second electrode opposite to the first electrode; and an organic layer that is formed between the first electrode and the second electrode and includes a light-emitting layer. The second electrode includes a conductive protection layer that is formed on the organic layer so as to protect the organic layer and a conductive main electrode layer that is formed on the protection layer.
摘要:
Disclosed is a light emitting device manufacturing apparatus including a plurality of processing chambers for performing a substrate processing for forming, on a target substrate, a light emitting device having multiple layers including an organic layer, wherein each of the plurality of processing chambers is configured to perform a substrate process on the target substrate while maintaining the target substrate such that its device forming surface, on which the light emitting device is to be formed, is oriented toward a direction opposite to a direction of gravity.
摘要:
Disclosed is a light emitting device manufacturing apparatus including a plurality of processing chambers for performing a substrate processing for forming, on a target substrate, a light emitting device having multiple layers including an organic layer, wherein each of the plurality of processing chambers is configured to perform a substrate process on the target substrate while maintaining the target substrate such that its device forming surface, on which the light emitting device is to be formed, is oriented toward a direction opposite to a direction of gravity.
摘要:
A reciprocating-piston-type refrigerant compressor provided with a cylinder block having formed therein a plurality of cylinder bores in which a plurality of pistons are reciprocated to effect suction, compression and discharge of refrigerant gas in response to rotation of a drive shaft, a rotary valve element connected to the drive shaft to be rotated together with the drive shaft within a recessed chamber formed in the cylinder block, the valve element having a suction passageway for sequentially introducing the refrigerant gas before compression of the plurality of cylinder bores during the rotation of the rotary valve element, gas receiving grooves formed in the inner wall of the recessed chamber for receiving a part of the compressed refrigerant gas leaking from respective cylinder bores in the phase of the compressing and discharging operations into a contacting area between the inner wall of the recessed chamber and the rotary valve element, and a gas routing passageway formed in the rotary valve element so as to route the compressed refrigerant gas received by the gas receiving grooves into respective cylinder bores in the phase of the initial stage of the compressing operation.
摘要:
A reciprocatory piston type compressor having a compressor body in which a low pressure suction chamber for the refrigerant before compression, a discharge chamber for the refrigerant after compression, and a plurality of axial cylinder bores receiving a corresponding number of reciprocatory pistons are provided therein, and a rotating plate suction valve capable of mechanically and forcibly opening suction ports in synchronism with the suction stroke of the reciprocatory pistons to thereby permit the refrigerant gas before compression to be drawn into the cylinder bores without time delay. A discharge valve capable of mechanically and forcibly open the discharge ports in synchronism with the discharge stroke of the pistons is also provided in the compressor body.
摘要:
A plurality of pistons are provided in the associated cylinder bores arranged around the rotary shaft. Each piston reciprocates in relation to the rotation of the rotary shaft to execute suction, compression and discharge of the refrigerant gas. A valve chamber is disposed in the vicinity of the cylinder bore. A plurality of ports are arranged to communicate the valve chamber to the associated cylinder bores. The valve chamber has a rotary valve which rotates in relation to the reciprocating motion of the pistons. A suction passage is formed in the rotary valve to be sequentially communicated with each port in synchronism with the rotation of the rotary valve in order to introduce the refrigerant gas into each cylinder bore. A seal zone is included in the rotary valve, which sequentially blocks each port in synchronism with the rotation of the rotary valve. A groove is defined in the rotary valve, which is capable of guiding the refrigerant gas entering between the valve chamber and the rotary valve.
摘要:
A reciprocatory piston type compressor is provided with partition walls in a discharge chamber or chambers, the walls being arranged between discharge ports open to the discharge chamber, respectively, to prevent flows of refrigerant gas discharged from the discharge ports from directly interfering with each other at least during the time in which the opening of two adjacent discharge reed valves overlap one another. The partition walls may be formed integrally with a cylinder head of the compressor in such a manner that the partition walls extend centripetally from an inner wall surface of the cylinder head defining the discharge chamber. The flows of refrigerant gas discharged from the two adjacent discharge ports which are open will not interfere with each other but will be guided independently and centripetally along the partition walls in the discharge chamber toward the tops of the partition walls, and then toward an opening that leads to an outer discharge conduit.
摘要:
An axial multi-piston compressor includes a drive shaft, a cylinder block having cylinder bores formed therein and surrounding the drive shaft, and a plurality of pistons slidably received in the respective cylinder bores, wherein the pistons are successively reciprocated in the cylinder bores by a rotation of the drive shaft so that a suction stroke and a discharge stroke are alternately executed in each of the cylinder bores. During the suction stroke, a fluid is introduced into the cylinder bore, and during the compression stroke, the introduced fluid is compressed and discharged from the cylinder bore such that a residual part of the compressed fluid is inevitably left in the cylinder bore when the compression stroke is finished. The compressor further includes a rotary valve for allowing the residual part of the compressed fluid to escape from the cylinder bore into another cylinder bore after the suction stroke is executed in the former cylinder bore over a given short period of time.