公开(公告)号：US20090202708A1

公开(公告)日：2009-08-13

申请号：US12304324

申请日：2007-06-13

申请人： Kazuki Moyama ,  Yasushi Yagi ,  Toshihisa Nozawa ,  Tadahiro Ohmi ,  Chuichi Kawamura ,  Kimihiko Yoshino

发明人： Kazuki Moyama ,  Yasushi Yagi ,  Toshihisa Nozawa ,  Tadahiro Ohmi ,  Chuichi Kawamura ,  Kimihiko Yoshino

IPC分类号： B05D5/06 ,  C23C16/54

CPC分类号： H01L51/001 ,  C23C14/12 ,  C23C14/28 ,  H01L51/0021 ,  H01L51/56

摘要： An apparatus of manufacturing a light emitting element having a plurality of layers including an organic layer on a substrate to be processed is disclosed. The apparatus includes a plurality of process chambers to which the substrate to be processed is transferred in series, wherein the plurality of process chambers are substantially linearly connected to one another and wherein adjacent two of the process chambers are filled with gas that does not react with a layer on the substrate to be processed when the substrate to be processed is transferred between the two process chambers.

摘要翻译： 公开了一种制造发光元件的装置，该发光元件具有包括待处理衬底上的有机层的多个层。 该设备包括多个处理室，待处理的基板被串联传送，其中多个处理室基本上彼此直线连接，并且其中相邻的两个处理室被不与 当要处理的基板在两个处理室之间转移时，待处理的基板上的层。

公开(公告)号：US20090206728A1

公开(公告)日：2009-08-20

申请号：US12279347

申请日：2007-02-13

申请人： Toshihisa Nozawa ,  Kazuki Moyama ,  Tadahiro Ohmi ,  Chuichi Kawamura ,  Kimihiko Yoshino

发明人： Toshihisa Nozawa ,  Kazuki Moyama ,  Tadahiro Ohmi ,  Chuichi Kawamura ,  Kimihiko Yoshino

IPC分类号： H01J1/62 ,  B29D11/00 ,  H01L21/306

CPC分类号： H01L51/0017 ,  H01L51/5012 ,  H01L51/56

摘要： A substrate process apparatus that forms a light emitting device configured with an organic layer including a light emitting layer on a substrate to be processed, the organic layer being formed between a first electrode and a second electrode, includes an organic layer forming apparatus wherein the organic layer is formed on the first electrode formed on the substrate to be processed; an electrode forming apparatus wherein the second electrode is formed on the organic layer; and an etching apparatus wherein the organic layer is etched.

摘要翻译： 一种衬底处理装置，其形成配置有在被处理衬底上的发光层的有机层的发光器件，形成在第一电极和第二电极之间的有机层包括有机层形成装置，其中有机层 在形成在待处理基板上的第一电极上形成层; 电极形成装置，其中第二电极形成在有机层上; 以及其中蚀刻有机层的蚀刻装置。

公开(公告)号：US20090051280A1

公开(公告)日：2009-02-26

申请号：US12279405

申请日：2007-02-13

申请人： Kazuki Moyama ,  Yasushi Yagi ,  Shingo Watanabe ,  Chuichi Kawamura ,  Kimihiko Yoshino ,  Tadahiro Ohmi

发明人： Kazuki Moyama ,  Yasushi Yagi ,  Shingo Watanabe ,  Chuichi Kawamura ,  Kimihiko Yoshino ,  Tadahiro Ohmi

IPC分类号： H01J1/62 ,  H01L21/00 ,  H05B33/10

CPC分类号： H05B33/26 ,  H01L51/5221 ,  H05B33/22

摘要： Disclosed is a light-emitting device including a first electrode; a second electrode opposite to the first electrode; and an organic layer that is formed between the first electrode and the second electrode and includes a light-emitting layer. The second electrode includes a conductive protection layer that is formed on the organic layer so as to protect the organic layer and a conductive main electrode layer that is formed on the protection layer.

摘要翻译： 公开了一种发光装置，其包括第一电极; 与所述第一电极相对的第二电极; 以及形成在第一电极和第二电极之间并且包括发光层的有机层。 第二电极包括形成在有机层上以便保护有机层的导电保护层和形成在保护层上的导电主电极层。

公开(公告)号：US08263174B2

公开(公告)日：2012-09-11

申请号：US12304316

申请日：2007-06-13

申请人： Yasushi Yagi ,  Shingo Watanabe ,  Toshihisa Nozawa ,  Chuichi Kawamura ,  Kimihiko Yoshino ,  Tadahiro Ohmi

发明人： Yasushi Yagi ,  Shingo Watanabe ,  Toshihisa Nozawa ,  Chuichi Kawamura ,  Kimihiko Yoshino ,  Tadahiro Ohmi

IPC分类号： B05D5/06 ,  B05D5/12 ,  C23C16/00 ,  H01J9/00

CPC分类号： H01L51/001 ,  C23C14/12 ,  C23C14/28 ,  H01L51/56

摘要： Disclosed is a light emitting device manufacturing apparatus including a plurality of processing chambers for performing a substrate processing for forming, on a target substrate, a light emitting device having multiple layers including an organic layer, wherein each of the plurality of processing chambers is configured to perform a substrate process on the target substrate while maintaining the target substrate such that its device forming surface, on which the light emitting device is to be formed, is oriented toward a direction opposite to a direction of gravity.

摘要翻译： 公开了一种发光器件制造设备，包括：多个处理室，用于执行用于在目标衬底上形成包括有机层的多层的发光器件的衬底处理，其中，所述多个处理室中的每一个被配置为 在目标衬底上执行衬底处理，同时保持目标衬底，使得要在其上形成发光器件的器件形成表面朝向与重力方向相反的方向。

公开(公告)号：US20090156084A1

公开(公告)日：2009-06-18

申请号：US12304316

申请日：2007-06-13

申请人： Yasushi Yagi ,  Shingo Watanabe ,  Toshihisa Nozawa ,  Chuichi Kawamura ,  Kimihiko Yoshino ,  Tadahiro Ohmi

发明人： Yasushi Yagi ,  Shingo Watanabe ,  Toshihisa Nozawa ,  Chuichi Kawamura ,  Kimihiko Yoshino ,  Tadahiro Ohmi

IPC分类号： H01J9/00 ,  H05B33/10

CPC分类号： H01L51/001 ,  C23C14/12 ,  C23C14/28 ,  H01L51/56

摘要： Disclosed is a light emitting device manufacturing apparatus including a plurality of processing chambers for performing a substrate processing for forming, on a target substrate, a light emitting device having multiple layers including an organic layer, wherein each of the plurality of processing chambers is configured to perform a substrate process on the target substrate while maintaining the target substrate such that its device forming surface, on which the light emitting device is to be formed, is oriented toward a direction opposite to a direction of gravity.

摘要翻译： 公开了一种发光器件制造设备，包括：多个处理室，用于执行用于在目标衬底上形成包括有机层的多层的发光器件的衬底处理，其中，所述多个处理室中的每一个被配置为 在目标衬底上执行衬底处理，同时保持目标衬底，使得要在其上形成发光器件的器件形成表面朝向与重力方向相反的方向。

公开(公告)号：US20100326511A1

公开(公告)日：2010-12-30

申请号：US12735692

申请日：2009-02-10

申请人： Yoshihide Wakayama ,  Kazuki Moyama ,  Tadahiro Ohmi ,  Akinobu Teramoto

发明人： Yoshihide Wakayama ,  Kazuki Moyama ,  Tadahiro Ohmi ,  Akinobu Teramoto

IPC分类号： H01L31/0216

CPC分类号： H01L31/048 ,  H01L31/02167 ,  Y02B10/12 ,  Y02E10/50

摘要： Disclosed is a solar cell comprising a solar cell semiconductor thin film formed on a base, a transparent conductive film formed on the semiconductor thin film, and a nitride-containing moisture diffusion-preventing film which covers the upper surface of the transparent conductive film. The moisture diffusion-preventing film is preferably composed of at least a silicon nitride film or a silicon carbide nitride (SiCN) film.

摘要翻译： 公开了一种太阳能电池，其包括形成在基底上的太阳能电池半导体薄膜，形成在半导体薄膜上的透明导电膜和覆盖透明导电膜的上表面的含氮化物的防潮扩散膜。 防潮防止膜优选由至少氮化硅膜或碳化硅氮化物（SiCN）膜构成。

公开(公告)号：US08841545B2

公开(公告)日：2014-09-23

申请号：US12735692

申请日：2009-02-10

申请人： Yoshihide Wakayama ,  Kazuki Moyama ,  Tadahiro Ohmi ,  Akinobu Teramoto

发明人： Yoshihide Wakayama ,  Kazuki Moyama ,  Tadahiro Ohmi ,  Akinobu Teramoto

IPC分类号： H01L31/00 ,  H01L31/0216 ,  H01L31/048

CPC分类号： H01L31/048 ,  H01L31/02167 ,  Y02B10/12 ,  Y02E10/50

摘要： Disclosed is a solar cell comprising a solar cell semiconductor thin film formed on a base, a transparent conductive film formed on the semiconductor thin film, and a nitride-containing moisture diffusion-preventing film which covers the upper surface of the transparent conductive film. The moisture diffusion-preventing film is preferably composed of at least a silicon nitride film or a silicon carbide nitride (SiCN) film.

摘要翻译： 公开了一种太阳能电池，其包括形成在基底上的太阳能电池半导体薄膜，形成在半导体薄膜上的透明导电膜和覆盖透明导电膜的上表面的含氮化物的防潮扩散膜。 防潮防止膜优选由至少氮化硅膜或碳化硅氮化物（SiCN）膜构成。

公开(公告)号：US08915999B2

公开(公告)日：2014-12-23

申请号：US12446913

申请日：2007-09-26

申请人： Masahiro Okesaku ,  Tadahiro Ohmi ,  Tetsuya Goto ,  Takaaki Matsuoka ,  Toshihisa Nozawa ,  Atsutoshi Inokuchi ,  Kiyotaka Ishibashi

发明人： Masahiro Okesaku ,  Tadahiro Ohmi ,  Tetsuya Goto ,  Takaaki Matsuoka ,  Toshihisa Nozawa ,  Atsutoshi Inokuchi ,  Kiyotaka Ishibashi

IPC分类号： C23C16/455 ,  H01J37/32 ,  H01L21/3065

CPC分类号： H01J37/3244 ,  C23C16/45565 ,  C23C16/45568 ,  H01J37/32192 ,  H01J37/32449 ,  H01J37/32477 ,  H01J37/3255

摘要： A shower plate is disposed in a processing chamber in a plasma processing apparatus, and plasma excitation gas is released into the processing chamber so as to generate plasma. A ceramic member having a plurality of gas release holes having a diameter of 20 μm to 70 μm, and/or a porous gas-communicating body having pores having a maximum diameter of not more than 75 μm communicating in the gas-communicating direction are sintered and bonded integrally with the inside of each of a plurality of vertical holes which act as release paths for the plasma excitation gas.

摘要翻译： 喷淋板设置在等离子体处理装置的处理室中，等离子体激发气体释放到处理室中以产生等离子体。 具有多个直径为20μm至70μm的气体释放孔的陶瓷构件和/或具有气体连通方向上连通的最大直径不大于75μm的孔的多孔气体连通体被烧结 并且与用作等离子体激发气体的释放路径的多个垂直孔的每一个的内部一体地结合。

公开(公告)号：US20100216300A1

公开(公告)日：2010-08-26

申请号：US12675289

申请日：2008-08-07

申请人： Hirokazu Ueda ,  Toshihisa Nozawa ,  Takaaki Matsuoka ,  Akinobu Teramoto ,  Tadahiro Ohmi

发明人： Hirokazu Ueda ,  Toshihisa Nozawa ,  Takaaki Matsuoka ,  Akinobu Teramoto ,  Tadahiro Ohmi

IPC分类号： H01L21/28

CPC分类号： H01L21/02164 ,  C23C16/511 ,  H01J37/32192 ,  H01L21/02274 ,  H01L21/31055 ,  H01L21/31116

摘要： A semiconductor device manufacturing method, the method including: forming a semiconductor element on a semiconductor substrate; and by using microwaves as a plasma source, forming an insulation film on the semiconductor element by performing a CVD process using microwave plasma having an electron temperature of plasma lower than 1.5 eV and an electron density of plasma higher than 1×1011 cm−3 near a surface of the semiconductor substrate.

摘要翻译： 一种半导体器件制造方法，所述方法包括：在半导体衬底上形成半导体元件; 并且通过使用微波作为等离子体源，通过使用具有低于1.5eV的等离子体的电子温度和高于1×10 11 cm -3的等离子体的电子密度的微波等离子体进行CVD工艺，在半导体元件上形成绝缘膜 半导体衬底的表面。

公开(公告)号：US20100178775A1

公开(公告)日：2010-07-15

申请号：US12446913

申请日：2007-09-26

申请人： Masahiro Okesaku ,  Tadahiro Ohmi ,  Tetsuya Goto ,  Takaaki Matsuoka ,  Toshihisa Nozawa ,  Atsutoshi Inokuchi ,  Kiyotaka Ishibashi

发明人： Masahiro Okesaku ,  Tadahiro Ohmi ,  Tetsuya Goto ,  Takaaki Matsuoka ,  Toshihisa Nozawa ,  Atsutoshi Inokuchi ,  Kiyotaka Ishibashi

IPC分类号： H01L21/465 ,  C23C16/00 ,  C23C16/511 ,  H01L21/469 ,  C23F1/00 ,  C23F1/08 ,  C23C16/455 ,  B28B1/44

CPC分类号： H01J37/3244 ,  C23C16/45565 ,  C23C16/45568 ,  H01J37/32192 ,  H01J37/32449 ,  H01J37/32477 ,  H01J37/3255

摘要： A shower plate is disposed in a processing chamber in a plasma processing apparatus, and plasma excitation gas is released into the processing chamber so as to generate plasma. A ceramic member having a plurality of gas release holes having a diameter of 20 μm to 70 μm, and/or a porous gas-communicating body having pores having a maximum diameter of not more than 75 μm communicating in the gas-communicating direction are sintered and bonded integrally with the inside of each of a plurality of vertical holes which act as release paths for the plasma excitation gas.

摘要翻译： 喷淋板设置在等离子体处理装置的处理室中，等离子体激发气体释放到处理室中以产生等离子体。 具有多个直径为20μm至70μm的气体释放孔的陶瓷构件和/或具有气体连通方向上连通的最大直径不大于75μm的孔的多孔气体连通体被烧结 并且与用作等离子体激发气体的释放路径的多个垂直孔的每一个的内部一体地结合。