公开(公告)号：US06553845B2

公开(公告)日：2003-04-29

申请号：US09860519

申请日：2001-05-21

申请人： Kazumasa Ohnishi ,  Yoshiro Tomikawa

发明人： Kazumasa Ohnishi ,  Yoshiro Tomikawa

IPC分类号： G01F178

CPC分类号： G01F1/8472 ,  G01F1/8486

摘要： A highly sensitive Coriolis flowmeter, which is also utilizable as a density meter, is composed of: a substrate having two conduits through which a fluid to be measured flows; a curved tube fixed to the substrate in such manner that one end connects with one conduit and another end connects with another conduit; two curved rods having a curve identical to the curve of the curved tube each of which is fixed to the substrate on each side in parallel with the curve tube with a space; vibrators attached to the tube and rods which generate vibrations in such manner that the tube and rods vibrate in opposite phase; and a sensor for detecting variation of vibration of the tube which is caused by a Coriolis force occurring when a fluid flows through the tube.

摘要翻译： 也可用作密度计的高灵敏度的科里奥利流量计由以下部件组成：具有两个导管的基板，流体被测量流过该导管;弯曲的管以这样一种方式固定到基板上： 另一端与另一个导管连接;两个弯曲杆具有与弯曲管的曲线相同的曲线，每个弯曲管均与具有空间的曲线管平行地固定在每侧的基板上;振动器附接到管和杆 其以这样的方式产生振动，使得管和杆以相反的相位振动; 以及用于检测当流体流过管道时发生的科里奥利力引起的管的振动变化的传感器。

公开(公告)号：US5912524A

公开(公告)日：1999-06-15

申请号：US997248

申请日：1997-12-23

申请人： Kazumasa Ohnishi ,  Akira Satoh ,  Yoshiro Tomikawa

发明人： Kazumasa Ohnishi ,  Akira Satoh ,  Yoshiro Tomikawa

IPC分类号： G01C19/5607 ,  H01L41/08

CPC分类号： G01C19/5607

摘要： A vibratory gyroscope including an elongated vibrator having a central (neutral) axis (Y-axis), a drive unit for deforming the first direction such that the vibrator vibrates in a first (X) direction, an added mass attached to the vibrator at a position offset from the central axis in a second (Z) direction, and a detector formed on the vibrator. Rotation of the vibratory gyroscope about the second (Z) direction during vibration in the second direction causes Coriolis force to acting on the added mass in a direction parallel to the central axis. Because the added mass is offset from the central axis, a resulting vibration in the second (Z) direction is produced, which is detected by the detector. With this arrangement, the central axis of the vibrator is placed in parallel with the surface of rotation of the rotating system. Thus, rotations about two or three axes in each direction can be detected in such a manner that noise generation is prevented.

摘要翻译： 一种振动陀螺仪，包括具有中心（中性）轴（Y轴）的细长振动器，用于使第一方向变形的驱动单元，使得振动器以第一（X）方向振动，附加到振动器的附加质量 位置偏离第二（Z）方向的中心轴线，以及形成在振动器上的检测器。 在第二方向的振动期间，振动陀螺仪围绕第二（Z）方向的旋转导致科里奥利力在平行于中心轴线的方向上作用于添加的质量。 由于添加的质量偏离中心轴，所以产生第二（Z）方向产生的振动，由检测器检测。 利用这种布置，振动器的中心轴线与旋转系统的旋转表面平行放置。 因此，可以以防止噪声产生的方式来检测每个方向上大约两个或三个轴的旋转。

公开(公告)号：US06684716B2

公开(公告)日：2004-02-03

申请号：US09853586

申请日：2001-05-14

申请人： Kazumasa Ohnishi ,  Yoshiro Tomikawa

发明人： Kazumasa Ohnishi ,  Yoshiro Tomikawa

IPC分类号： G01F184

CPC分类号： G01F1/8418 ,  G01F1/849

摘要： A sensitivity of a Coriolis flowmeter, which is also utilizable as a density meter, composed of a straight conduit through which a fluid to be measured flows, and two counter straight rods that are aligned on both sides of the conduit in parallel, in which one end of the conduit and each one end of the counter rods are fixed to a common support block and another end of the conduit and each another end of the counter rods are fixed to another common support block, is improved by providing to each of the conduit and counter rods a vibration generator for generating vibrations in such manner that the conduit and the counter rods vibrate in opposite phase, and by fixing both support blocks onto a rigid substrate.

摘要翻译： 可用作密度计的科里奥利流量计的灵敏度由待测量的流体流过的直管和平行于导管两侧的两个反直直杆组成，其中一个 导管的端部和相对杆的每个一端固定到共同的支撑块，并且导管的另一端和对置杆的每个另一端固定到另一个共同的支撑块，通过提供给每个导管 以及反向杆，用于产生振动的振动发生器，使得导管和反向杆以相反的相位振动，并且将两个支撑块固定在刚性基板上。

公开(公告)号：US5691595A

公开(公告)日：1997-11-25

申请号：US531260

申请日：1995-09-20

申请人： Yoshiro Tomikawa ,  Kazumasa Ohnishi ,  Akira Satoh

发明人： Yoshiro Tomikawa ,  Kazumasa Ohnishi ,  Akira Satoh

IPC分类号： G01P9/04 ,  G01C19/56 ,  H01L41/08

CPC分类号： G01C19/5607

摘要： A vibratory gyroscope including a planar elastic vibrator having vibrator piezoelectric material layers formed on both the front and back sides. The vibrator includes a base portion and three parallel elastic pieces extending from the base portion such that the a center elastic piece is located between two side elastic pieces. Electrode layers are formed over the piezoelectric material layers which cause both the side elastic pieces and the center elastic piece to vibrate in a plane, such that the vibrations of the center elastic piece are 180.degree. out-of-phase with the side elastic pieces. When the thus-vibrated vibrator is rotated, the elastic pieces are vibrated in directions parallel to the plane due to the Coriolis force. These deformations are detected as voltage changes across the piezoelectric material layers, and the voltage changes are used to determinate the angular velocity of the vibrator. The outside edges of the side elastic pieces are offset from an outer edge of the base section to prevent twisting stress, thereby allowing more precise vibration detection.

摘要翻译： 一种振动陀螺仪，包括在前后两侧形成有振动压电材料层的平面弹性振动器。 振动器包括基部和从基部延伸的三个平行的弹性片，使得中心弹性片位于两个侧面弹性片之间。 电极层形成在压电材料层上，使得侧面弹性片和中心弹性片在平面中振动，使得中心弹性片的振动与侧面弹性片180度异相。 当如此振动的振动器旋转时，由于科里奥利力，弹性片在与平面平行的方向上振动。 这些变形被检测为跨越压电材料层的电压变化，并且使用电压变化来确定振动器的角速度。 侧面弹性片的外边缘从基部的外缘偏移以防止扭转应力，从而允许更精确的振动检测。

公开(公告)号：US5708320A

公开(公告)日：1998-01-13

申请号：US549616

申请日：1995-10-27

申请人： Kazumasa Ohnishi ,  Akira Satoh ,  Yoshiro Tomikawa

发明人： Kazumasa Ohnishi ,  Akira Satoh ,  Yoshiro Tomikawa

IPC分类号： G01C19/5607 ,  H01L41/08

CPC分类号： G01C19/5607

摘要： A vibratory gyroscope including an elongated vibrator having a central (neutral) axis (Y-axis), a drive unit for deforming the first direction such that the vibrator vibrates in a first (X) direction, an added mass attached to the vibrator at a position offset from the central axis in a second (Z) direction, and a detector formed on the vibrator. Rotation of the vibratory gyroscope about the second (Z) direction during vibration in the second direction causes Coriolis force to acting on the added mass in a direction parallel to the central axis. Because the added mass is offset from the central axis, a resulting vibration in the second (Z) direction is produced, which is detected by the detector. With this arrangement, the central axis of the vibrator is placed in parallel with the surface of rotation of the rotating system. Thus, rotations about two or three axes in each direction can be detected in such a manner that noise generation is prevented.

公开(公告)号：US5451828A

公开(公告)日：1995-09-19

申请号：US278776

申请日：1994-07-22

申请人： Yoshiro Tomikawa ,  Kazumasa Ohnishi

发明人： Yoshiro Tomikawa ,  Kazumasa Ohnishi

IPC分类号： G01C19/56 ,  G01P9/04 ,  H01L41/09 ,  H03H9/24 ,  H01L41/08

CPC分类号： G01C19/5607

摘要： A vibratory gyroscope, including a vibrator, which has three elastic arms separated by two slits, a driving means for generating vibration in at least one elastic arm, and a detecting means for detecting a component of vibration in a direction, which intersects with the direction of the vibration generated in an elastic arm due to Coriolis force when the vibrator rotates.

摘要翻译： 一种振动陀螺仪，包括振动器，其具有由两个狭缝分开的三个弹性臂，用于在至少一个弹性臂中产生振动的驱动装置，以及检测装置，用于检测与方向相交的方向上的振动分量 当振动器旋转时由于科里奥利力而在弹性臂中产生的振动。

公开(公告)号：US6072266A

公开(公告)日：2000-06-06

申请号：US574928

申请日：1995-12-19

申请人： Yoshiro Tomikawa

发明人： Yoshiro Tomikawa

IPC分类号： H01L41/09 ,  H02N2/10 ,  H01L41/08

CPC分类号： H02N2/0035 ,  H02N2/026 ,  H02N2/028

摘要： A vibration actuator has an elastic member formed into a ring shape, an electro-mechanical converting element joined to the elastic member, and a relative moving member which is in press contact with the elastic member. In the vibration actuator, the electro-mechanical converting element generates, upon application of a driving signal, a first vibration mode that vibrates in a direction parallel to a reference plane where the ring shape is formed, and a second vibration mode that vibrates in a direction perpendicular to or substantially perpendicular to the reference plane, and the relative moving member moves relative to the elastic member in one- or two-dimensional directions in the reference plane by the first and second vibration modes.

摘要翻译： 振动致动器具有形成为环形的弹性构件，与弹性构件接合的机电转换元件以及与弹性构件压接的相对移动构件。 在振动致动器中，机电转换元件在施加驱动信号时产生在平行于形成环形的参考平面的方向上振动的第一振动模式，以及振动在第二振动模式 方向垂直于或基本上垂直于参考平面，并且相对移动构件通过第一和第二振动模式在参考平面中以一维或二维方向相对于弹性构件移动。

公开(公告)号：US5760528A

公开(公告)日：1998-06-02

申请号：US626325

申请日：1996-04-02

申请人： Yoshiro Tomikawa

发明人： Yoshiro Tomikawa

IPC分类号： G02B7/04 ,  H01L41/09 ,  H02N2/00 ,  H01L41/08

CPC分类号： H02N2/003 ,  H02N2/026 ,  H02N2/028 ,  H02N2/103

摘要： An ultrasonic actuator is capable of moving one-dimensionally or two-dimensionally on a flat plane, and can easily be assembled in a cylindrical portion such as a lens barrel of a camera. This ultrasonic actuator comprises a frame-like elastic member having an outer form in a regular square, and electro-mechanical converting elements which are joined to frame side portions of the elastic member for generating vibrations in a longitudinal vibration mode and a bending vibration mode in response to a drive signal so as to generate elliptic motion at predetermined positions in the frame side portions by a synthetic motion of the above-mentioned vibrations. The ultrasonic actuator can translate one-dimensionally or two-dimensionally on the flat plane upon application of a driving voltage onto each group of the opposed electro-mechanical converting elements.

摘要翻译： 超声波致动器能够在平面上一维或二维地移动，并且可以容易地组装在诸如相机的镜筒的圆柱形部分中。 这种超声波致动器包括具有正方形的外部形状的框架状弹性构件，以及机电转换元件，其连接到弹性构件的框架侧部分，用于在纵向振动模式和弯曲振动模式中产生振动 响应于驱动信号，以通过上述振动的合成运动在帧侧部分中的预定位置产生椭圆运动。 当将驱动电压施加到每组相对的机电转换元件上时，超声致动器可在平面上一维或二维平移。

公开(公告)号：US06915694B2

公开(公告)日：2005-07-12

申请号：US10664821

申请日：2003-09-17

申请人： Yoshiro Tomikawa ,  Kenji Sato ,  Atsushi Ono

发明人： Yoshiro Tomikawa ,  Kenji Sato ,  Atsushi Ono

IPC分类号： G01C19/56 ,  G01C19/574 ,  H01L41/08 ,  H01L41/18 ,  G01P9/04

CPC分类号： H03H9/2473 ,  G01C19/5607

摘要： The object of the present invention is to provide an angular velocity sensor that uses Coriolis force with a flatly supported double tuning fork structure that uses an in-plane asymmetrical flexural secondary mode. A large support area is used to provide a high-precision angular velocity sensor with superior resistance to vibration and impact. A double tuning fork gyro-sensor is formed integrally from: two arms; a driver electrode formed on the arms; and a double tuning fork supporting the ends of the arms. Also included are: a detection module connected to the double tuning fork support section; a detection electrode formed on the detection module; and a support securing section for the detection module. When there is rotation, the Coriolis force acting on the arms is transferred to the detection module by way of the double tuning fork support section so that an in-plane asymmetrical flexural secondary vibration takes place.

摘要翻译： 本发明的目的是提供一种角速度传感器，该角速度传感器使用具有平面支撑的双音叉结构的科里奥利力，其使用平面内不对称的弯曲次级模式。 大的支撑区域用于提供高精度的角速度传感器，具有优异的抗振动和冲击能力。 双音叉陀螺仪传感器由两个臂组成： 形成在臂上的驱动电极; 以及支撑臂的端部的双音叉。 还包括：连接到双音叉支撑部分的检测模块; 形成在检测模块上的检测电极; 以及用于检测模块的支撑固定部。 当旋转时，通过双音叉支撑部将作用在臂上的科里奥利力转移到检测模块，从而发生面内不对称的弯曲二次振动。

公开(公告)号：US07053534B2

公开(公告)日：2006-05-30

申请号：US10654802

申请日：2003-09-03

申请人： Yoshiro Tomikawa ,  Yoshiaki Tanaka

发明人： Yoshiro Tomikawa ,  Yoshiaki Tanaka

IPC分类号： H03H9/21 ,  H03H9/25

CPC分类号： G01C19/5607

摘要： The present invention provides a piezoelectric vibration gyro-sensor utilizing Coriolis force that includes a tuning fork type vibrator in which two rectangular-columnar arms and a base to support the lower end of the arms are integrated; drive electrodes formed on two rectangular-columnar arms; and IDT electrodes of a surface acoustic wave element formed on two arms. Two pairs of the drive electrodes are provided on each rectangular-columnar arm, in which each of the pairs of drive electrodes face each other, and each pair of the drive electrodes are arranged in parallel on the rectangular-columnar arm at a given distance. The IDT electrodes of the surface acoustic wave element are provided between the drive electrodes at the lower end of the rectangular-columnar arms.

摘要翻译： 本发明提供了一种使用科里奥利力的压电振动陀螺传感器，其包括音叉式振动器，其中两个矩形柱状臂和支撑臂的下端的基座一体化; 驱动电极形成在两个矩形柱状臂上; 和形成在两个臂上的声表面波元件的IDT电极。 在每个矩形柱上设置两对驱动电极，其中每对驱动电极彼此面对，并且每对驱动电极以一定距离平行布置在矩形柱状臂上。 表面声波元件的IDT电极设置在矩形柱的下端的驱动电极之间。