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公开(公告)号：US06596992B2
公开(公告)日：2003-07-22
申请号：US10017123
申请日：2001-12-14
申请人： Kazunori Ando , Kazutoshi Watanabe , Yoshiteru Shikakura , Masaki Tsuchihashi , Takehiro Yamaoka
发明人： Kazunori Ando , Kazutoshi Watanabe , Yoshiteru Shikakura , Masaki Tsuchihashi , Takehiro Yamaoka
IPC分类号： G21K700
CPC分类号： G01Q60/32 , G01Q10/06 , G01Q20/02 , Y10S977/851
摘要： In the first operation, the cantilever is oscillated at a frequency which is at opposite sides of a frequency band having a half value of an oscillation frequency f and amplitude A on a dependent curve (Q-curve). The cantilever oscillating frequency is far from an oscillation frequency (near a resonance point) where the cantilever is slow to damp, which enables the cantilever to quickly damp in accordance with a variation of a transient oscillation frequency after the probe comes into contact with the specimen, and allows the probe to follow the uneven surface state of the specimen.
摘要翻译： 在第一操作中，悬臂以相对曲线（Q曲线）上具有振荡频率f的一半值和振幅A的频带的相反侧的频率振荡。 悬臂振荡频率远离振动频率（接近谐振点），其中悬臂缓慢减震，这使得悬臂能够在探头与试样接触后根据瞬态振荡频率的变化迅速衰减 ，并且允许探针跟随样本的不平坦表面状态。
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公开(公告)号：US07442925B2
公开(公告)日：2008-10-28
申请号：US11370006
申请日：2006-03-04
申请人： Masatoshi Yasutake , Takuya Nakaue , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto , Naoya Watanabe , Yoshiteru Shikakura
发明人： Masatoshi Yasutake , Takuya Nakaue , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto , Naoya Watanabe , Yoshiteru Shikakura
IPC分类号： G01N13/16
CPC分类号： G01N23/225 , G01Q60/34
摘要： The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using a scanning probe which works a sample by performing the relative scanning of a probe supported on a cantilever on the sample at a predetermined scanning speed. The working method can work the object to be worked while forcibly and relatively vibrating the probe in the direction orthogonal to or parallel to a working surface of the sample at low frequency of 100 to 1000 Hz.
摘要翻译： 本发明提供一种使用扫描探针的工作方法，其可以提高工作速度并延长探针的寿命。 本发明提供了使用扫描探针的工作方法，该扫描探针通过以预定扫描速度执行支撑在样品上的悬臂上的探针的相对扫描来对样品进行工作。 该工作方法可以在100至1000Hz的低频下，以与样品的工作表面正交或平行的方向强制地相对振动探针，从而对被加工物进行加工。
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公开(公告)号：US20050199046A1
公开(公告)日：2005-09-15
申请号：US11076250
申请日：2005-03-09
CPC分类号： G01Q30/04 , G01Q10/065
摘要： A scanning probe microscope is capable of not only avoiding contact between a sample and a probe but also capable of shortening the time from detection of the sample during scanning by the probe to raising the probe to the top surface of the sample. A Z-axis controlling amount calculating mechanism controls a displacement amount of a cantilever or an oscillation amount in oscillating the cantilever so as to be constant, and a Z-axis driving mechanism drives in a Z direction the cantilever or a sample based on the controlling signal from the Z-axis controlling amount calculating mechanism. A driving range limiting device limits a driving range of the Z-axis driving mechanism, and a driving range setting device optionally sets the driving range so that the probe is lowered to a set position even in an area with no sample.
摘要翻译： 扫描探针显微镜不仅可以避免样品和探针之间的接触，而且能够缩短探针扫描期间检测样品的时间，从而将探针升高到样品的顶部表面。 Z轴控制量计算机构控制悬臂的摆动量或使悬臂摆动的摆动量恒定，Z轴驱动机构在Z方向驱动基于控制的悬臂或样本 来自Z轴控制量计算机构的信号。 驱动范围限制装置限制Z轴驱动机构的驱动范围，并且驱动范围设定装置可选地设定驱动范围，使得即使在没有样品的区域中探针也降低到设定位置。
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公开(公告)号：US20060219901A1
公开(公告)日：2006-10-05
申请号：US11370006
申请日：2006-03-04
申请人： Masatoshi Yasutake , Takuya Nakaue , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto , Naoya Watanabe , Yoshiteru Shikakura
发明人： Masatoshi Yasutake , Takuya Nakaue , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto , Naoya Watanabe , Yoshiteru Shikakura
CPC分类号： G01N23/225 , G01Q60/34
摘要： The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using a scanning probe which works a sample by performing the relative scanning of a probe supported on a cantilever on the sample at a predetermined scanning speed. The working method can work the object to be worked while forcibly and relatively vibrating the probe in the direction orthogonal to or parallel to a working surface of the sample at low frequency of 100 to 1000 Hz.
摘要翻译： 本发明提供一种使用扫描探针的工作方法，其可以提高工作速度并延长探针的寿命。 本发明提供了使用扫描探针的工作方法，该扫描探针通过以预定扫描速度执行支撑在样品上的悬臂上的探针的相对扫描来对样品进行工作。 该工作方法可以在100至1000Hz的低频下，以与样品的工作表面正交或平行的方向强制地相对振动探针，从而对被加工物进行加工。
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5.发明申请公开(公告)号：US20070278177A1
公开(公告)日：2007-12-06
申请号：US11809518
申请日：2007-06-01
申请人： Kazushige Kondo , Masatoshi Yasutake , Takuya Nakaue , Osamu Takaoka , Atsushi Uemoto , Kazutoshi Watanabe , Yoshiteru Shikakura
发明人： Kazushige Kondo , Masatoshi Yasutake , Takuya Nakaue , Osamu Takaoka , Atsushi Uemoto , Kazutoshi Watanabe , Yoshiteru Shikakura
摘要： Under the condition that the height is fixed at a target height by turning off a feedback control system of a Z piezoelectric actuator of a cantilever of an atomic force microscope having a probe, which is harder than a processed material, flexure and twisting of the cantilever when carrying out mechanical processing while selectively repeating scanning only on the processed area (in the case of detecting flexure, parallel with the cantilever and in the case of detecting twisting, vertical with the cantilever) is monitored by a quadrant photodiode position sensing detector and the processing is repeated till a flexure amount or a twisting amount, namely, till an elastic deformation amount of the cantilever becomes not more than a determined threshold. It is not necessary to carry out scanning of the observation in obtaining the height information for detection of an end point, so that it is possible to improve a throughput of processing.
摘要翻译： 通过关闭具有探针的原子力显微镜的悬臂的Z型压电致动器的反馈控制系统，该高度被固定在目标高度的条件下，其比加工材料更硬，悬臂的弯曲和扭曲 当在被处理区域（在检测弯曲的情况下，与悬臂平行的情况下，并且在检测到扭转的情况下，与悬臂垂直的情况下）进行机械处理时，通过象限光电二极管位置感测检测器监视 重复加工直到挠曲量或扭转量，即直到悬臂的弹性变形量变得不大于确定的阈值。 在获得用于检测终点的高度信息时，不需要进行观察的扫描，从而可以提高处理的吞吐量。
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公开(公告)号：US07284415B2
公开(公告)日：2007-10-23
申请号：US11076250
申请日：2005-03-09
CPC分类号： G01Q30/04 , G01Q10/065
摘要： A scanning probe microscope has a cantilever having a minute probe on a distal end thereof and a displacement detecting device for detecting displacement of the cantilever. A Z-axis controlling amount calculating mechanism calculates a controlling amount for keeping constant a displacement amount of the cantilever. A Z-axis driving mechanism drives in a Z direction the cantilever or a sample in accordance with the controlling amount from the Z-axis controlling amount calculating mechanism. An XY scanning mechanism relatively moves the probe in a direction of an XY plane with respect to the sample to measure an uneven shape and/or a physical characteristic of the surface of the sample. A controlling range limiting device limits a driving range of the Z-axis driving mechanism. A controlling range setting device optionally sets the driving range of the Z-axis driving mechanism.
摘要翻译： 扫描探针显微镜具有在其远端具有微小探针的悬臂和用于检测悬臂的位移的位移检测装置。 Z轴控制量计算机构计算用于保持悬臂的位移量恒定的控制量。 Z轴驱动机构根据来自Z轴控制量计算机构的控制量沿Z方向驱动悬臂或样本。 XY扫描机构使探针相对于样品相对于XY平面的方向移动，以测量样品表面的不均匀形状和/或物理特性。 控制范围限制装置限制Z轴驱动机构的驱动范围。 控制范围设定装置可选地设定Z轴驱动机构的驱动范围。
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公开(公告)号：US07997124B2
公开(公告)日：2011-08-16
申请号：US11879878
申请日：2007-07-19
IPC分类号： G01B5/28
CPC分类号： G01Q30/04 , G01Q10/065
摘要： A scanning probe microscope has a cantilever mounted to undergo oscillation movement over a surface of a sample. The cantilever has a probe on a distal end thereof. A Z-axis controlling amount calculating mechanism calculates a controlling amount for keeping constant an oscillation amount of the cantilever. A Z-axis driving mechanism drives in a Z direction the cantilever or the sample in accordance with the controlling amount from the Z-axis controlling amount calculating mechanism. A driving range limiting device limits a driving range of the Z-axis driving mechanism. A driving range setting device optionally sets the driving range of the Z-axis driving mechanism.
摘要翻译： 扫描探针显微镜具有悬臂安装以在样品的表面上经历振荡运动。 悬臂在其远端具有探针。 Z轴控制量计算机构计算用于保持悬臂的振荡量恒定的控制量。 Z轴驱动机构根据来自Z轴控制量计算机构的控制量沿Z方向驱动悬臂或样本。 驱动范围限制装置限制了Z轴驱动机构的驱动范围。 驱动范围设定装置可选地设定Z轴驱动机构的驱动范围。
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公开(公告)号：US20100205697A1
公开(公告)日：2010-08-12
申请号：US12700236
申请日：2010-02-04
IPC分类号： G01Q10/00
CPC分类号： G01Q10/06
摘要： In detecting a displacement of a cantilever (2) by a displacement detecting mechanism (5) and allowing a probe (1) and a sample (8) to approach each other by at least one of a coarse-movement mechanism (13) and a vertical direction fine-movement mechanism (11) at the same time, an excitation mechanism (4) excites the cantilever (2) with a first excitation condition and the probe (1) and the sample (8) are allowed to approach each other with a first stop condition, and then the cantilever (2) is excited with a second excitation condition different from the first excitation condition, a second stop condition is set, and the probe (1) and the sample (8) are allowed to approach each other by the at least one of the vertical direction fine-movement mechanism (11) and the coarse-movement mechanism (13) until the second stop condition is satisfied.
摘要翻译： 在通过位移检测机构（5）检测悬臂（2）的位移并且允许探针（1）和样品（8）通过粗略运动机构（13）和 垂直方向微动机构（11）同时激励机构（4）以第一激励条件激发悬臂（2），使探头（1）和样品（8）彼此靠近 第一停止条件，然后用与第一激励条件不同的第二激励条件激励悬臂（2），设置第二停止条件，并且允许探头（1）和样品（8）接近每个 另外通过垂直方向微动机构11和粗动机构13中的至少一个，直到满足第二停止条件为止。
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公开(公告)号：US08615811B2
公开(公告)日：2013-12-24
申请号：US13428136
申请日：2012-03-23
IPC分类号： G01Q20/00
摘要： A method of measuring vibration characteristics of a cantilever in a scanning probe microscope (SPM). An excitation signal is generated by a forward and backward frequency sweep signal in a frequency range including a resonance frequency of the cantilever. The cantilever is vibrated by supplying the excitation signal to a vibrating portion of the cantilever. The largest amplitude of a displacement of the cantilever in a forward path and in a backward path is directly measured, and an intermediate value of a frequency between frequencies measured on the basis of the directly measured largest amplitude of the displacement of the cantilever is detected as the resonance frequency of the cantilever.
摘要翻译： 测量扫描探针显微镜（SPM）中悬臂振动特性的方法。 在包括悬臂的共振频率的频率范围内，通过正向和反向频率扫描信号产生激励信号。 通过将激励信号提供给悬臂的振动部分来振动悬臂。 直接测量前进路径和后向路径中的悬臂的位移的最大幅度，并且基于直接测量的悬臂的位移的最大振幅测量的频率的中间值被检测为 悬臂的共振频率。
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公开(公告)号：US08024816B2
公开(公告)日：2011-09-20
申请号：US12700236
申请日：2010-02-04
CPC分类号： G01Q10/06
摘要： In detecting a displacement of a cantilever (2) by a displacement detecting mechanism (5) and allowing a probe (1) and a sample (8) to approach each other by at least one of a coarse-movement mechanism (13) and a vertical direction fine-movement mechanism (11) at the same time, an excitation mechanism (4) excites the cantilever (2) with a first excitation condition and the probe (1) and the sample (8) are allowed to approach each other with a first stop condition, and then the cantilever (2) is excited with a second excitation condition different from the first excitation condition, a second stop condition is set, and the probe (1) and the sample (8) are allowed to approach each other by the at least one of the vertical direction fine-movement mechanism (11) and the coarse-movement mechanism (13) until the second stop condition is satisfied.
摘要翻译： 在通过位移检测机构（5）检测悬臂（2）的位移并且允许探针（1）和样品（8）通过粗略运动机构（13）和 垂直方向微动机构（11）同时激励机构（4）以第一激励条件激发悬臂（2），使探头（1）和样品（8）彼此靠近 第一停止条件，然后用与第一激励条件不同的第二激励条件激励悬臂（2），设置第二停止条件，并且允许探头（1）和样品（8）接近每个 另外通过垂直方向微动机构11和粗动机构13中的至少一个，直到满足第二停止条件为止。
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