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    Manufacturing method of composite type thin-film magnetic head
    1.
    发明授权
    Manufacturing method of composite type thin-film magnetic head 失效
    复合型薄膜磁头制造方法

    公开(公告)号：US06532647B1

    公开(公告)日：2003-03-18

    申请号：US09506604

    申请日：2000-02-18

    申请人： Kazuya Maekawa ,  Akio Iijima ,  Tetsuya Mino

    发明人： Kazuya Maekawa ,  Akio Iijima ,  Tetsuya Mino

    IPC分类号： G11B5129

    CPC分类号： G11B5/3967 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3163 ,  G11B5/332 ,  G11B5/3903 ,  Y10T29/49021 ,  Y10T29/49039 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49117

    摘要： A manufacturing method of a composite type thin-film magnetic head with a reading head element and an inductive writing head element, includes a step of forming the reading head element and its lead conductor layers on a first insulation layer, a step of forming a second insulation layer to cover the reading head element and the lead conductor layers, a step of forming a second shield layer on the second insulation layer, a step of forming a third insulation layer, and a step of forming via holes and a back gap hole. The via holes and back gap hole forming step is executed by reactive ion etching (RIE) for simultaneously removing the second insulation layer and the third insulation layer located at the via holes and the third insulation layer located at the back gap hole.

    摘要翻译： 具有读取头元件和感应写入头元件的复合型薄膜磁头的制造方法包括在第一绝缘层上形成读取头元件及其引线导体层的步骤，形成第二绝缘层的步骤 绝缘层覆盖读头元件和引线导体层，在第二绝缘层上形成第二屏蔽层的步骤，形成第三绝缘层的步骤，以及形成通孔和后间隙孔的步骤。 通孔和后隙孔形成步骤通过反应离子蚀刻（RIE）来执行，用于同时去除位于通孔的第二绝缘层和第三绝缘层以及位于后间隙孔处的第三绝缘层。

    Perpendicular magnetic recording head and method of manufacturing the same
    3.
    发明授权
    Perpendicular magnetic recording head and method of manufacturing the same 有权
    垂直磁记录头及其制造方法

    公开(公告)号：US08470185B2

    公开(公告)日：2013-06-25

    申请号：US12457060

    申请日：2009-05-29

    申请人： Tetsuya Mino ,  Naoto Matono ,  Ikuhito Onodera ,  Kazushi Nishiyama ,  Michitoshi Tsuchiya ,  Kenji Sasaki

    发明人： Tetsuya Mino ,  Naoto Matono ,  Ikuhito Onodera ,  Kazushi Nishiyama ,  Michitoshi Tsuchiya ,  Kenji Sasaki

    IPC分类号： G11B5/10

    CPC分类号： G11B5/3116 ,  G11B5/1278 ,  Y10T29/49046 ,  Y10T29/49052

    摘要： A method of manufacturing a perpendicular magnetic write head capable of precisely narrowing a side gap is provided. A tip portion having a cross sectional geometry of an inverted trapezoid is formed in an opening portion of a non-magnetic layer and thereafter, the non-magnetic layer is etched with the tip portion as a mask. Thereby, a portion adjacent to the tip portion in a writing track width direction remains and an outermost edge portion of the tip portion in that direction is located on a plane which coincides with an etching face (side face) of the non-magnetic layer. When a gap layer is formed with a vapor phase growth such as a sputtering method to cover the side face of the non-magnetic layer and thereafter a side shield layer is formed adjacently to the tip portion therethrough, a thickness of the gap layer becomes extremely thin and is reproduced precisely. Therefore, the side gap is narrowed with high precision.

    摘要翻译： 提供了一种制造能够精确地缩小侧面间隙的垂直磁性写入头的方法。 在非磁性层的开口部分中形成具有倒梯形截面几何形状的尖端部分，然后用尖端部分作为掩模蚀刻非磁性层。 由此，沿着书写轨道宽度方向与尖端部分相邻的部分残留，并且尖端部分在该方向上的最外边缘部分位于与非磁性层的蚀刻面（侧面）重合的平面上。 当用诸如溅射法的气相生长形成间隙层以覆盖非磁性层的侧面，然后与其顶端部分相邻形成侧屏蔽层时，间隙层的厚度变得非常大 薄而被精确地复制。 因此，侧面间隙以高精度变窄。

    Thin film magnetic head including a first pole portion having a depressed portion for receiving a coil
    5.
    发明授权
    Thin film magnetic head including a first pole portion having a depressed portion for receiving a coil 失效
    薄膜磁头包括具有用于接收线圈的凹陷部分的第一极部分

    公开(公告)号：US06466415B1

    公开(公告)日：2002-10-15

    申请号：US09604794

    申请日：2000-06-28

    申请人： Koichi Terunuma ,  Tetsuya Mino ,  Katsuya Kanakubo ,  Noriyuki Ito

    发明人： Koichi Terunuma ,  Tetsuya Mino ,  Katsuya Kanakubo ,  Noriyuki Ito

    IPC分类号： G11B523

    CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3909 ,  G11B5/3967

    摘要： The invention provides a thin film magnetic head including a first pole portion having depressed portion that is formed therein. The depressed portion descends, backward within the first pole portion, at a first inclination angle &thgr;1 from a first inclination starting point P1. Then, an insulating film is filled up in the depressed portion so that it can be located up to the upper side of the surface of the first pole and have an inclined surface in the side of a medium opposing surface. Additionally, a first magnetic film of a second pole portion can have a larger saturated magnetic flux density than a second magnetic film of the second pole portion, and can include an inclined portion with a second inclination angle &thgr;2 from a second inclination starting point P2.

    摘要翻译： 本发明提供一种薄膜磁头，其包括形成有凹部的第一极部。 凹陷部分在第一极部分内以与第一倾斜起始点P1成第一倾斜角θ1下降。 然后，在凹部中填充绝缘膜，使得其可以位于第一极的表面的上侧，并且在介质相对表面的侧面具有倾斜表面。 此外，第二极部的第一磁性膜可以具有比第二极部的第二磁性膜更大的饱和磁通密度，并且可以包括从第二倾斜起点P2起的第二倾斜角θ2的倾斜部。

    Perpendicular magnetic recording head including non-magnetic protruding layer
    7.
    发明授权
    Perpendicular magnetic recording head including non-magnetic protruding layer 失效
    垂直磁记录头包括非磁性突出层

    公开(公告)号：US08339737B2

    公开(公告)日：2012-12-25

    申请号：US12457521

    申请日：2009-06-12

    申请人： Tetsuya Mino ,  Naoto Matono ,  Ikuhito Onodera ,  Kazushi Nishiyama ,  Michitoshi Tsuchiya ,  Kenji Sasaki

    发明人： Tetsuya Mino ,  Naoto Matono ,  Ikuhito Onodera ,  Kazushi Nishiyama ,  Michitoshi Tsuchiya ,  Kenji Sasaki

    IPC分类号： G11B5/147

    CPC分类号： G11B5/3106 ,  G11B5/1278 ,  G11B5/255 ,  G11B5/3133 ,  G11B5/40

    摘要： A perpendicular magnetic write head capable of suppressing damage and corrosion of a magnetic pole to secure a stable writing performance is provided. A non-magnetic protruding layer protruding from a main magnetic pole layer (tip portion) toward an air bearing surface side is formed on both sides of the tip portion in a writing track width direction. The non-magnetic protruding layer is located closer to a recording medium than the tip portion during writing operation, and is more likely to be in contact with the writing medium instead of the tip portion. Since the protective film portion covering the tip portion hardly peels off (e.g., compared to the protective film portion covering the non-magnetic protruding layer), the tip portion is hardly damaged or corroded. Since the tip portion is protected physically and chemically by the non-magnetic protruding layer, deterioration of the soft magnetic characteristics of the tip portion is suppressed.

    摘要翻译： 提供了能够抑制磁极的损坏和腐蚀以确保稳定的写入性能的垂直磁性写入头。 从主磁极层（前端部）向空气轴承面侧突出的非磁性突出层形成在磁头部的书写轨道宽度方向的两侧。 在写入操作期间，非磁性突出层位于比尖端部分更靠近记录介质的位置，并且更可能与书写介质接触而不是尖端部分。 由于覆盖尖端部分的保护膜部分几乎不剥离（例如，与覆盖非磁性突出层的保护膜部分相比），尖端部分几乎不被损坏或腐蚀。 由于尖端部分被非磁性突出层物理和化学地保护，所以抑制了尖端部分的软磁特性的劣化。

    Perpendicular magnetic write head
    8.
    发明授权
    Perpendicular magnetic write head 失效
    垂直写磁头

    公开(公告)号：US08169739B2

    公开(公告)日：2012-05-01

    申请号：US12585456

    申请日：2009-09-15

    申请人： Tetsuya Mino ,  Naoto Matono ,  Ikuhito Onodera ,  Kazushi Nishiyama ,  Michitoshi Tsuchiya ,  Kenji Sasaki

    发明人： Tetsuya Mino ,  Naoto Matono ,  Ikuhito Onodera ,  Kazushi Nishiyama ,  Michitoshi Tsuchiya ,  Kenji Sasaki

    IPC分类号： G11B5/31

    CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

    摘要： A perpendicular magnetic write head in which unintended erasure of information at the time of non-writing can be suppressed while keeping the capability of writing is provided. The perpendicular magnetic write head includes a magnetic pole tip portion, a first yoke portion connected to the magnetic pole tip portion, having a width larger than that of the magnetic pole tip portion, and having a recess portion in a center region thereof, and a second yoke portion embedded in the recess portion. The magnetic pole tip portion and the first yoke portion are integrally formed with a vapor deposition method, and the second yoke portion is formed with a plating method. Since the saturation flux density of the magnetic pole tip portion formed with the vapor deposition method becomes higher than that of the yoke portion, a magnetic flux intake capacity of the magnetic pole tip portion is ensured. In a magnetic domain structure of the yoke portion most of which is formed with the plating method, since an easy magnetization axis becomes likely to be directed in a direction perpendicular to an emitting direction of a magnetic flux, residual flux becomes less likely to leak out of the main magnetic pole layer at the time of non-writing.

    摘要翻译： 提供了在保持写入能力的同时抑制在非写入时的意外擦除信息的垂直磁性写入头。 垂直磁性写入头包括磁极尖端部分，连接到磁极尖端部分的第一磁轭部分，其宽度大于磁极尖端部分的宽度，并且在其中心区域具有凹部， 第二轭部嵌入凹部。 磁极端部和第一磁轭部用气相沉积法一体形成，第二磁轭部形成电镀法。 由于利用气相沉积法形成的磁极尖端部分的饱和磁通密度变得高于磁轭部分的饱和磁通密度，所以确保了磁极尖端部分的磁通量进入容量。 在磁轭部分的磁畴结构中，其大部分由电镀法形成，由于容易的磁化轴变得可能沿垂直于磁通的发射方向的方向指向，所以残余磁通不太可能泄漏 在非写入时的主磁极层。