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    Electromagnetic field application system
    1.
    发明授权
    Electromagnetic field application system 失效
    电磁场应用系统

    公开(公告)号：US08653472B2

    公开(公告)日：2014-02-18

    申请号：US12854262

    申请日：2010-08-11

    申请人： Ken Harada ,  Akira Sugawara ,  Noboru Moriya

    发明人： Ken Harada ,  Akira Sugawara ,  Noboru Moriya

    IPC分类号： G21K5/04

    CPC分类号： H01J37/20 ,  H01J37/09 ,  H01J37/26 ,  H01J2237/2002 ,  H01J2237/206

    摘要： The present invention is based on the property that the electric and magnetic fields are independent of each other and normal to each other and the property that the deflection of a charged particle beam by the electromagnetic field follows the rule of linear combination. The present invention employs a system that creates a region in which there exist both electromagnetic field and controls the deflection of a charged particle beam in each of the electric and magnetic fields.

    摘要翻译： 本发明是基于电场和磁场彼此独立并且彼此正常的特性以及通过电磁场的带电粒子束的偏转遵循线性组合规则的性质。 本发明采用一种系统，其产生存在电磁场的区域，并控制每个电场和磁场中的带电粒子束的偏转。

    Electron Beam Biprism Device and Electron Beam Device
    2.
    发明申请
    Electron Beam Biprism Device and Electron Beam Device 审中-公开
    电子束双棱镜装置和电子束装置

    公开(公告)号：US20120241612A1

    公开(公告)日：2012-09-27

    申请号：US13514654

    申请日：2010-12-06

    申请人： Ken Harada ,  Akira Sugawara ,  Noboru Moriya

    发明人： Ken Harada ,  Akira Sugawara ,  Noboru Moriya

    IPC分类号： H01J37/26 ,  H01J3/26

    CPC分类号： H01J37/26 ,  H01J37/1478 ,  H01J2237/1514 ,  H01J2237/2614

    摘要： Disclosed are an electron beam biprism device and an electron beam device, in which, in order to implement a fringe scan method in an electron beam interferometer, a deflection function in one direction is added to the function of an electron beam biprism, and electron beams passing the left and right sides of a filament electrode can be respectively deflected at different angles.

    摘要翻译： 公开了一种电子束双棱镜装置和电子束装置，其中为了在电子束干涉仪中实现边缘扫描方法，将一个方向的偏转函数加到电子束双棱镜的功能上，并且电子束 通过灯丝电极的左右两侧可以分别以不同的角度偏转。

    Interferometer
    4.
    发明授权
    Interferometer 失效
    干涉仪

    公开(公告)号：US07872755B2

    公开(公告)日：2011-01-18

    申请号：US11883568

    申请日：2006-01-27

    申请人： Ken Harada ,  Tetsuya Akashi ,  Yoshihiko Togawa ,  Tsuyoshi Matsuda ,  Noboru Moriya

    发明人： Ken Harada ,  Tetsuya Akashi ,  Yoshihiko Togawa ,  Tsuyoshi Matsuda ,  Noboru Moriya

    IPC分类号： G01B9/02

    CPC分类号： H01J37/295 ,  G01N23/00 ,  G02B19/0014 ,  G02B19/0047 ,  G03H5/00 ,  H01J37/04 ,  H01J2237/1514 ,  H01J2237/228 ,  H01J2237/2614

    摘要： A double-biprism electron interferometer is an optical system which dramatically increases the degree of freedom of a conventional one-stage electron interferometer. The double biprism interferometer, however, is the same as the optical system of the single electron biprism in terms of the one-dimensional shape of an electron hologram formed by filament electrodes, the direction of an interference area, and the azimuth of the interference fringes. In other words, the longitudinal direction of the interference area is determined corresponding to the direction of the filament electrodes, and the azimuth of the interference fringes only coincides with and is in parallel with the longitudinal direction of the interference area. An interferometer according to the present invention has upper-stage and lower-stage electron biprisms, and operates with an azimuth angle Φ between filament electrodes of the upper-stage and lower-stage electron biprisms to arbitrarily control an interference area and an azimuth θ of the interference fringes formed therein.

    摘要翻译： 双二棱镜电子干涉仪是一种显着提高常规一级电子干涉仪自由度的光学系统。 然而，双棱镜干涉仪与由单丝电极组成的电子全息图的一维形状，干涉区域的方向和干涉条纹的方位角的单电子双棱镜的光学系统相同 。 换句话说，干扰区域的长度方向根据灯丝电极的方向确定，并且干涉条纹的方位角仅与干涉区域的纵向方向一致并且平行。 根据本发明的干涉仪具有上级和下级电子双极，并且在上级和下级电子双极之间的灯丝电极之间以方位角Φ操作以任意地控制干涉区域和方位角; 的干涉条纹。

    Interferometer
    6.
    发明授权
    Interferometer 有权
    干涉仪

    公开(公告)号：US07538323B2

    公开(公告)日：2009-05-26

    申请号：US10585359

    申请日：2005-01-07

    申请人： Ken Harada ,  Tetsuya Akashi ,  Yoshihiko Togawa ,  Tsuyoshi Matsuda ,  Noboru Moriya

    发明人： Ken Harada ,  Tetsuya Akashi ,  Yoshihiko Togawa ,  Tsuyoshi Matsuda ,  Noboru Moriya

    IPC分类号： G01B15/00

    CPC分类号： H01J37/295 ,  H01J2237/1514 ,  H01J2237/2614

    摘要： The present invention provides a technique enabling to control fringe spacing s and an interference width W independently of each other, which are important parameters for an interferometer using an electron biprism.In the present invention, two electron biprisms 9u, 9b are used in two stages along the optical axis, and fringe spacing s and an interference width W are controlled independently of each other by controlling a voltage applied to an electrode of each of the electron biprisms. Also Fresnel diffraction can be suppressed.

    摘要翻译： 本发明提供一种能够彼此独立地控制边缘间隔s和干涉宽度W的技术，这是使用电子双棱镜的干涉仪的重要参数。 在本发明中，沿着光轴两级分别使用两个电子双极子9u，9b，通过控制施加到每个电子双极性电极的电压，彼此独立地控制边缘间隔s和干涉宽度W 。 也可以抑制菲涅尔衍射。

    Interferometer
    7.
    发明申请
    Interferometer 失效
    干涉仪

    公开(公告)号：US20080258058A1

    公开(公告)日：2008-10-23

    申请号：US11884680

    申请日：2006-01-27

    申请人： Ken Harada ,  Tetsuya Akashi ,  Yoshihiko Togawa ,  Tsuyoshi Matsuda ,  Noboru Moriya

    发明人： Ken Harada ,  Tetsuya Akashi ,  Yoshihiko Togawa ,  Tsuyoshi Matsuda ,  Noboru Moriya

    IPC分类号： G01N23/00 ,  G01J3/45

    CPC分类号： H01J37/04 ,  G01N23/00 ,  G02B19/0014 ,  G02B19/0047 ,  G03H5/00 ,  H01J37/295 ,  H01J2237/1514 ,  H01J2237/228 ,  H01J2237/2614

    摘要： A double-biprism electron interferometer is an optical system which dramatically increases the degree of freedom of a conventional one-stage electron interferometer. The double-biprism electron interferometer, however, is the same as the optical system of the single electron biprism interferometer in terms of the one-dimensional shape of an electron hologram formed by filament electrodes, the direction of an interference area and the azimuth of the interference fringes. In other words, the longitudinal direction of the interference area is determined corresponding to the direction of the filament electrodes, and the azimuth of the interference fringes only coincides with and is in parallel with the longitudinal direction of the interference area.An interferometer according to the present invention has upper-stage, intermediate-stage, and lower-stage electron biprisms, operates with an azimuth angle Φ among filament electrodes of the three electron biprisms to arbitrarily control an interference area and an azimuth θ of the interference fringes formed therein, eliminates Fresnel fringes generation, and allows independent control of an interference fringe spacing s and the azimuth θ of the interference fringes.

    摘要翻译： 双二棱镜电子干涉仪是一种显着提高常规一级电子干涉仪自由度的光学系统。 然而，双二棱镜电子干涉仪与单电子双棱镜干涉仪的光学系统相同，就由灯丝电极形成的电子全息图的一维形状，干涉区域的方向和方位角 干涉条纹。 换句话说，干扰区域的长度方向根据灯丝电极的方向确定，并且干涉条纹的方位角仅与干涉区域的纵向方向一致并且平行。 根据本发明的干涉仪具有上级，中级和低级电子双极，与三个电子双极体的细丝电极之间的方位角Phi一起操作以任意地控制干涉区域和干涉的方位角θ 形成在其中的边缘消除了菲涅尔条纹生成，并且允许独立控制干涉条纹间距s和干涉条纹的方位角θ。

    Interferometer
    9.
    发明申请
    Interferometer 失效
    干涉仪

    公开(公告)号：US20090273789A1

    公开(公告)日：2009-11-05

    申请号：US11883568

    申请日：2006-01-27

    申请人： Ken Harada ,  Tetsuya Akashi ,  Yoshihiko Togawa ,  Tsuyoshi Matsuda ,  Noboru Moriya

    发明人： Ken Harada ,  Tetsuya Akashi ,  Yoshihiko Togawa ,  Tsuyoshi Matsuda ,  Noboru Moriya

    IPC分类号： G01B9/02 ,  H01J3/14

    CPC分类号： H01J37/295 ,  G01N23/00 ,  G02B19/0014 ,  G02B19/0047 ,  G03H5/00 ,  H01J37/04 ,  H01J2237/1514 ,  H01J2237/228 ,  H01J2237/2614

    摘要： A double-biprism electron interferometer is an optical system which dramatically increases the degree of freedom of a conventional one-stage electron interferometer. The double biprism interferometer, however, is the same as the optical system of the single electron biprism in terms of the one-dimensional shape of an electron hologram formed by filament electrodes, the direction of an interference area, and the azimuth of the interference fringes. In other words, the longitudinal direction of the interference area is determined corresponding to the direction of the filament electrodes, and the azimuth of the interference fringes only coincides with and is in parallel with the longitudinal direction of the interference area. An interferometer according to the present invention has upper-stage and lower-stage electron biprisms, and operates with an azimuth angle Φ between filament electrodes of the upper-stage and lower-stage electron biprisms to arbitrarily control an interference area and an azimuth θ of the interference fringes formed therein.

    摘要翻译： 双二棱镜电子干涉仪是一种显着提高常规一级电子干涉仪自由度的光学系统。 然而，双棱镜干涉仪与由单丝电极组成的电子全息图的一维形状，干涉区域的方向和干涉条纹的方位角的单电子双棱镜的光学系统相同 。 换句话说，干扰区域的长度方向根据灯丝电极的方向确定，并且干涉条纹的方位角仅与干涉区域的纵向方向一致并且平行。 根据本发明的干涉仪具有上级和下级电子双极性，并且在上级和下级电子双极之间的细丝电极之间的方位角Φi操作，以任意地控制干扰区域和方位角θ 其中形成的干涉条纹。

    TRANSMISSION ELECTRON MICROSCOPE AND METHOD FOR OBSERVING SPECIMEN IMAGE WITH THE SAME
    10.
    发明申请
    TRANSMISSION ELECTRON MICROSCOPE AND METHOD FOR OBSERVING SPECIMEN IMAGE WITH THE SAME 有权
    传输电子显微镜和用于观察样本图像的方法

    公开(公告)号：US20110031395A1

    公开(公告)日：2011-02-10

    申请号：US12850961

    申请日：2010-08-05

    申请人： Ken Harada ,  Akira Sugawara

    发明人： Ken Harada ,  Akira Sugawara

    IPC分类号： H01J37/26

    CPC分类号： H01J37/28 ,  H01J37/295 ,  H01J2237/1514 ,  H01J2237/2611 ,  H01J2237/2614

    摘要： A first electron biprism is disposed in a condenser optical system and an observation region of a specimen is irradiated simultaneously with two electron beams of different angles. The two electron beams that have simultaneously transmitted the specimen are spatially separated and focused with a second electron biprism disposed in an imaging optical system and two electron microscopic images of different irradiation angles are obtained. The two picture images are obtained by a detecting unit. Based on the two picture images, a stereoscopic image or two images having different kinds of information of the specimen is/are produced and displayed on a display device.

    摘要翻译： 第一电子双棱镜设置在聚光镜系统中，并且与两个不同角度的电子束同时照射样本的观察区域。 同时透射样品的两个电子束在空间上分离并且与设置在成像光学系统中的第二电子双棱镜聚焦，并且获得两个不同照射角度的电子显微镜图像。 两个图像由检测单元获得。 基于两个图像，产生并显示具有样本的不同种类的信息的立体图像或两个图像并显示在显示装置上。