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    Foreign substance inspection apparatus
    1.
    发明授权
    Foreign substance inspection apparatus 失效
    异物检验仪器

    公开(公告)号：US5717485A

    公开(公告)日：1998-02-10

    申请号：US637230

    申请日：1996-04-24

    申请人： Masami Ito ,  Kenji Takamoto ,  Kanji Nishii ,  Tatsuo Nagasaki ,  Ken Shimono

    发明人： Masami Ito ,  Kenji Takamoto ,  Kanji Nishii ,  Tatsuo Nagasaki ,  Ken Shimono

    IPC分类号： G01B11/30 ,  G01N21/88 ,  G01N21/94 ,  G01N21/956 ,  G06T1/00 ,  H01L21/66 ,  G01N21/00

    CPC分类号： G01N21/94

    摘要： A foreign substance inspection apparatus having a good signal to noise ratio with optical detection accuracy capable of detecting infinitesimal foreign substances, comprising a lighting portion to irradiate with an S polarized laser light beam and having the optical axis parallel to the substrate to be inspected, a detecting portion having an optical axis located in a position set by rotating the optical axis of the lighting portion by 120.degree. to 160.degree. with the point of intersection of the optical axis of the lighting portion and the surface to be inspected as the center of rotation so as to have an angle made with the surface to be inspected of 45.degree. or smaller to detect the area irradiated from the lighting portion by detecting the S polarized component in the scattered component from the foreign substances existing on the surface to be inspected and converting the S polarized component photoelectrically to a signal, and a signal processing portion to detect a foreign substance based on the signal outputted from the detecting portion.

    摘要翻译： 具有能够检测无限小杂质的具有良好的信噪比与检测精度的异物检查装置，包括用S偏振激光束照射并使光轴平行于要检查的基板的照明部， 检测部分，其光轴位于通过将照明部分的光轴与要检查的表面的相交点作为旋转中心的位置使照明部分的光轴旋转120度至160度所设定的位置 以使被检查面的角度为45°以下，通过检测来自存在于被检测面上的异物的散射成分中的S偏振成分来检测照明部照射的面积，并进行转印 光信号的S偏振光分量和检测异物ba的信号处理部 关于从检测部分输出的信号。

    Method and apparatus for particle inspection
    2.
    发明授权
    Method and apparatus for particle inspection 失效
    颗粒检查方法和装置

    公开(公告)号：US5748305A

    公开(公告)日：1998-05-05

    申请号：US670851

    申请日：1996-06-28

    申请人： Ken Shimono ,  Tatsuo Nagasaki ,  Kenji Takamoto ,  Masami Ito ,  Kanji Nishii

    发明人： Ken Shimono ,  Tatsuo Nagasaki ,  Kenji Takamoto ,  Masami Ito ,  Kanji Nishii

    IPC分类号： G01B11/30 ,  G01N21/88 ,  G01N21/94 ,  G01N21/956 ,  H01L21/66 ,  H05K3/00 ,  G01N21/00

    CPC分类号： G01N21/94

    摘要： A method for foreign particles inspection includes illuminating an inspection surface of an inspection object with a beam which is, one of s-polarized and p-polarized relative to the inspection surface of the inspection object. The illumination utilizes an optical axis which is generally parallel to the inspection surface or which intersects the inspection surface at an angle that is greater than or equal to 1.degree. and less than 5.degree.. Reflected and scattered light is detected utilizing an optical axis which makes an acute angle with the inspection surface and which makes a differential angle of 30.degree. or less with the optical axis of the illumination beam. The detection of foreign particles is accomplished by detecting the component of the reflected and scattered light which is the other of s-polarized and p-polarized relative to the inspection surface.

    摘要翻译： 外来粒子检查方法包括用相对于检查对象的检查面的s偏振和p偏振光束照射检查对象的检查面。 照明使用大致平行于检查表面的光轴，或者以大于或等于1度且小于5度的角度与检查表面相交的光轴。 使用与检查面成锐角的光轴来检测反射散射光，并且与照明光束的光轴成30°以下的差角。 通过检测相对于检查表面的s偏振和p偏振中的另一个的反射和散射光的分量来实现异物的检测。

    Method and appratus for measuring thickness of birefringence layer
    5.
    发明授权
    Method and appratus for measuring thickness of birefringence layer 失效
    测量双折射层厚度的方法和应用

    公开(公告)号：US5734472A

    公开(公告)日：1998-03-31

    申请号：US668136

    申请日：1996-06-21

    申请人： Masami Ito ,  Kanji Nishii ,  Kenji Takamoto ,  Atsushi Fukui

    发明人： Masami Ito ,  Kanji Nishii ,  Kenji Takamoto ,  Atsushi Fukui

    IPC分类号： G01B11/06 ,  G01M11/00 ,  G01N21/23 ,  G02F1/13 ,  G01N21/21

    CPC分类号： G01N21/23

    摘要： A liquid crystal layer is interposed between two polarizers arranged in a parallel Nicol or crossed Nicol manner, and a phase plate is set between two polarizers so that the transmission direction of the first polarizer coincides with the optical axis. Then, a rotation angle at which optical intensity transmitted through the second polarizer has an extreme value to be determined, and the thickness of the birefringence layer is calculated according to the rotation angle of the phase plate. In a different method, a half-wave plate is used. First, the liquid crystal layer is set at a position where an optical intensity of the transmission light has an extreme value, and the half-wave plate provided between the two polarizers is set so that a transmission direction of the first polarizer coincides with the optical axis. Then, a rotation angle of the phase plate is determined at which an optical intensity of light transmitted through the second polarizer has an extreme value. Then, the thickness is calculated according to the rotation angle of the half-wave plate. Thus, the thickness is measured in a short time even for a liquid crystal that does not have a twist angle of 90.degree. or in which the rubbing direction is not known.

    摘要翻译： 将液晶层插入以并联尼科耳或尼科尔方式排列的两个偏振器之间，将相位板设置在两个偏振器之间，使得第一偏振器的透射方向与光轴重合。 然后，透过第二偏振片的光强度的旋转角度具有待确定的极值，并且根据相位板的旋转角度来计算双折射层的厚度。 使用不同的方法，使用半波片。 首先，将液晶层设置在透光光的光强度为极值的位置，设置在两个偏振器之间的半波片被设定为使得第一偏振器的透射方向与光 轴。 然后，确定透射通过第二偏振器的光的光强度具有极值的相位板的旋转角。 然后，根据半波片的旋转角度来计算厚度。 因此，即使对于不具有90°扭转角的液晶，或者摩擦方向不知道，也可以在短时间内测量厚度。

    Optical encoder using doubled diffraction angle based on first and second diffraction gratings
    6.
    发明授权
    Optical encoder using doubled diffraction angle based on first and second diffraction gratings 失效
    基于第一和第二衍射光栅的双重衍射角光学编码器

    公开(公告)号：US5696374A

    公开(公告)日：1997-12-09

    申请号：US711598

    申请日：1996-09-10

    申请人： Atsushi Fukui ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito

    发明人： Atsushi Fukui ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito

    IPC分类号： G01B11/00 ,  G01D5/38 ,  G02B5/18 ,  G02B27/42 ,  G03F9/00 ,  G01B9/02

    CPC分类号： G03F9/70 ,  G01D5/38

    摘要： An optical encoder includes: a light source; a first grating plate having a first diffraction grating for diffracting a light beam emitted from the light source; a second grating plate having a second diffraction grating for further diffracting the light beam diffracted by the first diffraction grating; a reflector for reflecting the light beam from the second grating plate so as to allow the light beam to reenter the second grating plate; and a light-receiving portion for receiving the light beam reflected by the reflector and successively diffracted by the second and first grating plates, wherein a diffraction angle of plus and minus first-order diffracted light beams of the first diffraction grating is substantially equal to that of the plus and minus first-order diffracted light beams of the second diffraction grating, and the light-receiving portion generates an electric signal in accordance with the amount of the plus and minus first-order diffracted light beams of the first diffraction grating.

    摘要翻译： 光学编码器包括：光源; 第一光栅板，具有用于衍射从光源发射的光束的第一衍射光栅; 第二光栅板，具有用于进一步衍射由第一衍射光栅衍射的光束的第二衍射光栅; 用于反射来自第二光栅板的光束以使光束重新进入第二光栅板的反射器; 以及光接收部分，用于接收由反射器反射并被第二和第一光栅板连续衍射的光束，其中第一衍射光栅的正，负一级衍射光束的衍射角基本上等于 第二衍射光栅的正，负一级衍射光束，并且光接收部分根据第一衍射光栅的正，负一级衍射光束的量产生电信号。

    Optical method of detecting defect and apparatus used therein
    7.
    发明授权
    Optical method of detecting defect and apparatus used therein 失效
    检测缺陷的光学方法及其中使用的装置

    公开(公告)号：US5894345A

    公开(公告)日：1999-04-13

    申请号：US859423

    申请日：1997-05-20

    申请人： Kenji Takamoto ,  Kanji Nishii ,  Masami Ito ,  Atsushi Fukui ,  Kazumasa Takata

    发明人： Kenji Takamoto ,  Kanji Nishii ,  Masami Ito ,  Atsushi Fukui ,  Kazumasa Takata

    IPC分类号： G01B11/30 ,  G01N21/88 ,  G01N21/89 ,  G01N21/956 ,  G01N21/00

    CPC分类号： G01N21/8903

    摘要： An array light source 1 with semiconductor laser sources disposed one-dimensionally and a projective lens 2 are used to illuminate an inspected object so that light beams projected from the array light source form a dotted line on the object. A line sensor is used to receive through an objective lens 3 light emitted from an imaging area 11 away from an illuminated area 12. An image signal, fed to an image processing unit 8 through a pre-processing unit 7 producing an image from signals from the line sensor 4 and a stage 5 is processed, while the stage 5 bearing the object 6 is being gradually moved, to inspect the object 6 for crack defects 9 and 10 by detecting an optically nonhomogeneous portion of the object. The method allows a crack defect of an object, such as a ceramic substrate or a sintered metal product, to be detected fast with high accuracy.

    摘要翻译： 使用具有一维设置的半导体激光源的阵列光源1和投射透镜2来照射被检查物体，使得从阵列光源投射的光束在物体上形成虚线。 线传感器用于通过物镜3接收从成像区域11发出的远离照明区域12的光。图像信号，通过预处理单元7馈送到图像处理单元8，从预处理单元7产生来自 在承载物体6的台架5正在逐渐移动的同时，对线传感器4和台5进行处理，通过检测物体的光学非均匀部分来检查物体6的裂纹缺陷9和10。 该方法允许以高精度快速检测诸如陶瓷基板或烧结金属产品的物体的裂纹缺陷。

    Phase grating, its fabricating method, optical encoder, motor using the optical encoder, and robot using the motor
    8.
    发明授权
    Phase grating, its fabricating method, optical encoder, motor using the optical encoder, and robot using the motor 失效
    相位光栅，其制造方法，光学编码器，使用光学编码器的电动机和使用电动机的机器人

    公开(公告)号：US5754341A

    公开(公告)日：1998-05-19

    申请号：US661154

    申请日：1996-06-10

    申请人： Kazumasa Takata ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito ,  Atsushi Fukui

    发明人： Kazumasa Takata ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito ,  Atsushi Fukui

    IPC分类号： G01D5/38 ,  G02B5/18 ,  G02B27/46

    CPC分类号： G02B5/1871 ,  G02B27/46 ,  Y10S359/90

    摘要： A phase grating has a concave part of rectangular shape type substantially, of which grating depth is deeper in a specific range than depth d' calculated in a formula .vertline.n-n.sub.0 .vertline..times.(p-d'/e)/p.times.d'=(.lambda./2).times.(1+2m) (where m=0, .+-.1, .+-.2, . . . ) in terms of center wavelength .lambda. of light having partial interference to be diffracted by the phase grating, pitch length p of the phase grating, refractive index n of base material of the phase grating, refractive index n.sub.0 of medium surrounding the phase grating, and shape ratio e as the ratio of grating depth to width of slope of the concave part.

    摘要翻译： 相位光栅具有基本上为矩形形状类型的凹部，光栅深度在与公式| n-n0 | x（p-d'/ e）/ pxd'=（ λ/ 2）x（1 + 2m）（其中m = 0，+/- 1，+/- 2，...）就具有待被相位光栅衍射的部分干涉的光的中心波长λ 相位光栅的长度p，相位光栅的基材的折射率n，围绕相位光栅的介质的折射率n0，以及作为凹部的光栅深度与斜率宽度的比率的形状比e。

    Optical encoder with dual diffraction grating
    9.
    发明授权
    Optical encoder with dual diffraction grating 失效
    具有双衍射光栅的光学编码器

    公开(公告)号：US5696373A

    公开(公告)日：1997-12-09

    申请号：US711513

    申请日：1996-09-10

    申请人： Atsushi Fukui ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito

    发明人： Atsushi Fukui ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito

    IPC分类号： G01B11/00 ,  G01D5/38 ,  G02B5/18 ,  G02B27/42 ,  G03F9/00 ,  H01J3/14

    CPC分类号： G03F9/70 ,  G01D5/38

    摘要： An optical encoder including a light source and a first grating plate having a first diffraction grating for diffracting a light beam emitted from the light source. The optical encoder further includes a second grating plate having a second diffraction grating including a blazed diffraction grating for further diffracting the light beam diffracted by the first diffraction grating so as to allow the light beam to be incident on the first grating plate. The optical encoder also includes a light-receiving portion for receiving the light beam reentering the first grating plate and diffracted by the first grating plate. The second diffraction grating is designed so that the greater part of the diffracted light is concentrated in diffracted light beam of a predetermined order among the light beams from the first diffraction grating, and the diffracted light beam of the predetermined order travels from the second diffraction grating in a direction which is parallel with a direction in which the light beam is incident on the second diffraction grating from the first grating plate. The light-receiving portion generates an electric signal in accordance with an amount of plus and minus mth-order diffracted light beams of the further diffracted light beam.

    摘要翻译： 一种光学编码器，包括光源和具有用于衍射从光源发射的光束的第一衍射光栅的第一光栅板。 光学编码器还包括具有第二衍射光栅的第二光栅板，第二衍射光栅包括闪耀的衍射光栅，用于进一步衍射由第一衍射光栅衍射的光束，以允许光束入射在第一光栅板上。 光学编码器还包括用于接收重新进入第一光栅板并被第一光栅板衍射的光束的光接收部分。 第二衍射光栅被设计成使得衍射光的大部分集中在来自第一衍射光栅的光束之间的预定次数的衍射光束中，并且预定次数的衍射光束从第二衍射光栅行进 在与第一光栅板上的光束入射到第二衍射光栅上的方向平行的方向上。 光接收部分根据进一步的衍射光束的正和负的第m级衍射光束的量产生电信号。

    Optical encorder for detection having a moving reference point
    10.
    发明授权
    Optical encorder for detection having a moving reference point 失效
    具有移动参考点的用于检测的光学记录仪

    公开(公告)号：US5981941A

    公开(公告)日：1999-11-09

    申请号：US859321

    申请日：1997-05-20

    申请人： Kazumasa Takata ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito ,  Atsushi Fukui ,  Tomohisa Kishi

    发明人： Kazumasa Takata ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito ,  Atsushi Fukui ,  Tomohisa Kishi

    IPC分类号： G01D5/38 ,  G01D5/34

    CPC分类号： G01D5/38

    摘要： The present invention provides an optical encoder capable of using the recesses and convexes of a movable plate and a fixed plate to accurately generate a Z phase signal in synchronism with an A/B phase signal. Phase type diffraction gratings on the moving and fixed plates including a plurality of tracks with different grating pitches cause parallel coherent beams to interfere with one another, and a light receiving part detects the intensity of light to obtain a plurality of synchronous signals with different periods. On the other hand, the light receiving part detects light spots formed by condensing elements on the movable plate to generates a single pulse per rotation as a reference position. One of the plurality of synchronous signals that has the shortest period is selected as an A/B phase signal that depends on the movement of the movable plate. The conjunction of the reference position signal and the plurality of synchronous signals is determined as a Z phase signal indicating the origin of the movable plate, thereby obtaining a Z phase signal in synchronism with one pulse of the A/B phase signal.

    摘要翻译： 本发明提供一种能够使用可移动板和固定板的凹凸的光学编码器，以与A / B相位信号同步地精确地生成Z相信号。 包括具有不同光栅间距的多个轨道的移动和固定板上的相位衍射光栅使平行的相干光束彼此干涉，并且光接收部分检测光的强度以获得具有不同周期的多个同步信号。 另一方面，光接收部检测由可动板上的聚光元件形成的光斑，以产生每旋转一脉冲作为基准位置。 选择具有最短周期的多个同步信号中的一个作为取决于可动板的移动的A / B相位信号。 基准位置信号和多个同步信号的结合被确定为指示可移动板的原点的Z相信号，从而获得与A / B相位信号的一个脉冲同步的Z相信号。