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    Optical method of detecting defect and apparatus used therein
    1.
    发明授权
    Optical method of detecting defect and apparatus used therein 失效
    检测缺陷的光学方法及其中使用的装置

    公开(公告)号：US5894345A

    公开(公告)日：1999-04-13

    申请号：US859423

    申请日：1997-05-20

    申请人： Kenji Takamoto ,  Kanji Nishii ,  Masami Ito ,  Atsushi Fukui ,  Kazumasa Takata

    发明人： Kenji Takamoto ,  Kanji Nishii ,  Masami Ito ,  Atsushi Fukui ,  Kazumasa Takata

    IPC分类号： G01B11/30 ,  G01N21/88 ,  G01N21/89 ,  G01N21/956 ,  G01N21/00

    CPC分类号： G01N21/8903

    摘要： An array light source 1 with semiconductor laser sources disposed one-dimensionally and a projective lens 2 are used to illuminate an inspected object so that light beams projected from the array light source form a dotted line on the object. A line sensor is used to receive through an objective lens 3 light emitted from an imaging area 11 away from an illuminated area 12. An image signal, fed to an image processing unit 8 through a pre-processing unit 7 producing an image from signals from the line sensor 4 and a stage 5 is processed, while the stage 5 bearing the object 6 is being gradually moved, to inspect the object 6 for crack defects 9 and 10 by detecting an optically nonhomogeneous portion of the object. The method allows a crack defect of an object, such as a ceramic substrate or a sintered metal product, to be detected fast with high accuracy.

    摘要翻译： 使用具有一维设置的半导体激光源的阵列光源1和投射透镜2来照射被检查物体，使得从阵列光源投射的光束在物体上形成虚线。 线传感器用于通过物镜3接收从成像区域11发出的远离照明区域12的光。图像信号，通过预处理单元7馈送到图像处理单元8，从预处理单元7产生来自 在承载物体6的台架5正在逐渐移动的同时，对线传感器4和台5进行处理，通过检测物体的光学非均匀部分来检查物体6的裂纹缺陷9和10。 该方法允许以高精度快速检测诸如陶瓷基板或烧结金属产品的物体的裂纹缺陷。

    Phase grating, its fabricating method, optical encoder, motor using the optical encoder, and robot using the motor
    2.
    发明授权
    Phase grating, its fabricating method, optical encoder, motor using the optical encoder, and robot using the motor 失效
    相位光栅，其制造方法，光学编码器，使用光学编码器的电动机和使用电动机的机器人

    公开(公告)号：US5754341A

    公开(公告)日：1998-05-19

    申请号：US661154

    申请日：1996-06-10

    申请人： Kazumasa Takata ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito ,  Atsushi Fukui

    发明人： Kazumasa Takata ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito ,  Atsushi Fukui

    IPC分类号： G01D5/38 ,  G02B5/18 ,  G02B27/46

    CPC分类号： G02B5/1871 ,  G02B27/46 ,  Y10S359/90

    摘要： A phase grating has a concave part of rectangular shape type substantially, of which grating depth is deeper in a specific range than depth d' calculated in a formula .vertline.n-n.sub.0 .vertline..times.(p-d'/e)/p.times.d'=(.lambda./2).times.(1+2m) (where m=0, .+-.1, .+-.2, . . . ) in terms of center wavelength .lambda. of light having partial interference to be diffracted by the phase grating, pitch length p of the phase grating, refractive index n of base material of the phase grating, refractive index n.sub.0 of medium surrounding the phase grating, and shape ratio e as the ratio of grating depth to width of slope of the concave part.

    摘要翻译： 相位光栅具有基本上为矩形形状类型的凹部，光栅深度在与公式| n-n0 | x（p-d'/ e）/ pxd'=（ λ/ 2）x（1 + 2m）（其中m = 0，+/- 1，+/- 2，...）就具有待被相位光栅衍射的部分干涉的光的中心波长λ 相位光栅的长度p，相位光栅的基材的折射率n，围绕相位光栅的介质的折射率n0，以及作为凹部的光栅深度与斜率宽度的比率的形状比e。

    Position detecting element and range sensor
    6.
    发明授权
    Position detecting element and range sensor 失效
    位置检测元件和量程传感器

    公开(公告)号：US5999249A

    公开(公告)日：1999-12-07

    申请号：US950282

    申请日：1997-10-14

    申请人： Masami Ito ,  Kanji Nishii ,  Kenji Takamoto ,  Atsushi Fukui ,  Kazumasa Takata

    发明人： Masami Ito ,  Kanji Nishii ,  Kenji Takamoto ,  Atsushi Fukui ,  Kazumasa Takata

    IPC分类号： G01B11/00 ,  G01B11/02 ,  G01C3/06 ,  G01C3/08 ,  G01C3/00 ,  G01N21/86 ,  G02B7/04

    CPC分类号： G01C3/085 ,  G01B11/026

    摘要： A position detecting element that enables a position to be detected at high speed and high precision, and a range sensor using the same. The position detecting element is provided with a PIN photodiode array 1 having n segments and a parallel arithmetic processing portion 2 that calculates the segment having maximum intensity by comparing n outputs from the segments of the PIN photodiode array 1. The range sensor includes a light source by which the object to be measured is irradiated by optical beam, a lens that gathers rays of the reflected light from the surface of the object to be measured and the position detecting element mentioned above that detects the position of the light gathered by the lens.

    摘要翻译： 能够高速高精度地检测位置的位置检测元件和使用该位置检测元件的距离传感器。 位置检测元件设置有具有n个段的PIN光电二极管阵列1和并行算术处理部分2，其通过比较PIN光电二极管阵列1的各个部分的n个输出来计算具有最大强度的段。范围传感器包括光源 被测量对象被光束照射，从被检测体的表面收集反射光的光线的透镜和上述检测由透镜收集的光的位置的位置检测元件。

    Optical encorder for detection having a moving reference point
    7.
    发明授权
    Optical encorder for detection having a moving reference point 失效
    具有移动参考点的用于检测的光学记录仪

    公开(公告)号：US5981941A

    公开(公告)日：1999-11-09

    申请号：US859321

    申请日：1997-05-20

    申请人： Kazumasa Takata ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito ,  Atsushi Fukui ,  Tomohisa Kishi

    发明人： Kazumasa Takata ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito ,  Atsushi Fukui ,  Tomohisa Kishi

    IPC分类号： G01D5/38 ,  G01D5/34

    CPC分类号： G01D5/38

    摘要： The present invention provides an optical encoder capable of using the recesses and convexes of a movable plate and a fixed plate to accurately generate a Z phase signal in synchronism with an A/B phase signal. Phase type diffraction gratings on the moving and fixed plates including a plurality of tracks with different grating pitches cause parallel coherent beams to interfere with one another, and a light receiving part detects the intensity of light to obtain a plurality of synchronous signals with different periods. On the other hand, the light receiving part detects light spots formed by condensing elements on the movable plate to generates a single pulse per rotation as a reference position. One of the plurality of synchronous signals that has the shortest period is selected as an A/B phase signal that depends on the movement of the movable plate. The conjunction of the reference position signal and the plurality of synchronous signals is determined as a Z phase signal indicating the origin of the movable plate, thereby obtaining a Z phase signal in synchronism with one pulse of the A/B phase signal.

    摘要翻译： 本发明提供一种能够使用可移动板和固定板的凹凸的光学编码器，以与A / B相位信号同步地精确地生成Z相信号。 包括具有不同光栅间距的多个轨道的移动和固定板上的相位衍射光栅使平行的相干光束彼此干涉，并且光接收部分检测光的强度以获得具有不同周期的多个同步信号。 另一方面，光接收部检测由可动板上的聚光元件形成的光斑，以产生每旋转一脉冲作为基准位置。 选择具有最短周期的多个同步信号中的一个作为取决于可动板的移动的A / B相位信号。 基准位置信号和多个同步信号的结合被确定为指示可移动板的原点的Z相信号，从而获得与A / B相位信号的一个脉冲同步的Z相信号。

    Optical encoder including a plurality of phase adjusting gratings
    8.
    发明授权
    Optical encoder including a plurality of phase adjusting gratings 失效
    光学编码器包括多个相位调整光栅

    公开(公告)号：US5694218A

    公开(公告)日：1997-12-02

    申请号：US643433

    申请日：1996-05-08

    申请人： Atsushi Fukui ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito ,  Kazumasa Takata

    发明人： Atsushi Fukui ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito ,  Kazumasa Takata

    IPC分类号： G01D5/38 ,  G02B5/18 ,  G02B5/30 ,  G01B9/02

    CPC分类号： G01D5/38

    摘要： An optical encoder has a light source and a diffracted light interference device including at least first and second diffraction gratings confronting each other, producing diffracted light beams in specific orders by passing light emitted from the light source through the first and second diffraction gratings, and making the diffracted light beams in the specific orders, which have passed through the diffraction gratings, interfere with each other to produce on-axis interference light beams in which the sum of the orders of the diffraction at the diffraction gratings is zero and off-axis interference light beams in which the sum of the orders of the diffraction is not zero. A phase device is adjusting the phases of the on-axis interference light beams and the off-axis interference light beams emitted from plural portions of the diffracted light interference device. A plurality of light sensors receive and detect the on-axis interference light beams and the off-axis interference light beams device. In this structure, since the on-axis interference light beams in which the sum of the orders of the diffraction at the diffraction gratings is zero and the off-axis interference light beams in which the sum of the orders of the diffraction is not zero are produced and the phases of the on-axis interference light beams and the phases of the off-axis interference light beams are made equal to each other, unwanted negation of signals is avoided, whereby the light utilization efficiency is increased.

    摘要翻译： 光学编码器具有光源和衍射光干涉装置，其至少包括彼此面对的第一和第二衍射光栅，通过使从光源发射的光通过第一和第二衍射光栅，以特定的顺序产生衍射光束，并且 已经通过衍射光栅的特定次数的衍射光束彼此干涉以产生在衍射光栅处的衍射级之和为零和离轴干扰之和的轴上干涉光束 其中衍射级数之和不为零的光束。 相位装置调节从衍射光干涉装置的多个部分发射的轴上干涉光束和离轴干涉光束的相位。 多个光传感器接收并检测轴上干涉光束和离轴干涉光束装置。 在这种结构中，由于衍射光栅的衍射级之和为零的衍射的次数和衍射级之和不为零的离轴干涉光束的轴上干涉光束为 使轴上干涉光束的相位和离轴干涉光束的相位彼此相等，避免信号的不希望的反转，从而提高光的利用效率。

    Optical encoder with dual diffraction grating
    9.
    发明授权
    Optical encoder with dual diffraction grating 失效
    具有双衍射光栅的光学编码器

    公开(公告)号：US5696373A

    公开(公告)日：1997-12-09

    申请号：US711513

    申请日：1996-09-10

    申请人： Atsushi Fukui ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito

    发明人： Atsushi Fukui ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito

    IPC分类号： G01B11/00 ,  G01D5/38 ,  G02B5/18 ,  G02B27/42 ,  G03F9/00 ,  H01J3/14

    CPC分类号： G03F9/70 ,  G01D5/38

    摘要： An optical encoder including a light source and a first grating plate having a first diffraction grating for diffracting a light beam emitted from the light source. The optical encoder further includes a second grating plate having a second diffraction grating including a blazed diffraction grating for further diffracting the light beam diffracted by the first diffraction grating so as to allow the light beam to be incident on the first grating plate. The optical encoder also includes a light-receiving portion for receiving the light beam reentering the first grating plate and diffracted by the first grating plate. The second diffraction grating is designed so that the greater part of the diffracted light is concentrated in diffracted light beam of a predetermined order among the light beams from the first diffraction grating, and the diffracted light beam of the predetermined order travels from the second diffraction grating in a direction which is parallel with a direction in which the light beam is incident on the second diffraction grating from the first grating plate. The light-receiving portion generates an electric signal in accordance with an amount of plus and minus mth-order diffracted light beams of the further diffracted light beam.

    摘要翻译： 一种光学编码器，包括光源和具有用于衍射从光源发射的光束的第一衍射光栅的第一光栅板。 光学编码器还包括具有第二衍射光栅的第二光栅板，第二衍射光栅包括闪耀的衍射光栅，用于进一步衍射由第一衍射光栅衍射的光束，以允许光束入射在第一光栅板上。 光学编码器还包括用于接收重新进入第一光栅板并被第一光栅板衍射的光束的光接收部分。 第二衍射光栅被设计成使得衍射光的大部分集中在来自第一衍射光栅的光束之间的预定次数的衍射光束中，并且预定次数的衍射光束从第二衍射光栅行进 在与第一光栅板上的光束入射到第二衍射光栅上的方向平行的方向上。 光接收部分根据进一步的衍射光束的正和负的第m级衍射光束的量产生电信号。

    Method and appratus for measuring thickness of birefringence layer
    10.
    发明授权
    Method and appratus for measuring thickness of birefringence layer 失效
    测量双折射层厚度的方法和应用

    公开(公告)号：US5734472A

    公开(公告)日：1998-03-31

    申请号：US668136

    申请日：1996-06-21

    申请人： Masami Ito ,  Kanji Nishii ,  Kenji Takamoto ,  Atsushi Fukui

    发明人： Masami Ito ,  Kanji Nishii ,  Kenji Takamoto ,  Atsushi Fukui

    IPC分类号： G01B11/06 ,  G01M11/00 ,  G01N21/23 ,  G02F1/13 ,  G01N21/21

    CPC分类号： G01N21/23

    摘要： A liquid crystal layer is interposed between two polarizers arranged in a parallel Nicol or crossed Nicol manner, and a phase plate is set between two polarizers so that the transmission direction of the first polarizer coincides with the optical axis. Then, a rotation angle at which optical intensity transmitted through the second polarizer has an extreme value to be determined, and the thickness of the birefringence layer is calculated according to the rotation angle of the phase plate. In a different method, a half-wave plate is used. First, the liquid crystal layer is set at a position where an optical intensity of the transmission light has an extreme value, and the half-wave plate provided between the two polarizers is set so that a transmission direction of the first polarizer coincides with the optical axis. Then, a rotation angle of the phase plate is determined at which an optical intensity of light transmitted through the second polarizer has an extreme value. Then, the thickness is calculated according to the rotation angle of the half-wave plate. Thus, the thickness is measured in a short time even for a liquid crystal that does not have a twist angle of 90.degree. or in which the rubbing direction is not known.

    摘要翻译： 将液晶层插入以并联尼科耳或尼科尔方式排列的两个偏振器之间，将相位板设置在两个偏振器之间，使得第一偏振器的透射方向与光轴重合。 然后，透过第二偏振片的光强度的旋转角度具有待确定的极值，并且根据相位板的旋转角度来计算双折射层的厚度。 使用不同的方法，使用半波片。 首先，将液晶层设置在透光光的光强度为极值的位置，设置在两个偏振器之间的半波片被设定为使得第一偏振器的透射方向与光 轴。 然后，确定透射通过第二偏振器的光的光强度具有极值的相位板的旋转角。 然后，根据半波片的旋转角度来计算厚度。 因此，即使对于不具有90°扭转角的液晶，或者摩擦方向不知道，也可以在短时间内测量厚度。