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公开(公告)号:US20210091221A1
公开(公告)日:2021-03-25
申请号:US16816871
申请日:2020-03-12
Applicant: Kioxia Corporation
Inventor: Tadayoshi UECHI , Takashi IZUMIDA
IPC: H01L29/78 , H01L21/8234 , H01L21/8238
Abstract: According to one embodiment, a semiconductor device includes an element region, an element isolation region adjacent to the element region, a gate insulating layer provided on an upper surface of the element region, and a gate electrode including a semiconductor layer, the semiconductor layer containing boron (B) and including a portion provided on the gate insulating layer, the element isolation region including an upper portion including an upper surface of the element isolation region and a lower portion including a lower surface of the element isolation region, and the upper portion of the element isolation region applying compressive stress to a portion of the element region, which is adjacent to the upper portion of the element isolation region.
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公开(公告)号:US20220216228A1
公开(公告)日:2022-07-07
申请号:US17656143
申请日:2022-03-23
Applicant: Kioxia Corporation
Inventor: Tetsuya YAMASHITA , Takuyo NAKAYAMA , Takashi ICHIKAWA , Tadayoshi UECHI , Takashi IZUMIDA
IPC: H01L27/11565 , H01L27/11575 , H01L27/11578 , H01L27/11582
Abstract: According to one embodiment, a semiconductor memory device includes a first stacked body in which a plurality of first conductive layers are stacked at intervals in a first direction above a semiconductor substrate; a second stacked body in which a plurality of second conductive layers are stacked at intervals in the first direction above the semiconductor substrate; and a first slit extending in a second direction perpendicular to the first direction, the first slit isolating the first stacked body and the second stacked body in a third direction perpendicular to the first and second directions.
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公开(公告)号:US20210091044A1
公开(公告)日:2021-03-25
申请号:US16801312
申请日:2020-02-26
Applicant: Kioxia Corporation
Inventor: Tetsuya YAMASHITA , Takuyo NAKAYAMA , Takashi ICHIKAWA , Tadayoshi UECHI , Takashi IZUMIDA
IPC: H01L25/065 , H01L27/11578 , H01L27/11575
Abstract: According to one embodiment, a semiconductor memory device includes a first stacked body in which a plurality of first conductive layers are stacked at intervals in a first direction above a semiconductor substrate; a second stacked body in which a plurality of second conductive layers are stacked at intervals in the first direction above the semiconductor substrate; and a first slit extending in a second direction perpendicular to the first direction, the first slit isolating the first stacked body and the second stacked body in a third direction perpendicular to the first and second directions.
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公开(公告)号:US20230301109A1
公开(公告)日:2023-09-21
申请号:US17897065
申请日:2022-08-26
Applicant: KIOXIA CORPORATION
Inventor: Tadayoshi UECHI , Takeshi SHIMANE
IPC: H01L27/11573 , H01L25/065 , H01L25/18 , H01L23/00 , H01L27/11526
CPC classification number: H01L27/11573 , H01L25/0657 , H01L25/18 , H01L24/08 , H01L27/11526 , H01L2224/08145 , H01L2924/1431 , H01L2924/14511
Abstract: A semiconductor device has a third region between first and second regions on a substrate surface. A gate insulating film which is above the third region. A gate electrode is above the gate insulating film and includes a metal-containing layer. A first conductor is above the gate electrode. A first voltage can be applied to the first conductor. A second conductor is above the first region. A second voltage can be applied to the second conductor. A third conductor is above the first region. A third voltage different from the first and second can be applied to the third conductor. A metal oxide film is provided between the first region and the third conductor. An upper surface of the metal oxide film includes a portion at a height from the substrate that is lower than a height of an upper surface of the metal-containing layer.
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公开(公告)号:US20220084984A1
公开(公告)日:2022-03-17
申请号:US17188308
申请日:2021-03-01
Applicant: Kioxia Corporation
Inventor: Michihito KONO , Takashi IZUMIDA , Tadayoshi UECHI , Takeshi SHIMANE
IPC: H01L25/065 , H01L25/18 , H01L23/00 , H01L27/11556 , H01L27/11529 , H01L27/11582 , H01L27/11573
Abstract: A semiconductor memory device, includes: a first region including a memory cell array; and a second region including a peripheral circuit. The second region includes a semiconductor substrate having a first surface and a second surface. The semiconductor substrate includes: a semiconductor region between the first and second surfaces; an n-type semiconductor region provided on the first surface and higher in donor concentration than the semiconductor region; a damaged region provided on the second surface; and a p-type semiconductor region provided between the damaged region and the n-type semiconductor region, closer to the second surface than the n-type semiconductor region in a direction from the first surface toward the second surfaces of the semiconductor substrate, and higher in acceptor concentration than the semiconductor region.
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公开(公告)号:US20220237348A1
公开(公告)日:2022-07-28
申请号:US17472108
申请日:2021-09-10
Applicant: Kioxia Corporation , KABUSHIKI KAISHA TOSHIBA
Inventor: Satoru YOKOTA , Daiki KIRIBUCHI , Takeichiro NISHIKAWA , Tadayoshi UECHI , Soh KOIKE
Abstract: An information processing apparatus has an output data acquisition unit configured to acquire an output value obtained by performing an experiment or simulation based on an input parameter of a predetermined number of dimensions, an evaluation value calculation unit configured to calculate and output an evaluation value of the output value, an outlier processing unit configured to output a converted evaluation value including a specified value obtained by converting the evaluation value that does not satisfy a predetermined criterion, a next input parameter determination unit configured to determine a next input parameter based on the input parameter and the converted evaluation value corresponding to the input parameter, and an iteration determination unit configured to repeat processing of the output data acquisition unit, the evaluation value calculation unit, the outlier processing unit, and the next input parameter determination unit until a predetermined condition is satisfied.
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公开(公告)号:US20220067235A1
公开(公告)日:2022-03-03
申请号:US17193546
申请日:2021-03-05
Applicant: KABUSHIKI KAISHA TOSHIBA , Kioxia Corporation
Inventor: Daiki KIRIBUCHI , Satoru YOKOTA , Soh KOIKE , Tadayoshi UECHI
Abstract: An information processing apparatus according to an embodiment of the present invention includes an estimator and a recommender. The estimator is configured to, based on a data set including a set value set for a parameter and an evaluation value or an evaluation value variation where the set value is set for the parameter, estimate a relationship between the set value and the evaluation value variation. The evaluation value variation indicates a variation of respective evaluation values where a plurality of values included within a neighborhood range that is based on the set value are set for the parameter. The recommender is configured to, based on the estimated relationship, determine a recommended set value.
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