Rotary machine abnormality detection device and method thereof and rotary machine

    公开(公告)号:US10385853B2

    公开(公告)日:2019-08-20

    申请号:US15345980

    申请日:2016-11-08

    申请人: Kobe Steel, Ltd.

    IPC分类号: F04C28/28 G01H1/00 F04C18/16

    摘要: A rotary machine abnormality detection device capable of determining abnormality with higher accuracy, a method thereof, and a rotary machine provided therewith. A rotary machine abnormality detection device detects abnormality in a rotary machine M having at least first and second rotating bodies using a specific feature amount based on a frequency spectrum of measurement data of vibration. The device obtains, from the frequency spectrum, a fundamental wave component F1 of a fundamental wave lobe mesh frequency f1 and n-th harmonic wave components Fn of n-th harmonic wave lobe mesh frequencies fn up to XAB, and obtains the specific feature amount based on these components. The f1 is obtained by dividing a rotational frequency by a teeth number of the first rotating body and the XAB represents the least common multiple of the teeth numbers of the two rotating bodies.

    Device and system for detecting malfunction of rotating machine

    公开(公告)号:US10352760B2

    公开(公告)日:2019-07-16

    申请号:US15380234

    申请日:2016-12-15

    申请人: Kobe Steel, Ltd.

    摘要: Provided is a device for detecting a malfunction of a rotating machine, the device being able to early detect the malfunction and to have a reduced size. The device includes a detecting unit for detecting vibration of the machine, sampling a signal indicative of the vibration with a predetermined sampling frequency, and outputting, at a time at intervals of a predetermined period, a plurality of the sampled data detected within the predetermined period, a storage for storing the plurality of the sampled data, a frequency analyzer for analyzing the frequency of the plurality of the sampled data, a determination unit for performing a primary determination based on the result of the analysis, a display unit for displaying the result of the analysis in chronological order and in real time, and a communication unit for transmitting the plurality of the sampled data to an information-processing device for performing a secondary determination.

    Deterioration detector and thermocouple inspection device

    公开(公告)号:US10209144B2

    公开(公告)日:2019-02-19

    申请号:US15108869

    申请日:2014-11-21

    申请人: Kobe Steel, Ltd.

    摘要: A protection tube thermocouple (5) includes a thermocouple (52), and a protection tube (51) which accommodates the thermocouple (52). The protection tube (51) includes a conical portion (511) formed on a front end (54) side of the protection tube (51); and a hollow portion (53) which extends in the length direction of the protection tube (51) for connecting between a front end (54) and a rear end (55) of the protection tube (51) in the inside of the protection tube (51), and into which the thermocouple (52) is received. The hollow portion (53) in the conical portion (511) has a tapered portion (532) configured such that the sectional area of the hollow portion (53) decreases toward the front end (54).

    Data processing method and data processing apparatus

    公开(公告)号:US10408711B2

    公开(公告)日:2019-09-10

    申请号:US15100781

    申请日:2014-10-10

    申请人: Kobe Steel, Ltd.

    摘要: A sample point extraction unit (323) extracts natural defect candidate portions by using sample points comprising height data for one line obtained by scanning once around the measurement surface of a tire surface. Natural defect candidate portions include natural defect portions and intentional irregularity portions, such as characters and patterns. A differentiation unit (325) stores, in advance, conditions characteristic of the shape of intentional irregularity portions formed on the measurement surface, and from among the natural defect candidate portions, excludes natural defect candidate portions that satisfy those conditions from the natural defect candidate portions. Due to this configuration, intentional irregularity portions are differentiated from natural defect portions.

    Rotational misalignment measuring device of bonded substrate, rotational misalignment measuring method of bonded substrate, and method of manufacturing bonded substrate
    8.
    发明授权
    Rotational misalignment measuring device of bonded substrate, rotational misalignment measuring method of bonded substrate, and method of manufacturing bonded substrate 有权
    接合基板的旋转对准测量装置,接合基板的旋转对准测量方法以及接合基板的制造方法

    公开(公告)号:US09354047B2

    公开(公告)日:2016-05-31

    申请号:US13691491

    申请日:2012-11-30

    IPC分类号: B32B41/00 G01B11/27

    CPC分类号: G01B11/272

    摘要: A rotational misalignment between semiconductor wafers constituting a bonded wafer is calculated. A light source is arranged at a position which is on a front side of an opening of a notch and which is separated from an outer edge portion of a bonded wafer by a predetermined interval, and outputs light to irradiate the outer edge portion of the bonded wafer including the notch. A camera receives and photoelectrically converts reflected light that is specularly-reflected by the outer edge portion of the bonded wafer including the notch among the light outputted by the light source in order to output a brightness distribution of the reflected light as an image. A computer analyzes positions of notches from the image outputted by the camera to obtain a notch position misalignment, and further calculates a rotational misalignment between semiconductor wafers using a center position misalignment between the semiconductor wafers.

    摘要翻译: 计算构成接合晶片的半导体晶片之间的旋转未对准。 光源布置在位于凹口的开口的前侧上并且与键合晶片的外边缘部分隔开预定间隔的位置处,并输出光以照射粘合的晶片的外边缘部分 晶圆包括凹口。 照相机接收并光电转换由光源输出的光中包括凹口的键合晶片的外边缘部分被镜面反射的反射光,以输出作为图像的反射光的亮度分布。 计算机分析由相机输出的图像的凹口的位置以获得切口位置未对准,并且还使用半导体晶片之间的中心位置未对准来计算半导体晶片之间的旋转未对准。

    MEASURING METHOD AND MEASURING DEVICE
    9.
    发明申请
    MEASURING METHOD AND MEASURING DEVICE 有权
    测量方法和测量装置

    公开(公告)号:US20150254829A1

    公开(公告)日:2015-09-10

    申请号:US14433794

    申请日:2013-10-10

    摘要: A measuring unit (301) acquires measurement data for a plurality of lines by repeatedly executing, on a reference tire, a measurement process to acquire measurement data for one line. A first acquisition unit (311) generates height data for one line for each of the plurality of sets of measurement data measured by the measuring unit (301), arranges the generated plurality of values of one-dimensional height data into a matrix form, generates two-dimensional height data for the measured face, and generates reference shape data. A second acquisition unit (314) acquires object one-dimensional height data from one-line shape data measured by the measuring unit (301) for the object tire. The measuring method and measuring device are characterized in that a removal unit (315) compares the object one-dimensional height data and the one-dimensional height data of the reference shape data at the same position in the sub-scan direction for the object one-dimensional height data, and removes, from the object one-dimensional height data, the height component of the projection.

    摘要翻译: 测量单元(301)通过在参考轮胎上重复执行用于获取一行的测量数据的测量处理来获取多条线的测量数据。 第一获取单元(311)针对由测量单元(301)测量的多组测量数据中的每一组生成一行的高度数据,将所生成的一维高度数据的多个值排列成矩阵形式,生成 测量面的二维高度数据,并生成参考形状数据。 第二获取单元(314)从由对象轮胎的测量单元(301)测量的一行形状数据中获取对象一维高度数据。 测量方法和测量装置的特征在于,去除单元(315)将对象一维高度数据和参考形状数据的一维高度数据在对象一的副扫描方向上的相同位置进行比较 维数高度数据,并从对象一维高度数据中移除投影的高度分量。