公开(公告)号：US06552991B1

公开(公告)日：2003-04-22

申请号：US09692258

申请日：2000-10-19

申请人： Koji Ishioka ,  Hiroto Ido ,  Naoto Kojima ,  Kazuhito Hori ,  Masaki Hara

发明人： Koji Ishioka ,  Hiroto Ido ,  Naoto Kojima ,  Kazuhito Hori ,  Masaki Hara

IPC分类号： G11B700

CPC分类号： G11B7/1362 ,  G02B26/085 ,  G11B7/08576 ,  G11B7/122 ,  Y10S359/904

摘要： In a micro mirror apparatus pivoting on a hinge part as its axis, a movable part connected to a stationary part through the hinge part enhances exclusively the flexural rigidity of the hinge part without causing any significant change in the torsional rigidity of the hinge part and thus widens servo band. To this end, on at least a part of the hinge part 14, a protrusion 14b protruding in the direction of its thickness is formed. This greatly increases the flexural rigidity of the hinge part 14 and widens the servo band.

摘要翻译： 在铰链部件作为其轴线枢转的微镜装置中，通过铰链部分连接到固定部件的可移动部件仅提供铰链部件的弯曲刚度，而不会引起铰链部件的扭转刚度的任何显着变化，因此 拓宽伺服带。 为此，在铰链部14的至少一部分上，形成有沿其厚度方向突出的突出部14b。 这大大增加了铰链部分14的弯曲刚度并且加宽了伺服带。

公开(公告)号：US07215630B2

公开(公告)日：2007-05-08

申请号：US11114868

申请日：2005-04-26

申请人： Masaki Hara ,  Kazuhito Hori ,  Hiroto Ido ,  Naoto Kojima ,  Kazuhiro Hane

发明人： Masaki Hara ,  Kazuhito Hori ,  Hiroto Ido ,  Naoto Kojima ,  Kazuhiro Hane

IPC分类号： G11B7/135 ,  G02B7/182

CPC分类号： G11B7/08564 ,  B81B2201/042 ,  B81B2201/11 ,  B81B2203/0109 ,  B81C1/00595 ,  G02B7/1821 ,  G02B26/0841 ,  G11B7/08576 ,  Y10T428/24942

摘要： The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiNx, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.

摘要翻译： 优选地，铰链（13）形成为具有比以往更高的抗反射镜主体（12）的枢转的阻力，以有效地防止铰链（13）被损坏。 通过根据需要采用各种生产步骤中的合适的一种，铰链（13）可以更精细地形成并且具有更高的精度，从而可以在更短的时间内更容易地制造微反射镜单元。 为此，铰链（13）由形成框架（11）和反射镜主体（12）的反射镜基板材料由不同的材料（例如SiN x x）形成。

公开(公告)号：US06914871B2

公开(公告)日：2005-07-05

申请号：US09750007

申请日：2000-12-27

申请人： Masaki Hara ,  Kazuhito Hori ,  Hiroto Ido ,  Naoto Kojima ,  Kazuhiro Hane

发明人： Masaki Hara ,  Kazuhito Hori ,  Hiroto Ido ,  Naoto Kojima ,  Kazuhiro Hane

IPC分类号： B81B3/00 ,  B81C1/00 ,  G02B7/182 ,  G02B26/08 ,  G11B7/085 ,  G11B7/09 ,  G11B7/135

CPC分类号： G11B7/08564 ,  B81B2201/042 ,  B81B2201/11 ,  B81B2203/0109 ,  B81C1/00595 ,  G02B7/1821 ,  G02B26/0841 ,  G11B7/08576 ,  Y10T428/24942

摘要： The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiNx, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.

摘要翻译： 优选地，铰链（13）形成为具有比以往更高的抗反射镜主体（12）的枢转的阻力，以有效地防止铰链（13）被损坏。 通过根据需要采用各种生产步骤中的合适的一种，铰链（13）可以更精细地形成并且具有更高的精度，从而可以在更短的时间内更容易地制造微反射镜单元。 为此，铰链（13）由形成框架（11）和反射镜主体（12）的反射镜基板材料由不同的材料（例如SiN x x）形成。

公开(公告)号：US20050195466A1

公开(公告)日：2005-09-08

申请号：US11114868

申请日：2005-04-26

申请人： Masaki Hara ,  Kazuhito Hori ,  Hiroto Ido ,  Naoto Kojima ,  Kazuhiro Hane

发明人： Masaki Hara ,  Kazuhito Hori ,  Hiroto Ido ,  Naoto Kojima ,  Kazuhiro Hane

IPC分类号： B81B3/00 ,  B81C1/00 ,  G02B7/182 ,  G02B26/08 ,  G11B7/085 ,  G11B7/09 ,  G11B7/135 ,  G02B26/00

CPC分类号： G11B7/08564 ,  B81B2201/042 ,  B81B2201/11 ,  B81B2203/0109 ,  B81C1/00595 ,  G02B7/1821 ,  G02B26/0841 ,  G11B7/08576 ,  Y10T428/24942

摘要： The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiNX, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.

摘要翻译： 优选地，铰链（13）形成为具有比以往更高的抗反射镜主体（12）的枢转的阻力，以有效地防止铰链（13）被损坏。 通过根据需要采用各种生产步骤中的合适的一种，铰链（13）可以更精细地形成并且具有更高的精度，从而可以在更短的时间内更容易地制造微反射镜单元。 为此，铰链（13）由形成框架（11）和镜体（12）的反射镜基板材料由不同的材料（例如SiN x X）形成。

公开(公告)号：US07173748B2

公开(公告)日：2007-02-06

申请号：US11297929

申请日：2005-12-08

申请人： Masaki Hara ,  Takuya Makino ,  Kazuhito Hori ,  Kazuhiro Hane ,  Minoru Sasaki

发明人： Masaki Hara ,  Takuya Makino ,  Kazuhito Hori ,  Kazuhiro Hane ,  Minoru Sasaki

IPC分类号： G02B26/08

CPC分类号： G02B26/0866 ,  G02B26/0833 ,  Y10S359/904

摘要： A micro-mirror for deflecting an incident light is disclosed, wherein the micro-mirror comprises: a mirror section for reflecting an incident light issued from a laser diode; a hinge section including a fixed section and a movable section each having a flat surface; and a drive section having a bi-morph structure made of two or more of materials having different heat expansion coefficient for deflecting said mirror section to change relative angle to said incident light.

摘要翻译： 公开了一种用于偏转入射光的微镜，其中微镜包括：用于反射从激光二极管发出的入射光的反射镜部分; 铰链部分，其包括固定部分和每个具有平坦表面的可动部分; 以及具有由两种或更多种具有不同热膨胀系数的材料制成的双变形结构的驱动部分，用于偏转所述镜部分以改变与所述入射光的相对角度。

公开(公告)号：US07009747B2

公开(公告)日：2006-03-07

申请号：US10092711

申请日：2002-03-07

申请人： Masaki Hara ,  Takuya Makino ,  Kazuhito Hori ,  Kazuhiro Hane ,  Minoru Sasaki

发明人： Masaki Hara ,  Takuya Makino ,  Kazuhito Hori ,  Kazuhiro Hane ,  Minoru Sasaki

IPC分类号： G02B26/08

CPC分类号： G02B26/0866 ,  G02B26/0833 ,  Y10S359/904

摘要： A micro-mirror for deflecting an incident light is disclosed, wherein the micro-mirror comprises: a mirror section for reflecting an incident light issued from a laser diode; a hinge section including a fixed section and a movable section each having a flat surface; and a drive section having a bi-morph structure made of two or more of materials having different heat expansion coefficient for deflecting said mirror section to change relative angle to said incident light.

公开(公告)号：US06549694B2

公开(公告)日：2003-04-15

申请号：US09836718

申请日：2001-04-17

申请人： Takuya Makino ,  Kazuhiro Hane ,  Kazuhito Hori ,  Masaki Hara ,  Naoki Sano ,  Hidenori Watanabe

发明人： Takuya Makino ,  Kazuhiro Hane ,  Kazuhito Hori ,  Masaki Hara ,  Naoki Sano ,  Hidenori Watanabe

IPC分类号： G02B626

CPC分类号： G02B6/3522 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/3582 ,  G02B6/3584 ,  G02B6/3598 ,  G02B26/0841

摘要： To provide a small and lightweight optical switching element with a simple structure capable of fast response, and an optical switching apparatus employing the optical switching element. Optical extraction unit contacts an upper substrate with electrostatic attraction generated between a transparent electrode of the optical extraction unit and a transparent electrode of the upper substrate. In the case that light enters one V-shaped trench of the upper substrate vertically, the light enters the optical extraction unit of the upper substrate and is emitted from a back of the optical extraction unit (a tapered unit). Subsequently, the incident light P1 passes through a lower substrate and is converted into transmission light. With electrostatic attraction generated between a transparent electrode of the lower substrate and a transparent electrode of the optical extraction unit, the optical extraction unit is attracted to a lower substrate side. In this state, the incident light is caused the total reflection at a total reflection face. This total reflection light is emitted from the other V-shaped trench. The incident light can be switched in two ways: the transmission light and the total reflection light.

公开(公告)号：US20060098311A1

公开(公告)日：2006-05-11

申请号：US11297929

申请日：2005-12-08

申请人： Masaki Hara ,  Takuya Makino ,  Kazuhito Hori ,  Kazuhiro Hane ,  Minoru Sasaki

发明人： Masaki Hara ,  Takuya Makino ,  Kazuhito Hori ,  Kazuhiro Hane ,  Minoru Sasaki

IPC分类号： G02B7/182

CPC分类号： G02B26/0866 ,  G02B26/0833 ,  Y10S359/904

摘要： A micro-mirror for deflecting an incident light is disclosed, wherein the micro-mirror comprises: a mirror section for reflecting an incident light issued from a laser diode; a hinge section including a fixed section and a movable section each having a flat surface; and a drive section having a bi-morph structure made of two or more of materials having different heat expansion coefficient for deflecting said mirror section to change relative angle to said incident light.

公开(公告)号：US07000686B2

公开(公告)日：2006-02-21

申请号：US11043132

申请日：2005-01-27

申请人： Takuya Makino ,  Masaki Hara

发明人： Takuya Makino ,  Masaki Hara

IPC分类号： F28D15/02

CPC分类号： H01L23/427 ,  F28D15/043 ,  H01L2924/0002 ,  H01L2924/00

摘要： A heat transport device includes an evaporator, a condenser, and a vapor channel and a plurality of liquid channels that connect the evaporator and the condenser. The evaporator generates a capillary force to circulate working fluid. This structure prevents the performance deterioration and malfunction due to the entry of vapor-phase working fluid into the liquid channels. Since the cross-sectional areas of the liquid channels gradually decrease from the condenser toward the evaporator, the capillary force at the liquid channels can be increased, and vapor-phase working fluid is prevented from entering the liquid channels. Wicks and the portions of the liquid channels adjacent thereto are filled with liquid-phase working fluid even after dryout occurs, stable operation is achieved.

摘要翻译： 热传输装置包括蒸发器，冷凝器和蒸汽通道以及连接蒸发器和冷凝器的多个液体通道。 蒸发器产生毛细管力以循环工作流体。 这种结构防止由于气相工作流体进入液体通道而引起的性能劣化和故障。 由于液体通道的横截面积从冷凝器朝向蒸发器逐渐减小，所以可以增加液体通道处的毛细管力，并且防止气相工作流体进入液体通道。 即使在干燥发生之后，芯子和与其相邻的液体通道的部分填充有液相工作流体，因此实现了稳定的操作。

公开(公告)号：US06458715B2

公开(公告)日：2002-10-01

申请号：US09779766

申请日：2001-02-08

申请人： Naoki Sano ,  Masaki Hara ,  Mitsunobu Sekiya ,  Toshiyuki Sameshima

发明人： Naoki Sano ,  Masaki Hara ,  Mitsunobu Sekiya ,  Toshiyuki Sameshima

IPC分类号： H01L21265

CPC分类号： H01L21/3105 ,  H01L31/1864 ,  Y02E10/50 ,  Y02P70/521 ,  Y10S438/909

摘要： A target semiconductor device can be obtained stably by reforming an insulating film and a semiconductor. In a process of manufacturing a semiconductor device, at least one of the semiconductor and the insulating film is reformed after an annealing process for annealing the semiconductor at a temperature ranging from 20 to 400° C. in the atmosphere containing a gas of water (H2O) with a partial pressure from 1 Torr to a saturated vapor pressure for an annealing time ranging from 15 seconds to 20 hours.

摘要翻译： 可以通过重整绝缘膜和半导体来稳定地获得目标半导体器件。 在制造半导体器件的过程中，在包含水气体（H 2 O）的气氛中，在20〜400℃的温度范围内退火半导体的退火处理后，半导体和绝缘膜中的至少一个被重整 ），分压为1乇至饱和蒸汽压，退火时间为15秒至20小时。