摘要:
The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiNX, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.
摘要翻译:优选地,铰链(13)形成为具有比以往更高的抗反射镜主体(12)的枢转的阻力,以有效地防止铰链(13)被损坏。 通过根据需要采用各种生产步骤中的合适的一种,铰链(13)可以更精细地形成并且具有更高的精度,从而可以在更短的时间内更容易地制造微反射镜单元。 为此,铰链(13)由形成框架(11)和镜体(12)的反射镜基板材料由不同的材料(例如SiN x X)形成。
摘要:
The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiNx, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.
摘要翻译:优选地,铰链(13)形成为具有比以往更高的抗反射镜主体(12)的枢转的阻力,以有效地防止铰链(13)被损坏。 通过根据需要采用各种生产步骤中的合适的一种,铰链(13)可以更精细地形成并且具有更高的精度,从而可以在更短的时间内更容易地制造微反射镜单元。 为此,铰链(13)由形成框架(11)和反射镜主体(12)的反射镜基板材料由不同的材料(例如SiN x x)形成。
摘要:
The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiNx, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.
摘要翻译:优选地,铰链(13)形成为具有比以往更高的抗反射镜主体(12)的枢转的阻力,以有效地防止铰链(13)被损坏。 通过根据需要采用各种生产步骤中的合适的一种,铰链(13)可以更精细地形成并且具有更高的精度,从而可以在更短的时间内更容易地制造微反射镜单元。 为此,铰链(13)由形成框架(11)和反射镜主体(12)的反射镜基板材料由不同的材料(例如SiN x x)形成。
摘要:
In a micro mirror apparatus pivoting on a hinge part as its axis, a movable part connected to a stationary part through the hinge part enhances exclusively the flexural rigidity of the hinge part without causing any significant change in the torsional rigidity of the hinge part and thus widens servo band. To this end, on at least a part of the hinge part 14, a protrusion 14b protruding in the direction of its thickness is formed. This greatly increases the flexural rigidity of the hinge part 14 and widens the servo band.
摘要:
A hologram recording/reproducing device includes a laser light source emitting laser light; a spatial light modulator generating signal light and reference light from the laser light emitted from the laser light source, the signal light and the reference light traveling in a common light path; a first relay lens system including a first shielding plate at a focal position thereof and transmitting the signal light and the reference light generated by the spatial light modulator, the first shielding plate having a pinhole whose size is 1 to 2 times a Nyquist size; a phase modulating element disposed at a conjugate plane of the signal light and the reference light transmitted through the first relay lens system; an objective lens converging the signal light and the reference light transmitted through the phase modulating element on a hologram recording medium; and a light receiving system disposed between the phase modulating element and objective lens and receiving light returning from the hologram recording medium.
摘要:
A signal detecting device includes: a semiconductor substrate; a near-field light generating section that is provided on the semiconductor substrate and generates near-field light near an interface with the semiconductor substrate; a light source that outputs light having wavelength corresponding to photon energy about a half as large as band-gap energy of a material of the semiconductor substrate; and a current detecting unit that detects a photocurrent generated in the semiconductor substrate when the near-field light is generated.
摘要:
A hologram recording/reproducing device includes a laser light source emitting laser light; a spatial light modulator generating signal light and reference light from the laser light emitted from the laser light source, the signal light and the reference light traveling in a common light path; a first relay lens system including a first shielding plate at a focal position thereof and transmitting the signal light and the reference light generated by the spatial light modulator, the first shielding plate having a pinhole whose size is 1 to 2 times a Nyquist size; a phase modulating element disposed at a conjugate plane of the signal light and the reference light transmitted through the first relay lens system; an objective lens converging the signal light and the reference light transmitted through the phase modulating element on a hologram recording medium; and a light receiving system disposed between the phase modulating element and objective lens and receiving light returning from the hologram recording medium.
摘要:
A laser assisted type magnetic recording head forming a magnetic recording apparatus includes a focusing lens system including an objective lens and a hemispherical or hyper-hemispherical lens and whose effective numerical aperture is greater than 1.0. A recording thin-film magnetic head is built in the inside of the hemispherical or hyper-hemispherical lens. A magnetic recording head and a magnetic recording apparatus are able to record information on a magnetic recording medium while the coercive force of only a predetermined recording portion of the magnetic recording medium can be lowered but a temperature can be prevented from being lowered before magnetic fields are applied.
摘要:
A surface processing method by blowing submicron particles is disclosed, in which submicron particles are blown against a surface of a work to deposit a layer of the material of the particles on a surface of the work, or etching the surface of the work.The processing method uses blowing air stream containing submicron particles having average particles size ranging between 0.01 and 3.0 .mu.m. The deposition or etching is effected depending on an incident angle of the particles to the surface of work. According to the method deposition of the material can be effected with very high deposition rate and in case of etching very smooth etched surface is obtained.
摘要:
A hologram recording/reproducing device includes a recording/reproducing optical unit performing recording and reproducing operations on a hologram recording/reproducing medium. The optical unit includes a laser light source emitting laser light; a spatial-light modulator generating signal light and reference light from the laser light, the signal light and reference light having a common light path; a phase mask disposed near the modulator or in a conjugate plane of the modulator and transmitting at least the reference light; and an objective lens including a first lens portion and a second lens portion. The first lens portion is disposed at an inner peripheral portion of the objective lens and serves as a Fourier transformation lens focusing the signal light to a predetermined point. The second lens portion is disposed at an outer peripheral portion of the objective lens and has focuses continuously or discretely disposed in an optical-axis direction of the objective lens and at portions in the medium near the predetermined point.