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公开(公告)号：USD640030S1
公开(公告)日：2011-06-14
申请号：US29365852
申请日：2010-07-15
申请人： Kunio Fukuma , Daisuke Sado , Hideki Matsuo
设计人： Kunio Fukuma , Daisuke Sado , Hideki Matsuo
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公开(公告)号：USD647680S1
公开(公告)日：2011-10-25
申请号：US29365850
申请日：2010-07-15
申请人： Kunio Fukuma , Daisuke Sado , Hideki Matsuo
设计人： Kunio Fukuma , Daisuke Sado , Hideki Matsuo
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公开(公告)号：US20100209217A1
公开(公告)日：2010-08-19
申请号：US12633298
申请日：2009-12-08
申请人： Kunio Fukuma , Hideki Matsuo , Daisuke Sado
发明人： Kunio Fukuma , Hideki Matsuo , Daisuke Sado
IPC分类号： H01L21/677
CPC分类号： B25J19/0025 , B25J9/041 , B25J9/107 , H01L21/67109 , H01L21/67766
摘要： A work transfer apparatus includes a hand mechanism, a scissors lift mechanism, a seat, and a rotary mechanism. The hand mechanism supports and reciprocates a work. The scissors lift mechanism supports the hand mechanism, and moves the hand mechanism vertically, i.e., raises or lowers it. The seat supports the scissors lift mechanism. The rotary mechanism rotates the seat around a vertical axis. The scissors lift mechanism includes a stage on which the hand mechanism is mounted, at least one scissors link, and a lift driver.
摘要翻译： 工作传送装置包括手动机构，剪刀提升机构，座椅和旋转机构。 手动机构支持和回报工作。 剪刀提升机构支撑手动机构，并且垂直移动手动机构，即升高或降低。 座椅支撑剪刀提升机构。 旋转机构围绕垂直轴旋转座椅。 剪刀提升机构包括安装手动机构的平台，至少一个剪刀连杆和升降机驱动器。
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公开(公告)号：US20090035114A1
公开(公告)日：2009-02-05
申请号：US12220535
申请日：2008-07-25
申请人： Takafumi Uratani , Daisuke Sado , Hideki Matsuo
发明人： Takafumi Uratani , Daisuke Sado , Hideki Matsuo
IPC分类号： B25J1/12
CPC分类号： B25J18/04 , H01L21/67742 , Y10T74/20305
摘要： A transfer apparatus includes a stationary base, a lift base, a lifting mechanism for vertically moving the lift base, a rotary base mounted to the lift base, a rotating mechanism for rotating the rotary base about a vertical rotation axis, a linear moving mechanism supported by the rotary base, and a work hand supported by the linear moving mechanism. The lifting mechanism includes a slide guide mechanism for vertical movement of the lift base, and first and second screw-feeding mechanisms. Each screw-feeding mechanism includes a rotatable vertical screw shaft, and a nut member provided on the lift base and screwed onto the screw shaft. The first and the second screw-feeding mechanisms are spaced from each other, with the rotation axis of the rotary base being located between the first and the second screw-feeding mechanisms.
摘要翻译： 一种传送装置，包括固定基座，升降台，用于使提升基座垂直移动的提升机构，安装在提升基座上的旋转基座，旋转基座绕垂直旋转轴线旋转的旋转机构， 通过旋转基座和由线性移动机构支撑的作业手。 提升机构包括用于提升基座的垂直运动的滑动引导机构，以及第一和第二螺旋进给机构。 每个螺旋进给机构包括可旋转的垂直螺杆轴和设置在提升基座上并拧到螺杆轴上的螺母构件。 第一和第二螺旋进给机构彼此间隔开，旋转底座的旋转轴线位于第一和第二螺旋进给机构之间。
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公开(公告)号：US08479607B2
公开(公告)日：2013-07-09
申请号：US12647194
申请日：2009-12-24
申请人： Kunio Fukuma , Hideki Matsuo
发明人： Kunio Fukuma , Hideki Matsuo
CPC分类号： H01L21/67742 , H01L21/67748 , Y10T74/20305 , Y10T74/20348 , Y10T74/20354
摘要： A work transfer apparatus includes a work carrying mechanism, a driving source that drives the work carrying mechanism, a sealed box that accommodates the driving source in a hermetically sealed state, and a coolant circulation path provided in the sealed box for cooling the driving source. The sealed box includes a box body with an opening, and a partition lid for closing the opening. The partition lid includes an outer plate member and an inner plate member superposed on the outer plate member. The coolant circulation path is disposed at the interface between the outer plate member and the inner plate member.
摘要翻译： 工件传送装置包括工作承载机构，驱动工作承载机构的驱动源，密封状态下容纳驱动源的密封箱，以及设置在密封箱内用于冷却驱动源的冷却剂循环路径。 密封箱包括具有开口的盒体和用于封闭开口的分隔盖。 分隔盖包括外板构件和叠置在外板构件上的内板构件。 冷却剂循环路径设置在外板构件和内板构件之间的界面处。
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公开(公告)号：US08203101B2
公开(公告)日：2012-06-19
申请号：US12529471
申请日：2007-03-02
CPC分类号： B25J9/107 , B65G49/061 , B65G49/067 , B65G2249/02 , H01L21/67115 , H01L21/67742
摘要： A conveying device A is disposed inside a vacuum chamber B, includes a fixation base 1; a swivel base which is held rotatably with respect to the fixation base 1; linear movement mechanisms 3A, 3B supported by the swivel base 2; and hands 4A, 4B supported by the linear movement mechanisms 3A, 3B; and a transports work W placed on the hands 4A, 4B by operation of the linear movement mechanism 3A, 3B. Radiation plates 62, 63, 65 are provided at appropriate locations on a lower surface side of the swivel base or of the linear movement mechanisms 3A, 3B. The vacuum chamber is provided with heat absorption plates 61, 66 on a wall which faces the lower surface side of the swivel base 2.
摘要翻译： 输送装置A设置在真空室B内，包括固定基座1; 相对于固定基座1可旋转地固定的旋转基座; 由旋转底座2支撑的直线移动机构3A，3B; 以及由线性移动机构3A，3B支撑的手4A，4B; 以及通过线性运动机构3A，3B的操作而放置在手4A，4B上的运送工件W. 辐射板62,63,65设置在旋转底座或直线移动机构3A，3B的下表面侧上的适当位置处。 真空室在面向旋转基座2的下表面侧的壁上设置吸热板61,66。
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公开(公告)号：US20100068025A1
公开(公告)日：2010-03-18
申请号：US12529471
申请日：2007-03-02
IPC分类号： H01L21/677 , B65G49/06
CPC分类号： B25J9/107 , B65G49/061 , B65G49/067 , B65G2249/02 , H01L21/67115 , H01L21/67742
摘要： A conveying device A is disposed inside a vacuum chamber B, includes a fixation base 1; a swivel base which is held rotatably with respect to the fixation base 1; linear movement mechanisms 3A, 3B supported by the swivel base 2; and hands 4A, 4B supported by the linear movement mechanisms 3A, 3B; and a transports work W placed on the hands 4A, 4B by operation of the linear movement mechanism 3A, 3B. Radiation plates 62, 63, 65 are provided at appropriate locations on a lower surface side of the swivel base or of the linear movement mechanisms 3A, 3B. The vacuum chamber is provided with heat absorption plates 61, 66 on a wall which faces the lower surface side of the swivel base 2.
摘要翻译： 输送装置A设置在真空室B内，包括固定基座1; 相对于固定基座1可旋转地固定的旋转基座; 由旋转底座2支撑的直线移动机构3A，3B; 以及由线性移动机构3A，3B支撑的手4A，4B; 以及通过线性运动机构3A，3B的操作而放置在手4A，4B上的运送工件W. 辐射板62,63,65设置在旋转底座或直线运动机构3A，3B的下表面侧上的适当位置处。 真空室在面向旋转基座2的下表面侧的壁上设置吸热板61,66。
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公开(公告)号：US07665950B2
公开(公告)日：2010-02-23
申请号：US12150144
申请日：2008-04-25
申请人： Takafumi Uratani , Daisuke Sado , Hideki Matsuo
发明人： Takafumi Uratani , Daisuke Sado , Hideki Matsuo
IPC分类号： B25J18/04
CPC分类号： B65G49/067 , B25J9/042 , B25J9/104 , B65G2249/02 , B65G2249/045 , H01L21/67742 , Y10T74/19521 , Y10T74/20323
摘要： A transfer apparatus includes a stationary base, a swivel rotatable around a vertical rotation axis, a linear movement mechanism supported by the swivel, a hand supported by the linear movement mechanism for transferring a work along a horizontal path, a driving power source in the stationary base, and a transmission shaft arranged along the rotation axis for transmitting driving force from the driving power source to the linear movement mechanism. The linear movement mechanism includes a driving mechanism and a guide rail for movably supporting the hand. The driving mechanism has a plurality of pulleys, including a driving pulley supported rotatably around a horizontal axis, and an output belt wound around the plurality of pulleys for reciprocal movement within a predetermined section extending parallel to the movement path. The hand is connected to the output belt via a connection member.
摘要翻译： 传送装置包括固定基座，可围绕垂直旋转轴线旋转的旋转体，由旋转体支撑的线性移动机构，由用于沿着水平路径传送工件的线性移动机构支撑的手，静止的驱动力源 基座和沿着旋转轴线布置的传动轴，用于将驱动力从驱动力源传递到线性运动机构。 线性移动机构包括用于可移动地支撑手的驱动机构和导轨。 驱动机构具有多个带轮，包括围绕水平轴线可旋转地支撑的驱动皮带轮，以及缠绕在多个滑轮上的输出皮带，用于在平行于运动路径延伸的预定部分内往复运动。 手通过连接构件连接到输出皮带。
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公开(公告)号：US20100196124A1
公开(公告)日：2010-08-05
申请号：US12647194
申请日：2009-12-24
申请人： Kunio Fukuma , Hideki Matsuo
发明人： Kunio Fukuma , Hideki Matsuo
IPC分类号： H01L21/673 , H01L21/677
CPC分类号： H01L21/67742 , H01L21/67748 , Y10T74/20305 , Y10T74/20348 , Y10T74/20354
摘要： A work transfer apparatus includes a work carrying mechanism, a driving source that drives the work carrying mechanism, a sealed box that accommodates the driving source in a hermetically sealed state, and a coolant circulation path provided in the sealed box for cooling the driving source. The sealed box includes a box body with an opening, and a partition lid for closing the opening. The partition lid includes an outer plate member and an inner plate member superposed on the outer plate member. The coolant circulation path is disposed at the interface between the outer plate member and the inner plate member.
摘要翻译： 工件传送装置包括工作承载机构，驱动工作承载机构的驱动源，密封状态下容纳驱动源的密封箱，以及设置在密封箱内用于冷却驱动源的冷却剂循环路径。 密封箱包括具有开口的盒体和用于封闭开口的分隔盖。 分隔盖包括外板构件和叠置在外板构件上的内板构件。 冷却剂循环路径设置在外板构件和内板构件之间的界面处。
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公开(公告)号：US08011874B2
公开(公告)日：2011-09-06
申请号：US12220535
申请日：2008-07-25
申请人： Takafumi Uratani , Daisuke Sado , Hideki Matsuo
发明人： Takafumi Uratani , Daisuke Sado , Hideki Matsuo
IPC分类号： B25J18/04
CPC分类号： B25J18/04 , H01L21/67742 , Y10T74/20305
摘要： A transfer apparatus includes a stationary base, a lift base, a lifting mechanism for vertically moving the lift base, a rotary base mounted to the lift base, a rotating mechanism for rotating the rotary base about a vertical rotation axis, a linear moving mechanism supported by the rotary base, and a work hand supported by the linear moving mechanism. The lifting mechanism includes a slide guide mechanism for vertical movement of the lift base, and first and second screw-feeding mechanisms. Each screw-feeding mechanism includes a rotatable vertical screw shaft, and a nut member provided on the lift base and screwed onto the screw shaft. The first and the second screw-feeding mechanisms are spaced from each other, with the rotation axis of the rotary base being located between the first and the second screw-feeding mechanisms.
摘要翻译： 一种传送装置，包括固定基座，升降台，用于使提升基座垂直移动的提升机构，安装在提升基座上的旋转基座，旋转基座绕垂直旋转轴线旋转的旋转机构， 通过旋转基座和由线性移动机构支撑的作业手。 提升机构包括用于提升基座的垂直运动的滑动引导机构，以及第一和第二螺旋进给机构。 每个螺旋进给机构包括可旋转的垂直螺杆轴和设置在提升基座上并拧到螺杆轴上的螺母构件。 第一和第二螺旋进给机构彼此间隔开，旋转底座的旋转轴线位于第一和第二螺旋进给机构之间。
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