METHOD OF FABRICATING NANOSTRUCTURE ARRAY AND DEVICE INCLUDING NANOSTRUCTURE ARRAY
    1.
    发明申请
    METHOD OF FABRICATING NANOSTRUCTURE ARRAY AND DEVICE INCLUDING NANOSTRUCTURE ARRAY 有权
    制造纳米结构阵列的方法和包括纳米结构阵列的器件

    公开(公告)号:US20120258289A1

    公开(公告)日:2012-10-11

    申请号:US13198892

    申请日:2011-08-05

    CPC classification number: G03F7/2016 G03F7/201

    Abstract: Provided are a method of fabricating a nanostructure array and a device including the nanostructure array. Nanoscale patterning is caused at an interface of a resist layer by light passed through a focusing layer. By such nanoscale patterning, a nanostructure array is fabricated on a substrate in various ways. As the focusing layer, an array of beads or lenses is used, and a pattern of the resist layer may include a nanoscale pore-opening and an undercut structure connected to a lower portion of the opening. The method facilitates adjustment of the size and shape of nanostructures and the interval between the nanostructures. Also, performance of the device including the nanostructure array can be improved. In particular, the method and device result in a sensor having improved sensitivity and reliability optimized for an environment and purpose to be used.

    Abstract translation: 提供制造纳米结构阵列的方法和包括纳米结构阵列的器件。 通过穿过聚焦层的光在抗蚀剂层的界面处引起纳米级图案化。 通过这种纳米尺度的图案化,以各种方式在衬底上制造纳米结构阵列。 作为聚焦层,使用珠或透镜的阵列,并且抗蚀剂层的图案可以包括连接到开口的下部的纳米级孔隙和底切结构。 该方法有助于调整纳米结构的尺寸和形状以及纳米结构之间的间隔。 此外,可以提高包括纳米结构阵列的器件的性能。 特别地,该方法和装置导致传感器具有针对要使用的环境和目的优化的改进的灵敏度和可靠性。

    HIGH RESOLUTION SURFACE PLASMON RESONANCE SENSOR AND SENSOR SYSTEM THEREOF
    2.
    发明申请
    HIGH RESOLUTION SURFACE PLASMON RESONANCE SENSOR AND SENSOR SYSTEM THEREOF 有权
    高分辨率表面等离子体共振传感器和传感器系统

    公开(公告)号:US20100128273A1

    公开(公告)日:2010-05-27

    申请号:US12534497

    申请日:2009-08-03

    CPC classification number: G01N21/553

    Abstract: Provided is a surface plasmon resonance sensor including: a part of delivering light by which a signal beam is incident to generate an evanescent field; and a part of exciting surface plasmon for exciting surface plasmons by the generated evanescent field and giving rise to a surface plasmon resonance, wherein a dielectric waveguide layer is inserted between metal layers of the part of exciting surface plasmon, and surface plasmon resonance properties are changed by an object to be analyzed.

    Abstract translation: 提供了一种表面等离子体共振传感器,包括:传递信号光束入射的光的一部分,以产生渐逝场; 以及激发表面等离子体的一部分,用于通过产生的ev逝场激发表面等离子体激元,并引起表面等离子体共振,其中介电波导层插入在激发表面等离子体激元的一部分的金属层之间,并且表面等离子体共振性质被改变 由待分析的对象。

    METHOD FOR GROWING THIN FILM
    3.
    发明申请
    METHOD FOR GROWING THIN FILM 有权
    生长薄膜的方法

    公开(公告)号:US20090324824A1

    公开(公告)日:2009-12-31

    申请号:US12417231

    申请日:2009-04-02

    CPC classification number: C30B29/16 C23C16/407 C30B25/02 C30B28/12

    Abstract: Disclosed is a method for growing a thin film, which includes modifying a surface grain size and surface roughness on a thin film to improve the mobility of a carrier and a light scattering effect. The method for growing a thin film includes: forming nuclei of grains having various grain orientations on a substrate; causing first grains having a first specific grain orientation to grow predominantly among the grains having various grain orientations, thereby forming a first preferred texture comprised of the predominantly grown first grains; and then causing second grains having a second grain orientation to grow predominantly, thereby forming a second preferred texture comprised of the predominantly grown second grains, wherein the surface grain size of each of the second grains forming the second texture is larger than that of each of the first grains forming the first texture.

    Abstract translation: 公开了一种用于生长薄膜的方法,其包括改变薄膜上的表面粒径和表面粗糙度以提高载体的迁移率和光散射效应。 生长薄膜的方法包括:在基板上形成具有各种晶粒取向的晶粒的核; 使得具有第一特定晶粒取向的第一晶粒主要在具有各种晶粒取向的晶粒中生长,由此形成由主要生长的第一晶粒组成的第一优选纹理; 然后使具有第二晶粒取向的第二晶粒主要生长,从而形成由主要生长的第二晶粒组成的第二优选纹理,其中形成第二纹理的每个第二晶粒的表面粒径大于 第一颗粒形成第一纹理。

    Se OR S BASED THIN FILM SOLAR CELL AND METHOD OF MANUFACTURING THE SAME
    4.
    发明申请
    Se OR S BASED THIN FILM SOLAR CELL AND METHOD OF MANUFACTURING THE SAME 审中-公开
    Se或S基薄膜太阳能电池及其制造方法

    公开(公告)号:US20130104972A1

    公开(公告)日:2013-05-02

    申请号:US13563915

    申请日:2012-08-01

    Abstract: Provided is a Se- or S-based thin film solar cell, including a substrate, a rear electrode formed on the substrate, a light absorbing layer formed on the rear electrode and containing at least one of selenium (Se) and sulfur (S), and an rear electrode top layer. The rear electrode top layer is formed between the rear electrode and the light absorbing layer, and contains a large amount of oxygen (O) to control diffusion of sodium (Na) through the rear electrode to the light absorbing layer. In this manner, it is possible to improve the electrical conductivity and interfacial adhesion of the rear electrode while stimulating diffusion of sodium (Na) to improve the efficiency of a thin film solar cell.

    Abstract translation: 提供了一种基于S或S的薄膜太阳能电池,其包括基板,形成在基板上的后电极,形成在后电极上并含有硒(Se)和硫(S)中的至少一种的光吸收层, ,和后电极顶层。 后电极顶层形成在后电极和光吸收层之间,并且含有大量的氧(O),以控制通过后电极将钠(Na)扩散到光吸收层。 以这种方式,可以改善后电极的导电性和界面粘合性,同时刺激钠(Na)的扩散以提高薄膜太阳能电池的效率。

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