公开(公告)号：US08758087B2

公开(公告)日：2014-06-24

申请号：US13114141

申请日：2011-05-24

申请人： Kyohei Koutake ,  Hiromichi Morita ,  Fumiyoshi Kano ,  Tetsuji Yamaguchi ,  Sumitomo Inomata ,  Masatake Nagaya

发明人： Kyohei Koutake ,  Hiromichi Morita ,  Fumiyoshi Kano ,  Tetsuji Yamaguchi ,  Sumitomo Inomata ,  Masatake Nagaya

IPC分类号： B24B1/00 ,  B24B49/16

CPC分类号： B28D5/022 ,  B28D5/0082 ,  H01L21/02008 ,  H01L21/02013

摘要： In a wafer processing method, an ingot is sliced into a wafer and the wafer is planarized by polishing a surface of the wafer. When the wafer is planarized, the wafer is disposed on a wafer holder and the wafer is rotated, a heat quantity is applied to a portion of the wafer so as to form a reformed layer at the portion of the wafer, and a polishing tool is brought into contact with the portion of wafer while rotating so as to polish the portion of the wafer.

摘要翻译： 在晶片处理方法中，将锭切成晶片，通过抛光晶片的表面使晶片平坦化。 当晶片平坦化时，将晶片设置在晶片保持器上并且晶片旋转，将热量施加到晶片的一部分，以在晶片的部分形成重整层，并且抛光工具 在旋转的同时与晶片的该部分接触以抛光晶片的该部分。

公开(公告)号：US20110294403A1

公开(公告)日：2011-12-01

申请号：US13114141

申请日：2011-05-24

申请人： Kyohei KOUTAKE ,  Hiromichi Morita ,  Fumiyoshi Kano ,  Tetsuji Yamaguchi ,  Sumitomo Inomata ,  Masatake Nagaya

发明人： Kyohei KOUTAKE ,  Hiromichi Morita ,  Fumiyoshi Kano ,  Tetsuji Yamaguchi ,  Sumitomo Inomata ,  Masatake Nagaya

IPC分类号： B24B1/00 ,  B28D1/02 ,  B24B49/16

CPC分类号： B28D5/022 ,  B28D5/0082 ,  H01L21/02008 ,  H01L21/02013

摘要： In a wafer processing method, an ingot is sliced into a wafer and the wafer is planarized by polishing a surface of the wafer. When the wafer is planarized, the wafer is disposed on a wafer holder and the wafer is rotated, a heat quantity is applied to a portion of the wafer so as to form a reformed layer at the portion of the wafer, and a polishing tool is brought into contact with the portion of wafer while rotating so as to polish the portion of the wafer.

摘要翻译： 在晶片处理方法中，将锭切成晶片，通过抛光晶片的表面使晶片平坦化。 当晶片平坦化时，将晶片设置在晶片保持器上并且晶片旋转，将热量施加到晶片的一部分，以在晶片的部分形成重整层，并且抛光工具 在旋转的同时与晶片的该部分接触以抛光晶片的该部分。

公开(公告)号：US07732784B2

公开(公告)日：2010-06-08

申请号：US11867732

申请日：2007-10-05

申请人： Kimiya Shimizu ,  Kohji Ohbayashi ,  Takuji Amano ,  Hideaki Hiro-Oka ,  DongHak Choi ,  Hiroyuki Furukawa ,  Motoi Nakanishi ,  Fumiyoshi Kano ,  Takeo Miyazawa ,  Ryoko Yoshimura

发明人： Kimiya Shimizu ,  Kohji Ohbayashi ,  Takuji Amano ,  Hideaki Hiro-Oka ,  DongHak Choi ,  Hiroyuki Furukawa ,  Motoi Nakanishi ,  Fumiyoshi Kano ,  Takeo Miyazawa ,  Ryoko Yoshimura

IPC分类号： G01T1/166 ,  H01S5/00

CPC分类号： G01N21/4795 ,  A61B5/0066 ,  A61B5/0073 ,  A61B5/0088 ,  A61B5/7257 ,  A61C9/0066 ,  G01B9/02004 ,  G01B9/02005 ,  G01B9/02091 ,  G01J3/10

摘要： An OCT technique that permits tomographic observation of biological body parts that are difficult to restrain, and also provides a tomographic observation technique for the observation of a constrainable part that does not require constraint and thus removes a burden on the biological body. A wavelength-tunable light generator (wavelength-tunable light source) is employed as the light source of the optical coherence tomography device. The wavelength-tunable light generator has a wave number tunable range width of at least 4.7×10−2 μm−1 and an emitted-light frequency width of no more than 13 GHz, for example, and is capable of changing the wave number stepwise at wave number intervals of no more than 3.1×10−4 μm−1 and time intervals of no more than 530 μs.

摘要翻译： 允许难以抑制的生物体部分的断层摄影观察的OCT技术，并且还提供用于观察不需要约束的约束部分的断层摄影观察技术，从而消除生物体的负担。 波长可调光发生器（波长可调光源）被用作光学相干断层摄影装置的光源。 该波长可调光发生器具有例如至少4.7×10 -2μm-1的波数可调范围宽度和不超过13GHz的发射光频率宽度，并且能够逐步改变波数 波数不得超过3.1×10-4μm-1，时间间隔不超过530μs。

公开(公告)号：US5325392A

公开(公告)日：1994-06-28

申请号：US26451

申请日：1993-03-03

申请人： Yuichi Tohmori ,  Yoshikuni ,  Hiroyuki Ishii ,  Fumiyoshi Kano ,  Toshiaki Tamamura

发明人： Yuichi Tohmori ,  Yoshikuni ,  Hiroyuki Ishii ,  Fumiyoshi Kano ,  Toshiaki Tamamura

IPC分类号： G02B6/12 ,  G02B6/124 ,  H01S5/042 ,  H01S5/0625 ,  H01S5/12 ,  H01S3/10

CPC分类号： H01S5/12 ,  G02B6/124 ,  H01S5/06256 ,  H01S5/06258 ,  G02B2006/12107 ,  G02B2006/12121 ,  H01S5/0425 ,  H01S5/1218 ,  H01S5/1225

摘要： The distributed reflector includes a substrate and at least one optical waveguide formed on the substrate and having a refractive index larger than the substrate and at least one optical confinement layer having a refractive index smaller than the optical waveguide layer. A diffractive grating is formed in at least one layer constituting the optical waveguide. The diffractive grating has a structure of which at least one parameter defining optical reflectivity varies depending on its position, and is formed continuously for at least two periods, the period being approximately defined by the length of repeating unit region. The parameter may be pitch, coupling coefficient, bandgap composition, phase shift, etc. The semiconductor laser includes the distributed reflector which may be of a distributed reflector type or distributed feed back type and has distributed reflector regions and a phase adjustment region. Application of current or voltage to the refractive index of the active region or inactive region in which a diffractive grating is present or absent adjusts the refractive index thereof and enables coarse and fine adjustment of lasing wavelength.

摘要翻译： 分布式反射器包括基板和形成在基板上并具有大于基板的折射率的至少一个光波导以及折射率小于光波导层的至少一个光限制层。 在构成光波导的至少一层中形成衍射光栅。 衍射光栅具有这样的结构，其中限定光反射率的至少一个参数根据其位置而变化，并且连续形成至少两个周期，该周期近似地由重复单位区域的长度限定。 该参数可以是间距，耦合系数，带隙组成，相移等。半导体激光器包括分布式反射器，其可以是分布式反射器类型或分布式反馈型，并且具有分布式反射器区域和相位调整区域。 施加电流或电压对衍射光栅存在或不存在的有源区域或非活性区域的折射率进行调节，其折射率可以进行激光波长的粗调和微调。

公开(公告)号：US07564565B2

公开(公告)日：2009-07-21

申请号：US11867736

申请日：2007-10-05

申请人： Kimiya Shimizu ,  Kohji Ohbayashi ,  Takuji Amano ,  Hideaki Hiro-Oka ,  DongHak Choi ,  Hiroyuki Furukawa ,  Motoi Nakanishi ,  Fumiyoshi Kano ,  Takeo Miyazawa ,  Ryoko Yoshimura

发明人： Kimiya Shimizu ,  Kohji Ohbayashi ,  Takuji Amano ,  Hideaki Hiro-Oka ,  DongHak Choi ,  Hiroyuki Furukawa ,  Motoi Nakanishi ,  Fumiyoshi Kano ,  Takeo Miyazawa ,  Ryoko Yoshimura

IPC分类号： G01B9/02 ,  G01B11/02

CPC分类号： G01N21/4795 ,  A61B5/0066 ,  A61B5/0073 ,  A61B5/0088 ,  A61B5/7257 ,  A61C9/0066 ,  G01B9/02004 ,  G01B9/02005 ,  G01B9/02091 ,  G01J3/10

摘要： The present invention provides an OCT technique that permits tomographic observation of a biological body parts that is difficult to restrain and also provides a tomographic observation technique for the observation of a constrainable part that does not require constraint and remove the burden from biological body. A wavelength-tunable light generator (wavelength-tunable light source) is employed as the light source of the optical coherence tomography device. The wavelength-tunable light generator has a wave number tunable range width of at least 4.7×10−2 μm−1 and an emitted-light frequency width of no more than 13 GHz, for example, and includes means capable of changing the wave number stepwise at wave number intervals of no more than 3.1×10−4 μm−1 and time intervals of no more than 530 μs.

摘要翻译： 本发明提供了一种OCT技术，其允许难以约束的生物体部分的层析成像观察，并且还提供用于观察不需要约束的约束部分并且消除生物体的负担的断层摄影观察技术。 波长可调光发生器（波长可调光源）被用作光学相干断层摄影装置的光源。 波长可调光发生器具有例如至少4.7×10 -2 mum-1的波数可调范围宽度和不超过13GHz的发射光频率宽度，并且包括能够逐步改变波数的装置 波数间隔不超过3.1x10-4 mum-1，时间间隔不超过530 mus。

公开(公告)号：US20080252901A1

公开(公告)日：2008-10-16

申请号：US10573113

申请日：2004-09-22

申请人： Kimiya Shimizu ,  Kohji Ohbayashi ,  Takuji Amano ,  Hideaki Hiro-Oka ,  DongHak Choi ,  Hiroyuki Furukawa ,  Motoi Nakanishi ,  Fumiyoshi Kano ,  Takeo Miyazawa ,  Ryoko Yoshimura

发明人： Kimiya Shimizu ,  Kohji Ohbayashi ,  Takuji Amano ,  Hideaki Hiro-Oka ,  DongHak Choi ,  Hiroyuki Furukawa ,  Motoi Nakanishi ,  Fumiyoshi Kano ,  Takeo Miyazawa ,  Ryoko Yoshimura

IPC分类号： G01B11/02

CPC分类号： G01N21/4795 ,  A61B5/0066 ,  A61B5/0073 ,  A61B5/0088 ,  A61B5/7257 ,  A61C9/0066 ,  G01B9/02004 ,  G01B9/02005 ,  G01B9/02091 ,  G01J3/10

摘要： The present invention provides an OCT technique that permits tomographic observation of a biological body parts that is difficult to restrain and also provides a tomographic observation technique for the observation of a constrainable part that does not require constraint and remove the burden from biological body. A wavelength-tunable light generator (wavelength-tunable light source) is employed as the light source of the optical coherence tomography device. The wavelength-tunable light generator has a wave number tunable range width of at least 4.7×10−2 μm−1 and an emitted-light frequency width of no more than 13 GHz, for example, and includes means capable of changing the wave number stepwise at wave number intervals of no more than 3.1×10−4 μm−1 and time intervals of no more than 530 μs.

摘要翻译： 本发明提供了一种OCT技术，其允许难以约束的生物体部分的层析成像观察，并且还提供用于观察不需要约束的约束部分并且消除生物体的负担的断层摄影观察技术。 波长可调光发生器（波长可调光源）被用作光学相干断层摄影装置的光源。 波长可调谐光发生器具有至少4.7×10 -2 m -1的波数可调范围宽度，并且发射光频率不超过13GHz ，并且包括能够以不超过3.1×10 -4 mum -1的波数间隔逐步改变波数的装置，并且不超过 530亩