Residue removing liquid composition and method for cleaning semiconductor element using same
    1.
    发明授权
    Residue removing liquid composition and method for cleaning semiconductor element using same 有权
    残渣除去液组合物及使用其的半导体元件的清洗方法

    公开(公告)号:US08623587B2

    公开(公告)日:2014-01-07

    申请号:US13057338

    申请日:2009-07-07

    IPC分类号: G03F7/26

    摘要: Provided are a residue removing liquid composition capable of completely removing a resist residue and a titanium (Ti)-derived residue that remains after dry etching and ashing in via hole formation in a production process for a semiconductor substrate having metal wiring of aluminum (Al) or an Al alloy, at a low temperature in a short time, not corroding parts of an interlayer insulating material, a wiring material and others, and a cleaning method for semiconductor devices using it.The residue removing liquid composition contains (A) ammonium fluoride, (B) methanesulfonic acid, (C) a carbon-carbon triple bond-having compound, (D) a water-soluble organic solvent, and (E) water, wherein the content of (A), (C), (D) and (E) in the residue removing liquid composition is from 0.005 to 2% by mass, from 0.1 to 10% by mass, from 60 to 75% by mass and from 5 to 38% by mass, respectively, and (B) is contained in an amount of from 0.9 to 1.5 times (by mol) the amount of (A).

    摘要翻译: 本发明提供一种残留物除去液体组合物,其能够在具有铝(Al)金属配线的半导体基板的制造工序中完全除去抗蚀剂残渣和残留在通孔形成中的干法蚀刻和灰化之后残留的钛(Ti) 或Al合金,在短时间内的低温下,不会腐蚀层间绝缘材料的部分,布线材料等,以及使用它的半导体器件的清洁方法。 除去残渣的液体组合物含有(A)氟化铵,(B)甲磺酸,(C)具有碳 - 碳三键的化合物,(D)水溶性有机溶剂和(E)水, 残渣除去液组合物中的(A),(C),(D)和(E)为0.005〜2质量%,0.1〜10质量%,60〜75质量% 38质量%,(B)的含量为(A)的量的0.9〜1.5倍(摩尔)。

    RESIDUE REMOVING LIQUID COMPOSITION AND METHOD FOR CLEANING SEMICONDUCTOR ELEMENT USING SAME
    2.
    发明申请
    RESIDUE REMOVING LIQUID COMPOSITION AND METHOD FOR CLEANING SEMICONDUCTOR ELEMENT USING SAME 有权
    残留液体组合物的清除方法及使用其清洗半导体元件的方法

    公开(公告)号:US20110256483A1

    公开(公告)日:2011-10-20

    申请号:US13057338

    申请日:2009-07-07

    IPC分类号: G03F7/20 C11D7/60

    摘要: Provided are a residue removing liquid composition capable of completely removing a resist residue and a titanium (Ti)-derived residue that remains after dry etching and ashing in via hole formation in a production process for a semiconductor substrate having metal wiring of aluminium (Al) or an Al alloy, at a low temperature in a short time, not corroding parts of an interlayer insulating material, a wiring material and others, and a cleaning method for semiconductor devices using it.The residue removing liquid composition contains (A) ammonium fluoride, (B) methanesulfonic acid, (C) a carbon-carbon triple bond-having compound, (D) a water-soluble organic solvent, and (E) water, wherein the content of (A), (C), (D) and (E) in the residue removing liquid composition is from 0.005 to 2% by mass, from 0.1 to 10% by mass, from 60 to 75% by mass and from 5 to 38% by mass, respectively, and (B) is contained in an amount of from 0.9 to 1.5 times (by mol) the amount of (A).

    摘要翻译: 本发明提供一种残留物除去液体组合物,其能够在具有铝(Al)金属配线的半导体基板的制造工序中完全除去抗蚀剂残渣和残留在通孔形成中的干法蚀刻和灰化之后残留的钛(Ti) 或Al合金,在短时间内的低温下,不会腐蚀层间绝缘材料的部分,布线材料等,以及使用它的半导体器件的清洁方法。 除去残渣的液体组合物含有(A)氟化铵,(B)甲磺酸,(C)具有碳 - 碳三键的化合物,(D)水溶性有机溶剂和(E)水, 残渣除去液组合物中的(A),(C),(D)和(E)为0.005〜2质量%,0.1〜10质量%,60〜75质量% 38质量%,(B)的含量为(A)的量的0.9〜1.5倍(摩尔)。

    Liquid crystal display panel
    3.
    发明授权
    Liquid crystal display panel 有权
    液晶显示面板

    公开(公告)号:US09019459B2

    公开(公告)日:2015-04-28

    申请号:US13581089

    申请日:2010-11-29

    摘要: The present invention provides a liquid crystal display panel which can prevent an electric short circuit (leakage) between a pair of substrates with no additional production step in the case where a multilayer spacer is used. The present invention is a liquid crystal display panel comprising: a pair of substrates; and a liquid crystal layer between the substrates, wherein a first substrate of the substrates has a support substrate, a plurality of pixel electrodes, transparent colored layers of plural colors overlapping with the pixel electrodes, and a multilayer spacer formed of a stacked body of three or more resin layers including transparent colored layers of plural colors, and a second substrate of the substrates has a supporting substrate and a common electrode.

    摘要翻译: 本发明提供了一种液晶显示面板,其可以防止一对基板之间的电短路(泄漏),而在使用多层隔板的情况下,无需额外的制造步骤。 本发明是一种液晶显示面板,包括:一对基板; 以及基板之间的液晶层,其中基板的第一基板具有支撑基板,多个像素电极,与像素电极重叠的多种颜色的透明着色层,以及由三层叠层体形成的多层隔板 或多个包括多种颜色的透明着色层的树脂层,并且该基板的第二基板具有支撑基板和公共电极。

    DEVICE COOPERATION SERVICE EXECUTION APPARATUS, DEVICE COOPERATION SERVICE EXECUTION METHOD, COMPUTER-READABLE RECORDING MEDIUM
    5.
    发明申请
    DEVICE COOPERATION SERVICE EXECUTION APPARATUS, DEVICE COOPERATION SERVICE EXECUTION METHOD, COMPUTER-READABLE RECORDING MEDIUM 有权
    设备合作服务执行装置,设备合作服务执行方法,计算机可读记录介质

    公开(公告)号:US20140075003A1

    公开(公告)日:2014-03-13

    申请号:US13989220

    申请日:2012-10-03

    IPC分类号: H04L12/24

    摘要: An application information acquisition unit 405 transmits a device list of unconnected devices, which are owned devices recorded in a local storage 407 but not retrieved by a device retrieval unit 402, and connected devices, which are owned devices retrieved by the device retrieval unit 402, to an external server 107 via an external network. A service list display unit 406 displays a list of device cooperation services indicated in device cooperation service list information obtained by the application information acquisition unit 405 from the external server 107 and a list of devices determined to be owned devices by an owned device management unit 404 on a display unit 410, whereby a user is prompted to select a device cooperation service.

    摘要翻译: 应用信息获取单元405发送作为本地存储器407中记录的但未被设备检索单元402检索的所有设备的未连接设备的设备列表以及由设备检索单元402检索到的所有设备的连接设备, 经由外部网络到外部服务器107。 服务列表显示单元406显示由应用信息获取单元405从外部服务器107获得的设备合作服务列表信息中所指示的设备协作服务的列表以及被拥有设备管理单元404确定为所有设备的设备列表 在显示单元410上,由此提示用户选择设备协作服务。

    Playback device, recording medium, playback method and program
    6.
    发明授权
    Playback device, recording medium, playback method and program 有权
    播放装置,记录介质,播放方法和程序

    公开(公告)号:US08588580B2

    公开(公告)日:2013-11-19

    申请号:US13016066

    申请日:2011-01-28

    IPC分类号: H04N9/80 H04N5/92

    摘要: A bytecode processing unit provided in a playback device is platform unit 20 that reads and runs a bytecode application recorded on read-only medium 105. The playback device includes: playback control unit 10 for controlling AV playback of digital streams; and machine unique function control unit 33 for performing machine unique functions unique to the playback device, to perform a control onto a content. APIs used by the bytecode application include API for playback control function, and API for socket communication. When the bytecode application requests playback control unit 10 to control the playback, it calls the playback control API to can instruct playback control unit 10 to execute the process. When the bytecode application requests execution of a machine unique function of the playback device, it instructs a machine unique function control unit to perform the process via a function call by the socket communication API.

    摘要翻译: 设置在再现装置中的字节码处理单元是读取并运行记录在只读介质105上的字节码应用的平台单元20.回放设备包括:用于控制数字流的AV回放的回放控制单元10; 以及机器独特的功能控制单元33,用于执行重放设备独有的机器独特功能,以对内容执行控制。 字节码应用程序使用的API包括用于播放控制功能的API和用于套接字通信的API。 当字节码应用程序请求播放控制单元10控制播放时,它呼叫播放控制API以指示播放控制单元10执行该过程。 当字节码应用程序请求执行重放设备的机器唯一功能时,它指示机器唯一功能控制单元通过套接字通信API的功能调用来执行处理。

    Recording medium, reproduction device, program, reproduction method
    7.
    发明授权
    Recording medium, reproduction device, program, reproduction method 有权
    记录介质,再现设备,程序,再现方法

    公开(公告)号:US08433178B2

    公开(公告)日:2013-04-30

    申请号:US12950692

    申请日:2010-11-19

    IPC分类号: H04N9/80

    摘要: A BD-ROM stores PlayList information. The PlayList information defines a playback section of each of a plurality of AV clips and includes MainPath information and SubPath information. The MainPath information designates one of the AV clips as a Main Clip and defines a portion of the Main Clip as a primary playback section. The SubPath information designates another one of the AV clips as a SubClip and defines a portion of the SubClip as a secondary playback section that is to be played back in synchronism with the primary playback section. The BD-ROM stores, the one of the AV clips designated as the SubClip along with an EP_map. The EP_map shows a plurality of entry points on the SubClip in a one-to-one correspondence with entry times on the SubClip timeline.

    摘要翻译: BD-ROM存储播放列表信息。 播放列表信息定义多个AV剪辑中的每一个的回放部分,并且包括MainPath信息和SubPath信息。 MainPath信息将AV剪辑中的一个指定为主剪辑,并将主剪辑的一部分定义为主要播放部分。 SubPath信息将AV片段中的另一个指定为SubClip,并将SubClip的一部分定义为与主播放部分同步地再现的辅助播放部分。 BD-ROM存储指定为SubClip的AV片段之一以及EP_map。 EP_map在子剪辑上显示多个入口点,与SubClip时间轴上的输入时间一一对应。

    Substrate processing method, computer-readable storage medium and substrate processing system
    8.
    发明授权
    Substrate processing method, computer-readable storage medium and substrate processing system 有权
    基板处理方法,计算机可读存储介质和基板处理系统

    公开(公告)号:US08420303B2

    公开(公告)日:2013-04-16

    申请号:US12957442

    申请日:2010-12-01

    IPC分类号: G03F7/26

    CPC分类号: G03F7/38

    摘要: A PEB unit has a first heat plate and a second heat plate. After an exposure process for a resist film for EUV on a wafer and before a development process, the PEB unit heats the wafer through the first heat plate at a first heating temperature. A heating time through the first heat plate is not less than 10 seconds and not more than 30 seconds. Thereafter, the PEB unit heats the wafer through the second heat plate at a second heating temperature lower than the first heating temperature. A temperature difference between the first heating temperature and the second heating temperature is not less than 20° C. and not more than 60° C.

    摘要翻译: PEB单元具有第一加热板和第二加热板。 在晶片上并且在显影处理之前用于EUV的抗蚀剂膜的曝光处理之后,PEB单元在第一加热温度下通过第一加热板加热晶片。 通过第一加热板的加热时间不小于10秒且不超过30秒。 此后,PEB单元在低于第一加热温度的第二加热温度下通过第二加热板加热晶片。 第一加热温度和第二加热温度之间的温差不小于20℃且不大于60℃。

    DETERIORATION DEGREE DETERMINING APPARATUS
    9.
    发明申请
    DETERIORATION DEGREE DETERMINING APPARATUS 审中-公开
    测定方法测定装置

    公开(公告)号:US20120299556A1

    公开(公告)日:2012-11-29

    申请号:US13495040

    申请日:2012-06-13

    IPC分类号: H02J7/14

    摘要: A deterioration degree determining apparatus determines a deterioration degree of a battery of a vehicle. The device includes an electric component activating part activating a non-driving series electric component of the vehicle by using electric power of the battery to determine the deterioration degree of the battery, a charge degree obtaining part which obtains a charge degree of the battery during a time period in which a charge state of the battery is increased to a designated degree by charging the battery after the battery is discharged for a designated period of time by causing the electric component activating part to activate the non-driving series electric component, the battery being charged by electric power generated by an electric generator of the vehicle; and a deterioration degree determining part determining the deterioration degree of the battery based on the charge degree obtained by the charge degree obtaining part.

    摘要翻译: 劣化度判定装置判定车辆的电池的劣化程度。 该装置包括通过使用电池的电力来激活车辆的非驱动串联电气部件以确定电池的劣化程度的电气部件启动部件,在充电度获得部件中获得电池的充电度 电池的充电状态通过使电气部件启动部分激活非驱动串联电气部件而在电池放电指定的时间段之后对电池充电而将电池的充电状态增加到指定的时间段,电池 由车辆的发电机产生的电力进行充电; 以及劣化度确定部,基于由所述充电度获得部获得的充电度来确定所述电池的劣化程度。

    Playback apparatus that reads data replacing data recorded on recording medium from another recording medium and plays back read data, playback method, and non-transitory recording medium
    10.
    发明授权
    Playback apparatus that reads data replacing data recorded on recording medium from another recording medium and plays back read data, playback method, and non-transitory recording medium 有权
    从另一记录介质读取记录在记录介质上的数据的数据的再现装置,并且重放读取数据,回放方法和非暂时记录介质

    公开(公告)号:US08107789B2

    公开(公告)日:2012-01-31

    申请号:US11571955

    申请日:2005-07-21

    IPC分类号: H04N9/80

    摘要: The present invention is the playback apparatus 400 for (i) mounting thereon the BD-ROM 200 in which a plurality of data groups and an application program that refers to each of the data groups are stored and (ii) playing back each of the data groups by executing the application program. The playback apparatus 400 comprises: the playback processing unit 412 operable to control the execution of the application program; the network IF unit 419 operable to obtain, from an external server including therein one or more alternative data groups, an alternative data group to replace part of the data groups; and the HDD unit 418 that stores therein correspondence information showing a correspondence between a storage location where on an internal recording medium the alternative data group is stored and a storage location where on the external recording medium the part of the data groups to be replaced. Here, at a time when the application program in execution reads a data group being referred to, the playback processing unit 412 (i) judges based on the correspondence information whether an alternative data group for replacing the data group being referred to exists on the internal recording medium, and (ii) specifies, as a data retrieve destination, a storage location of the alternative data group indicated by the correspondence information when the judgment is affirmative.

    摘要翻译: 本发明是用于(i)在其上安装BD-ROM200的播放装置400,其中存储多个数据组和引用每个数据组的应用程序,并且(ii)播放每个数据 组通过执行应用程序。 播放装置400包括:再现处理单元412,用于控制应用程序的执行; 网络IF单元419可操作以从其中包括一个或多个替代数据组的外部服务器获得替代数据组以替换部分数据组; 以及HDD单元418,其中存储有表示在内部记录介质上存储备选数据组的存储位置与外部记录介质上要替换的数据组的一部分的存储位置之间的对应关系的对应信息。 这里,在执行中的应用程序读取所参照的数据组的时候,再现处理部412(i)根据对应信息来判断是否存在用于替换所参照的数据组的备用数据组 记录介质,以及(ii)当判断为肯定时,指定由对应信息指示的替代数据组的存储位置作为数据检索目的地。