摘要:
Provided are a residue removing liquid composition capable of completely removing a resist residue and a titanium (Ti)-derived residue that remains after dry etching and ashing in via hole formation in a production process for a semiconductor substrate having metal wiring of aluminum (Al) or an Al alloy, at a low temperature in a short time, not corroding parts of an interlayer insulating material, a wiring material and others, and a cleaning method for semiconductor devices using it.The residue removing liquid composition contains (A) ammonium fluoride, (B) methanesulfonic acid, (C) a carbon-carbon triple bond-having compound, (D) a water-soluble organic solvent, and (E) water, wherein the content of (A), (C), (D) and (E) in the residue removing liquid composition is from 0.005 to 2% by mass, from 0.1 to 10% by mass, from 60 to 75% by mass and from 5 to 38% by mass, respectively, and (B) is contained in an amount of from 0.9 to 1.5 times (by mol) the amount of (A).
摘要:
Provided are a residue removing liquid composition capable of completely removing a resist residue and a titanium (Ti)-derived residue that remains after dry etching and ashing in via hole formation in a production process for a semiconductor substrate having metal wiring of aluminium (Al) or an Al alloy, at a low temperature in a short time, not corroding parts of an interlayer insulating material, a wiring material and others, and a cleaning method for semiconductor devices using it.The residue removing liquid composition contains (A) ammonium fluoride, (B) methanesulfonic acid, (C) a carbon-carbon triple bond-having compound, (D) a water-soluble organic solvent, and (E) water, wherein the content of (A), (C), (D) and (E) in the residue removing liquid composition is from 0.005 to 2% by mass, from 0.1 to 10% by mass, from 60 to 75% by mass and from 5 to 38% by mass, respectively, and (B) is contained in an amount of from 0.9 to 1.5 times (by mol) the amount of (A).
摘要:
The present invention provides a liquid crystal display panel which can prevent an electric short circuit (leakage) between a pair of substrates with no additional production step in the case where a multilayer spacer is used. The present invention is a liquid crystal display panel comprising: a pair of substrates; and a liquid crystal layer between the substrates, wherein a first substrate of the substrates has a support substrate, a plurality of pixel electrodes, transparent colored layers of plural colors overlapping with the pixel electrodes, and a multilayer spacer formed of a stacked body of three or more resin layers including transparent colored layers of plural colors, and a second substrate of the substrates has a supporting substrate and a common electrode.
摘要:
An optical fiber ribbon comprising a plurality of the coated optical fibers 2 arranged in plane and flame-retardant films 4a and 4b to integrate the coated optical fibers 2 is provided. The flame-retardant films 4a and 4b have an adhesive layer 5 formed thereon, and a plurality of the coated optical fibers 2 arranged in plane are integrated by the adhesive layer. The optical fiber ribbon 1 in this constitution uses flame-retardant films, wherein the ribbon thickness can be lowered and separation of single fiber can be facilitated by tearing off the film.
摘要:
An application information acquisition unit 405 transmits a device list of unconnected devices, which are owned devices recorded in a local storage 407 but not retrieved by a device retrieval unit 402, and connected devices, which are owned devices retrieved by the device retrieval unit 402, to an external server 107 via an external network. A service list display unit 406 displays a list of device cooperation services indicated in device cooperation service list information obtained by the application information acquisition unit 405 from the external server 107 and a list of devices determined to be owned devices by an owned device management unit 404 on a display unit 410, whereby a user is prompted to select a device cooperation service.
摘要:
A bytecode processing unit provided in a playback device is platform unit 20 that reads and runs a bytecode application recorded on read-only medium 105. The playback device includes: playback control unit 10 for controlling AV playback of digital streams; and machine unique function control unit 33 for performing machine unique functions unique to the playback device, to perform a control onto a content. APIs used by the bytecode application include API for playback control function, and API for socket communication. When the bytecode application requests playback control unit 10 to control the playback, it calls the playback control API to can instruct playback control unit 10 to execute the process. When the bytecode application requests execution of a machine unique function of the playback device, it instructs a machine unique function control unit to perform the process via a function call by the socket communication API.
摘要:
A BD-ROM stores PlayList information. The PlayList information defines a playback section of each of a plurality of AV clips and includes MainPath information and SubPath information. The MainPath information designates one of the AV clips as a Main Clip and defines a portion of the Main Clip as a primary playback section. The SubPath information designates another one of the AV clips as a SubClip and defines a portion of the SubClip as a secondary playback section that is to be played back in synchronism with the primary playback section. The BD-ROM stores, the one of the AV clips designated as the SubClip along with an EP_map. The EP_map shows a plurality of entry points on the SubClip in a one-to-one correspondence with entry times on the SubClip timeline.
摘要:
A PEB unit has a first heat plate and a second heat plate. After an exposure process for a resist film for EUV on a wafer and before a development process, the PEB unit heats the wafer through the first heat plate at a first heating temperature. A heating time through the first heat plate is not less than 10 seconds and not more than 30 seconds. Thereafter, the PEB unit heats the wafer through the second heat plate at a second heating temperature lower than the first heating temperature. A temperature difference between the first heating temperature and the second heating temperature is not less than 20° C. and not more than 60° C.
摘要:
A deterioration degree determining apparatus determines a deterioration degree of a battery of a vehicle. The device includes an electric component activating part activating a non-driving series electric component of the vehicle by using electric power of the battery to determine the deterioration degree of the battery, a charge degree obtaining part which obtains a charge degree of the battery during a time period in which a charge state of the battery is increased to a designated degree by charging the battery after the battery is discharged for a designated period of time by causing the electric component activating part to activate the non-driving series electric component, the battery being charged by electric power generated by an electric generator of the vehicle; and a deterioration degree determining part determining the deterioration degree of the battery based on the charge degree obtained by the charge degree obtaining part.
摘要:
The present invention is the playback apparatus 400 for (i) mounting thereon the BD-ROM 200 in which a plurality of data groups and an application program that refers to each of the data groups are stored and (ii) playing back each of the data groups by executing the application program. The playback apparatus 400 comprises: the playback processing unit 412 operable to control the execution of the application program; the network IF unit 419 operable to obtain, from an external server including therein one or more alternative data groups, an alternative data group to replace part of the data groups; and the HDD unit 418 that stores therein correspondence information showing a correspondence between a storage location where on an internal recording medium the alternative data group is stored and a storage location where on the external recording medium the part of the data groups to be replaced. Here, at a time when the application program in execution reads a data group being referred to, the playback processing unit 412 (i) judges based on the correspondence information whether an alternative data group for replacing the data group being referred to exists on the internal recording medium, and (ii) specifies, as a data retrieve destination, a storage location of the alternative data group indicated by the correspondence information when the judgment is affirmative.