Short-wavelength optoelectronic device including field emission device
and its fabricating method
    1.
    发明授权
    Short-wavelength optoelectronic device including field emission device and its fabricating method 失效
    包括场发射器件和光学器件的短波长光电器件及其制造方法

    公开(公告)号:US6139760A

    公开(公告)日:2000-10-31

    申请号:US129880

    申请日:1998-08-06

    摘要: Provided with a method of fabricating a 200-250 nm short-wavelength optoelectronic device, which has a combination of an optical device with a plurality of acceleration electrodes and a field emission device with a plurality of acceleration electrodes, from a semiconductor having a 5-6 eV energe band gap, based on a principle that an electron-hole pair is produced using a highly energetic electron which is injected from a field emission device, and short-wavelength photons are emitted when the electron recombines with the hole and confined in a quantum well to emit a light corresponding to the energy level of the quantum well, thereby eliminating the need of using dopants for forming n-p junctions in the semiconductor and achieving high efficiency in terms of energy because highly energetic electrons result in one or more electron-hole pairs.

    摘要翻译: 提供一种制造200-250nm短波长光电子器件的方法,该器件具有光学器件与多个加速电极的组合以及具有多个加速电极的场致发射器件, 6 eV带隙,基于电子 - 空穴对使用从场致发射器件注入的高能电子产生的原理,当电子与孔结合并限制在一个时,发射短波长的光子 量子阱发射对应于量子阱的能级的光,从而消除了在半导体中使用掺杂剂用于形成np结的需要,并且在能量方面实现高效率,因为高能电子产生一个或多个电子空穴 对。

    Effusion cell assembly for epitaxial apparatus
    2.
    发明授权
    Effusion cell assembly for epitaxial apparatus 有权
    用于外延设备的流出池组件

    公开(公告)号:US6063201A

    公开(公告)日:2000-05-16

    申请号:US141557

    申请日:1998-08-28

    IPC分类号: H01L21/20 C30B23/06 C23C16/00

    CPC分类号: C30B23/066

    摘要: An effusion cell assembly for epitaxial apparatus is disclosed. The assembly includes an effusion cell incluing a growing material, a heater for supplying heats with the effusion cell to effuse the growing material, a supporting plate for supporting the heater, a bolt having one end connected to the supporting plate, a cell flange coupled to a lower flange of an adaptor for supporting the cell assembly, bellows fixed between the supporting plate and the cell flange including the bolt, and a control nut for expanding and contracting the bellows so as to separate only the cell assembly from a vacuum chamber with entire vacuum maintained in the vacuum chamber and local vacuum released in the cell assembly. The epitaxial apparatus further includes a control valve located between an entrance flange of the vacuum chamber and an upper adaptor flange of the adaptor for introducing and maintaining vacuum in the vacuum chamber.

    摘要翻译: 公开了一种用于外延设备的渗流池组件。 组件包括包含生长材料的积液池,用于向渗出池供应热量以加热生长材料的加热器,用于支撑加热器的支撑板,具有连接到支撑板的一端的螺栓,耦合到 用于支撑电池组件的适配器的下凸缘,固定在支撑板和包括螺栓的电池凸缘之间的波纹管,以及用于膨胀和收缩波纹管的控制螺母,以便仅将电池组件与真空室整体分离 在真空室中保持真空并在电池组件中释放局部真空。 外延装置还包括位于真空室的入口凸缘和适配器的上适配器凸缘之间的控制阀,用于在真空室中引入和保持真空。