公开(公告)号：US20090145553A1

公开(公告)日：2009-06-11

申请号：US11951861

申请日：2007-12-06

Applicant: Lee CHEN ,  Lin XU

Inventor： Lee CHEN ,  Lin XU

IPC: C23F1/02 ,  C23C16/513

CPC classification number: H01J37/32623 ,  H01J37/3244 ,  H01J2237/0206 ,  Y10T29/41 ,  Y10T29/49432

Abstract: A chamber component configured to be coupled to a process chamber and a method of fabricating the chamber component is described. The chamber component comprises a chamber element comprising a first surface on a supply side of the chamber element and a second surface on a process side of the chamber element, wherein the chamber element comprises a reentrant cavity formed in the first surface and a conduit having an inlet coupled to the reentrant cavity and an outlet coupled to the second surface. Furthermore, the chamber component comprises an insertable member configured to couple with the reentrant cavity, the insertable member having one or more passages formed there through and each of the one or more passages are aligned off-axis from the conduit, wherein the one or more passages are configured to receive a process fluid on the supply side and the conduit is configured to distribute the process fluid from the one or more passages on the process side.

Abstract translation: 描述了被配置为联接到处理室的室部件和制造室部件的方法。 室部件包括室元件，其包括在腔室元件的供给侧上的第一表面和腔室元件的过程侧上的第二表面，其中，腔室元件包括形成在第一表面中的折返腔，以及具有 入口耦合到所述凹陷腔和连接到所述第二表面的出口。 此外，腔室部件包括被配置为与凹陷腔联接的可插入部件，该可插入部件具有一个或多个通道，该通道形成于此处，并且该一个或多个通道中的每个通道与管道离轴对准，其中一个或多个 通道被配置为在供应侧上接收过程流体，并且导管被配置成从处理侧上的一个或多个通道分配过程流体。

公开(公告)号：US20090242791A1

公开(公告)日：2009-10-01

申请号：US12059983

申请日：2008-03-31

Applicant: Lee CHEN ,  Lin XU ,  Ronald Victor BRAVENEC

Inventor： Lee CHEN ,  Lin XU ,  Ronald Victor BRAVENEC

IPC: H01J37/04

CPC classification number: H01J37/05 ,  H01J37/32422 ,  H01J37/32935 ,  H01J49/443 ,  H01J2237/053

Abstract: An ion energy analyzer is described for use in diagnosing the ion energy distribution (IED) of ions incident on a radio frequency (RF) biased substrate immersed in plasma. The ion energy analyzer comprises an entrance grid exposed to the plasma, an electron rejection grid disposed proximate to the entrance grid, and an ion current collector disposed proximate to the electron rejection grid. The ion current collector is coupled to an ion selection voltage source configured to positively bias the ion current collector by an ion selection voltage, and the electron rejection grid is coupled to an electron rejection voltage source configured to negatively bias the electron rejection grid by an electron rejection voltage. Furthermore, an ion current meter is coupled to the ion current collector to measure the ion current.

Abstract translation: 描述了用于诊断入射在等离子体中的射频（RF）偏压衬底上的离子的离子能量分布（IED）的离子能量分析器。 离子能量分析器包括暴露于等离子体的入口网格，靠近入口格栅设置的电子排斥栅极，以及靠近电子排除栅格设置的离子集电器。 离子集电器耦合到离子选择电压源，该离子选择电压源被配置为通过离子选择电压对离子集电器进行正偏置，并且电子抑制栅极耦合到电子抑制电压源，其被配置为通过电子 拒绝电压。 此外，离子电流计耦合到离子集电器以测量离子电流。

公开(公告)号：US20110319568A1

公开(公告)日：2011-12-29

申请号：US13169852

申请日：2011-06-27

Applicant: Guozhu YU ,  Lin XU ,  Xinhe KANG ,  Nini WANG ,  Hui LIU ,  Chuanqing LI

Inventor： Guozhu YU ,  Lin XU ,  Xinhe KANG ,  Nini WANG ,  Hui LIU ,  Chuanqing LI

IPC: C08J5/14 ,  C08F2/00 ,  C08F299/00

CPC classification number: C08F297/044 ,  B60C1/0016 ,  Y02T10/862

Abstract: Provided is a copolymer rubber, comprising a copolymer having a star-shaped block structure (SIB-PA)n-X, wherein SIB is a block comprising styrene, butadiene, and isoprene as constituent monomers; PA is a block comprising butadiene or isoprene as a constituent monomer; X is the residue of at least one coupling agent; and n=2−4. Also provided is a process for preparing the copolymer rubber and use thereof.

Abstract translation: 提供一种共聚物橡胶，其包含具有星形嵌段结构（SIB-PA）n-X的共聚物，其中SIB是包含苯乙烯，丁二烯和异戊二烯作为构成单体的嵌段; PA是包含丁二烯或异戊二烯作为构成单体的嵌段; X是至少一种偶联剂的残基; 并且n = 2-4。 还提供了制备共聚物橡胶的方法及其用途。