公开(公告)号：US20120084026A1

公开(公告)日：2012-04-05

申请号：US13252988

申请日：2011-10-04

Applicant: Ronald Victor BRAVENEC ,  Jianping Zhao

Inventor： Ronald Victor BRAVENEC ,  Jianping Zhao

IPC: G06F19/00 ,  G01N27/62

CPC classification number: H05H1/0081 ,  H01J37/32917 ,  H01J37/32926 ,  H01J37/32954

Abstract: Disclosed are a method and system for measuring the electron energy distribution function (EEDF) in a plasma which has a pronounced drifting Maxwellian component of the EEDF. The method comprises fitting an acquired unfiltered electron current vs. bias voltage curve to a functional form which assumes an EEDF comprising at least one stationary Maxwellian component and at least one drifting Maxwellian component. The method and system allow more accurate characterization of plasmas with electron components with pronounced drift, such as plasmas in microwave surface wave plasma (SWP) sources.

Abstract translation: 公开了一种用于测量等离子体中的电子能量分布函数（EEDF）的方法和系统，其具有EEDF的显着漂移的麦克斯韦分量。 该方法包括将获得的未过滤的电子电流与偏置电压曲线拟合到假设包括至少一个固定麦克斯韦分量和至少一个漂移的麦克斯韦分量的EEDF的功能形式。 该方法和系统允许具有明显漂移的电子成分的等离子体的更精确的表征，例如微波表面波等离子体（SWP）源中的等离子体。

公开(公告)号：US20090242790A1

公开(公告)日：2009-10-01

申请号：US12059855

申请日：2008-03-31

Applicant: Lee Chen ,  Lin Xu ,  Ronald Victor Bravenec

Inventor： Lee Chen ,  Lin Xu ,  Ronald Victor Bravenec

IPC: H01J37/04

CPC classification number: H01J37/05 ,  H01J37/32422 ,  H01J37/32935 ,  H01J49/443 ,  H01J2237/053

Abstract: An ion energy analyzer is described for use in diagnosing the ion energy distribution (IED) of ions incident on a radio frequency (RF) biased substrate immersed in plasma. The ion energy analyzer comprises an entrance grid exposed to the plasma, an ion selection grid disposed proximate to the entrance grid, an electron rejection grid disposed proximate to the ion selection grid, and an ion current collector disposed proximate to the electron rejection grid. The ion selection grid is coupled to an ion selection voltage source configured to positively bias the ion selection grid by an ion selection voltage, and the electron rejection grid is coupled to an electron rejection voltage source configured to negatively bias the electron rejection grid by an electron rejection voltage. Furthermore, an ion current meter is coupled to the ion current collector to measure the ion current.

Abstract translation: 描述了用于诊断入射在等离子体中的射频（RF）偏压衬底上的离子的离子能量分布（IED）的离子能量分析器。 离子能量分析器包括暴露于等离子体的入口栅格，靠近入口栅格设置的离子选择栅格，靠近离子选择栅极设置的电子排斥栅格，以及靠近电子排斥栅极设置的离子集电器。 离子选择网格耦合到离子选择电压源，其被配置为通过离子选择电压对离子选择栅极进行正偏置，并且电子抑制栅极耦合到被配置为通过电子负偏置电子排斥栅极的电子阻挡电压源 拒绝电压。 此外，离子电流计耦合到离子集电器以测量离子电流。

公开(公告)号：US08660805B2

公开(公告)日：2014-02-25

申请号：US13252988

申请日：2011-10-04

Applicant: Ronald Victor Bravenec ,  Jianping Zhao

Inventor： Ronald Victor Bravenec ,  Jianping Zhao

IPC: G01R15/00

CPC classification number: H05H1/0081 ,  H01J37/32917 ,  H01J37/32926 ,  H01J37/32954

Abstract: Disclosed are a method and system for measuring the electron energy distribution function (EEDF) in a plasma which has a pronounced drifting Maxwellian component of the EEDF. The method comprises fitting an acquired unfiltered electron current vs. bias voltage curve to a functional form which assumes an EEDF comprising at least one stationary Maxwellian component and at least one drifting Maxwellian component. The method and system allow more accurate characterization of plasmas with electron components with pronounced drift, such as plasmas in microwave surface wave plasma (SWP) sources.

Abstract translation: 公开了一种用于测量等离子体中的电子能量分布函数（EEDF）的方法和系统，其具有EEDF的显着漂移的麦克斯韦分量。 该方法包括将获得的未过滤的电子电流与偏置电压曲线拟合到假设包括至少一个固定麦克斯韦分量和至少一个漂移的麦克斯韦分量的EEDF的功能形式。 该方法和系统允许具有明显漂移的电子成分的等离子体的更精确的表征，例如微波表面波等离子体（SWP）源中的等离子体。

公开(公告)号：US07777179B2

公开(公告)日：2010-08-17

申请号：US12059983

申请日：2008-03-31

Applicant: Lee Chen ,  Lin Xu ,  Ronald Victor Bravenec

Inventor： Lee Chen ,  Lin Xu ,  Ronald Victor Bravenec

IPC: H01J37/04 ,  H01J49/00 ,  H01J3/26

CPC classification number: H01J37/05 ,  H01J37/32422 ,  H01J37/32935 ,  H01J49/443 ,  H01J2237/053

Abstract: An ion energy analyzer is described for use in diagnosing the ion energy distribution (IED) of ions incident on a radio frequency (RF) biased substrate immersed in plasma. The ion energy analyzer comprises an entrance grid exposed to the plasma, an electron rejection grid disposed proximate to the entrance grid, and an ion current collector disposed proximate to the electron rejection grid. The ion current collector is coupled to an ion selection voltage source configured to positively bias the ion current collector by an ion selection voltage, and the electron rejection grid is coupled to an electron rejection voltage source configured to negatively bias the electron rejection grid by an electron rejection voltage. Furthermore, an ion current meter is coupled to the ion current collector to measure the ion current.

Abstract translation: 描述了用于诊断入射在等离子体中的射频（RF）偏压衬底上的离子的离子能量分布（IED）的离子能量分析器。 离子能量分析器包括暴露于等离子体的入口网格，靠近入口格栅设置的电子排斥栅极，以及靠近电子排除栅格设置的离子集电器。 离子集电器耦合到离子选择电压源，该离子选择电压源被配置为通过离子选择电压对离子集电器进行正偏置，并且电子抑制栅极耦合到电子抑制电压源，其被配置为通过电子 拒绝电压。 此外，离子电流计耦合到离子集电器以测量离子电流。

公开(公告)号：US20090242791A1

公开(公告)日：2009-10-01

申请号：US12059983

申请日：2008-03-31

Applicant: Lee CHEN ,  Lin XU ,  Ronald Victor BRAVENEC

Inventor： Lee CHEN ,  Lin XU ,  Ronald Victor BRAVENEC

IPC: H01J37/04

CPC classification number: H01J37/05 ,  H01J37/32422 ,  H01J37/32935 ,  H01J49/443 ,  H01J2237/053

Abstract: An ion energy analyzer is described for use in diagnosing the ion energy distribution (IED) of ions incident on a radio frequency (RF) biased substrate immersed in plasma. The ion energy analyzer comprises an entrance grid exposed to the plasma, an electron rejection grid disposed proximate to the entrance grid, and an ion current collector disposed proximate to the electron rejection grid. The ion current collector is coupled to an ion selection voltage source configured to positively bias the ion current collector by an ion selection voltage, and the electron rejection grid is coupled to an electron rejection voltage source configured to negatively bias the electron rejection grid by an electron rejection voltage. Furthermore, an ion current meter is coupled to the ion current collector to measure the ion current.

Abstract translation: 描述了用于诊断入射在等离子体中的射频（RF）偏压衬底上的离子的离子能量分布（IED）的离子能量分析器。 离子能量分析器包括暴露于等离子体的入口网格，靠近入口格栅设置的电子排斥栅极，以及靠近电子排除栅格设置的离子集电器。 离子集电器耦合到离子选择电压源，该离子选择电压源被配置为通过离子选择电压对离子集电器进行正偏置，并且电子抑制栅极耦合到电子抑制电压源，其被配置为通过电子 拒绝电压。 此外，离子电流计耦合到离子集电器以测量离子电流。

公开(公告)号：US07875859B2

公开(公告)日：2011-01-25

申请号：US12059855

申请日：2008-03-31

Applicant: Lee Chen ,  Lin Xu ,  Ronald Victor Bravenec

Inventor： Lee Chen ,  Lin Xu ,  Ronald Victor Bravenec

IPC: G01K1/08

CPC classification number: H01J37/05 ,  H01J37/32422 ,  H01J37/32935 ,  H01J49/443 ,  H01J2237/053

Abstract: An ion energy analyzer is described for use in diagnosing the ion energy distribution (IED) of ions incident on a radio frequency (RF) biased substrate immersed in plasma. The ion energy analyzer comprises an entrance grid exposed to the plasma, an ion selection grid disposed proximate to the entrance grid, an electron rejection grid disposed proximate to the ion selection grid, and an ion current collector disposed proximate to the electron rejection grid. The ion selection grid is coupled to an ion selection voltage source configured to positively bias the ion selection grid by an ion selection voltage, and the electron rejection grid is coupled to an electron rejection voltage source configured to negatively bias the electron rejection grid by an electron rejection voltage. Furthermore, an ion current meter is coupled to the ion current collector to measure the ion current.

Abstract translation: 描述了用于诊断入射在等离子体中的射频（RF）偏压衬底上的离子的离子能量分布（IED）的离子能量分析器。 离子能量分析器包括暴露于等离子体的入口栅格，靠近入口栅格设置的离子选择栅格，靠近离子选择栅极设置的电子排斥栅格，以及靠近电子排斥栅极设置的离子集电器。 离子选择网格耦合到离子选择电压源，其被配置为通过离子选择电压对离子选择栅极进行正偏置，并且电子抑制栅极耦合到被配置为通过电子负偏置电子排斥栅极的电子阻挡电压源 拒绝电压。 此外，离子电流计耦合到离子集电器以测量离子电流。