Microfabricated rotary motion wobble motor and disk drive incorporating
it
    1.
    发明授权
    Microfabricated rotary motion wobble motor and disk drive incorporating it 失效
    微型旋转摆动电机和磁盘驱动器

    公开(公告)号:US5539267A

    公开(公告)日:1996-07-23

    申请号:US378490

    申请日:1994-07-21

    摘要: A motor based on the wobble motor provides pure rotary motion and can be used as a spindle motor for very small disk drives. The primary components of the motor are fabricated using thin film processes. The rotor has inner and outer rings that are interconnected by flexible members, such as semicircularly-shaped spring elements, with the rings and flexible members being formed of the same material. The rotor resides within the wobble motor stator elements that are circumferentially spaced on a substrate. The inner rotor ring is supported by a bearing structure that may be a ball bearing assembly or a pin bearing comprising a post and a restraining cap. The outer rotor ring functions as the wobble motor rotor and rolls around the inside of the stator as the stator elements are sequentially electrostatically activated. The flexible members act as a transmission to convert the wobble motion of the outer rotor ring to pure rotary motion of the inner rotor ring. The motor can function as a disk drive spindle motor by attachment of a data recording disk to the inner rotor ring and use of appropriate control circuitry to drive the motor at constant speed. The disk drive actuator may be attached to the same substrate that supports the stator elements. The stator elements, the rotor, and the bearing assembly may all be fabricated on a suitable substrate using thin film processes, without the necessity of assembly of separate components.

    摘要翻译: 基于摆动电机的电机提供纯粹的旋转运动,可用作非常小的磁盘驱动器的主轴电机。 使用薄膜工艺制造电动机的主要部件。 转子具有通过柔性构件例如半圆形弹簧元件互连的内圈和外圈,其中环和柔性构件由相同的材料形成。 转子驻留在摆动马达定子元件中,其在基板上周向间隔开。 内转子环由可以是球轴承组件或包括柱和限制帽的销轴承的轴承结构支撑。 外转子环用作摆动电动机转子,并且随着定子元件依次静电激活而在定子的内部滚动。 柔性构件用作变速器以将外转子环的摆动运动转换为内转子环的纯旋转运动。 通过将数据记录盘连接到内转子环上,电机可以用作磁盘驱动器主轴电机,并使用适当的控制电路以恒定的速度驱动电机。 磁盘驱动器致动器可以附接到支撑定子元件的相同基板。 定子元件,转子和轴承组件都可以使用薄膜工艺在合适的基板上制造,而不需要组装单独的部件。

    Micro-miniature structures and method of fabrication thereof
    2.
    发明授权
    Micro-miniature structures and method of fabrication thereof 失效
    微型微型结构及其制造方法

    公开(公告)号:US5364742A

    公开(公告)日:1994-11-15

    申请号:US948189

    申请日:1992-09-21

    摘要: In the fabrication of a free-standing miniaturized structure in a range of about 10 to 20 .mu.m thick, a method based on a sacrificial system includes the steps of selecting a substrate material, depositing on the substrate material a sacrificial layer of material and patterning the sacrificial layer to define a shape. A photoresist layer of material is deposited on the sacrificial layer and patterned by contrast-enhanced photolithography to form a photoresist mold. Upon the mold there is plated a metallic layer of material. The electroplated structure conforms to the resist profile and can have a thickness many times that of conventional polysilicon microstructures. The photoresist mold and the sacrificial layer are thereafter dissolved using etchants to form a free standing metallic structure in a range of about 10 to 20 .mu.m thick, with vertical to lateral aspect ratios of 9:1 to 10:1 or more.

    摘要翻译: 在制造大约10至20μm厚的独立小型化结构的过程中,基于牺牲系统的方法包括以下步骤:选择衬底材料,在衬底材料上沉积材料的牺牲层和图案化 牺牲层来定义一个形状。 材料的光致抗蚀剂层沉积在牺牲层上并通过对比度增强的光刻法形成光致抗蚀剂模具。 在模具上镀有金属层材料。 电镀结构符合抗蚀剂轮廓,并且其厚度可以是常规多晶硅微结构的厚度。 然后,使用蚀刻剂溶解光致抗蚀剂模具和牺牲层,以形成约10至20μm厚的独立金属结构,垂直与横向纵横比为9:1至10:1或更高。

    Single flux quantum storage devices and sensing means therefor
    3.
    发明授权
    Single flux quantum storage devices and sensing means therefor 失效
    单通量子量存储器件及其感测装置

    公开(公告)号:US3936809A

    公开(公告)日:1976-02-03

    申请号:US477387

    申请日:1974-06-07

    申请人: Hans H. Zappe

    发明人: Hans H. Zappe

    IPC分类号: G11C11/14 G11C11/44 H01L39/22

    摘要: An information storage device which stores a single flux quantum without bias is disclosed. The device includes a single Josephson tunneling device made from two superconductive materials spaced apart by an insulator wherein a Josephson current density profile J.sub.1 (x) defined by ##EQU1## IS CHARACTERIZED SUCH THAT THE PROFILE HAS A LARGER MAGNITUDE AT THE BOUNDARY PORTIONS OF SAID DEVICE THAN AT THE CENTER. The current density profile is controlled by adjusting either the oxide thicknesses, the work function of the superconductors or by changing the shape of the junction from its usual rectangular cross-section.A sensing arrangement for the above described storage devices is also disclosed. By controlling the damping of the above described structures, the gain characteristics and the vortex characteristics are adjusted to permit coincident selection of a single device. The overall reduction in the magnitude of the Josephson current density profile provides a higher junction resistance with a consequent decrease in damping. This increase in resistance across the tunneling junction unexpectedly extends the switching characteristic from the envelope boundary of all vortex modes to the extent that the application of the same coincident currents permits the unambiguous reading of both positive and zero or negative vortices. Each device during sensing acts as its own sense detector and is capable of switching to the voltage state if a flux quantum is stored. A bit-organized memory array utilizing the devices disclosed is also shown.

    摘要翻译: 公开了一种无偏压存储单通量的信息存储装置。 该装置包括由绝缘体间隔开的两个超导材料制成的单个约瑟夫逊隧道装置,其中由+ INFINITY J1(x)= J1(x,y)定义的约瑟夫逊电流密度分布J1(x)表示为这样的特征 简介在中心的设备的边界部分有一个较大的磁头。 通过调节氧化物厚度,超导体的功函数或通过从其通常的矩形横截面改变结的形状来控制电流密度分布。

    Low-crosstalk-automatic resetting scheme for Josephson junction logic
circuit
    4.
    发明授权
    Low-crosstalk-automatic resetting scheme for Josephson junction logic circuit 失效
    约瑟夫逊结逻辑电路的低串扰自动复位方案

    公开(公告)号:US4029975A

    公开(公告)日:1977-06-14

    申请号:US540762

    申请日:1975-01-14

    申请人: Hans H. Zappe

    发明人: Hans H. Zappe

    IPC分类号: H01L39/22 H03K19/195 H03K3/38

    摘要: A Josephson logic network which includes high and low transmission line impedance sections in the feeder line enables multiple logic devices to be connected in series to the same feeder line with minimum crosstalk between the logic devices. Also, the arrangement of the high and low impedance sections results in resetting of a switched Josephson logic device without the need for altering the d.c. current supplied to the feeder line.

    摘要翻译: 约瑟夫森逻辑网络,其包括馈线中的高传输线路和低传输线路阻抗部分,使多个逻辑器件可以串联连接到相同的馈线,逻辑器件之间的串扰最小。 此外,高阻抗和低阻抗部分的布置导致切换的约瑟夫森逻辑器件的复位,而不需要改变直流电压。 电流供给到馈线。

    Phase-to-pulse conversion circuits incorporating Josephson devices and
superconducting interconnection circuitry
    5.
    发明授权
    Phase-to-pulse conversion circuits incorporating Josephson devices and superconducting interconnection circuitry 失效
    并入约瑟夫逊器件和超导互连电路的相对脉冲转换电路

    公开(公告)号:US3983546A

    公开(公告)日:1976-09-28

    申请号:US543568

    申请日:1975-01-23

    申请人: Hans H. Zappe

    发明人: Hans H. Zappe

    摘要: Josephson tunneling devices are used as parametrons in circuits for logic and memory. Parametron circuits are used as input devices to conventional pulsed Josephson tunneling device circuitry, and as output devices from pulsed Josephson tunneling device circuitry. Therefore, transfers from phase information to pulse information and from pulse information to phase information are obtained. Interconnection between superconducting circuit chips is achieved using Josephson tunneling parametrons and Josephson tunneling detectors. Another interconnection scheme uses capacitive coupling between superconducting circuit chips without physical interconnections therebetween, and employs Josephson tunneling devices on separate chips for the receiving and sending circuitry.

    摘要翻译: 约瑟夫森隧道器件用作逻辑和存储器电路中的参数。 参数电路用作常规脉冲约瑟夫逊隧道装置电路的输入装置,以及来自脉冲约瑟夫逊隧道装置电路的输出装置。 因此,获得从相位信息到脉冲信息以及从脉冲信息到相位信息的转移。 使用约瑟夫逊隧道参数和约瑟夫逊隧道探测器实现超导电路芯片之间的互连。 另一种互连方案使用超导电路芯片之间的电容耦合,而在它们之间没有物理互连,并且在接收和发送电路的单独芯片上使用约瑟夫逊隧道装置。