公开(公告)号：US08848870B2

公开(公告)日：2014-09-30

申请号：US13373644

申请日：2011-11-23

申请人： Lutz Bruegemann ,  Carsten Michaelsen ,  Keisuke Saito

发明人： Lutz Bruegemann ,  Carsten Michaelsen ,  Keisuke Saito

IPC分类号： G21K1/06

CPC分类号： G21K1/06 ,  G21K2201/064

摘要： An X-ray optical configuration for irradiation of a sample (1) with an X-ray beam having a line-shaped cross-section, wherein the configuration contains an X-ray source (2) and a beam-conditioning X-ray optics, is characterized in that the X-ray source (2) comprises a brilliant point source (4) and the X-ray optics comprises an X-ray optical element (3) which conditions X-ray light emitted by the point source in such a fashion that the X-ray beam is rendered parallel in one direction perpendicular to the beam propagation direction and remains divergent in a direction which is perpendicular thereto and also to the beam propagation direction. An X-ray optical element of this type enables use of both point-shaped and line-shaped beam geometries without complicated and time-consuming conversion work.

摘要翻译： 一种用于用具有线状横截面的X射线束照射样品（1）的X射线光学构造，其中所述构造包含X射线源（2）和束调节X射线光学器件 的特征在于，所述X射线源（2）包括辉光点源（4），所述X射线光学元件包括X射线光学元件（3），所述X射线光学元件（3）对所述X射线光学元件 使得X射线束在垂直于光束传播方向的一个方向上平行，并且在与其垂直的方向以及波束传播方向上保持发散。 这种类型的X射线光学元件使得能够使用点状和线形的几何形状，而不需要复杂和耗时的转换工作。

公开(公告)号：US20120140897A1

公开(公告)日：2012-06-07

申请号：US13373644

申请日：2011-11-23

申请人： Lutz Bruegemann ,  Carsten Michaelsen ,  Keisuke Saito

发明人： Lutz Bruegemann ,  Carsten Michaelsen ,  Keisuke Saito

IPC分类号： G21K1/02 ,  G21K1/00

CPC分类号： G21K1/06 ,  G21K2201/064

摘要： An X-ray optical configuration for irradiation of a sample (1) with an X-ray beam having a line-shaped cross-section, wherein the configuration contains an X-ray source (2) and a beam-conditioning X-ray optics, is characterized in that the X-ray source (2) comprises a brilliant point source (4) and the X-ray optics comprises an X-ray optical element (3) which conditions X-ray light emitted by the point source in such a fashion that the X-ray beam is rendered parallel in one direction perpendicular to the beam propagation direction and remains divergent in a direction which is perpendicular thereto and also to the beam propagation direction. An X-ray optical element of this type enables use of both point-shaped and line-shaped beam geometries without complicated and time-consuming conversion work.

摘要翻译： 一种用于用具有线状横截面的X射线束照射样品（1）的X射线光学构造，其中所述构造包含X射线源（2）和束调节X射线光学器件 的特征在于，所述X射线源（2）包括辉光点源（4），所述X射线光学元件包括X射线光学元件（3），所述X射线光学元件（3）对所述X射线光学元件 使得X射线束在垂直于光束传播方向的一个方向上平行，并且在与其垂直的方向以及波束传播方向上保持发散。 这种类型的X射线光学元件使得能够使用点状和线形的几何形状，而不需要复杂和耗时的转换工作。

公开(公告)号：US20060083350A1

公开(公告)日：2006-04-20

申请号：US11236651

申请日：2005-09-28

申请人： Ekkehard Gerndt ,  Pawel Grybos ,  Lutz Bruegemann ,  Rachel Eisenhower ,  Arne Kasten

发明人： Ekkehard Gerndt ,  Pawel Grybos ,  Lutz Bruegemann ,  Rachel Eisenhower ,  Arne Kasten

IPC分类号： G01N23/20

CPC分类号： G01N23/20 ,  G01T1/2914

摘要： An X-ray or neutron-optical analysis device comprising means for directing radiation from a source (1) onto a sample (2), and a detector (7) with n substantially identical detector elements (Di) which are disposed parallel, next to each other in a first direction x and which extend in strips in a second direction y, wherein i=1, . . . n, for one-dimensional spatially-resolved detection of radiation reflected, scattered or diffracted by the sample (2) onto the detector (7), and with a detection electronics for processing the detector signals of the n detector elements (Di), wherein the detection electronics can reliably process a maximum radiation intensity per detector element (Di) without overloading, is characterized in that an optical element is disposed in front of the detector (7) which covers or weakens radiation incident on the surfaces of the respective n detector elements (Di) in correspondence with a predetermined, non-constant transmission function f(x) and/or the optical element comprises a collimator (6) which can be displaced along the strip direction y. The inventive analysis device permits artificial enlargement of the dynamic range of the detector (7).

摘要翻译： 一种X射线或中子光学分析装置，包括用于将来自源（1）的辐射引导到样品（2）上的装置，以及具有n个基本上相同的检测器元件（D）的检测器（7） ），它们在第一方向x彼此相邻地平行设置，并且在第二方向y上以条状延伸，其中i = 1。 。 。 n，用于由样品（2）反射，散射或衍射到检测器（7）上的辐射的一维空间分辨检测，以及用于处理n个检测器元件的检测器信号的检测电子装置（D＆ 其中检测电子装置可以可靠地处理每个检测器元件的最大辐射强度而不过载，其特征在于，光学元件设置在检测器的前面（ 7），其对应于预定的非常数透射函数f（x）覆盖或削弱入射在各个n个检测器元件的表面上的辐射，和/或光学元件包括 准直器（6），其可沿条带方向y移位。 本发明的分析装置允许人造扩大检测器（7）的动态范围。

公开(公告)号：US20100150310A1

公开(公告)日：2010-06-17

申请号：US12314723

申请日：2008-12-16

申请人： Rolf-Dieter Schipper ,  Eduard Konusch ,  Rachel Eisenhower ,  Lutz Bruegemann

发明人： Rolf-Dieter Schipper ,  Eduard Konusch ,  Rachel Eisenhower ,  Lutz Bruegemann

IPC分类号： G01N23/20

CPC分类号： G01N23/20025

摘要： An X-ray reflectometry apparatus comprises an X-ray source (1) configured to emit an incident X-ray beam directed onto a sample measuring position and an X-ray detector (2) configured to detect an X-ray beam (3) reflected from a surface of a selected sample (4) located in said sample measuring position and with a multiple sample holder (5) comprising an essentially horizontal one- or two-dimensional array of sample resting positions into which solid samples can be placed from above. A drive mechanism (6) moves the sample holder in one or two directions within a horizontal plane underneath the sample measuring position in order to place a selected sample (4) directly beneath the measuring position and a sample lift mechanism (7) has a vertically movable piston (8) located below the multiple sample holder (5) beneath the sample measuring position. When the sample lift mechanism (7) is activated, the piston (8) moves upwards against a bottom surface of the selected sample (4) or sample container (9) containing said selected sample (4), lifts the selected sample (4) or sample container (9) until it touches a stop (10) that keeps the sample (4) in the sample measuring position. When the sample lift mechanism (7) is deactivated, the piston (8) moves downwards and the sample (4) rests in its resting position. The device prevents signal cross talk to neighboring samples or to the sample holder, while also assuring an alignment which can be parallel to the incident beam.

摘要翻译： 一种X射线反射测量装置，包括：X射线源（1），被配置为发射指向样本测量位置的入射X射线束;以及X射线检测器（2），被配置为检测X射线束（3） 从位于所述样品测量位置的所选样品（4）的表面反射并且具有多个样品保持器（5），所述多个样品保持器（5）包含基本上水平的一维或二维样品静止位置阵列，固体样品可以从上方放置在其中 。 驱动机构（6）在样品测量位置下方的水平平面内沿一个或两个方向移动样品架，以将选定的样品（4）直接放置在测量位置的正下方，并且样品提升机构（7）具有垂直 位于样品测量位置下方的多个样品保持器（5）下方的活动活塞（8）。 当样品提升机构（7）被启动时，活塞（8）相对于所选择的样品（4）或含有所选样品（4）的样品容器（9）的底表面向上移动，提升所选样品（4） 或样品容器（9），直到其接触将样品（4）保持在样品测量位置的停止（10）。 当样品提升机构（7）停用时，活塞（8）向下移动，样品（4）处于其静止位置。 该装置防止与相邻样品或样品保持器的信号串扰，同时还确保可平行于入射光束的对准。

公开(公告)号：US20050105684A1

公开(公告)日：2005-05-19

申请号：US10927427

申请日：2004-08-26

申请人： Lutz Bruegemann ,  Ekkehard Gerndt ,  Heiko Ress ,  Kurt Helming ,  Uwe Preckwinkel

发明人： Lutz Bruegemann ,  Ekkehard Gerndt ,  Heiko Ress ,  Kurt Helming ,  Uwe Preckwinkel

IPC分类号： G01N23/207 ,  G01N23/20 ,  G01J3/28

CPC分类号： G01N23/207

摘要： A detector arrangement for detecting X-ray or neutron radiation redirected from a sample makes use of a one-dimensional particle or photon counting detector. The detector is oriented along a direction that is disposed substantially perpendicularly to a straight line extending between the sample and the detector. The detector may be rotated within the detection plane to allow inexpensive acquisition of two-dimensional diffraction patterns without the use of a two-dimensional detector.

摘要翻译： 用于检测从样品重定向的X射线或中子辐射的检测器装置使用一维粒子或光子计数检测器。 检测器沿着基本上垂直于在样品和检测器之间延伸的直线设置的方向定向。 检测器可以在检测平面内旋转，从而在不使用二维检测器的情况下便宜地获取二维衍射图。

公开(公告)号：US07263161B2

公开(公告)日：2007-08-28

申请号：US11236651

申请日：2005-09-28

申请人： Ekkehard Gerndt ,  Pawel Grybos ,  Lutz Bruegemann ,  Rachel Eisenhower ,  Arne Kasten

发明人： Ekkehard Gerndt ,  Pawel Grybos ,  Lutz Bruegemann ,  Rachel Eisenhower ,  Arne Kasten

IPC分类号： G01N23/20

CPC分类号： G01N23/20 ,  G01T1/2914

摘要： An X-ray or neutron-optical analysis device comprising means for directing radiation from a source (1) onto a sample (2), and a detector (7) with n substantially identical detector elements (Di) which are disposed parallel, next to each other in a first direction x and which extend in strips in a second direction y, wherein i=1, . . . n, for one-dimensional spatially-resolved detection of radiation reflected, scattered or diffracted by the sample (2) onto the detector (7), and with a detection electronics for processing the detector signals of the n detector elements (Di), wherein the detection electronics can reliably process a maximum radiation intensity per detector element (Di) without overloading, is characterized in that an optical element is disposed in front of the detector (7) which covers or weakens radiation incident on the surfaces of the respective n detector elements (Di) in correspondence with a predetermined, non-constant transmission function f(x) and/or the optical element comprises a collimator (6) which can be displaced along the strip direction y. The inventive analysis device permits artificial enlargement of the dynamic range of the detector (7).

摘要翻译： 一种X射线或中子光学分析装置，包括用于将来自源（1）的辐射引导到样品（2）上的装置，以及具有n个基本上相同的检测器元件（D）的检测器（7） ），它们在第一方向x彼此相邻地平行设置，并且在第二方向y上以条状延伸，其中i = 1。 。 。 n，用于由样品（2）反射，散射或衍射到检测器（7）上的辐射的一维空间分辨检测，以及用于处理n个检测器元件的检测器信号的检测电子装置（D＆ 其中检测电子装置可以可靠地处理每个检测器元件的最大辐射强度而不过载，其特征在于，光学元件设置在检测器的前面（ 7），其对应于预定的非常数透射函数f（x）覆盖或削弱入射在各个n个检测器元件（D SUB）上的辐射的辐射， 准直器（6），其可沿条带方向y移位。 本发明的分析装置允许人造扩大检测器（7）的动态范围。

公开(公告)号：US07746980B1

公开(公告)日：2010-06-29

申请号：US12314723

申请日：2008-12-16

申请人： Rolf-Dieter Schipper ,  Eduard Konusch ,  Rachel Eisenhower ,  Lutz Bruegemann

发明人： Rolf-Dieter Schipper ,  Eduard Konusch ,  Rachel Eisenhower ,  Lutz Bruegemann

IPC分类号： G01N23/20 ,  H05G1/00

CPC分类号： G01N23/20025

摘要： An X-ray reflectometry apparatus comprises an X-ray source (1) configured to emit an incident X-ray beam directed onto a sample measuring position and an X-ray detector (2) configured to detect an X-ray beam (3) reflected from a surface of a selected sample (4) located in said sample measuring position and with a multiple sample holder (5) comprising an essentially horizontal one- or two-dimensional array of sample resting positions into which solid samples can be placed from above. A drive mechanism (6) moves the sample holder in one or two directions within a horizontal plane underneath the sample measuring position in order to place a selected sample (4) directly beneath the measuring position and a sample lift mechanism (7) has a vertically movable piston (8) located below the multiple sample holder (5) beneath the sample measuring position. When the sample lift mechanism (7) is activated, the piston (8) moves upwards against a bottom surface of the selected sample (4) or sample container (9) containing said selected sample (4), lifts the selected sample (4) or sample container (9) until it touches a stop (10) that keeps the sample (4) in the sample measuring position. When the sample lift mechanism (7) is deactivated, the piston (8) moves downwards and the sample (4) rests in its resting position. The device prevents signal cross talk to neighboring samples or to the sample holder, while also assuring an alignment which can be parallel to the incident beam.

摘要翻译： 一种X射线反射测量装置，包括：X射线源（1），被配置为发射指向样本测量位置的入射X射线束;以及X射线检测器（2），被配置为检测X射线束（3） 从位于所述样品测量位置的所选样品（4）的表面反射并且具有多个样品保持器（5），所述多个样品保持器（5）包含基本上水平的一维或二维样品静止位置阵列，固体样品可以从上方放置在其中 。 驱动机构（6）在样品测量位置下方的水平平面内沿一个或两个方向移动样品架，以将选定的样品（4）直接放置在测量位置的正下方，并且样品提升机构（7）具有垂直 位于样品测量位置下方的多个样品保持器（5）下方的活动活塞（8）。 当样品提升机构（7）被启动时，活塞（8）相对于所选择的样品（4）或含有所选样品（4）的样品容器（9）的底表面向上移动，提升所选样品（4） 或样品容器（9），直到其接触将样品（4）保持在样品测量位置的停止（10）。 当样品提升机构（7）停用时，活塞（8）向下移动，样品（4）处于其静止位置。 该装置防止与相邻样品或样品保持器的信号串扰，同时还确保可平行于入射光束的对准。