公开(公告)号：US10302880B2

公开(公告)日：2019-05-28

申请号：US16110587

申请日：2018-08-23

Applicant: Luxtera, Inc.

Inventor： Daniel Kucharski ,  John Andrew Guckenberger ,  Thierry Pinguet ,  Sherif Abdalla

IPC: G02B6/42

Abstract: A method and system for implementing high-speed electrical interfaces between semiconductor dies in optical communication systems are disclosed and may include communicating electrical signals between a first die and a second die via coupling pads which may be located in low impedance points in Tx and Rx paths. The electrical signals may be communicated via one or more current-mode, controlled impedance, and/or capacitively-coupled interfaces. The current-mode interface may include a cascode amplifier stage split between source and drain terminals of transistors on the dies. The controlled-impedance interfaces may include transmission line drivers on a first die and transmission lines on a second die. The capacitively-coupled interfaces may include capacitors formed by contact pads on the dies. The coupling pads may be connected via one or more of: wire bonds, metal pillars, solder balls, or conductive resin. The dies may comprise CMOS and may be coupled in a flip-chip configuration.

公开(公告)号：US10256908B2

公开(公告)日：2019-04-09

申请号：US14729826

申请日：2015-06-03

Applicant: Luxtera, Inc.

Inventor： Attila Mekis ,  Peter DeDobbelaere ,  Kosei Yokoyama ,  Sherif Abdalla ,  Steffen Gloeckner ,  John Guckenberger ,  Thierry Pinguet ,  Gianlorenzo Masini ,  Daniel Kucharski

IPC: H04B10/2575 ,  H04B10/40 ,  H01L21/84 ,  H01L27/12 ,  H01L27/06 ,  H01L25/16 ,  H01L25/065

Abstract: Methods and systems for monolithic integration of photonics and electronics in CMOS processes are disclosed and may include in an optoelectronic transceiver comprising photonic and electronic devices from two complementary metal-oxide semiconductor (CMOS) die with different silicon layer thicknesses for the photonic and electronic devices, the CMOS die bonded together by metal contacts: communicating optical signals and electronic signals to and from said optoelectronic transceiver utilizing a received continuous wave optical signal as a source signal. A first of the CMOS die includes the photonic devices and a second includes the electronic devices. Electrical signals may be communicated between electrical devices to the optical devices utilizing through-silicon vias coupled to the metal contacts. The metal contacts may include back-end metals from a CMOS process. The electronic and photonic devices may be fabricated on SOI wafers, with the SOI wafers being diced to form the CMOS die.

公开(公告)号：US20190293883A1

公开(公告)日：2019-09-26

申请号：US16424136

申请日：2019-05-28

Applicant: Luxtera, Inc.

Inventor： Daniel Kucharski ,  John Andrew Guckenberger ,  Thierry Pinguet ,  Sherif Abdalla

IPC: G02B6/42

Abstract: A method and system for implementing high-speed electrical interfaces between semiconductor dies in optical communication systems are disclosed and may include communicating electrical signals between a first die and a second die via coupling pads which may be located in low impedance points in Tx and Rx paths. The electrical signals may be communicated via one or more current-mode, controlled impedance, and/or capacitively-coupled interfaces. The current-mode interface may include a cascode amplifier stage split between source and drain terminals of transistors on the dies. The controlled-impedance interfaces may include transmission line drivers on a first die and transmission lines on a second die. The capacitively-coupled interfaces may include capacitors formed by contact pads on the dies. The coupling pads may be connected via one or more of: wire bonds, metal pillars, solder balls, or conductive resin. The dies may comprise CMOS and may be coupled in a flip-chip configuration.

公开(公告)号：US20190238228A1

公开(公告)日：2019-08-01

申请号：US16378119

申请日：2019-04-08

Applicant: Luxtera, Inc.

Inventor： Attila Mekis ,  Peter DeDobbelaere ,  Kosei Yokoyama ,  Sherif Abdalla ,  Steffen Gloeckner ,  John Guckenberger ,  Thierry Pinguet ,  Gianlorenzo Masini ,  Daniel Kucharski

IPC: H04B10/2575 ,  H01L27/12 ,  H04B10/40 ,  H01L21/84

CPC classification number: H04B10/2575 ,  H01L21/84 ,  H01L25/0652 ,  H01L25/167 ,  H01L27/0688 ,  H01L27/1203 ,  H01L2225/06541 ,  H04B10/40

Abstract: Methods and systems for monolithic integration of photonics and electronics in CMOS processes are disclosed and may include fabricating photonic and electronic devices on two CMOS wafers with different silicon layer thicknesses. The devices may be fabricated on semiconductor-on-insulator (SOI) wafers utilizing a bulk CMOS process and/or on a SOI wafer utilizing a SOI CMOS process. The different thicknesses may be fabricated utilizing a double SOI process and/or a selective area growth process. Cladding layers may be fabricated utilizing one or more oxygen implants and/or utilizing CMOS trench oxide on the CMOS wafer. Silicon may be deposited on the CMOS trench oxide utilizing epitaxial lateral overgrowth. Cladding layers may be fabricated utilizing selective backside etching. Reflective surfaces may be fabricated by depositing metal on the selectively etched regions. Silicon dioxide or silicon germanium integrated in the CMOS wafer may be utilized as an etch stop layer.

公开(公告)号：US20190296830A1

公开(公告)日：2019-09-26

申请号：US16424137

申请日：2019-05-28

Applicant: Luxtera, Inc.

Inventor： Daniel Kucharski ,  Brian Welch ,  Sherif Abdalla

IPC: H04B10/516 ,  G02F1/01 ,  G02F1/225 ,  G02B26/06 ,  H04B10/54 ,  H04B10/50 ,  H04B10/079

Abstract: Methods and systems for encoding multi-level pulse amplitude modulated signals using integrated optoelectronics are disclosed and may include generating a multi-level, amplitude-modulated optical signal utilizing an optical modulator driven by first and second electrical input signals, where the optical modulator may configure levels in the multi-level amplitude modulated optical signal, drivers are coupled to the optical modulator; and the first and second electrical input signals may be synchronized before being communicated to the drivers. The optical modulator may include optical modulator elements coupled in series and configured into groups. The number of optical modular elements and groups may configure the number of levels in the multi-level amplitude modulated optical signal. Unit drivers may be coupled to each of the groups. The electrical input signals may be synchronized before communicating them to the unit drivers utilizing flip-flops. Phase addition may be synchronized utilizing one or more electrical delay lines.

公开(公告)号：US10341021B2

公开(公告)日：2019-07-02

申请号：US15804680

申请日：2017-11-06

Applicant: Luxtera, Inc.

Inventor： Thierry Pinguet ,  Steffen Gloeckner ,  Sherif Abdalla ,  Sina Mirsaidi ,  Peter De Dobbelaere

IPC: H04B10/25 ,  G02B6/122 ,  G02B6/124 ,  G02B6/43 ,  G02B6/42

Abstract: Methods and systems for optoelectronics transceivers integrated on a CMOS chip are disclosed and may include receiving optical signals from optical fibers via grating couplers on a top surface of a CMOS chip, which may include a guard ring. Photodetectors may be integrated in the CMOS chip. A CW optical signal may be received from a laser source via optical couplers, and may be modulated using optical modulators, which may be Mach-Zehnder and/or ring modulators. Circuitry in the CMOS chip may drive the optical modulators. The modulated optical signal may be communicated out of the top surface of the CMOS chip into optical fibers via grating couplers. The received optical signals may be communicated between devices via waveguides. The photodetectors may include germanium waveguide photodiodes, avalanche photodiodes, and/or heterojunction diodes. The CW optical signal may be generated using an edge-emitting and/or a vertical-cavity surface emitting semiconductor laser.

公开(公告)号：US10305597B2

公开(公告)日：2019-05-28

申请号：US15407440

申请日：2017-01-17

Applicant: Luxtera, Inc.

Inventor： Daniel Kucharski ,  Brian Welch ,  Sherif Abdalla

IPC: G02B26/00 ,  G02F1/01 ,  H04B10/516 ,  G02F1/225 ,  H04B10/50 ,  H04B10/54 ,  G02B26/06 ,  H04B10/079 ,  G02F1/21 ,  G02B26/08

Abstract: Methods and systems for encoding multi-level pulse amplitude modulated signals using integrated optoelectronics are disclosed and may include generating a multi-level, amplitude-modulated optical signal utilizing an optical modulator driven by first and second electrical input signals, where the optical modulator may configure levels in the multi-level amplitude modulated optical signal, drivers are coupled to the optical modulator; and the first and second electrical input signals may be synchronized before being communicated to the drivers. The optical modulator may include optical modulator elements coupled in series and configured into groups. The number of optical modular elements and groups may configure the number of levels in the multi-level amplitude modulated optical signal. Unit drivers may be coupled to each of the groups. The electrical input signals may be synchronized before communicating them to the unit drivers utilizing flip-flops. Phase addition may be synchronized utilizing one or more electrical delay lines.

公开(公告)号：US10061094B2

公开(公告)日：2018-08-28

申请号：US15716103

申请日：2017-09-26

Applicant: Luxtera, Inc.

Inventor： Daniel Kucharski ,  John Andrew Guckenberger ,  Thierry Pinguet ,  Sherif Abdalla

IPC: G02B6/42

Abstract: A method and system for implementing high-speed electrical interfaces between semiconductor dies in optical communication systems are disclosed and may include communicating electrical signals between a first die and a second die via coupling pads which may be located in low impedance points in Tx and Rx paths. The electrical signals may be communicated via one or more current-mode, controlled impedance, and/or capacitively-coupled interfaces. The current-mode interface may include a cascode amplifier stage split between source and drain terminals of transistors on the dies. The controlled-impedance interfaces may include transmission line drivers on a first die and transmission lines on a second die. The capacitively-coupled interfaces may include capacitors formed by contact pads on the dies. The coupling pads may be connected via one or more of: wire bonds, metal pillars, solder balls, or conductive resin. The dies may comprise CMOS and may be coupled in a flip-chip configuration.

公开(公告)号：US20180074270A1

公开(公告)日：2018-03-15

申请号：US15818352

申请日：2017-11-20

Applicant: Luxtera, Inc.

Inventor： Thierry Pinguet ,  Sherif Abdalla ,  Mark Peterson ,  Gianlorenzo Masini

IPC: G02B6/42 ,  H04B10/27 ,  G02F1/225 ,  G02B6/12 ,  G02B6/34 ,  G02F1/21

CPC classification number: G02B6/428 ,  G02B6/12004 ,  G02B6/34 ,  G02B6/4295 ,  G02B2006/12107 ,  G02B2006/12123 ,  G02F1/2255 ,  G02F1/2257 ,  G02F2001/212 ,  H01L21/84 ,  H01L25/0652 ,  H01L27/0688 ,  H01L27/1203 ,  H01L2224/73265 ,  H01L2225/06541 ,  H04B10/27

Abstract: Methods and systems for hybrid integration of optical communication systems are disclosed and may include receiving a continuous wave (CW) optical signal in a silicon photonics die (SPD) from an optical source external to the SPD. The received CW optical signal may be processed based on electrical signals received from an electronics die bonded to the SPD via metal interconnects. A modulated optical signal may be received in the SPD from optical fibers coupled to the SPD. An electrical signal may be generated in the SPD based on the received modulated optical signal and communicated to the electronics die via the metal interconnects. The CW optical signal may be received from an optical source assembly coupled to the SPD and/or from one or more optical fibers coupled to the SPD. The received CW optical signal may be processed utilizing one or more optical modulators, which may comprise Mach-Zehnder interferometer modulators.

公开(公告)号：US20180017747A1

公开(公告)日：2018-01-18

申请号：US15716103

申请日：2017-09-26

Applicant: Luxtera, Inc.

Inventor： Daniel Kucharski ,  John Andrew Guckenberger ,  Thierry Pinguet ,  Sherif Abdalla

IPC: G02B6/42

CPC classification number: G02B6/4274 ,  G02B6/4286

Abstract: A method and system for implementing high-speed electrical interfaces between semiconductor dies in optical communication systems are disclosed and may include communicating electrical signals between a first die and a second die via coupling pads which may be located in low impedance points in Tx and Rx paths. The electrical signals may be communicated via one or more current-mode, controlled impedance, and/or capacitively-coupled interfaces. The current-mode interface may include a cascode amplifier stage split between source and drain terminals of transistors on the dies. The controlled-impedance interfaces may include transmission line drivers on a first die and transmission lines on a second die. The capacitively-coupled interfaces may include capacitors formed by contact pads on the dies. The coupling pads may be connected via one or more of: wire bonds, metal pillars, solder balls, or conductive resin. The dies may comprise CMOS and may be coupled in a flip-chip configuration.