GAS LASER OSCILLATION APPARATUS OF ORTHOGONAL EXCITATION TYPE
    1.
    发明申请
    GAS LASER OSCILLATION APPARATUS OF ORTHOGONAL EXCITATION TYPE 有权
    正交激发类型的气体激光振荡装置

    公开(公告)号:US20160240992A1

    公开(公告)日:2016-08-18

    申请号:US15028775

    申请日:2014-05-27

    摘要: A gas laser oscillation apparatus of orthogonal excitation type includes an electric discharge region having a pair of electric discharge electrodes, an axial flow blower having a plurality of rotor vanes and working by a permanent magnet motor, a first heat exchanger having a plurality of cooling fins, the cooling fins arranged on a plane perpendicular to an optical axis, a second heat exchanger having a plurality of cooling fins, the cooling fins arranged on a plane perpendicular to the optical axis, a gas duct having a gas passageway and arranged between the electric discharge region and the first heat exchanger, the axial flow blower being arranged on the gas passageway. The axial flow blower is arranged on a windward side of the first heat exchanger. The second heat exchanger is arranged on a windward side of the axial flow blower.

    摘要翻译: 正交激励型气体激光振荡装置包括具有一对放电电极的放电区域,具有多个转子叶片并由永磁电动机加工的轴流鼓风机,具有多个散热片的第一热交换器 所述冷却翅片布置在与光轴垂直的平面上;第二热交换器,具有多个散热片,所述散热翅片布置在与所述光轴垂直的平面上;气体导管,具有气体通道并且布置在所述电气 排出区域和第一热交换器,轴流鼓风机布置在气体通道上。 轴流鼓风机布置在第一热交换器的迎风侧。 第二热交换器设置在轴流鼓风机的迎风侧。

    Laser apparatus and extreme ultraviolet light generation apparatus

    公开(公告)号:US10211589B2

    公开(公告)日:2019-02-19

    申请号:US15552730

    申请日:2016-04-20

    摘要: Kinematic mounts have three points having zero degree of freedom, one degree of freedom, and two degrees of freedom, respectively. As viewed from a direction perpendicular to a plane containing the three points, an extension of an entrance optical axis of a laser beam to an amplifying apparatus or an extension of an exit optical axis from the amplifying apparatus is oriented to the point with the zero degree of freedom. A translational direction of the point with the one degree of freedom is oriented to the point with the zero degree of freedom. One of the extension of the entrance optical axis and the extension of the exist optical axis passes on a side closer to the point with the two degrees of freedom with respect to a side of the point with the one degree of freedom.

    Gas laser device
    4.
    发明授权
    Gas laser device 有权
    气体激光装置

    公开(公告)号:US09502850B2

    公开(公告)日:2016-11-22

    申请号:US14759942

    申请日:2014-03-06

    摘要: A gas laser device includes a housing for enclosing a laser gas. The housing includes a main body having a frame-like structure with openings formed on both sides thereof, and a pair of cover members detachably attached to cover each of the openings. The main body is provided with an upper plate and a lower plate each extending along the optical axis of the laser light, and a pair of side plates respectively connecting both ends of the upper plate and the lower plate. Each of the cover members includes a partially cylindrical member having an arc-like cross-sectional shape in a plane perpendicular to the optical axis and extending along the optical axis, and a pair of side wall members occluding both ends of the partially cylindrical member. The partially cylindrical member has a bellows portion molded into a shape having peaks and valleys each alternating along the optical axis.

    摘要翻译: 气体激光装置包括用于封闭激光气体的壳体。 壳体包括主体,其具有形成在其两侧上的开口的框架状结构,以及可拆卸地安装以覆盖每个开口的一对盖构件。 主体设置有沿着激光的光轴延伸的上板和下板,以及分别连接上板和下板的两端的一对侧板。 每个盖构件包括在与光轴垂直并且沿着光轴延伸的平面中具有弧形横截面形状的部分圆柱形构件,以及封闭部分圆柱形构件的两端的一对侧壁构件。 部分圆柱形构件具有模制成具有每个沿光轴交替的峰谷的波纹管部分。