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公开(公告)号:US20240318342A1
公开(公告)日:2024-09-26
申请号:US18578049
申请日:2022-07-25
Applicant: MacDermid Enthone Inc.
Inventor: Jianwen Han , Pingping Ye , Kyle M Whitten , Stephan I. Braye , Thomas B. Richardson , Elie H. Najjar
Abstract: A copper electrolyte comprising a copper salt, a source of halide ions, and a linear or branched polyhydroxyl. The copper electrolyte is used to deposit copper having a high density of nanotwinned columnar copper grains on a substrate. The linear or branched polyhydroxy] may comprise a reaction product between 2,3-epoxy-1-propanol and an amine compound. A leveler comprising a polymeric quaternary nitrogen species and/or an accelerator comprising an organic sulfur compound may also be added to the copper electrolyte so long as the nanotwinned columnar copper grains are maintained.