公开(公告)号：US09425086B2

公开(公告)日：2016-08-23

申请号：US14138007

申请日：2013-12-21

Applicant: Macronix International Co., Ltd.

Inventor： Fang-Hao Hsu ,  Hsu-Sheng Yu ,  Kuo-Feng Lo ,  Hong-Ji Lee

IPC: H01L21/768 ,  H01L23/485 ,  H01L23/31 ,  H01L23/532

CPC classification number: H01L21/76802 ,  H01L21/31105 ,  H01L21/31116 ,  H01L21/31144 ,  H01L21/76804 ,  H01L21/76831 ,  H01L23/3192 ,  H01L23/485 ,  H01L23/53257 ,  H01L2924/00 ,  H01L2924/0002

Abstract: A method of eliminating overhang in a contact hole formed in a contact film stack is described. A liner layer is overlaid on the contact film stack, the liner also coating the contact hole. A portion of the liner is removed to expose the overhang, and the exposed overhang is removed. The liner is also used to fill-in a bowing profile of the contact hole, thereby rendering sidewalls of the contact hole smooth and straight suitable for metal fill-in while suppressing piping defects.

Abstract translation: 描述了形成在接触膜叠层中的接触孔中消除悬垂的方法。 衬垫层覆盖在接触膜叠层上，衬垫也涂覆接触孔。 衬里的一部分被去除以露出突出端，并且去除暴露的突出端。 衬套也用于填充接触孔的弯曲轮廓，从而使接触孔的侧壁平滑和直线适于金属填充，同时抑制管道缺陷。

公开(公告)号：US20150179569A1

公开(公告)日：2015-06-25

申请号：US14138007

申请日：2013-12-21

Applicant: Macronix International Co., Ltd.

Inventor： Fang-Hao Hsu ,  Hsu-Sheng Yu ,  Kuo-Feng Lo ,  Hong-Ji Lee

IPC: H01L23/522 ,  H01L21/768

CPC classification number: H01L21/76802 ,  H01L21/31105 ,  H01L21/31116 ,  H01L21/31144 ,  H01L21/76804 ,  H01L21/76831 ,  H01L23/3192 ,  H01L23/485 ,  H01L23/53257 ,  H01L2924/00 ,  H01L2924/0002

Abstract: A method of eliminating overhang in a contact hole formed in a contact film stack is described. A liner layer is overlaid on the contact film stack, the liner also coating the contact hole. A portion of the liner is removed to expose the overhang, and the exposed overhang is removed. The liner is also used to fill-in a bowing profile of the contact hole, thereby rendering sidewalls of the contact hole smooth and straight suitable for metal fill-in while suppressing piping defects.

Abstract translation: 描述了形成在接触膜叠层中的接触孔中消除悬垂的方法。 衬垫层覆盖在接触膜叠层上，衬垫也涂覆接触孔。 衬里的一部分被去除以露出突出端，并且去除暴露的突出端。 衬套也用于填充接触孔的弯曲轮廓，从而使接触孔的侧壁平滑和直线适于金属填充，同时抑制管道缺陷。