Liquid material supply system and method for semiconductor manufacturing
    1.
    发明授权
    Liquid material supply system and method for semiconductor manufacturing 失效
    液体材料供应系统和半导体制造方法

    公开(公告)号:US06933233B2

    公开(公告)日:2005-08-23

    申请号:US10383892

    申请日:2003-03-07

    CPC分类号: B01D19/0042 B01D19/0005

    摘要: A liquid material supply system in which an inert gas is injected into a material tank accommodating a liquid material so as to discharge the liquid material into a liquid material discharge pipe connected to the material tank and that the inert gas dissolved or mixed in the discharged liquid material is trapped by a gas trap provided on the liquid material discharge pipe, is constructed in such a manner that when a dissolution temperature characteristic of the inert gas with respect to the liquid material is negative, an upstream side of the liquid material discharge pipe with respect to the gas trap is heated while the downstream side of the liquid material discharge pipe with respect to the gas trap is cooled.

    摘要翻译: 一种液体材料供给系统,其中将惰性气体注入容纳液体材料的材料罐中,以便将液体材料排放到与材料罐连接的液体材料排出管中,并且将惰性气体溶解或混合在排出液体中 材料被设置在液体材料排出管上的气体捕集阱捕获,其结构是当惰性气体相对于液体材料的溶解温度特性为负时,液体排出管的上游侧具有 在液体材料排出管的下游侧相对于气体收集器被冷却的同时,对气阱进行加热。

    Liquid material evaporation apparatus for semiconductor manufacturing

    公开(公告)号:US07115186B2

    公开(公告)日:2006-10-03

    申请号:US10386318

    申请日:2003-03-11

    IPC分类号: B01D1/14 B01D1/30 B01F3/04

    CPC分类号: B01B1/005 B01D1/16 Y10S261/65

    摘要: A liquid material evaporation apparatus including a mixing chamber, a flow control unit, a first flow passage for introducing a liquid material, a second flow passage for introducing a carrier gas connected to the mixing chamber through a first nozzle, the first nozzle inhibiting backflow from the mixing chamber into the second flow passage. A third flow passage for discharging evaporated mixed gas is connected to the mixing chamber through a second nozzle, the mixed liquid material and carrier gas being forced through the second nozzle by the flow control unit, the mixed liquid material and carrier gas depressurizing after passing through the second nozzle to evaporate into a mixed gas in the third flow passage. Heat is applied to the mixing chamber and the second and third flow passages to enhance mixing in the mixing chamber and to avoid condensation in the third flow passage.

    Image processing apparatus, image processing method, and computer-readable storage medium
    3.
    发明授权
    Image processing apparatus, image processing method, and computer-readable storage medium 有权
    图像处理装置,图像处理方法和计算机可读存储介质

    公开(公告)号:US08983122B2

    公开(公告)日:2015-03-17

    申请号:US13411445

    申请日:2012-03-02

    申请人: Hideaki Miyamoto

    发明人: Hideaki Miyamoto

    IPC分类号: G06K9/00 G06T5/00

    摘要: An image processing apparatus includes a first acquisition unit configured to obtain identification information for a plurality of blocks of an image, a second acquisition unit configured to obtain information to be used for image processing from a pixel value of a region of the image determined based on the identification information, and an image processing unit configured to perform image processing of the image based on the information obtained by the second acquisition unit.

    摘要翻译: 一种图像处理装置包括:第一获取单元,被配置为获得图像的多个块的识别信息;第二获取单元,被配置为从根据图像确定的图像的区域的像素值获得用于图像处理的信息 所述识别信息和图像处理单元,被配置为基于由所述第二获取单元获得的信息来执行所述图像的图像处理。

    Imaging apparatus, control method thereof, and program
    5.
    发明授权
    Imaging apparatus, control method thereof, and program 有权
    成像设备及其控制方法及程序

    公开(公告)号:US08710446B2

    公开(公告)日:2014-04-29

    申请号:US12765108

    申请日:2010-04-22

    CPC分类号: G01T1/2928

    摘要: An imaging apparatus includes: a plurality of photoelectric converters each adapted to perform photoelectric conversion in response to receiving light, and output an electrical signal; a holding unit adapted to hold, for each of the plurality of photoelectric converters, a correction value for correcting photoelectric conversion characteristics of the photoelectric converter; and a correction unit adapted to correct each of the electrical signals output by the plurality of photoelectric converters, using the corresponding correction values, wherein the correction unit corrects each of the electrical signals based on the correction values, which have been increased or decreased in accordance with a prescribed pixel arrangement pattern, and the imaging apparatus comprises a determination unit adapted to evaluate correction results that are based on the correction values increased or decreased in accordance with the prescribed pattern, and determine a presence of a correction error in the correction values held in the holding unit.

    摘要翻译: 一种成像装置包括:多个光电转换器,每个光电转换器适于响应于接收光执行光电转换,并输出电信号; 保持单元,适于为所述多个光电转换器中的每一个保持用于校正所述光电转换器的光电转换特性的校正值; 以及校正单元,其使用相应的校正值来校正由所述多个光电转换器输出的每个电信号,其中所述校正单元基于已经根据所述多个光电转换器增大或减小的校正值校正每个所述电信号 具有规定的像素排列图案,并且所述成像装置包括确定单元,所述确定单元适于基于根据所述规定图案增加或减少的校正值来评估校正结果,并且确定所保持的校正值中存在校正误差 在持有单位。

    Liquid material vaporization apparatus
    6.
    发明授权
    Liquid material vaporization apparatus 有权
    液体材料蒸发装置

    公开(公告)号:US08544828B2

    公开(公告)日:2013-10-01

    申请号:US12809051

    申请日:2008-12-05

    IPC分类号: B01F3/04

    摘要: An object of this invention is to provide a liquid material vaporization apparatus that is capable of increasing the flow rate of a carrier gas without changing the shape of a nozzle. The liquid material vaporization apparatus comprises a gas-liquid mixing chamber in which a liquid material and the carrier gas are mixed, a liquid material introduction path that introduces the liquid material into the gas-liquid mixing chamber, a carrier gas introduction path that introduces the carrier gas into the gas-liquid mixing chamber, a vaporization nozzle section that is communicated with the gas-liquid mixing chamber to subject a mixture of the liquid material and the carrier gas to flash boiling, and a mixed gas derivation path that is communicated with the vaporization nozzle section to derive the mixed gas vaporized by the vaporization nozzle section.

    摘要翻译: 本发明的目的是提供一种液体材料蒸发装置,其能够增加载气的流量而不改变喷嘴的形状。 液体材料蒸发装置包括混合有液体材料和载气的气液混合室,将液体材料引入气液混合室的液体材料导入路径,导入 载气进入气液混合室,蒸气喷嘴部与气液混合室连通以使液体材料和载气混合物闪蒸,以及与气液混合室连通的混合气体导出路径 所述蒸发喷嘴部分导出由蒸发喷嘴部分蒸发的混合气体。

    Image processing apparatus, image processing method, and computer program
    7.
    发明授权
    Image processing apparatus, image processing method, and computer program 有权
    图像处理装置,图像处理方法和计算机程序

    公开(公告)号:US07991212B2

    公开(公告)日:2011-08-02

    申请号:US12351094

    申请日:2009-01-09

    申请人: Hideaki Miyamoto

    发明人: Hideaki Miyamoto

    IPC分类号: G06K9/00

    摘要: An image processing apparatus is provided. The apparatus includes a setting unit configured to set a radiation exposure condition; a radiation generation unit configured to generate a radiation beam according to the radiation exposure condition; a two-dimensional radiation sensor configured to transform the reached radiation beam into a radiation image data and output the radiation image data; a storage unit configured to store the radiation image data; a detecting unit configured to detect a scattered radiation fluctuation in the reached radiation beam based on a comparison of two radiation image data with different radiation exposure condition, where the two radiation image data are selected within the plurality of radiation image data stored in the storage unit; and an image processing unit configured to extract a outline of a region of interest from the radiation image data based on the scattered radiation fluctuation detected by the detecting unit.

    摘要翻译: 提供一种图像处理装置。 该装置包括设置单元,其被配置为设置辐射曝光条件; 辐射生成单元,被配置为根据所述辐射照射条件产生辐射束; 二维辐射传感器,被配置为将到达的辐射束变换成辐射图像数据并输出放射线图像数据; 存储单元,被配置为存储所述放射线图像数据; 检测单元,被配置为基于两个辐射图像数据与不同的曝光条件的比较来检测所达到的辐射束中的散射辐射波动,其中在存储在存储单元中的多个辐射图像数据中选择两个辐射图像数据 ; 以及图像处理单元,被配置为基于由所述检测单元检测到的散射辐射波动,从所述放射线图像数据中提取感兴趣区域的轮廓。

    LIQUID MATERIAL VAPORIZATION APPARATUS
    8.
    发明申请
    LIQUID MATERIAL VAPORIZATION APPARATUS 有权
    液体物质蒸发装置

    公开(公告)号:US20110115104A1

    公开(公告)日:2011-05-19

    申请号:US12809051

    申请日:2008-12-05

    IPC分类号: B01F3/04

    摘要: An object of this invention is to provide a liquid material vaporization apparatus that is capable of increasing the flow rate of a carrier gas without changing the shape of a nozzle. The liquid material vaporization apparatus comprises a gas-liquid mixing chamber in which a liquid material and the carrier gas are mixed, a liquid material introduction path that introduces the liquid material into the gas-liquid mixing chamber, a carrier gas introduction path that introduces the carrier gas into the gas-liquid mixing chamber, a vaporization nozzle section that is communicated with the gas-liquid mixing chamber to subject a mixture of the liquid material and the carrier gas to flash boiling, and a mixed gas derivation path that is communicated with the vaporization nozzle section to derive the mixed gas vaporized by the vaporization nozzle section.

    摘要翻译: 本发明的目的是提供一种液体材料蒸发装置,其能够增加载气的流量而不改变喷嘴的形状。 液体材料蒸发装置包括混合有液体材料和载气的气液混合室,将液体材料引入气液混合室的液体材料导入路径,导入 载气进入气液混合室,蒸气喷嘴部与气液混合室连通以使液体材料和载气混合物闪蒸,以及与气液混合室连通的混合气体导出路径 所述蒸发喷嘴部分导出由蒸发喷嘴部分蒸发的混合气体。

    Memory
    9.
    发明授权
    Memory 有权
    记忆

    公开(公告)号:US07564730B2

    公开(公告)日:2009-07-21

    申请号:US11760383

    申请日:2007-06-08

    申请人: Hideaki Miyamoto

    发明人: Hideaki Miyamoto

    IPC分类号: G11C7/00

    摘要: A memory includes an access control portion performing an internal access operation on the basis of an external access operation, a refresh control portion performing a refresh operation, a refresh division control portion dividing the refresh operation into a read operation and a rewrite operation and an address determination portion determining whether or not an address to be subjected to the refresh operation and an address to be subjected to the external access operation during the refresh operation coincide with each other.

    摘要翻译: 存储器包括访问控制部分,其基于外部访问操作执行内部访问操作,执行刷新操作的刷新控制部分,将刷新操作分为读取操作和重写操作的刷新分割控制部分和地址 决定部分确定刷新操作期间要进行刷新操作的地址和要进行外部访问操作的地址是否一致。

    Ferroelectric memory with sub bit-lines connected to each other and to fixed potentials
    10.
    发明授权
    Ferroelectric memory with sub bit-lines connected to each other and to fixed potentials 有权
    铁电存储器,子位线彼此连接并具有固定电位

    公开(公告)号:US07558098B2

    公开(公告)日:2009-07-07

    申请号:US11739754

    申请日:2007-04-25

    申请人: Hideaki Miyamoto

    发明人: Hideaki Miyamoto

    IPC分类号: G11C5/06

    CPC分类号: G11C11/22

    摘要: A memory capable of suppressing increase of a chip area thereof while preventing nonselected subarrays from disturbance is obtained. This memory comprises a first transistor for connecting respective sub bit lines with each other, and connects the sub bit lines of the nonselected subarrays with each other through the first transistor and connects the same to fixed potentials arranged on both ends of a memory cell array at least in a read operation.

    摘要翻译: 获得能够抑制芯片面积的增加同时防止非选择的子阵列受到干扰的存储器。 该存储器包括用于将各个子位线彼此连接的第一晶体管,并且通过第一晶体管将非选择的子阵列的子位线彼此连接,并将其连接到布置在存储单元阵列两端的固定电位 最少在读操作。