公开(公告)号：US20060027772A1

公开(公告)日：2006-02-09

申请号：US11223828

申请日：2005-09-09

申请人： Martin Richter ,  Juergen Kruckow

发明人： Martin Richter ,  Juergen Kruckow

IPC分类号： F16K31/02

CPC分类号： F16K99/0001 ,  F04B43/043 ,  F16K99/0007 ,  F16K99/0015 ,  F16K99/0046 ,  F16K99/0057 ,  F16K2099/0074 ,  F16K2099/0094

摘要： A normally closed microvalve includes a fluid inlet, a fluid outlet, a deflectable closing element, which, in the closed state of the microvalve, is seated on a sealing lip, such that the fluid inlet is fluidically disconnected from the fluid outlet, and in the opened state of the microvalve, is spaced apart from the sealing lip, and a deflectable holding structure which is connected to the closing element such that, between the same, a space exists, which is in fluidic communication to the fluid outlet. An influence of a force onto the holding structure and the closing element in a first direction provides an opening-action to the microvalve, while an influence of a force onto the holding structure and the closing element in a second direction provides a closing-action. The fluid inlet and the closing element are arranged such that a pressure at the fluid inlet exerts a force in the second direction. An effective surface of the holding structure, which, when a pressure is applied to the fluid outlet, causes a force in the second direction, is greater than an effective surface of the closing element, which, when a pressure is applied to the fluid outlet, causes a force in the first direction.

公开(公告)号：US08382452B2

公开(公告)日：2013-02-26

申请号：US12743831

申请日：2007-11-23

申请人： Martin Richter ,  Juergen Kruckow

发明人： Martin Richter ,  Juergen Kruckow

IPC分类号： F04B17/00

CPC分类号： F04B43/043 ,  F04B43/12 ,  F04B49/10

摘要： A pump arrangement includes a pump having a pump inlet and a pump outlet, and a safety valve arranged between the pump outlet and an outlet of the pump arrangement and having a valve seat and a valve lid. The valve seat, the pump outlet and the pump inlet are patterned in a first surface of a first integrated part of the pump arrangement, whereas the valve lid is formed in a second integrated part of the pump arrangement. An inlet of the pump arrangement and a fluid region fluidically connected thereto are formed in a third part of the pump arrangement. The second integrated part is arranged between the first integrated part and the third part of the pump arrangement such that a pressure in the fluid region has a closing effect on the safety valve, the pump inlet and the inlet of the pump arrangement being connected fluidically.

摘要翻译： 泵装置包括具有泵入口和泵出口的泵，以及布置在泵出口和泵装置的出口之间并具有阀座和阀盖的安全阀。 泵座，泵出口和泵入口在泵装置的第一集成部分的第一表面中被图案化，而阀盖形成在泵装置的第二整体部分中。 在泵装置的第三部分中形成有泵装置的入口和与其流体连接的流体区域。 第二集成部件布置在第一集成部件和泵装置的第三部分之间，使得流体区域中的压力对安全阀具有闭合作用，泵装置的泵入口和入口流体连接。

公开(公告)号：US20100290935A1

公开(公告)日：2010-11-18

申请号：US12743831

申请日：2007-11-23

申请人： Martin Richter ,  Juergen Kruckow

发明人： Martin Richter ,  Juergen Kruckow

IPC分类号： F04B43/04 ,  F04B53/10

CPC分类号： F04B43/043 ,  F04B43/12 ,  F04B49/10

摘要： A pump arrangement includes a pump having a pump inlet and a pump outlet, and a safety valve arranged between the pump outlet and an outlet of the pump arrangement and having a valve seat and a valve lid. The valve seat, the pump outlet and the pump inlet are patterned in a first surface of a first integrated part of the pump arrangement, whereas the valve lid is formed in a second integrated part of the pump arrangement. An inlet of the pump arrangement and a fluid region fluidically connected thereto are formed in a third part of the pump arrangement. The second integrated part is arranged between the first integrated part and the third part of the pump arrangement such that a pressure in the fluid region has a closing effect on the safety valve, the pump inlet and the inlet of the pump arrangement being connected fluidically.

摘要翻译： 泵装置包括具有泵入口和泵出口的泵，以及布置在泵出口和泵装置的出口之间并具有阀座和阀盖的安全阀。 泵座，泵出口和泵入口在泵装置的第一集成部分的第一表面中被图案化，而阀盖形成在泵装置的第二整体部分中。 在泵装置的第三部分中形成有泵装置的入口和与其流体连接的流体区域。 第二集成部件布置在第一集成部件和泵装置的第三部分之间，使得流体区域中的压力对安全阀具有闭合作用，泵装置的泵入口和入口流体连接。

公开(公告)号：US09217426B2

公开(公告)日：2015-12-22

申请号：US12739031

申请日：2008-10-21

申请人： Martin Wackerle ,  Juergen Kruckow ,  Martin Richter ,  Klaus Heinrich

发明人： Martin Wackerle ,  Juergen Kruckow ,  Martin Richter ,  Klaus Heinrich

IPC分类号： F04B43/06 ,  F04B23/06 ,  F04B43/04 ,  F04B53/10

CPC分类号： F04B43/06 ,  F04B23/06 ,  F04B43/04 ,  F04B43/046 ,  F04B53/1047

摘要： A pump has an inlet opening, an outlet opening, a pump diaphragm comprising an opening, provided with a passive check valve, through the pump diaphragm, and an actuator configured to move the pump diaphragm between a first position and a second position. The passive check valve is configured such that a movement from the first position in the direction toward the second position has a closing effect, and that a movement from the second position in the direction toward the first position has an opening effect, so that a pumping cycle wherein the pump diaphragm is moved from the first to the second positions, and back, causes a net flow from the inlet opening to the outlet opening.

摘要翻译： 泵具有入口开口，出口开口，泵隔膜，其包括通过泵隔膜设置有被动止回阀的开口，以及构造成在第一位置和第二位置之间移动泵隔膜的致动器。 被动止回阀被构造成使得从第一位置朝向第二位置的方向的移动具有闭合效果，并且从朝向第一位置的方向从第二位置的移动具有打开效果，从而泵送 循环，其中泵隔膜从第一位置移动到第二位置，并且返回，导致从入口开口到出口开口的净流。

公开(公告)号：US20110280755A1

公开(公告)日：2011-11-17

申请号：US12739031

申请日：2008-10-21

申请人： Martin Wackerle ,  Juergen Kruckow ,  Martin Richter ,  Klaus Heinrich

发明人： Martin Wackerle ,  Juergen Kruckow ,  Martin Richter ,  Klaus Heinrich

IPC分类号： F04B53/10

CPC分类号： F04B43/06 ,  F04B23/06 ,  F04B43/04 ,  F04B43/046 ,  F04B53/1047

摘要： A pump has an inlet opening, an outlet opening, a pump diaphragm comprising an opening, provided with a passive check valve, through the pump diaphragm, and an actuator configured to move the pump diaphragm between a first position and a second position. The passive check valve is configured such that a movement from the first position in the direction toward the second position has a closing effect, and that a movement from the second position in the direction toward the first position has an opening effect, so that a pumping cycle wherein the pump diaphragm is moved from the first to the second positions, and back, causes a net flow from the inlet opening to the outlet opening.

摘要翻译： 泵具有入口开口，出口开口，泵隔膜，其包括通过泵隔膜设置有被动止回阀的开口，以及构造成在第一位置和第二位置之间移动泵隔膜的致动器。 被动止回阀被构造成使得从第一位置朝向第二位置的方向的移动具有闭合效果，并且从朝向第一位置的方向从第二位置的移动具有打开效果，从而泵送 循环，其中泵隔膜从第一位置移动到第二位置，并且返回，导致从入口开口到出口开口的净流。

公开(公告)号：US07631852B2

公开(公告)日：2009-12-15

申请号：US11223828

申请日：2005-09-09

申请人： Martin Richter ,  Juergen Kruckow

发明人： Martin Richter ,  Juergen Kruckow

IPC分类号： F16K31/126 ,  F04B17/00

CPC分类号： F16K99/0001 ,  F04B43/043 ,  F16K99/0007 ,  F16K99/0015 ,  F16K99/0046 ,  F16K99/0057 ,  F16K2099/0074 ,  F16K2099/0094

摘要： A normally closed microvalve includes a fluid inlet, a fluid outlet, a deflectable closing element, which, in the closed state of the microvalve, is seated on a sealing lip, such that the fluid inlet is fluidically disconnected from the fluid outlet, and in the opened state of the microvalve, is spaced apart from the sealing lip, and a deflectable holding structure which is connected to the closing element such that, between the same, a space exists, which is in fluidic communication to the fluid outlet. An influence of a force onto the holding structure and the closing element in a first direction provides an opening-action to the microvalve, while an influence of a force onto the holding structure and the closing element in a second direction provides a closing-action. The fluid inlet and the closing element are arranged such that a pressure at the fluid inlet exerts a force in the second direction. An effective surface of the holding structure, which, when a pressure is applied to the fluid outlet, causes a force in the second direction, is greater than an effective surface of the closing element, which, when a pressure is applied to the fluid outlet, causes a force in the first direction.

摘要翻译： 常闭微型阀包括流体入口，流体出口，可偏转闭合元件，其在微型阀的关闭状态下位于密封唇上，使得流体入口与流体出口流体地断开，并且在 微型阀的打开状态与密封唇部间隔开，以及可偏转的保持结构，其连接到闭合元件，使得在其间存在与流体出口流体连通的空间。 在第一方向上的力对保持结构和闭合元件的影响向微型阀提供打开动作，同时在第二方向上对保持结构和关闭元件的力的影响提供关闭动作。 流体入口和关闭元件布置成使得流体入口处的压力在第二方向上施加力。 保持结构的有效表面当压力施加到流体出口时引起第二方向的力大于闭合元件的有效表面，当将压力施加到流体出口 ，在第一方向上产生力。

公开(公告)号：US06518084B1

公开(公告)日：2003-02-11

申请号：US09868402

申请日：2001-09-12

申请人： Stefan Seitz ,  Leonhard Hoefter ,  Juergen Kruckow ,  Karl Neumeier ,  Dieter Bollmann

发明人： Stefan Seitz ,  Leonhard Hoefter ,  Juergen Kruckow ,  Karl Neumeier ,  Dieter Bollmann

IPC分类号： H01L2100

CPC分类号： G01P15/0802 ,  B81B2203/0127 ,  B81C1/00246 ,  B81C2201/019 ,  B81C2203/0728 ,  G01L9/0042 ,  G01L9/0073

摘要： In a method of producing a micromechanical structure for a micro-electromechanical element, a first intermediate layer, which is applied to a first main surface of a first semiconductor wafer, is structured in a first step so as to produce a recess. The first semiconductor wafer is then connected via the first intermediate layer to a second semiconductor wafer in such a way that a hermetically sealed cavity is defined by the recess. Finally, one of the wafers is thinned from a surface facing away from said first intermediate layer so as to produce a diaphragm-like structure on top of the cavity. At least one further intermediate layer is provided between the two semiconductor wavers which, prior to the connection of the two semiconductor wafers, is structured in such a way that the structure formed in said at least one further intermediate layer and the recess in said first intermediate layer define the cavity.

摘要翻译： 在制造微电子机电元件的微机械结构的方法中，施加到第一半导体晶片的第一主表面的第一中间层被构造成第一步骤以产生凹陷。 然后将第一半导体晶片经由第一中间层连接到第二半导体晶片，使得由凹部限定气密密封腔。 最后，其中一个晶片从背离所述第一中间层的表面变薄，从而在空腔的顶部产生隔膜状结构。 在两个半导体波幅之间提供至少一个另外的中间层，其在两个半导体晶片的连接之前被构造成使得在所述至少一个另外的中间层中形成的结构和所述第一中间层 层定义空腔。