摘要:
In a method of producing a micromechanical structure for a micro-electromechanical element, a first intermediate layer, which is applied to a first main surface of a first semiconductor wafer, is structured in a first step so as to produce a recess. The first semiconductor wafer is then connected via the first intermediate layer to a second semiconductor wafer in such a way that a hermetically sealed cavity is defined by the recess. Finally, one of the wafers is thinned from a surface facing away from said first intermediate layer so as to produce a diaphragm-like structure on top of the cavity. At least one further intermediate layer is provided between the two semiconductor wavers which, prior to the connection of the two semiconductor wafers, is structured in such a way that the structure formed in said at least one further intermediate layer and the recess in said first intermediate layer define the cavity.
摘要:
The invention relates to a method for producing a microphone, in which a transducer element (WE) is mounted on a carrier (TR); a cover is arranged over the transducer element (WE) and the carrier (TR) such that the transducer element (WE) is enclosed between the cover and the carrier (TR); a first sound inlet opening (S01) is produced in the carrier (TR); a functional test of the microphone is carried out; the first sound inlet opening (S01) is closed; and a second sound inlet opening (S02) is created in the cover. The present invention further relates to a microphone resulting from the method, in which the first sound inlet opening (S01) is prepared but closed.
摘要:
A selectively marked contact lens having, in one aspect, marks in an optical zone region on a surface thereof and, in another aspect, different marks outside an optical zone region of the lens, for an in-vivo lens. With the lens in-vivo, the subject's eye is illuminated and the lens is imaged. A fast algorithm is used to determine the mark coordinates in relation to a measured pupil coordinate to determine position and/or orientation of the contact lens. A wavefront aberration measurement can also be obtained simultaneously with the contact lens position measurement, as well as pupil size. A fast algorithm provides for online measurements; i.e., at a repetition rate of 10 Hz or greater, over a selected time interval. Blinking periods are determined and anomalous lens position and/or wavefront information is discarded. A most frequently occurring wavefront and/or contact lens position/orientation is determined over the selected time interval.
摘要:
A reciprocating piston pump element of a reciprocating piston pump having a piston, a cylinder with a formed-on cylinder head, an outlet valve which adjoins the cylinder head and an outlet valve housing that is secured in the cylinder head in order to form a structural unit. To reduce the amount of structural space required and to reduce the purchase price, the cylinder with the cylinder head and the region of the outlet valve housing enclosing the closure element are embodied in one piece, and in addition to a sealing ring, a further sealing ring of essentially the same diameter is disposed. As a result, a securing means in the form of a bead formed from the material of the housing block, oriented toward the outlet valve chamber, suffices to secure the reciprocating piston pump element inside the bore of the housing block. The reciprocating piston pump element can be used for space-saving, less expensive anti-lock systems in motor vehicle brake systems and can be expanded for traction control.
摘要:
The invention relates to a method for producing a microphone, in which a transducer element (WE) is mounted on a carrier (TR); a cover is arranged over the transducer element (WE) and the carrier (TR) such that the transducer element (WE) is enclosed between the cover and the carrier (TR); a first sound inlet opening (SO1) is produced in the carrier (TR); a functional test of the microphone is carried out; the first sound inlet opening (SO1) is closed; and a second sound inlet opening (SO2) is created in the cover. The present invention further relates to a microphone resulting from the method, in which the first sound inlet opening (SO1) is prepared but closed.
摘要:
A micro electro-mechanical systems (MEMS) package is described herein. The package includes a carrier substrate having a top side, a MEMS chip mounted on the top side of the carrier substrate, and at least one chip component on or above the top side of the carrier substrate or embedded in the carrier substrate. The package also includes a thin metallic shielding layer covering the MEMS chip and the chip component and forming a seal with the top side of the carrier substrate.
摘要:
A fast algorithm is presented which allows for substantially simultaneous acquisition, analysis, and display of a wavefront centroid image, referred to as online aberrometry. A method embodiment involves determination of an average, or most frequently occurring, wavefront aberration over a selected time interval, e.g., 20 sec. Online pupil diameter measurement allows analysis of wavefront aberration as a function of changing pupil size. A wavefront measuring apparatus is disclosed that supports online aberrometry.
摘要:
A reciprocating piston pump element of a reciprocating piston pump having a piston, a cylinder with a formed-on cylinder head, an outlet valve which adjoins the cylinder head and an outlet valve housing that is secured in the cylinder head in order to form a structural unit. To reduce the amount of structural space required and to reduce the purchase price, the cylinder with the cylinder head and the region of the outlet valve housing enclosing the closure element are embodied in one piece, and in addition to a sealing ring, a further sealing ring of essentially the same diameter is disposed. As a result, a securing means in the form of a bead formed from the material of the housing block, oriented toward the outlet valve chamber, suffices to secure the reciprocating piston pump element inside the bore of the housing block. The reciprocating piston pump element can be used for space-saving, less expensive anti-lock systems in motor vehicle brake systems and can be expanded for traction control.
摘要:
A micro electro-mechanical systems (MEMS) package is described herein. The package includes a carrier substrate having a top side, a MEMS chip mounted on the top side of the carrier substrate, and at least one chip component on or above the top side of the carrier substrate or embedded in the carrier substrate. The package also includes a thin metallic shielding layer covering the MEMS chip and the chip component and forming a seal with the top side of the carrier substrate.
摘要:
A capacitor includes a multi layer structure on a ceramic or crystalline substrate. The multilayer structure includes a lower electrode, an upper electrode, and a dielectric that is tunable by a voltage applied to the electrodes. The multilayer structure is configured such that resonant oscillation modes of bulk acoustic waves can be propagated in the multilayer structure and such that the resonant frequencies of the oscillation modes are outside a first band range of between 810 and 1000 MHz, second band range of between 1700 and 2205 MHz and third band range of between 2400 and 2483.5 MHz.