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公开(公告)号：US06567236B1
公开(公告)日：2003-05-20
申请号：US10010785
申请日：2001-11-09
IPC分类号： G11B566
CPC分类号： B82Y25/00 , G11B5/012 , G11B5/66 , G11B5/732 , G11B5/7325 , G11B2005/001 , H01F10/3218 , H01F10/3295 , Y10S428/90 , Y10T428/1107 , Y10T428/12465 , Y10T428/12847 , Y10T428/12861 , Y10T428/24942 , Y10T428/24975
摘要： An antiferromagnetically coupled layer structure for magnetic recording wherein the top ferromagnetic structure is a bilayer structure including a relatively thin first sublayer of ferromagnetic material in contact with the coupling/spacer layer. The first sublayer has a higher magnetic moment than the second sublayer. The layer structure of the invention results improved manufacturability and improved performance. A preferred embodiment of a layer structure according to the invention includes: a bottom ferromagnetic layer preferably of CoCr; an antiferromagnetic coupling/spacer layer preferably of Ru; and a top ferromagnetic structure including a thin first sublayer of material preferably of CoCr, CoCrB or CoPtCrB, and a thicker second sublayer of material preferably of CoPtCrB with a lower moment than the first sublayer.
摘要翻译： 一种用于磁记录的反铁磁耦合层结构，其中顶部铁磁结构是包括与耦合/间隔层接触的铁磁材料的相对薄的第一子层的双层结构。 第一子层具有比第二子层更高的磁矩。 本发明的层结构提高了可制造性和改进的性能。 根据本发明的层结构的优选实施例包括：优选CoCr的底部铁磁层; 优选Ru的反铁磁耦合/间隔层; 以及包括优选CoCr，CoCrB或CoPtCrB的材料的薄的第一子层以及具有比第一子层更低的力矩的较厚的CoPtCrB材料的较厚的第二子层的顶部铁磁结构。
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公开(公告)号：US06863993B1
公开(公告)日：2005-03-08
申请号：US10676735
申请日：2003-09-30
申请人： Mary Frances Doerner , Kai Tang , Qi-Fan Xiao
发明人： Mary Frances Doerner , Kai Tang , Qi-Fan Xiao
IPC分类号： G11B5/738 , G11B5/64 , G11B5/65 , G11B5/66 , G11B5/73 , H01F10/26 , H01F10/32 , G11B5/70 , H01J1/00
CPC分类号： B82Y25/00 , G11B5/656 , G11B5/66 , G11B5/732 , H01F10/26 , H01F10/324 , Y10T428/12465 , Y10T428/12861
摘要： A thin film structure for a magnetic thin film recording medium including a dual seed layer of RuAl/NiAlB is disclosed. The use of the RuAl/NiAlB structure provides reduced grain size, an increased Mrt orientation ratio (OR), increased SNR and lower PW50 at higher amplitude. The RuAl and NiAlB seed layers each have a B2 crystallographic structure. The RuAl/NiAlB dual seed layer can be used to obtain an underlayer with a preferred in-plane orientation of (200) and a cobalt alloy magnetic film with the preferred in-plane orientation of (11{overscore ( )}20).
摘要翻译： 公开了一种用于包括RuAl / NiAlB的双种子层的磁性薄膜记录介质的薄膜结构。 使用RuAl / NiAlB结构提供了降低的晶粒尺寸，增加的Mrt取向比（OR），增加的SNR和在较高幅度下降低PW50。 RuAl和NiAlB种子层各自具有B2晶体结构。 可以使用RuAl / NiAlB双种子层来获得具有（200）的优选面内取向的底层和具有优选的面内取向的（11（超芯）（20））的钴合金磁性膜。
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公开(公告)号：US06852430B2
公开(公告)日：2005-02-08
申请号：US10059780
申请日：2002-01-29
申请人： Xiaoping Bian , Mary Frances Doerner , James A. Hagan , Tim Minvielle , Mohammad Taghi Mirzamaani , Adam Daniel Polcyn , Kai Tang
发明人： Xiaoping Bian , Mary Frances Doerner , James A. Hagan , Tim Minvielle , Mohammad Taghi Mirzamaani , Adam Daniel Polcyn , Kai Tang
CPC分类号： B82Y25/00 , G11B5/732 , H01F10/30 , H01F10/32 , Y10S428/90 , Y10T428/12472 , Y10T428/12681 , Y10T428/265
摘要： A thin film magnetic media structure with a pre-seed layer of CrTi is disclosed. The CrTi pre-seed layer presents an amorphous or nanocrystalline structure. The preferred seed layer is RuAl for use with the CrTi pre-seed layer. The use of the CrTi/RuAl bilayer structure provides superior adhesion to the substrate and resistance to scratching, as well as, excellent coercivity and signal-to-noise ratio (SNR) and reduced cost over the prior art. One embodiment of the invention sputter-deposits a CrTi pre-seed layer and a RuAl seed layer followed by at least one underlayer and at least one magnetic layer on a circumferentially polished substrate structure to achieve an Mrt orientation ratio greater than one. Two methods according to the invention allow the Mrt orientation ratio of the disk to be adjusted or maximized by varying the thickness of the RuAl seed layer and/or altering the atomic percentage of titanium in the pre-seed layer.
摘要翻译： 公开了一种具有CrTi预种子层的薄膜磁介质结构。 CrTi预种子层呈现无定形或纳米晶体结构。 优选的种子层是用于CrTi预种子层的RuAl。 CrTi / RuAl双层结构的使用提供了优异的与基板的粘附性和耐划伤性，以及优于现有技术的矫顽力和信噪比（SNR）以及降低的成本。 本发明的一个实施方案溅射沉积CrTi预种子层和RuAl种子层，随后是周向抛光的衬底结构上的至少一个底层和至少一个磁性层，以实现大于1的Mrt取向比。 根据本发明的两种方法允许通过改变RuAl种子层的厚度和/或改变预种子层中钛的原子百分比来调节或最大化盘的Mrt取向比。
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公开(公告)号：US06872478B2
公开(公告)日：2005-03-29
申请号：US10608866
申请日：2003-06-26
申请人： Xiaoping Bian , Mary Frances Doerner , Kai Tang , Qi-Fan Xiao
发明人： Xiaoping Bian , Mary Frances Doerner , Kai Tang , Qi-Fan Xiao
CPC分类号： G11B5/732 , G11B5/7325 , Y10S428/90 , Y10T428/12465 , Y10T428/12854 , Y10T428/265
摘要： The applicants disclose a thin film magnetic media structure with a pre-seed layer of CrTiAl. The CrTiAl pre-seed layer presents an amorphous or nanocrystalline structure. The CrTiAl pre-seed layer improves in-plane c-axis orientation while maintaining a good orientation ratio. The pulse transition width (PW50) is narrowed and the soft error rate is improved. The preferred seed layer is RuAl.
摘要翻译： 申请人公开了具有CrTiAl预种子层的薄膜磁性介质结构。 CrTiAl预种子层呈现无定形或纳米晶体结构。 CrTiAl预种子层提高面内c轴取向，同时保持良好的取向比。 脉冲宽度（PW50）变窄，软错误率提高。 优选的种子层是RuAl。
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公开(公告)号：US06846543B2
公开(公告)日：2005-01-25
申请号：US10850735
申请日：2004-05-21
CPC分类号： G11B5/732 , G11B5/656 , G11B5/7325 , G11B5/8404 , Y10S428/90 , Y10T428/12465 , Y10T428/12861 , Y10T428/265
摘要： A magnetic thin film disk for use in a disk drive with a ruthenium-aluminum (RuAl) seed layer with B2 structure followed by a NiAl layer is described. The disk has reduced noise and increased squareness which results in improved recording performance in a disk drive utilizing the disk. The improved disk is formed by first depositing the RuAl seed layer on the substrate then the NiAl layer is deposited onto the NiAl, followed by the other layers required for a magnetic disk such as an underlayer material with a lattice parameter compatible with RuAl such as Cr-alloy, followed by a standard hcp magnetic material. The RuAl seed layer promotes a [100] preferred orientation in the underlayer which in turn promotes a [11{overscore (2)}0] preferred orientation in the magnetic layer.
摘要翻译： 描述了一种用于带有B2结构的钌 - 铝（RuAl）晶种层的磁盘驱动器的磁性薄膜盘片，然后是NiAl层。 磁盘具有降低的噪声和增加的矩形度，这导致利用磁盘的磁盘驱动器中的记录性能得到改善。 通过首先在衬底上沉积RuAl籽晶层，然后将NiAl层沉积到NiAl上，然后沉积到具有与RuAl相容的晶格参数如Cr的磁盘所需的其它层，形成改进的盘 合金，其次是标准的hcp磁性材料。 RuAl种子层促进底层中的优选取向，这进一步促进了磁性层中的[11（超（20））优选取向。
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公开(公告)号：US06677052B2
公开(公告)日：2004-01-13
申请号：US10158377
申请日：2002-05-29
申请人： Xiaoping Bian , Mary Frances Doerner , Kai Tang , Qi-Fan Xiao
发明人： Xiaoping Bian , Mary Frances Doerner , Kai Tang , Qi-Fan Xiao
IPC分类号： G11B566
CPC分类号： G11B5/732 , Y10S428/90 , Y10S428/928 , Y10T428/12806 , Y10T428/12847
摘要： A magnetic recording disk is provided having an amorphous preseed layer of chromium, titanium, and yttrium. The use of the preseed layer improves the magnetic performance of the disk including signal to noise, inplane orientation, and readback pulsewidth.
摘要翻译： 提供具有铬，钛和钇的无定形预置层的磁记录盘。 使用预置层提高了磁盘的磁性能，包括信噪比，平面方向和回读脉冲宽度。
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公开(公告)号：US06593009B2
公开(公告)日：2003-07-15
申请号：US09798235
申请日：2001-03-02
IPC分类号： G11B566
CPC分类号： B82Y25/00 , G11B5/732 , H01F10/30 , H01F10/32 , Y10S428/90 , Y10T428/12465 , Y10T428/12826 , Y10T428/12847 , Y10T428/12861 , Y10T428/265
摘要： A thin film magnetic media structure comprising a pre-seed layer CrTi is disclosed. The CrTi pre-seed layer presents an amorphous or nanocrystalline structure. The preferred seed layer is RuAl. The use of the CrTi/RuAl bilayer structure provides superior adhesion to the substrate and resistance to scratching, as well as, excellent coercivity and signal-to-noise ratio (SNR) and reduced cost over the prior art.
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公开(公告)号：US06572989B2
公开(公告)日：2003-06-03
申请号：US09876571
申请日：2001-06-06
IPC分类号： G11B566
CPC分类号： G11B5/732 , G11B5/66 , G11B5/7325 , Y10S428/90 , Y10T428/12465 , Y10T428/12847 , Y10T428/12854 , Y10T428/12944 , Y10T428/24975 , Y10T428/265
摘要： In a thin film magnetic disk, a crystalline CrNi pre-seed layer is sputtered onto a substrate such as glass, followed by a RuAl seed layer. The CrNi pre-seed layer reduces grain size and its distribution, and improves in-plane crystallographic orientation, coercivity (Hc) and SNR. In a preferred embodiment the RuAl seed layer is followed by a Cr alloy underlayer. In a preferred embodiment the Cr alloy underlayer is followed by an onset layer and a magnetic layer, or by two or more magnetic layers antiferromagnetically coupled through one or more spacer layers. The crystalline CrNi pre-seed layer allows use of a thinner RuAl seed layer which results in smaller overall grain size, as well as a reduction in manufacturing cost due to relatively high cost of ruthenium. The CrNi pre-seed layer also allows use of a thinner Cr alloy underlayer which also contributes to reduce overall grain size.
摘要翻译： 在薄膜磁盘中，将结晶CrNi预种子层溅射到诸如玻璃的衬底上，随后是RuAl种子层。 CrNi预种子层减小晶粒尺寸及其分布，并提高晶面取向，矫顽力（Hc）和信噪比。 在优选的实施方案中，RuAl种子层之后是Cr合金底层。 在优选的实施方案中，Cr合金底层之后是起始层和磁性层，或者由两个或更多个通过一个或多个间隔层反铁磁耦合的磁性层。 结晶CrNi预种子层允许使用更薄的RuAl种子层，其导致更小的总体晶粒尺寸，以及由于钌的相对高的成本而导致的制造成本的降低。 CrNi预种子层还允许使用更薄的Cr合金底层，这也有助于减小总体晶粒尺寸。
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公开(公告)号：US06599642B2
公开(公告)日：2003-07-29
申请号：US09758396
申请日：2001-01-09
IPC分类号： G11B565
CPC分类号： G11B5/66 , Y10T428/12465 , Y10T428/12736 , Y10T428/12743 , Y10T428/12757 , Y10T428/12861 , Y10T428/12931 , Y10T428/24967 , Y10T428/265
摘要： The thin film disk includes a pre-seed layer of amorphous or nanocrystalline structure which may be AlTi or Alta, and that is deposited upon a disk substrate. The pre-seed layer is followed by the RuAl seed layer, a Cr alloy underlayer, an onset layer composed essentially of CoCr and a magnetic layer. The magnetic layer is comprised of CoPtxCrBy, wherein x is the at. % concentration of Pt, y is the at. % concentration of boron, and x>4+y.
摘要翻译： 薄膜盘包括可以是AlTi或Alta的非晶或纳米晶体结构的种子前层，并且沉积在盘基片上。 预种子层之后是RuAl种子层，Cr合金底层，基本上由CoCr和磁性层组成的起始层。 磁性层由CoPtxCrBy组成，其中x是at。 Pt的浓度百分比，y为at。 ％的硼浓度，x> 4 + y。
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公开(公告)号：US06596409B2
公开(公告)日：2003-07-22
申请号：US09758690
申请日：2001-01-09
IPC分类号： G11B565
CPC分类号： G11B5/66 , Y10T428/12465 , Y10T428/12736 , Y10T428/12743 , Y10T428/12757 , Y10T428/12861 , Y10T428/12931 , Y10T428/24967 , Y10T428/265
摘要： The thin film disk includes a pre-seed layer of amorphous or nanocrystalline structure which may be CrTa or AlTi or AlTa, and that is deposited upon a disk substrate. The pre-seed layer is followed by the RuAl seed layer, a Cr alloy underlayer, an onset layer composed essentially of CoCr and a magnetic layer. The onset layer has an optimal concentration of 28-33 at. % Cr and an optimal thickness of 0.5 to 2.5 nm and it increases coercivity and improves the Signal-to-Noise Ratio (SNR) of the disk.
摘要翻译： 薄膜盘包括可以是CrTa或AlTi或AlTa并且沉积在盘基底上的非晶态或纳米晶体结构的种子前层。 预种子层之后是RuAl种子层，Cr合金底层，基本上由CoCr和磁性层组成的起始层。 起始层的最佳浓度为28-33。 ％Cr，最佳厚度为0.5〜2.5nm，提高了矫顽力，提高了磁盘的信噪比（SNR）。
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