Exposure analyzing system, method for analyzing exposure condition, and method for manufacturing semiconductor device
    2.
    发明申请
    Exposure analyzing system, method for analyzing exposure condition, and method for manufacturing semiconductor device 审中-公开
    曝光分析系统,曝光条件分析方法以及制造半导体器件的方法

    公开(公告)号:US20060172207A1

    公开(公告)日:2006-08-03

    申请号:US11044266

    申请日:2005-01-28

    IPC分类号: G03C5/00

    CPC分类号: G03F7/70641 G03F7/70625

    摘要: An exposure analyzing system includes a microscope measuring CDs in resist patterns, each of the resist patterns being formed by specific defocus and dose conditions, an exposure condition calculator calculating functions of the specific defocus and dose conditions, each of the functions giving one of the CDs, an image arranger arranging images of the resist patterns in a matrix having a first coordinate axis arranging the defocus conditions and a second coordinate axis arranging the dose conditions, and a graphic controller displaying the images and the functions in a coordinate plane implemented by the first and second coordinate axes.

    摘要翻译: 曝光分析系统包括显微镜测量抗蚀剂图案的CD,每个抗蚀剂图案通过特定的散焦和剂量条件形成,曝光条件计算器计算特定散焦和剂量条件的功能,每个功能给出一个CD 图像排列器,其将具有布置散焦条件的第一坐标轴的阵列中的抗蚀剂图案的图像和排列剂量条件的第二坐标轴布置;以及图形控制器,其在由第一 和第二坐标轴。

    Solenoid valve having a yoke with an externally-accessible fitting hole
    3.
    发明授权
    Solenoid valve having a yoke with an externally-accessible fitting hole 有权
    电磁阀具有带外部可接近的装配孔的轭

    公开(公告)号:US08061685B2

    公开(公告)日:2011-11-22

    申请号:US12666195

    申请日:2008-05-30

    IPC分类号: F16K31/06

    摘要: A solenoid valve includes a tubular coil bobbin 12 having a coil 13 wound around the outer peripheral surface thereof, a core 8 arranged inside the coil bobbin 12, a yoke 7 for fixing the core 8, a plunger 10 having a central axis coaxial to that of the core 8 and being movable in the axial direction, and a valve housing 5 having ports 3, 4, wherein the yoke 7 is provided, in the outer surface thereof, with a fitting hole 7d projecting tubularly for receiving and fixing the core 8 inserted therein and securing it in place, and the core 8 is provided with a projection 8a to be inserted into the fitting hole 7d and a flange 8b to abut against the inner surface of the yoke 7.

    摘要翻译: 电磁阀包括:管状线圈架12,其具有围绕其外周表面缠绕的线圈13;布置在线圈架12内部的芯8;用于固定芯8的轭7;具有与其同轴的中心轴的柱塞10 并且可以沿轴向移动的阀壳体5和具有端口3,4的阀壳体5,其中,在其外表面中设置有用于容纳和固定芯体8的装配孔7d的装配孔7d 插入其中并将其固定就位,并且芯8设置有插入到装配孔7d中的突起8a和凸缘8b以抵靠轭架7的内表面。

    Fuel cell system
    5.
    发明授权
    Fuel cell system 失效
    燃料电池系统

    公开(公告)号:US07651800B2

    公开(公告)日:2010-01-26

    申请号:US12073860

    申请日:2008-03-11

    IPC分类号: H01M8/04 H01M8/02

    摘要: The object is to provide a simplified but highly efficient fuel cell system, permitting to perform the flame off detection and so on without supplying the burner with additional raw fuel, even if a flame rod system flame detection means is adopted as burner for reformer. The invention concerns a fuel cell system, comprising a reformer for reforming a hydrocarbon base fuel such as natural gas into hydrogen, a CO transformer, a CO eliminator, a fuel cell for generating electricity from hydrogen, and a burner for reformer for burning hydrogen gas discharged from the fuel cell and supply the reformer with heat necessary for reforming reaction, wherein the burner for reformer is provided with a flame rod system flame detection means and, at the same time, supplied with hydrogen gas containing a flame detectable amount of fuel gas.

    摘要翻译: 本发明的目的是提供一种简化但高效率的燃料电池系统,即使采用火焰棒系统火焰检测装置作为重整器的燃烧器,也可以进行火焰熄灭检测等,而不向燃烧器供应额外的原燃料。 本发明涉及燃料电池系统,其包括用于将诸如天然气的烃基燃料重整为氢的重整器,CO变压器,CO消除器,用于从氢气发电的燃料电池和用于燃烧氢气的重整器的燃烧器 从燃料电池排出并向重整器提供重整反应所需的热量,其中重整器燃烧器设置有火焰棒系统火焰检测装置,并且同时供给含有可燃火焰量的燃料气体 。

    Fuel-evaporated gas processing system and electromagnetic valve device
    6.
    发明授权
    Fuel-evaporated gas processing system and electromagnetic valve device 有权
    燃料蒸发气体处理系统和电磁阀装置

    公开(公告)号:US07607420B2

    公开(公告)日:2009-10-27

    申请号:US11988233

    申请日:2006-05-25

    IPC分类号: F02M33/02

    摘要: A fuel-evaporated gas processing system includes an input port taking in evaporated gas evaporated in a fuel tank; output ports supplying the evaporated gas taken in through the input port to an intake system of an engine; a chamber interposed between the input port and the output ports; an electromagnetic valve device including at least first and second electromagnetic valves disposed in the connection between the input port or the output ports and the chamber, either of the input port or the output ports being branched off into a plurality of sections, and perform opening and closing operations in response to a driving signal; and a valve control means driving the first and the second electromagnetic valves of the electromagnetic valve device.

    摘要翻译: 燃料蒸发气体处理系统包括:在燃料箱中蒸发的蒸发气体的输入端口; 输出端口,将通过输入端口吸入的蒸发气体供给到发动机的进气系统; 插入在输入端口和输出端口之间的室; 电磁阀装置,其至少包括设置在输入端口或输出端口和室之间的连接中的第一和第二电磁阀,输入端口或输出端口中的任一个被分支成多个部分,并且执行打开和 响应于驱动信号的关闭操作; 以及驱动电磁阀装置的第一和第二电磁阀的阀控制装置。

    Fuel cell system having a burner with a flame detection rod therein
    8.
    发明授权
    Fuel cell system having a burner with a flame detection rod therein 失效
    具有燃烧器的燃料电池系统,其中具有火焰检测棒

    公开(公告)号:US07419733B2

    公开(公告)日:2008-09-02

    申请号:US10371186

    申请日:2003-02-24

    IPC分类号: H01M8/06 H01M8/04

    摘要: The object is to provide a simplified but highly efficient fuel cell system, permitting to perform the flame off detection and so on without supplying the burner with additional raw fuel, even if a flame rod system flame detection means is adopted as burner for reformer. The invention concerns a fuel cell system, comprising a reformer for reforming a hydrocarbon base fuel such as natural gas into hydrogen, a CO transformer, a CO eliminator, a fuel cell for generating electricity from hydrogen, and a burner for reformer for burning hydrogen gas discharged from the fuel cell and supply the reformer with heat necessary for reforming reaction, wherein the burner for reformer is provided with a flame rod system flame detection means and, at the same time, supplied with hydrogen gas containing a flame detectable amount of fuel gas.

    摘要翻译: 本发明的目的是提供一种简化但高效率的燃料电池系统,即使采用火焰棒系统火焰检测装置作为重整器的燃烧器,也可以进行火焰熄灭检测等,而不向燃烧器供应额外的原燃料。 本发明涉及燃料电池系统,其包括用于将诸如天然气的烃基燃料重整为氢的重整器,CO变压器,CO消除器,用于从氢气发电的燃料电池和用于燃烧氢气的重整器的燃烧器 从燃料电池排出并向重整器提供重整反应所需的热量,其中重整器燃烧器设置有火焰棒系统火焰检测装置,并且同时供给含有可燃火焰量的燃料气体 。

    Fuel cell system
    9.
    发明申请
    Fuel cell system 失效
    燃料电池系统

    公开(公告)号:US20080160362A1

    公开(公告)日:2008-07-03

    申请号:US12073860

    申请日:2008-03-11

    IPC分类号: H01M8/06

    摘要: The object is to provide a simplified but highly efficient fuel cell system, permitting to perform the flame off detection and so on without supplying the burner with additional raw fuel, even if a flame rod system flame detection means is adopted as burner for reformer. The invention concerns a fuel cell system, comprising a reformer for reforming a hydrocarbon base fuel such as natural gas into hydrogen, a CO transformer, a CO eliminator, a fuel cell for generating electricity from hydrogen, and a burner for reformer for burning hydrogen gas discharged from the fuel cell and supply the reformer with heat necessary for reforming reaction, wherein the burner for reformer is provided with a flame rod system flame detection means and, at the same time, supplied with hydrogen gas containing a flame detectable amount of fuel gas.

    摘要翻译: 本发明的目的是提供一种简化但高效率的燃料电池系统,即使采用火焰棒系统火焰检测装置作为重整器的燃烧器,也可以进行火焰熄灭检测等,而不向燃烧器供应额外的原燃料。 本发明涉及燃料电池系统,其包括用于将诸如天然气的烃基燃料重整为氢的重整器,CO变压器,CO消除器,用于从氢气发电的燃料电池和用于燃烧氢气的重整器的燃烧器 从燃料电池排出并向重整器提供重整反应所需的热量,其中重整器燃烧器设置有火焰棒系统火焰检测装置,并且同时供给含有可燃火焰量的燃料气体 。

    SOLENOID VALVE
    10.
    发明申请
    SOLENOID VALVE 有权
    电磁阀

    公开(公告)号:US20100187458A1

    公开(公告)日:2010-07-29

    申请号:US12666195

    申请日:2008-05-30

    IPC分类号: F16K31/06

    摘要: A solenoid valve includes a tubular coil bobbin 12 having a coil 13 wound around the outer peripheral surface thereof, a core 8 arranged inside the coil bobbin 12, a yoke 7 for fixing the core 8, a plunger 10 having a central axis coaxial to that of the core 8 and being movable in the axial direction, and a valve housing 5 having ports 3, 4, wherein the yoke 7 is provided, in the outer surface thereof, with a fitting hole 7d projecting tubularly for receiving and fixing the core 8 inserted therein and securing it in place, and the core 8 is provided with a projection 8a to be inserted into the fitting hole 7d and a flange 8b to abut against the inner surface of the yoke 7.

    摘要翻译: 电磁阀包括:管状线圈架12,其具有围绕其外周表面缠绕的线圈13;布置在线圈架12内部的芯8;用于固定芯8的轭7;具有与其同轴的中心轴的柱塞10 并且可以沿轴向移动的阀壳体5和具有端口3,4的阀壳体5,其中,在其外表面中设置有用于容纳和固定芯体8的装配孔7d的装配孔7d 插入其中并将其固定就位,并且芯8设置有插入到装配孔7d中的突起8a和凸缘8b以抵靠轭架7的内表面。