公开(公告)号：US5041723A

公开(公告)日：1991-08-20

申请号：US589766

申请日：1990-09-28

申请人： Masahiko Ishida ,  Toshikazu Ohnishi ,  Syuji Takada ,  Kimio Miyatake

发明人： Masahiko Ishida ,  Toshikazu Ohnishi ,  Syuji Takada ,  Kimio Miyatake

IPC分类号： G01N21/31 ,  G01N21/35

CPC分类号： G01N21/3504 ,  G01N2021/3129 ,  G01N2021/3137 ,  G01N2021/3166

摘要： An infrared ray detector assembly for detecting a plurality of components such as hydrocarbons, CO.sub.2 and CO gases includes a housing member having a hollow interior and a portion transmissible to infrared rays and a holder member mounted within the hollow interior and having a plurality of separate compartments. An infrared detector is mounted in each compartment, and an optical filter is mounted over each compartment, abutting adjacent filters to respectively limit the wavelength band to each infrared detector, each optical filter having a substrate of approximately the same material and thickness.

摘要翻译： 一种用于检测诸如碳氢化合物，二氧化碳和氧气的多种组分的红外线检测器组件包括具有中空内部和可透过红外线的部分的壳体构件和安装在中空内部中的保持构件，并且具有多个分开的隔室 。 一个红外探测器安装在每个隔室中，一个滤光器安装在每个隔间上，邻接邻近的滤光片，以分别将波长带限制在每个红外检测器上，每个滤光片都具有大致相同材料和厚度的基片。

公开(公告)号：US5138485A

公开(公告)日：1992-08-11

申请号：US556847

申请日：1990-07-20

申请人： Masahiko Ishida ,  Syuji Takada ,  Toshikazu Ohnishi

发明人： Masahiko Ishida ,  Syuji Takada ,  Toshikazu Ohnishi

IPC分类号： G01J1/04 ,  G02B5/20

CPC分类号： G02B5/20

摘要： A measuring instrument that must transmit predetermined wavelengths of optical radiation has an optical filter assembly that can be conveniently manufactured. The optical filter assembly can be coated to provide optical coatings on either side of the substrate, and a masking layer can be deposited to encompass the peripheral edges of the optical coatings and exposed portions of the substrate to eliminate the problem of optical noise resulting from optical radiation contact with the edges of the coating layers.

公开(公告)号：US09209001B2

公开(公告)日：2015-12-08

申请号：US13634328

申请日：2011-03-16

申请人： Naoki Morimoto ,  Masahiko Ishida

发明人： Naoki Morimoto ,  Masahiko Ishida

IPC分类号： C23C14/34 ,  C23C14/54 ,  C23C14/50 ,  H01J37/34

CPC分类号： H01J37/3438 ,  C23C14/34 ,  C23C14/345 ,  C23C14/3492 ,  C23C14/50 ,  C23C14/542 ,  H01J37/3405 ,  H01L21/6833

摘要： A sputtering apparatus includes: a vacuum chamber in which a target is to be disposed; a power supply to input power to the target; gas introduction device; exhaust device; and substrate holding device to hold a substrate to be processed. The substrate holding device includes: a chuck main body having positive and negative electrodes; a chuck plate having a rib portion capable of bringing a peripheral edge portion of the substrate into surface contact with the rib portion; and a multiplicity of supporting portions provided upright and arranged at predetermined intervals in an interior space surrounded by the rib portion; and a DC power supply to apply a direct voltage between the two electrodes. The sputtering apparatus suppresses a variation in film thickness among substrates.

摘要翻译： 溅射装置包括：真空室，其中设置有靶; 用于向目标输入电力的电源; 气体引入装置; 排风装置; 以及用于保持待处理基板的基板保持装置。 基板保持装置包括：具有正极和负极的卡盘主体; 具有能够使基板的周缘部与肋部表面接触的肋部的卡盘板; 以及多个支撑部分，其设置成直立并以预定间隔布置在由所述肋部分包围的内部空间中; 以及在两个电极之间施加直流电压的直流电源。 溅射装置抑制基板之间的膜厚变化。

公开(公告)号：US20140230876A1

公开(公告)日：2014-08-21

申请号：US14232750

申请日：2012-07-10

申请人： Akihiro Kirihara ,  Masahiko Ishida ,  Takashi Manako ,  Kenichi Uchida ,  Eiji Saitoh

发明人： Akihiro Kirihara ,  Masahiko Ishida ,  Takashi Manako ,  Kenichi Uchida ,  Eiji Saitoh

IPC分类号： H01L37/04 ,  C30B7/02

CPC分类号： H01L37/04 ,  C30B7/02 ,  H01F10/24 ,  H01F10/265 ,  H01L37/00

摘要： A magnetic element according to the present invention is formed of a layered product having a magnetic insulator film formed on a substrate including a material having no crystal structure. The magnetic insulator film has a columnar crystal structure.

摘要翻译： 根据本发明的磁性元件由具有形成在包括不具有晶体结构的材料的基板上的磁性绝缘膜的层叠体形成。 磁性绝缘膜具有柱状晶体结构。

公开(公告)号：US08058112B2

公开(公告)日：2011-11-15

申请号：US12519949

申请日：2007-12-17

申请人： Masahiko Ishida

发明人： Masahiko Ishida

IPC分类号： H01L21/8238

CPC分类号： H01L51/0558 ,  B82Y10/00 ,  H01L51/0048 ,  H01L51/0508

摘要： A semiconductor device having good switching characteristics even metallic CNTs are included and a manufacturing method thereof are provided. The semiconductor device includes a source electrode; a drain electrode; and a channel layer formed between the source electrode and the drain electrode and including a carbon nanotube group. The carbon nanotube group includes conductive carbon nanotubes having a characteristic of a conductive material and semiconductive carbon nanotubes having a characteristic of a semiconductive material. The density of the carbon nanotube group is the density where the source electrode and the drain electrode are connected to each other through all of the carbon nanotube group and not connected to each other only through the conductive carbon nanotubes.

摘要翻译： 包括具有甚至金属CNT的良好开关特性的半导体器件，并提供其制造方法。 半导体器件包括源电极; 漏电极; 以及形成在源电极和漏电极之间并且包括碳纳米管组的沟道层。 碳纳米管组包括具有导电材料特性的导电性碳纳米管和具有半导体材料特性的半导体碳纳米管。 碳纳米管组的密度是源电极和漏电极通过所有碳纳米管组彼此连接并且仅通过导电性碳纳米管彼此不连接的密度。

公开(公告)号：US20110256810A1

公开(公告)日：2011-10-20

申请号：US13130595

申请日：2009-12-09

申请人： Takahiro Nanba ,  Naoki Morimoto ,  Kouji Sogabe ,  Masahiko Ishida

发明人： Takahiro Nanba ,  Naoki Morimoto ,  Kouji Sogabe ,  Masahiko Ishida

IPC分类号： B24C1/00

CPC分类号： H01L21/6833 ,  H01L21/68757

摘要： There is provided a method of manufacturing a chuck plate for an electrostatic chuck of good productivity which is free from poor releasing of a wafer which is a to-be-processed substrate, from the initial time of putting the electrostatic chuck to a new use. The method of manufacturing a chuck plate for electrostatic chuck ES which is made up of a dielectric body to cover a surface of the chuck main body having electrodes, includes the steps of: obtaining a sintered body by compression-forming raw material powder (or raw meal) into a predetermined shape and then sintering the same; forming, by polishing, such a surface of the sintered body as will come into contact with a substrate to be attracted, into a predetermined surface roughness and flatness; and performing blast processing for selectively removing only ready-to-be-separated particles that come into existence on the surface as a result of the polishing.

摘要翻译： 提供了一种制造用于静电卡盘的卡盘板的方法，该静电卡盘盘从高静电卡盘的初始时间开始到新的用途，该静电卡盘的卡盘板具有良好的生产率，该卡盘板不需要被处理的基板的晶片的释放不良。 制造由电介质体覆盖具有电极的卡盘主体的表面的静电卡盘ES的卡盘的方法包括以下步骤：通过压缩成形原料粉末（或未加工的原料粉末）获得烧结体 膳食）成预定形状，然后烧结它们; 通过抛光将烧结体的与待吸附的基板接触的表面形成为预定的表面粗糙度和平坦度; 并且进行喷砂处理，以便仅选择性地除去作为抛光的结果而在表面上存在的即将分离的颗粒。

公开(公告)号：US20050079120A1

公开(公告)日：2005-04-14

申请号：US10503660

申请日：2003-01-31

申请人： Jun-ichi Fujita ,  Masahiko Ishida ,  Fumiyuki Nihey ,  Yukinori Ochiai

发明人： Jun-ichi Fujita ,  Masahiko Ishida ,  Fumiyuki Nihey ,  Yukinori Ochiai

IPC分类号： C01B31/02 ,  C01B31/04

CPC分类号： B82Y30/00 ,  B82Y40/00 ,  C01B32/15 ,  C01P2004/16

摘要： The present invention provides a process for producing a nano-graphite structure having a desired two-dimensional or three-dimensional shape, which process possesses enough potential for ultra-fine processing to allow free selection of the size, shape, and position for the construction therefor; typically a process in which the nano-graphite structure 4 is produced by such a way where a nano-structure amorphous carbon structure 2 formed on a substrate 1 in advance in the shape of a desired ultra-fine steric configuration by a beam-excited reaction is equipped with catalyst metal atoms such as iron contained therein, and when subjecting the steric structure to a low-temperature heat treatment, the structure is converted into the graphite structure 3 through a catalytic thermal reaction by means of the catalyst metal atoms involved therein, while the shape of steric configuration thereof holds.

摘要翻译： 本发明提供一种具有所需二维或三维形状的纳米石墨结构的制造方法，该方法具有足够的超细加工潜力，可以自由选择结构的尺寸，形状和位置 为此; 通常是通过以下方式制造纳米石墨结构体4的方法：其中通过束激发反应，预先形成在所需的超细立方体形状的基板1上的纳米结构无定形碳结构2 配有催化剂金属原子如铁中所含的铁，并且当对空间结构进行低温热处理时，通过催化热反应借助于其中涉及的催化剂金属原子将结构转化为石墨结构3， 而其立体形状的形状成立。

公开(公告)号：US06777683B2

公开(公告)日：2004-08-17

申请号：US10072960

申请日：2002-02-12

申请人： Kennosuke Kojima ,  Masahiko Ishida ,  Shuji Takada

发明人： Kennosuke Kojima ,  Masahiko Ishida ,  Shuji Takada

IPC分类号： G01N2161

CPC分类号： G01N21/35 ,  G01J1/0271 ,  G01J1/04 ,  G01J1/0488 ,  G01J1/4228 ,  G01J3/36 ,  G01J5/602

摘要： An optical detector 1 wherein detection elements 11, 12, 13 and 14 are provided in a sealed case 4 whose opening portion 3 is blocked with a window material 2 for transmitting light such as an infrared and an ultraviolet ray therethrough, the detection elements being formed opposite to the window material; and optical filters 21, 22, 23 and 34 are disposed between the window material 2 and the detection elements 11, 12, 13 and 14 and used for selecting and causing only light composed of a predetermined band of wavelengths to be transmitted by thin optical films in connection with the detection elements 11, 12, 13 and 14. The optical detector includes a shielding body 9 having housing portions 28, 29, 30 and 31 for containing the optical filters 21, 22, 23 and 24 and used for preventing any light composed of other than the predetermined band of wavelength selected by the thin optical films and preventing light producing an interference effect during measurement from being transmitted through the optical filters 21, 22, 23 and 24.

摘要翻译： 光检测器1，其中检测元件11,12,13和14设置在其开口部分3被用于透射诸如红外线和紫外线的光的窗口材料2阻挡在其中的密封壳体4中，形成检测元件 与窗材相对; 并且光学滤光器21,22,23和34设置在窗材料2和检测元件11,12,13和14之间，并且用于选择并且仅使由光学薄膜透射由预定波长带组成的光 与检测元件11,12,13和14相关。光学检测器包括屏蔽体9，屏蔽体9具有用于容纳滤光器21,22,23和24并用于防止任何光的壳体部分28,29,30和31 由除了由薄型光学膜选择的波长的预定波段以外的光线组成，并且防止在测量期间产生干涉效应的光透过光学滤波器21,22,23和24。

公开(公告)号：US5166067A

公开(公告)日：1992-11-24

申请号：US443108

申请日：1989-11-29

申请人： Masahiko Ishida ,  Ryoichi Haga ,  Harumi Matsuzaki

发明人： Masahiko Ishida ,  Ryoichi Haga ,  Harumi Matsuzaki

IPC分类号： C12M3/06 ,  C12N5/02 ,  C12N5/06

CPC分类号： C12M29/16 ,  C12M29/02

摘要： A culturing method and system are disclosed in which a cell culture broth in withdrawn from a culturing apparatus to a filteration apparatus. The withdrawn broth in brought into contact with a membrane for precision filteration. Then a non-toxic gas is brown into the broth, while filtering the broth to separate the cells and breaking foams occurring on the surface of the broth due to gas bubbling. The separated cells are returned to the vessel and the filterate is withdrawn from the filteration apparatus.The method and system have such advantages that a perfusion culture of a long period of time can be realized because the clogging of the filteration membrane is effectively prevented.

公开(公告)号：US5030361A

公开(公告)日：1991-07-09

申请号：US431237

申请日：1989-11-03

申请人： Masahiko Ishida ,  Ryoichi Haga ,  Harumi Matsuzaki

发明人： Masahiko Ishida ,  Ryoichi Haga ,  Harumi Matsuzaki

IPC分类号： C12M1/00 ,  B04B5/00 ,  B04B15/12 ,  C12M1/26 ,  C12M3/00 ,  C12N1/02

CPC分类号： B04B5/00 ,  B04B15/12 ,  C12M47/02 ,  C12N1/02 ,  Y10T436/25375

摘要： A centrifugal separation method for living cells is disclosed in which a cell containing solution is charged in a rotor chamber confined by a steam pressure-resistant wall. A rotor having septa is disposed in the rotor chamber. The septa are rotatable in the same direction at the same angular velocity as the rotor while at least part thereof is immersed in a solution in the rotor when cells are to be centrifuged from the cell-containing solution. After the cells are separated and adhered to the inner surface of the rotor, a supernatant in the rotor is discharged from the rotor. Then a fresh cultivating medium is introduced into the rotor, and the septa and the rotor are rotated at mutually different angular velocities while at least part of the septa is immersed in the fresh medium in the rotor. As a result, the cells are again suspended in the fresh medium.