摘要:
A power supply system for consumable electrode arc welding alternately switches between the reverse polarity and the straight polarity. The formation of an arc is detected. A polarity change control signal is generated when the arc duration reaches a predetermined time or when the quantity of charge reaches a predetermined value. The predetermined value of the welding current or voltage is reduced either immediately before or after the change in polarity.
摘要:
A sizing composition comprises a carboxylic acid anhydride and a polyoxyalkylene nonionic surfactant blocked with a lower alkyl, acyl or carbamoyl group and/or an alkaline earth metal salt of a sulphur-containing anionic surfactant. The composition can be easily emulsified to form an aqueous emulsion useful for paper sizing.
摘要:
A control method for the projection optical system of a projection exposure apparatus used in the fabrication of LSIs. The amount of energy incident to the projection optical system during each unit time is maintained constant at all times including each projection and the intervals between the projection operations. This has the effect of cancelling any error in the projected image, particularly any variation of the magnification error with time due to any variation of the optical performance of the projection optical system caused by the illuminating energy.
摘要:
Methods and apparatus are disclosed for accurately measuring stresses in respective membrane regions of segmented mask blanks destined to be made into masks or reticles for use in microlithography. A mask blank is held to a securing plate, e.g., by electrostatic attraction. The mask blank is held such that the struts of the mask blank contact the surface of the securing plate. The securing plate defines an array of through holes that are aligned with individual subfields of the mask blank. A pressure differential is applied across the membrane via the through-holes, causing the membrane regions to bulge. While measuring the pressure, the magnitude of bulge of individual membrane regions is measured using a displacement-measuring device. From data concerning the magnitude of bulge, membrane stress and Young's modulus are determined.
摘要:
Sealing apparatus used for sealing the gap between flanges which comprises an O-ring engaged with a circular groove formed in the coupling surface of one of the flanges and two backup rings engaged with the groove and the O-ring, each of the backup rings having an inclined surface to be axially urged by the O-ring whereby the upper backup ring is moved according to the gap to close it.
摘要:
A motor device includes a base portion; a transmission portion that is formed with the base portion as one member and is wound around at least a part of an outer periphery of a rotator; and a driving portion which is supported by the base portion, moves the transmission portion by a certain distance in a state in which a rotational force is transmitted between the rotator and the transmission portion, and returns the transmission portion to a predetermined position in a state in which the rotation force transmission state is released.
摘要:
Apparatus are disclosed for evaluating a thin film of a sample such as a reticle blank. A representative embodiment includes a chamber defining an opening over which the sample, mounted in the sample-support mechanism, is placed such that a pneumatic pressure established in the chamber is transmitted to the thin film of the sample. A deflection-measuring device measures an amount of deflection exhibited by the thin film whenever the pressure is being applied from the chamber to the sample. An optical system irradiates the thin film of the sample, mounted to the chamber, with light to cause light reflected from the thin film to be incident on the deflection-measuring device. The sample-support mechanism includes a substrate that contacts the sample in a manner allowing access of a desired region of the thin film to the pressure, and a retainer that secures the sample and substrate to the opening in the chamber in a manner such that substrate and sample are sandwiched between the retainer and the chamber.
摘要:
A composite for moldings having the high bending elastic modulus and the high bending strength, comprising a thermoplastic resin and a polymerizable monomer which is a multifunctional polymerizable monomer having an alicyclic strucure unit or a mixture consisting of a multifunctional polymerizable monomer having an alicyclic strucure unit and a monofunctional polymerizable monomer having at least two alicyclic structure units, is prepared by compounding them. Also, a composite for moldings having the high bending elastic modulus and the high bending strength, comprising a vinyl chloride resin, a (meth)acrylate monomer which is a multifunctional (meth)acrylate or a mixture consisting of a multifunctional (meth)acrylate and a monofunctional (meth)acrylate, and a polymerization initiator. The composite has good workability. Further, an unfluid precursor for moldings is prepared by heating the composite. The obtained moldings have high bending modulus of elasticity and high bending strength, and then are suitably applied to business machines, parts of electric equipment, industrial equipment, and parts of transport equipment etc.
摘要:
An automatic focus adjusting device comprises an optical system for forming the image of a sample to be examined at the image formation point, a first image sensor disposed at a first position for receiving the light image of the sample and converting it into an electrical signal, a second image sensor disposed at a second position for receiving the light image of the sample and converting it into an electrical signal, signal processing systems for processing the signals from the first and second image sensors, and a servo device for controlling the vertical position of the sample relative to the image forming optical system.