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13 条记录 (耗时 0.022 秒)

    Turbo vacuum pump
    1.
    发明授权
    Turbo vacuum pump 失效
    涡轮真空泵

    公开(公告)号：US5020969A

    公开(公告)日：1991-06-04

    申请号：US409720

    申请日：1989-09-20

    申请人： Masahiro Mase ,  Seiji Sakagami ,  Takeshi Okawada ,  Shinjiroo Ueda ,  Yoshihisa Awada ,  Takashi Nagaoka

    发明人： Masahiro Mase ,  Seiji Sakagami ,  Takeshi Okawada ,  Shinjiroo Ueda ,  Yoshihisa Awada ,  Takashi Nagaoka

    IPC分类号： F04D19/04

    CPC分类号： F04D17/168 ,  F04D23/008

    摘要： Since a peripheral-flow pump according to the present invention has a peripheral-flow impeller having a cylindrical staircase shape whose outer diameter increases in one direction only like a staircase, a stator, which conventionally has been of a complicated configuration composed of two pieces, can be formed into an integral molding without any deterioration in pump performance. Accordingly, the production of pumps is facilitated.

    摘要翻译： 由于根据本发明的外围流量泵具有外圆流动叶轮，其圆筒状的台阶形状的外径仅在阶梯方向上增加一个方向，所以常规地由两部分组成的复杂构造的定子， 可以形成一体成型，而不会使泵性能下降。 因此，促进了泵的生产。

    Method for LPCVD of semiconductors using oil free vacuum pumps
    3.
    发明授权
    Method for LPCVD of semiconductors using oil free vacuum pumps 失效
    使用无油真空泵的半导体LPCVD方法

    公开(公告)号：US4835114A

    公开(公告)日：1989-05-30

    申请号：US16567

    申请日：1987-02-19

    申请人： Akihiko Satou ,  Tadao Kusaka ,  Shigeo Tomiyama ,  Kouzi Aoki ,  Ichiro Gyobu ,  Kimio Muramatsu ,  Hiroaki Sakamoto ,  Shinjiroo Ueda ,  Masahiro Mase ,  Takashi Nagaoka

    发明人： Akihiko Satou ,  Tadao Kusaka ,  Shigeo Tomiyama ,  Kouzi Aoki ,  Ichiro Gyobu ,  Kimio Muramatsu ,  Hiroaki Sakamoto ,  Shinjiroo Ueda ,  Masahiro Mase ,  Takashi Nagaoka

    IPC分类号： B01J3/00 ,  C23C16/44 ,  F04D19/04

    CPC分类号： B01J3/006 ,  C23C16/4412 ,  F04D17/168 ,  F04D19/046 ,  F04D23/008 ,  Y10S148/022 ,  Y10S148/03 ,  Y10S148/169 ,  Y10S438/909

    摘要： This invention concerns a production method and a processing apparatus for semiconductor devices, as well as an evacuating apparatus used for the processing apparatus. According to this invention, since the evacuation system of pressure-reduction processing apparatus for conducting various wafer processings during production steps of semi-conductor devices is constituted only with oil-free vacuum pump, deleterious oil contaminations or carbonation products of oils produced from oils upon heating are not present in the pressure-reducing processing chamber as compared with conventional pressure-reducing processing apparatus using a vacuum oil pump as an evacuation pump and the production method of semiconductor devices using such apparatus. Accordingly, highly clean evacuated condition can be attained and, in addition, semiconductor devices at high reliability and with no degradation in the electric characteristics can be obtained by using the pressure-reducing processing apparatus having such a highly clean processing chamber.

    摘要翻译： 本发明涉及一种用于半导体器件的制造方法和处理装置，以及用于该处理装置的抽空装置。 根据本发明，由于用于在半导体器件的制造步骤期间进行各种晶片处理的减压处理装置的抽空系统仅由无油真空泵，有害油污染或由油产生的油的碳酸化产物构成 与使用真空油泵作为抽空泵的常规减压处理装置以及使用这种装置的半导体装置的制造方法相比，减压处理室中不存在加热。 因此，可以实现高度清洁的抽真空条件，并且通过使用具有这种高度清洁的处理室的减压处理装置，可以获得高可靠性且不劣化电气特性的半导体器件。

    Turbo vacuum pump
    5.
    发明授权
    Turbo vacuum pump 失效
    涡轮真空泵

    公开(公告)号：US5451147A

    公开(公告)日：1995-09-19

    申请号：US767666

    申请日：1991-09-30

    申请人： Seiji Sakagami ,  Shinjiro Ueda ,  Masahiro Mase ,  Takashi Nagaoka

    发明人： Seiji Sakagami ,  Shinjiro Ueda ,  Masahiro Mase ,  Takashi Nagaoka

    IPC分类号： F04D29/056 ,  F04D19/04 ,  F04D29/04 ,  F04D29/057 ,  F04D29/059 ,  F01D1/36

    CPC分类号： F04D29/057 ,  F04D17/168 ,  F04D19/04 ,  F04D23/008 ,  F04D29/0513

    摘要： A compact, easy-to-handle turbo vacuum pump includes a housing having an inlet port and an outlet port; a cylindrical rotor disposed in the housing and having a stepped peripheral surface and a plurality of blades secured to protruding corners of the steps; and a pumping mechanism portion in which a pumping stage is formed by a stator which faces the blades of the rotor across a narrow gap, and in which peripheral pump flow paths are provided in step-like recessions inside the stator. The turbo vacuum pump further includes a rotating shaft which is connected to the rotor and is rotatably supported by a radial gas bearing and a thrust gas bearing; and a motor portion for operating the rotor. Gas sucked in through the inlet port can be discharged into the atmosphere through the outlet port.

    摘要翻译： 紧凑，易于操作的涡轮真空泵包括具有入口和出口的壳体; 设置在所述壳体中并且具有阶梯状周面的圆柱形转子和固定到所述台阶的突出角部的多个叶片; 以及泵送机构部，在该泵机构部分中，通过定子面对泵送级，所述定子面对转子的叶片横跨狭窄的间隙，并且其中在定子内部的阶梯状凹陷中设置有周边泵流路。 所述涡轮真空泵还包括旋转轴，其连接到所述转子并且由径向气体轴承和推进气体轴承可旋转地支撑; 以及用于操作转子的马达部分。 通过入口吸入的气体可以通过出口排出到大气中。

    Turbo vacuum pump
    7.
    发明授权
    Turbo vacuum pump 失效
    涡轮真空泵

    公开(公告)号：US5536148A

    公开(公告)日：1996-07-16

    申请号：US297017

    申请日：1994-08-29

    申请人： Akira Nishiuchi ,  Masahiro Mase ,  Noboru Matsumura ,  Katsuaki Kikuchi ,  Takashi Nagaoka ,  Seiji Sakagami

    发明人： Akira Nishiuchi ,  Masahiro Mase ,  Noboru Matsumura ,  Katsuaki Kikuchi ,  Takashi Nagaoka ,  Seiji Sakagami

    IPC分类号： F04D17/16 ,  F04D19/04 ,  F04D29/58 ,  F04B23/14

    CPC分类号： F04D19/046 ,  F04D17/168 ,  F04D23/008 ,  F04D29/582

    摘要： A turbo vacuum pump for compressing a low-pressure gas to discharge the compressed gas into atmosphere comprises pump stator having a gas flow passage comprising a plurality of annular flow passages on an inner surface thereof arranged stepwise diameters of which become smaller toward downstream and passages intercommunicating with adjacent annular flow passages and a gas discharge port communicated with one of the plurality of annular flow passages disposed at the most downstream. The pump stator includes a cylindrical spiral grooved pump impeller and a plurality of peripheral flow pump impellers facing the annular flow passages provided downstream of the cylindrical spiral grooved pump impeller and having stepwise diameters which become smaller toward downstream to form a peripheral flow pump stage. The suction casing has a spiral groove on a cylindrical inner surface thereof arranged with a predetermined clearance in relation to the spiral grooved pump impeller of the pump rotor so as to form a spiral grooved pump stage and a gas suction port communicated with the spiral grooved pump stage.

    摘要翻译： 用于压缩低压气体以将压缩气体排放到大气中的涡轮真空泵包括具有气体流动通道的泵定子，所述气体流动通道在其内表面上包括多个环形流动通道，所述内部表面的逐步直径向下游变小并且通过相互通信 与相邻的环形流动通道相连接，气体排出口与设置在最下游的多个环形流动通道中的一个连通。 泵定子包括圆柱形螺旋槽泵叶轮和面向环形流动通道的多个周向流动泵叶轮，其设置在圆柱形螺旋槽泵叶轮的下游，并且具有朝向下游变小的逐步直径以形成外围流动泵级。 抽吸壳体在其圆柱形内表面上具有相对于泵转子的螺旋槽泵叶轮设置有预定间隙的螺旋槽，以形成螺旋槽泵台和与螺旋槽泵连通的吸气口 阶段。

    Cryogenic liquefied pump system
    8.
    发明授权
    Cryogenic liquefied pump system 失效
    低温液化泵系统

    公开(公告)号：US4593835A

    公开(公告)日：1986-06-10

    申请号：US604002

    申请日：1984-04-26

    申请人： Seiichi Kikkawa ,  Hisanao Ogata ,  Yoshinori Hakuraku ,  Masahiro Mase ,  Nobuo Tsumaki ,  Yoshihisa Awada ,  Hiroki Kajiwara

    发明人： Seiichi Kikkawa ,  Hisanao Ogata ,  Yoshinori Hakuraku ,  Masahiro Mase ,  Nobuo Tsumaki ,  Yoshihisa Awada ,  Hiroki Kajiwara

    IPC分类号： F04D7/02 ,  B67D5/60 ,  B67D5/64

    CPC分类号： F04D7/02 ,  F04D29/5893

    摘要： A cryogenic liquefied pump system which includes a pump having a drive motor, bearings, a drive shaft, and an impeller adapted to be disposed in a vessel storing a cryogenic liquid. An outer insulating tank is mounted in the vessel and an inner insulating tank is mounted inside the outer insulating tank, with a vacuum layer being interposed between the inner and outer insulating tanks. An inner side of the inner insulated tank, in which the motor and bearings are arranged, is maintained at a room temperature, with a tip portion of the inner insulating tank being formed into an outer case extending into a cryogenic region outside of the outer insulated tank.

    摘要翻译： 一种低温液化泵系统，其包括具有驱动马达，轴承，驱动轴和叶轮的泵，该泵适于设置在存储低温液体的容器中。 外绝缘罐安装在容器中，内绝缘罐安装在外绝缘罐内，真空层插在内外绝缘罐之间。 内绝缘箱的内侧，电动机和轴承配置在其内部，保持在室温，内绝缘箱的顶端部分形成为延伸到外绝缘层外部的低温区域的外壳 坦克。

    Vacuum pump with plural labyrinth seal portions
    10.
    发明授权
    Vacuum pump with plural labyrinth seal portions 失效
    具有多个迷宫式密封部分的真空泵

    公开(公告)号：US4734018A

    公开(公告)日：1988-03-29

    申请号：US947282

    申请日：1986-12-29

    申请人： Minoru Taniyama ,  Masahiro Mase ,  Takashi Nagaoka

    发明人： Minoru Taniyama ,  Masahiro Mase ,  Takashi Nagaoka

    IPC分类号： F04D19/04 ,  F04D29/10 ,  F16J15/40 ,  F04B17/00

    CPC分类号： F16J15/406 ,  F04D19/04 ,  F04D29/104

    摘要： A vacuum pump with a seal structure for a pump unit of the vacuum pump and a driving mechanism for rotating a rotor in the pump stages of the pump is disclosed. The seal structure is provided with a narrow gap sealing arrangement formed by a stationary member which is opposed to the portion of a shaft of the driving mechanism which is between the pump unit and an upper bearing supporting the same shaft, which narrow gap sealing arrangement comprises first, second and third seal portions; a mechanism for supplying a discharge gas to the first seal portion; and a mechanism for supplying a purge gas to the second and third seal portions. Owing to these parts, the feed rate of the purge gas can be minimized, and the entry of the oil mist, which occurs during the lubrication of the bearing, into the interior of the pump unit can be prevented. This enables the interior of the pump unit to be kept clean.

    摘要翻译： 公开了具有用于真空泵的泵单元的密封结构的真空泵和用于使泵的泵级中的转子旋转的驱动机构。 所述密封结构设置有由固定构件形成的窄间隙密封装置，所述固定构件与所述驱动机构的轴的位于所述泵单元和支撑相同轴的上轴承之间的部分相对，所述窄间隙密封装置包括 第一，第二和第三密封部分; 用于向第一密封部供给排出气体的机构; 以及用于向第二和第三密封部分供应净化气体的机构。 由于这些部件，可以使吹扫气体的进料速度最小化，并且可以防止在轴承的润滑期间发生的油雾进入泵单元的内部。 这使得泵单元的内部保持清洁。