摘要:
A turbo vacuum pump has a rotor and magnetic bearings. The magnetic bearings are held in a housing having a suction port and an exhaust port, and support the rotor rotatably. A peripheral flow pump stage and screw pump stage are formed in the rotor, so that the pressure at the exhaust port can be at or near atmospheric pressure level. Before starting the turbo vacuum pump, the magnetic bearings are operated to displace a rotor position and to scrape off the reaction products which have deposited inside the pump. In addition, before starting the turbo vacuum pump, a stator of the pump is heated up to decrease a binding force of the reaction products. Therefore, the pump can be restarted, even if the rotor has locked by the solidification of deposited reaction products formed during stopping of the pump.
摘要:
A compact, easy-to-handle turbo vacuum pump includes a housing having an inlet port and an outlet port; a cylindrical rotor disposed in the housing and having a stepped peripheral surface and a plurality of blades secured to protruding corners of the steps; and a pumping mechanism portion in which a pumping stage is formed by a stator which faces the blades of the rotor across a narrow gap, and in which peripheral pump flow paths are provided in step-like recessions inside the stator. The turbo vacuum pump further includes a rotating shaft which is connected to the rotor and is rotatably supported by a radial gas bearing and a thrust gas bearing; and a motor portion for operating the rotor. Gas sucked in through the inlet port can be discharged into the atmosphere through the outlet port.
摘要:
A turbo vacuum pump for compressing a low-pressure gas to discharge the compressed gas into atmosphere comprises pump stator having a gas flow passage comprising a plurality of annular flow passages on an inner surface thereof arranged stepwise diameters of which become smaller toward downstream and passages intercommunicating with adjacent annular flow passages and a gas discharge port communicated with one of the plurality of annular flow passages disposed at the most downstream. The pump stator includes a cylindrical spiral grooved pump impeller and a plurality of peripheral flow pump impellers facing the annular flow passages provided downstream of the cylindrical spiral grooved pump impeller and having stepwise diameters which become smaller toward downstream to form a peripheral flow pump stage. The suction casing has a spiral groove on a cylindrical inner surface thereof arranged with a predetermined clearance in relation to the spiral grooved pump impeller of the pump rotor so as to form a spiral grooved pump stage and a gas suction port communicated with the spiral grooved pump stage.
摘要:
Since a peripheral-flow pump according to the present invention has a peripheral-flow impeller having a cylindrical staircase shape whose outer diameter increases in one direction only like a staircase, a stator, which conventionally has been of a complicated configuration composed of two pieces, can be formed into an integral molding without any deterioration in pump performance. Accordingly, the production of pumps is facilitated.
摘要:
In a linear scale type displacement measuring instrument including: a case fixed to one of relatively movable members; a main scale; a carriage; index scales and a detector; the carriage and the other of the relatively movable members are connected to each other through a connecting mechanism, one end of which is connected to the carriage, the other end of which is connected to the other of the relatively movable members in a location where a section standard length of the main scale is maintained as it is when the main scale is straight, i.e. within the neutral planes of the case as a whole including the main scale mounted, and capable of permitting the carriage to change the posture thereof such that the index scales can be held in a state of perpendicularly intersecting the normal line of the surface of a warp of the main scale.
摘要:
A dust excluding device for a linear scale type measuring instrument which comprises; flexible shield members disposed at opposite sides of an opening formed in a hollow casing along a line of movement of a movable member and having the forward ends thereof being brought into abutting contact with each other; and a neck adapted to locally push open the abutting contact portions of the shield members, for imparting a displacement of the movable member at the outside of said hollow casing to the interior of said hollow casing through said opening; characterized in that the end portions of said neck in the moving directions thereof are each formed into a letter `V` shape, the tip of which obliquely recedes from inside to outside of said hollow casing.
摘要:
A linear scale attachment device for holding and securely attaching a linear scale on an object to be measured is disclosed. The device includes an aluminum base formed with a holding groove having a larger opening than the width of a linear scale that is fitted in this groove, and a retainer for preventing the linear scale fitted in the holding groove from falling off. The base is permanently attached to the object at one location in the lengthwise direction, and resiliently attached at one or more other locations such as to be pressed in the X and Y directions using a cantilever plate spring. While using an aluminum base, the attachment device allows easy attachment and maintenance of the scale and relieves the effect of thermal stress caused by a difference in the thermal expansion coefficient between the aluminum base and the object.
摘要:
An optical encoder comprises a main scale (1) having scale gratings (11) formed thereon with a certain angular pitch along a measurement axis (x1) that describes a circular arc. It also comprises a detection bead (2) having photoreceptive optical gratings (7) formed thereon. The detection head is arranged relatively movable along the measurement axis (x1), opposing to the main scale (1). The photoreceptive optical gratings (7) on the detection head (2) have transparent and opaque portions alternately arranged with a certain distance pitch along a straight, grating arrangement axis (x2).
摘要:
In an optical encoder using a collimated lighting system, an index scale is inclined toward a main scale by a predetermined value. With this arrangement, a component of variation in the detection signal due to variations in the grating gap can be offset or integrated to be removed from a geometric image of the first grating in the detection signal, whereby the dependence of an S/N ratio of the detection signal on the grating gap can be avoided.
摘要:
A linear scale attachment device for holding and securely attaching a linear scale on an object to be measured is disclosed. The device includes an aluminum base formed with a holding groove having a larger opening than the width of a linear scale that is fitted in this groove, and a retainer for preventing the linear scale fitted in the holding groove from falling off. The base is permanently attached to the object at one location in the lengthwise direction, and resiliently attached at one or more other locations such as to be pressed in the X and Y directions using a cantilever plate spring. While using an aluminum base, the attachment device allows easy attachment and maintenance of the scale and relieves the effect of thermal stress caused by a difference in the thermal expansion coefficient between the aluminum base and the object.