公开(公告)号：US4904155A

公开(公告)日：1990-02-27

申请号：US217887

申请日：1988-07-12

申请人： Takashi Nagaoka ,  Ichiro Gyobu ,  Kimio Muramatsu ,  Keiji Ueyama ,  Masahiro Mase ,  Yoshihisa Awada ,  Akira Nishiuchi

发明人： Takashi Nagaoka ,  Ichiro Gyobu ,  Kimio Muramatsu ,  Keiji Ueyama ,  Masahiro Mase ,  Yoshihisa Awada ,  Akira Nishiuchi

IPC分类号： F04D17/16 ,  F04D19/04 ,  F04D29/58 ,  F04D29/70

CPC分类号： F04D19/046 ,  F04D17/168 ,  F04D29/582

摘要： A vacuum pump with a heating portion for preventing adhesion of reaction products on a discharge side thereof.

公开(公告)号：US5062771A

公开(公告)日：1991-11-05

申请号：US325910

申请日：1989-03-20

申请人： Akihiko Satou ,  Tadao Kusaka ,  Shigeo Tomiyama ,  Kouzi Aoki ,  Ichiro Gyobu ,  Kimio Muramatsu ,  Hiroaki Sakamoto ,  Shinjiroo Ueda ,  Masahiro Mase ,  Takashi Nagaoka

发明人： Akihiko Satou ,  Tadao Kusaka ,  Shigeo Tomiyama ,  Kouzi Aoki ,  Ichiro Gyobu ,  Kimio Muramatsu ,  Hiroaki Sakamoto ,  Shinjiroo Ueda ,  Masahiro Mase ,  Takashi Nagaoka

IPC分类号： B01J3/00 ,  C23C16/44 ,  F04D19/04

CPC分类号： B01J3/006 ,  C23C16/4412 ,  F04D17/168 ,  F04D19/046 ,  F04D23/008 ,  Y10S148/022 ,  Y10S148/03 ,  Y10S148/169 ,  Y10S438/909

摘要： This invention concerns a production method and a processing apparatus for semiconductor devices, as well as an evacuating apparatus used for the processing apparatus. According to this invention, since the evacuation system of pressure-reduction processing apparatus for conducting various wafer processings during production steps of semiconductor devices is constituted only with oil-free vacuum pump, deleterious oil contaminations or carbonation products of oils produced from oils upon heating are not present in the pressure-reducing processing chamber as compared with conventional pressure-reducing processing apparatus using a vacuum oil pump as an evacuation pump and the production method of semiconductor devices using such apparatus. Accordingly, highly clean evacuated condition can be attained and, in addition, semiconductor devices at high reliability and with no degradation in the electric characteristics can be obtained by using the pressure-reducing processing apparatus having such a highly clean processing chamber.

公开(公告)号：US4835114A

公开(公告)日：1989-05-30

申请号：US16567

申请日：1987-02-19

申请人： Akihiko Satou ,  Tadao Kusaka ,  Shigeo Tomiyama ,  Kouzi Aoki ,  Ichiro Gyobu ,  Kimio Muramatsu ,  Hiroaki Sakamoto ,  Shinjiroo Ueda ,  Masahiro Mase ,  Takashi Nagaoka

发明人： Akihiko Satou ,  Tadao Kusaka ,  Shigeo Tomiyama ,  Kouzi Aoki ,  Ichiro Gyobu ,  Kimio Muramatsu ,  Hiroaki Sakamoto ,  Shinjiroo Ueda ,  Masahiro Mase ,  Takashi Nagaoka

IPC分类号： B01J3/00 ,  C23C16/44 ,  F04D19/04

CPC分类号： B01J3/006 ,  C23C16/4412 ,  F04D17/168 ,  F04D19/046 ,  F04D23/008 ,  Y10S148/022 ,  Y10S148/03 ,  Y10S148/169 ,  Y10S438/909

摘要： This invention concerns a production method and a processing apparatus for semiconductor devices, as well as an evacuating apparatus used for the processing apparatus. According to this invention, since the evacuation system of pressure-reduction processing apparatus for conducting various wafer processings during production steps of semi-conductor devices is constituted only with oil-free vacuum pump, deleterious oil contaminations or carbonation products of oils produced from oils upon heating are not present in the pressure-reducing processing chamber as compared with conventional pressure-reducing processing apparatus using a vacuum oil pump as an evacuation pump and the production method of semiconductor devices using such apparatus. Accordingly, highly clean evacuated condition can be attained and, in addition, semiconductor devices at high reliability and with no degradation in the electric characteristics can be obtained by using the pressure-reducing processing apparatus having such a highly clean processing chamber.

摘要翻译： 本发明涉及一种用于半导体器件的制造方法和处理装置，以及用于该处理装置的抽空装置。 根据本发明，由于用于在半导体器件的制造步骤期间进行各种晶片处理的减压处理装置的抽空系统仅由无油真空泵，有害油污染或由油产生的油的碳酸化产物构成 与使用真空油泵作为抽空泵的常规减压处理装置以及使用这种装置的半导体装置的制造方法相比，减压处理室中不存在加热。 因此，可以实现高度清洁的抽真空条件，并且通过使用具有这种高度清洁的处理室的减压处理装置，可以获得高可靠性且不劣化电气特性的半导体器件。

公开(公告)号：US06529619B2

公开(公告)日：2003-03-04

申请号：US09893889

申请日：2001-06-29

申请人： Seiji Ishikawa ,  Masao Sakata ,  Jun Nakazato ,  Sadao Shimoyashiro ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Osamu Satou ,  Tsutomu Okabe ,  Yuzaburo Sakamoto ,  Kimio Muramatsu ,  Kazuhiko Matsuoka ,  Taizo Hashimoto ,  Yuichi Ohyama ,  Yutaka Ebara ,  Isao Miyazaki ,  Shuichi Hanashima

发明人： Seiji Ishikawa ,  Masao Sakata ,  Jun Nakazato ,  Sadao Shimoyashiro ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Osamu Satou ,  Tsutomu Okabe ,  Yuzaburo Sakamoto ,  Kimio Muramatsu ,  Kazuhiko Matsuoka ,  Taizo Hashimoto ,  Yuichi Ohyama ,  Yutaka Ebara ,  Isao Miyazaki ,  Shuichi Hanashima

IPC分类号： G06K900

CPC分类号： G01N21/88 ,  G01N21/956 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

摘要翻译： 本发明分别提供用于探测器和自动粒子检测机的数据分析台。 并且在数据分析站中，以产品为基础描述芯片的配置的坐标与描述缺陷的位置的坐标相同。 此外，该站提供确定每个缺陷属于哪个芯片的功能。 这些数据分析站通过通信线连接。 本发明能够基于芯片分析数据，从而能够掌握每个芯片上的缺陷引起的芯片与芯片的产品特性之间的关系。

公开(公告)号：US06339653B1

公开(公告)日：2002-01-15

申请号：US09523380

申请日：2000-03-10

申请人： Seiji Ishikawa ,  Masao Sakata ,  Jun Nakazato ,  Sadao Shimoyashiro ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Osamu Satou ,  Tsutomu Okabe ,  Yuzaburo Sakamoto ,  Kimio Muramatsu ,  Kazuhiko Matsuoka ,  Taizo Hashimoto ,  Yuichi Ohyama ,  Yutaka Ebara ,  Isao Miyazaki ,  Shuichi Hanashima

发明人： Seiji Ishikawa ,  Masao Sakata ,  Jun Nakazato ,  Sadao Shimoyashiro ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Osamu Satou ,  Tsutomu Okabe ,  Yuzaburo Sakamoto ,  Kimio Muramatsu ,  Kazuhiko Matsuoka ,  Taizo Hashimoto ,  Yuichi Ohyama ,  Yutaka Ebara ,  Isao Miyazaki ,  Shuichi Hanashima

IPC分类号： G06K900

CPC分类号： G01N21/88 ,  G01N21/956 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

摘要翻译： 本发明分别提供用于探测器和自动粒子检测机的数据分析台。 并且，在数据分析站中，以产品为基础描述芯片的配置的坐标与描述缺陷的位置的坐标相同。 此外，该站提供确定每个缺陷属于哪个芯片的功能。 这些数据分析站通过通信线连接。 本发明能够基于芯片分析数据，从而能够掌握每个芯片上的缺陷引起的芯片与芯片的产品特性之间的关系。

公开(公告)号：US5203586A

公开(公告)日：1993-04-20

申请号：US740628

申请日：1991-08-05

申请人： Minoru Niwa ,  Shinichi Goto ,  Kimio Muramatsu

发明人： Minoru Niwa ,  Shinichi Goto ,  Kimio Muramatsu

IPC分类号： B29C33/12 ,  B29C37/00 ,  B29C45/14 ,  B29C70/68 ,  B60R21/20 ,  B60R21/203 ,  B60R21/215

CPC分类号： B29C45/14 ,  B29C33/123 ,  B29C37/0057 ,  B29C70/688 ,  B60R21/21656 ,  B29L2031/3038 ,  Y10T428/24314

摘要： A pad for an air bag device including an upper wall portion which has an openable portion which, upon expansion of the air bag, is separated from a side wall portion of the pad, leaving a hinge portion, and is angularly movable about that pivot axis so as to be openable. The openable portion is constituted by a net insert of a net-like configuration and a covering layer of a soft material covering the net insert. The net insert has a slit which is formed in one edge portion thereof remote from the hinge portion and extends toward the hinge portion. With this construction, even if part of the pad is curved, the net insert can be set in a corresponding injection mold without generating wrinkles in the net insert, and the molding can be performed in such a manner that the openable portion has a good appearance.

摘要翻译： 一种用于气囊装置的垫，包括上壁部，该上壁部具有可打开部分，所述上壁部分在所述气囊膨胀时与所述垫的侧壁部分分离，留下铰链部分，并且可围绕所述枢转轴线成角度地移动 以便开放。 可打开部分由网状构造的网状插入物和覆盖网状插入物的软质材料的覆盖层构成。 网状插入物具有狭缝，该狭缝形成在远离铰链部分的一个边缘部分中并且朝向铰链部分延伸。 利用这种结构，即使垫的一部分是弯曲的，也可以将网状插入件设置在相应的注射模具中，而不会在网状插入物中产生褶皱，并且可以以可开启部分具有良好外观 。

公开(公告)号：US5577766A

公开(公告)日：1996-11-26

申请号：US216824

申请日：1994-03-23

申请人： Minoru Niwa ,  Kimio Muramatsu ,  Makoto Kanai ,  Michio Inoue ,  Junichi Mizutani ,  Takanori Kanich ,  Tadashi Yamamoto

发明人： Minoru Niwa ,  Kimio Muramatsu ,  Makoto Kanai ,  Michio Inoue ,  Junichi Mizutani ,  Takanori Kanich ,  Tadashi Yamamoto

IPC分类号： B60R16/02 ,  B60Q1/00 ,  B60Q5/00 ,  B60R16/027 ,  B60R21/05 ,  B60R21/2165 ,  B62D1/04 ,  B60R21/16

CPC分类号： B60Q1/0082 ,  B60Q5/003 ,  B60R21/21658

摘要： A pad for a steering wheel includes a membrane switch forming member and a cover member. The switch forming member includes a switch body and a support plate. The switch body has a plurality of conductive thin metal sheets and an insulating space interposed between the metal sheets. The support plate is made of rigid synthetic resin for supporting the switch body on its upper face and is formed in its outer peripheral edge with a plurality of mounting holes extending vertically. The cover member covers the air bag of an air bag device and is formed with a rapture portion adapted to be ruptured when the air bag is inflated, and mounting ribs projecting from the back face thereof and engaged with the mounting holes of the support plate. At least one of the outer peripheral edge of the support plate and the back face of the cover member is formed with gap regulating projections for setting a predetermined gap between the upper face of the support plate back face of the cover member.

摘要翻译： 用于方向盘的垫包括膜开关形成构件和盖构件。 开关形成构件包括开关体和支撑板。 开关体具有多个导电薄金属片和插入在金属片之间的绝缘空间。 支撑板由刚性合成树脂制成，用于在其上表面上支撑开关体，并在其外周缘形成有多个垂直延伸的安装孔。 盖构件覆盖气囊装置的气囊，并且形成有当气囊膨胀时适于破裂的突出部分，以及从其背面突出并与支撑板的安装孔接合的安装肋。 支撑板的外周边缘和盖构件的背面中的至少一个形成有用于在盖构件的支撑板背面的上表面之间设置预定间隙的间隙调节突起。

公开(公告)号：US5971430A

公开(公告)日：1999-10-26

申请号：US48330

申请日：1998-03-26

申请人： Minoru Niwa ,  Kimio Muramatsu ,  Makoto Kanai ,  Michio Inoue ,  Junichi Mizutani ,  Takanori Kantoh ,  Tadashi Yamamoto

发明人： Minoru Niwa ,  Kimio Muramatsu ,  Makoto Kanai ,  Michio Inoue ,  Junichi Mizutani ,  Takanori Kantoh ,  Tadashi Yamamoto

IPC分类号： B60R16/02 ,  B60Q1/00 ,  B60Q5/00 ,  B60R16/027 ,  B60R21/05 ,  B60R21/2165 ,  B62D1/04 ,  B60R21/22

CPC分类号： B60Q1/0082 ,  B60Q5/003 ,  B60R21/21658

摘要： A pad for a steering wheel includes a membrane switch forming member and a cover member. The switch forming member includes a switch body and a support plate. The switch body has a plurality of conductive thin metal sheets and an insulating space interposed between the metal sheets. The support plate is made of rigid synthetic resin for supporting the switch body on its upper face and is formed in its outer peripheral edge with a plurality of mounting holes extending vertically. The cover member covers the air bag of an air bag device and is formed with a rupture portion adapted to be ruptured when the air bag is inflated, and mounting ribs projecting from the back face thereof and engaged with the mounting holes of the support plate. At least one of the outer peripheral edge of the support plate and the back face of the cover member is formed with gap regulating projections for setting a predetermined gap between the upper face of the support plate back face of the cover member.

摘要翻译： 用于方向盘的垫包括膜开关形成构件和盖构件。 开关形成构件包括开关体和支撑板。 开关体具有多个导电薄金属片和插入在金属片之间的绝缘空间。 支撑板由刚性合成树脂制成，用于在其上表面上支撑开关体，并在其外周缘形成有多个垂直延伸的安装孔。 盖构件覆盖气囊装置的气囊，并且形成有当气囊膨胀时适于破裂的破裂部分，以及从其背面突出并与支撑板的安装孔接合的安装肋。 支撑板的外周边缘和盖构件的背面中的至少一个形成有用于在盖构件的支撑板背面的上表面之间设置预定间隙的间隙调节突起。

公开(公告)号：US5841893A

公开(公告)日：1998-11-24

申请号：US908550

申请日：1992-06-30

申请人： Seiji Ishikawa ,  Masao Sakata ,  Jun Nakazato ,  Sadao Shimoyashiro ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Osamu Satou ,  Tsutomu Okabe ,  Yuzaburo Sakamoto ,  Kimio Muramatsu ,  Kazuhiko Matsuoka ,  Taizo Hashimoto ,  Yuichi Ohyama ,  Yutaka Ebara ,  Isao Miyazaki ,  Shuichi Hanashima

发明人： Seiji Ishikawa ,  Masao Sakata ,  Jun Nakazato ,  Sadao Shimoyashiro ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Osamu Satou ,  Tsutomu Okabe ,  Yuzaburo Sakamoto ,  Kimio Muramatsu ,  Kazuhiko Matsuoka ,  Taizo Hashimoto ,  Yuichi Ohyama ,  Yutaka Ebara ,  Isao Miyazaki ,  Shuichi Hanashima

IPC分类号： H01L21/66 ,  G01N21/88 ,  G01N21/956 ,  G06K9/00

CPC分类号： G01N21/88 ,  G01N21/956 ,  H01L22/20 ,  H01L2924/0002

摘要： The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

公开(公告)号：US4893521A

公开(公告)日：1990-01-16

申请号：US271387

申请日：1988-11-14

申请人： Syuichi Ishida ,  Shinichi Goto ,  Kimio Muramatsu

发明人： Syuichi Ishida ,  Shinichi Goto ,  Kimio Muramatsu

IPC分类号： B60R21/05 ,  B62D1/04

CPC分类号： B60R21/05 ,  B62D1/04 ,  Y10T74/20834 ,  Y10T74/20876

摘要： A steering wheel having an operating portion, a hub portion, a spoke portion, an impact energy absorbing member located on the hub portion for absorbing impact energy, and a pad including a hard insert and a soft cover member integrally covering the insert for covering at least an impact energy absorbing member and a spoke portion. The insert has a plurality of divided parts or a portion or portions of thin wall section to improve an impact energy absorbing effect of the impact energy absorbing member independently of the rigidity of the pad, without the deterioration of the pad.

摘要翻译： 具有操作部分，轮毂部分，轮辐部分，位于轮毂部分上用于吸收冲击能量的冲击能量吸收部件的方向盘，以及包括硬质插入件和软质盖部件的垫， 至少一个冲击能量吸收构件和一个辐条部分。 该插入件具有多个分开的部分或薄壁部分的一部分或部分，以改善冲击能量吸收构件的冲击能量吸收效果，而与垫的刚性无关，而不会损坏垫。