Cold cathode field emission device and process for the production thereof, and cold cathode field emission display and process for the production thereof
    3.
    发明授权
    Cold cathode field emission device and process for the production thereof, and cold cathode field emission display and process for the production thereof 失效
    冷阴极场发射器件及其生产方法,以及冷阴极场发射显示及其生产方法

    公开(公告)号:US07118927B2

    公开(公告)日:2006-10-10

    申请号:US11091448

    申请日:2005-03-29

    IPC分类号: H01L21/26 H01L21/66

    摘要: A process for producing a cold cathode field emission device. A cathode electrode is formed on a front surface of a support member that transmits exposure light. An insulating layer is formed on an entire surface. A gate electrode is formed on the insulating layer. The support member is irradiated with exposure light from a back surface side of the support member through the hole as a mask for exposure. An electron-emitting-portion-forming-layer composed of a photosensitive material is formed at least inside the opening portion. The support member is irradiated with exposure light from a back surface side of the support member through the hole as a mask for exposure.

    摘要翻译: 一种冷阴极场致发射器件的制造方法。 阴极电极形成在透射曝光光的支撑构件的前表面上。 在整个表面上形成绝缘层。 在绝缘层上形成栅电极。 通过作为掩模的曝光孔将来自支撑部件的背面侧的曝光光照射在支撑部件上。 至少在开口部内部形成由感光材料构成的电子发射部分形成层。 通过作为掩模的曝光孔将来自支撑部件的背面侧的曝光光照射在支撑部件上。

    Cold cathode field emission device and process for the production thereof, and cold cathode field emission display and process for the production thereof
    6.
    发明授权
    Cold cathode field emission device and process for the production thereof, and cold cathode field emission display and process for the production thereof 失效
    冷阴极场发射器件及其生产方法,以及冷阴极场发射显示及其生产方法

    公开(公告)号:US07169628B2

    公开(公告)日:2007-01-30

    申请号:US11105503

    申请日:2005-04-14

    IPC分类号: H01L21/00

    摘要: A process for producing a cold cathode field emission device. A cathode electrode is formed on a front surface of a support member that transmits exposure light. An insulating layer is formed on an entire surface. A gate electrode is formed on the insulating layer. The support member is irradiated with exposure light from a back surface side of the support member through the hole as a mask for exposure. An electron-emitting-portion-forming-layer composed of a photosensitive material is formed at least inside the opening portion. The support member is irradiated with exposure light from a back surface side of the support member through the hole as a mask for exposure.

    摘要翻译: 一种冷阴极场致发射器件的制造方法。 阴极电极形成在透射曝光光的支撑构件的前表面上。 在整个表面上形成绝缘层。 在绝缘层上形成栅电极。 通过作为掩模的曝光孔将来自支撑部件的背面侧的曝光光照射在支撑部件上。 至少在开口部内部形成由感光材料构成的电子发射部分形成层。 通过作为掩模的曝光孔将来自支撑部件的背面侧的曝光光照射在支撑部件上。

    Manufacturing method of an electron emitting apparatus
    7.
    发明授权
    Manufacturing method of an electron emitting apparatus 失效
    电子发射装置的制造方法

    公开(公告)号:US06991949B2

    公开(公告)日:2006-01-31

    申请号:US10475586

    申请日:2002-04-09

    IPC分类号: H01L21/00

    摘要: A cold cathode field emission device comprising a cathode electrode 11 formed on a supporting member 10, a gate electrode 13 which is formed above the cathode electrode 11 and has an opening portion 14, and an electron emitting portion 15 formed on a surface of a portion of the cathode electrode 11 which portion is positioned in a bottom portion of the opening portion 14, said electron emitting portion 15 comprising a carbon-group-material layer 23, and said carbon-group-material layer 23 being a layer formed from a hydrocarbon gas and a fluorine-containing hydrocarbon gas.

    摘要翻译: 一种冷阴极场发射器件,包括形成在支撑构件10上的阴极电极11,形成在阴极电极11上方并具有开口部分14的栅电极13和形成在阴极电极11的一部分的表面上的电子发射部分15 的阴极电极11,该部分位于开口部分14的底部,所述电子发射部分15包括碳基材料层23,所述碳基材料层23是由烃形成的层 气体和含氟烃气体。