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    Optical method of detecting defect and apparatus used therein
    3.
    发明授权
    Optical method of detecting defect and apparatus used therein 失效
    检测缺陷的光学方法及其中使用的装置

    公开(公告)号：US5894345A

    公开(公告)日：1999-04-13

    申请号：US859423

    申请日：1997-05-20

    申请人： Kenji Takamoto ,  Kanji Nishii ,  Masami Ito ,  Atsushi Fukui ,  Kazumasa Takata

    发明人： Kenji Takamoto ,  Kanji Nishii ,  Masami Ito ,  Atsushi Fukui ,  Kazumasa Takata

    IPC分类号： G01B11/30 ,  G01N21/88 ,  G01N21/89 ,  G01N21/956 ,  G01N21/00

    CPC分类号： G01N21/8903

    摘要： An array light source 1 with semiconductor laser sources disposed one-dimensionally and a projective lens 2 are used to illuminate an inspected object so that light beams projected from the array light source form a dotted line on the object. A line sensor is used to receive through an objective lens 3 light emitted from an imaging area 11 away from an illuminated area 12. An image signal, fed to an image processing unit 8 through a pre-processing unit 7 producing an image from signals from the line sensor 4 and a stage 5 is processed, while the stage 5 bearing the object 6 is being gradually moved, to inspect the object 6 for crack defects 9 and 10 by detecting an optically nonhomogeneous portion of the object. The method allows a crack defect of an object, such as a ceramic substrate or a sintered metal product, to be detected fast with high accuracy.

    摘要翻译： 使用具有一维设置的半导体激光源的阵列光源1和投射透镜2来照射被检查物体，使得从阵列光源投射的光束在物体上形成虚线。 线传感器用于通过物镜3接收从成像区域11发出的远离照明区域12的光。图像信号，通过预处理单元7馈送到图像处理单元8，从预处理单元7产生来自 在承载物体6的台架5正在逐渐移动的同时，对线传感器4和台5进行处理，通过检测物体的光学非均匀部分来检查物体6的裂纹缺陷9和10。 该方法允许以高精度快速检测诸如陶瓷基板或烧结金属产品的物体的裂纹缺陷。

    Phase grating, its fabricating method, optical encoder, motor using the optical encoder, and robot using the motor
    4.
    发明授权
    Phase grating, its fabricating method, optical encoder, motor using the optical encoder, and robot using the motor 失效
    相位光栅，其制造方法，光学编码器，使用光学编码器的电动机和使用电动机的机器人

    公开(公告)号：US5754341A

    公开(公告)日：1998-05-19

    申请号：US661154

    申请日：1996-06-10

    申请人： Kazumasa Takata ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito ,  Atsushi Fukui

    发明人： Kazumasa Takata ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito ,  Atsushi Fukui

    IPC分类号： G01D5/38 ,  G02B5/18 ,  G02B27/46

    CPC分类号： G02B5/1871 ,  G02B27/46 ,  Y10S359/90

    摘要： A phase grating has a concave part of rectangular shape type substantially, of which grating depth is deeper in a specific range than depth d' calculated in a formula .vertline.n-n.sub.0 .vertline..times.(p-d'/e)/p.times.d'=(.lambda./2).times.(1+2m) (where m=0, .+-.1, .+-.2, . . . ) in terms of center wavelength .lambda. of light having partial interference to be diffracted by the phase grating, pitch length p of the phase grating, refractive index n of base material of the phase grating, refractive index n.sub.0 of medium surrounding the phase grating, and shape ratio e as the ratio of grating depth to width of slope of the concave part.

    摘要翻译： 相位光栅具有基本上为矩形形状类型的凹部，光栅深度在与公式| n-n0 | x（p-d'/ e）/ pxd'=（ λ/ 2）x（1 + 2m）（其中m = 0，+/- 1，+/- 2，...）就具有待被相位光栅衍射的部分干涉的光的中心波长λ 相位光栅的长度p，相位光栅的基材的折射率n，围绕相位光栅的介质的折射率n0，以及作为凹部的光栅深度与斜率宽度的比率的形状比e。

    Optical encorder for detection having a moving reference point
    5.
    发明授权
    Optical encorder for detection having a moving reference point 失效
    具有移动参考点的用于检测的光学记录仪

    公开(公告)号：US5981941A

    公开(公告)日：1999-11-09

    申请号：US859321

    申请日：1997-05-20

    申请人： Kazumasa Takata ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito ,  Atsushi Fukui ,  Tomohisa Kishi

    发明人： Kazumasa Takata ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito ,  Atsushi Fukui ,  Tomohisa Kishi

    IPC分类号： G01D5/38 ,  G01D5/34

    CPC分类号： G01D5/38

    摘要： The present invention provides an optical encoder capable of using the recesses and convexes of a movable plate and a fixed plate to accurately generate a Z phase signal in synchronism with an A/B phase signal. Phase type diffraction gratings on the moving and fixed plates including a plurality of tracks with different grating pitches cause parallel coherent beams to interfere with one another, and a light receiving part detects the intensity of light to obtain a plurality of synchronous signals with different periods. On the other hand, the light receiving part detects light spots formed by condensing elements on the movable plate to generates a single pulse per rotation as a reference position. One of the plurality of synchronous signals that has the shortest period is selected as an A/B phase signal that depends on the movement of the movable plate. The conjunction of the reference position signal and the plurality of synchronous signals is determined as a Z phase signal indicating the origin of the movable plate, thereby obtaining a Z phase signal in synchronism with one pulse of the A/B phase signal.

    摘要翻译： 本发明提供一种能够使用可移动板和固定板的凹凸的光学编码器，以与A / B相位信号同步地精确地生成Z相信号。 包括具有不同光栅间距的多个轨道的移动和固定板上的相位衍射光栅使平行的相干光束彼此干涉，并且光接收部分检测光的强度以获得具有不同周期的多个同步信号。 另一方面，光接收部检测由可动板上的聚光元件形成的光斑，以产生每旋转一脉冲作为基准位置。 选择具有最短周期的多个同步信号中的一个作为取决于可动板的移动的A / B相位信号。 基准位置信号和多个同步信号的结合被确定为指示可移动板的原点的Z相信号，从而获得与A / B相位信号的一个脉冲同步的Z相信号。

    Optical encoder including a plurality of phase adjusting gratings
    6.
    发明授权
    Optical encoder including a plurality of phase adjusting gratings 失效
    光学编码器包括多个相位调整光栅

    公开(公告)号：US5694218A

    公开(公告)日：1997-12-02

    申请号：US643433

    申请日：1996-05-08

    申请人： Atsushi Fukui ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito ,  Kazumasa Takata

    发明人： Atsushi Fukui ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito ,  Kazumasa Takata

    IPC分类号： G01D5/38 ,  G02B5/18 ,  G02B5/30 ,  G01B9/02

    CPC分类号： G01D5/38

    摘要： An optical encoder has a light source and a diffracted light interference device including at least first and second diffraction gratings confronting each other, producing diffracted light beams in specific orders by passing light emitted from the light source through the first and second diffraction gratings, and making the diffracted light beams in the specific orders, which have passed through the diffraction gratings, interfere with each other to produce on-axis interference light beams in which the sum of the orders of the diffraction at the diffraction gratings is zero and off-axis interference light beams in which the sum of the orders of the diffraction is not zero. A phase device is adjusting the phases of the on-axis interference light beams and the off-axis interference light beams emitted from plural portions of the diffracted light interference device. A plurality of light sensors receive and detect the on-axis interference light beams and the off-axis interference light beams device. In this structure, since the on-axis interference light beams in which the sum of the orders of the diffraction at the diffraction gratings is zero and the off-axis interference light beams in which the sum of the orders of the diffraction is not zero are produced and the phases of the on-axis interference light beams and the phases of the off-axis interference light beams are made equal to each other, unwanted negation of signals is avoided, whereby the light utilization efficiency is increased.

    摘要翻译： 光学编码器具有光源和衍射光干涉装置，其至少包括彼此面对的第一和第二衍射光栅，通过使从光源发射的光通过第一和第二衍射光栅，以特定的顺序产生衍射光束，并且 已经通过衍射光栅的特定次数的衍射光束彼此干涉以产生在衍射光栅处的衍射级之和为零和离轴干扰之和的轴上干涉光束 其中衍射级数之和不为零的光束。 相位装置调节从衍射光干涉装置的多个部分发射的轴上干涉光束和离轴干涉光束的相位。 多个光传感器接收并检测轴上干涉光束和离轴干涉光束装置。 在这种结构中，由于衍射光栅的衍射级之和为零的衍射的次数和衍射级之和不为零的离轴干涉光束的轴上干涉光束为 使轴上干涉光束的相位和离轴干涉光束的相位彼此相等，避免信号的不希望的反转，从而提高光的利用效率。

    Position detecting element and range sensor
    8.
    发明授权
    Position detecting element and range sensor 失效
    位置检测元件和量程传感器

    公开(公告)号：US5999249A

    公开(公告)日：1999-12-07

    申请号：US950282

    申请日：1997-10-14

    申请人： Masami Ito ,  Kanji Nishii ,  Kenji Takamoto ,  Atsushi Fukui ,  Kazumasa Takata

    发明人： Masami Ito ,  Kanji Nishii ,  Kenji Takamoto ,  Atsushi Fukui ,  Kazumasa Takata

    IPC分类号： G01B11/00 ,  G01B11/02 ,  G01C3/06 ,  G01C3/08 ,  G01C3/00 ,  G01N21/86 ,  G02B7/04

    CPC分类号： G01C3/085 ,  G01B11/026

    摘要： A position detecting element that enables a position to be detected at high speed and high precision, and a range sensor using the same. The position detecting element is provided with a PIN photodiode array 1 having n segments and a parallel arithmetic processing portion 2 that calculates the segment having maximum intensity by comparing n outputs from the segments of the PIN photodiode array 1. The range sensor includes a light source by which the object to be measured is irradiated by optical beam, a lens that gathers rays of the reflected light from the surface of the object to be measured and the position detecting element mentioned above that detects the position of the light gathered by the lens.

    摘要翻译： 能够高速高精度地检测位置的位置检测元件和使用该位置检测元件的距离传感器。 位置检测元件设置有具有n个段的PIN光电二极管阵列1和并行算术处理部分2，其通过比较PIN光电二极管阵列1的各个部分的n个输出来计算具有最大强度的段。范围传感器包括光源 被测量对象被光束照射，从被检测体的表面收集反射光的光线的透镜和上述检测由透镜收集的光的位置的位置检测元件。

    Method and apparatus for evaluating aberrations of optical element and method and apparatus for adjusting optical unit and lens
    9.
    发明授权
    Method and apparatus for evaluating aberrations of optical element and method and apparatus for adjusting optical unit and lens 有权
    用于评估光学元件像差的方法和装置以及用于调整光学单元和透镜的方法和装置

    公开(公告)号：US06809829B1

    公开(公告)日：2004-10-26

    申请号：US09573257

    申请日：2000-05-18

    申请人： Kazumasa Takata ,  Masahiro Nakajo ,  Kanji Nishii

    发明人： Kazumasa Takata ,  Masahiro Nakajo ,  Kanji Nishii

    IPC分类号： G01B902

    CPC分类号： G01M11/0271 ,  G01M11/0228

    摘要： A lens evaluation method includes diffracting light derived from a lens so that two diffracted rays of different orders (e.g., a 0th-order diffracted ray and a +1st-order diffracted ray) interfere with each other, thereby obtaining a shearing interference figure, and changing phases of the diffracted rays. The method also includes in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on a measuring line which passes through a midpoint of a line segment interconnecting optical axes of the two diffracted rays, and determining characteristics (defocus amount, coma, astigmatism, spherical aberration and a higher-order aberration) of the lens based on the phases.

    摘要翻译： 透镜评价方法包括衍射从透镜衍射的光，使得两个不同阶数的衍射光线（例如，0次衍射光线和+ 1次衍射光线）彼此干涉，从而获得剪切干涉图，并且 改变衍射光线的相位。 该方法还包括在剪切干涉图中，确定通过互连两个衍射光线的光轴的线段的中点的测量线上的多个测量点处的光强度变化的相位，以及确定特性（散焦量 ，昏迷，散光，球面像差和高阶像差）。

    Method and apparatus for evaluating aberrations of optical element for use with optical device by using phase differences determined by overlapping two diffracted lights to form a sharing image
    10.
    发明授权
    Method and apparatus for evaluating aberrations of optical element for use with optical device by using phase differences determined by overlapping two diffracted lights to form a sharing image 失效
    用于通过使用通过重叠两个衍射光确定的相位差来评估用于光学装置的光学元件的像差的方法和装置，以形成共享图像

    公开(公告)号：US06538749B1

    公开(公告)日：2003-03-25

    申请号：US09361143

    申请日：1999-07-27

    申请人： Kazumasa Takata ,  Masahiro Nakajo ,  Kanji Nishii

    发明人： Kazumasa Takata ,  Masahiro Nakajo ,  Kanji Nishii

    IPC分类号： G01B902

    CPC分类号： G01M11/0271

    摘要： A method for evaluating aberrations of an optical element such as optical head for use with an optical system such as DVD. In this method, light is transmitted through the optical element and then diffracted into 0, ±1, ±2, . . . order diffraction lights, for example. Among others, first and second lights (e.g., 0 and +1, 0 and −1, +1 and −1, or 0 and ±1 order diffracted lights) are overlapped to form an image shared by the first and second lights. Then, light intensity at first and second points in the shared image are detected. At this moment, light intensity at the first and second points are changed. Then, a phase difference in light intensity of between first and second points is determined. Using the phase difference, aberrations of the optical element are determined.

    摘要翻译： 一种用于评估诸如用于诸如DVD之类的光学系统的光学头的光学元件的像差的方法。 在这种方法中，光通过光学元件传输，然后衍射成0，±1，±2。 。 。 订单衍射灯，例如。 其中，第一和第二光（例如0和+1,0和-1，+1和-1，或0和±1级衍射光）被重叠以形成由第一和第二光共享的图像。 然后，检测共享图像中的第一点和第二点处的光强度。 此时，第一点和第二点的光强度发生变化。 然后，确定第一和第二点之间的光强度的相位差。 使用相位差，确定光学元件的像差。