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    Testing module, testing apparatus and testing method
    4.
    发明授权
    Testing module, testing apparatus and testing method 有权
    测试模块，测试仪器和测试方法

    公开(公告)号：US08010851B2

    公开(公告)日：2011-08-30

    申请号：US12058757

    申请日：2008-03-31

    申请人： Sami Akhtar ,  Kiyoshi Murata ,  Tomoyuki Sugaya

    发明人： Sami Akhtar ,  Kiyoshi Murata ,  Tomoyuki Sugaya

    IPC分类号： G11C29/00

    CPC分类号： G01R31/31919

    摘要： A testing module including a designation information storing section that stores designation information designating an order of decoding fundamental patterns, a fundamental pattern storing section that stores the fundamental patterns, a plurality of pattern generating sections that each generate a test pattern to be supplied to a device under test, a plurality of position information storing sections that each store, in association with a corresponding pattern generating section, position information designating a read position from which the designation information is read from the designation information storing section, and an information transmission path shared by the pattern generating sections that transmits a part of the designation information from the designation information storing section to the designation information temporary storing section in each pattern generating section. Each pattern generating section decodes the fundamental patterns in an order designated by the partial designation information stored on the designation information temporary storing section.

    摘要翻译： 一种测试模块，包括指定信息存储部分，其存储指定解码基本模式的顺序的指定信息，存储基本模式的基本模式存储部分，多个模式生成部分，每个模式生成部分生成要提供给设备的测试模式 多个位置信息存储部分，其与对应的图案生成部分相关联地存储指定从指定信息存储部分读取指定信息的读取位置的位置信息和由指定信息存储部分共享的信息传播路径 图案生成部，其将指定信息的一部分从指定信息存储部发送到各图案生成部中的指定信息临时存储部。 每个图案生成部分以存储在指定信息临时存储部分上的部分指定信息指定的顺序对基本图案进行解码。

    TESTING MODULE, TESTING APPARATUS AND TESTING METHOD
    5.
    发明申请
    TESTING MODULE, TESTING APPARATUS AND TESTING METHOD 失效
    测试模块，测试装置和测试方法

    公开(公告)号：US20090248347A1

    公开(公告)日：2009-10-01

    申请号：US12058754

    申请日：2008-03-30

    申请人： SAMI AKHTAR ,  Kiyoshi Murata ,  Tomoyuki Sugaya

    发明人： SAMI AKHTAR ,  Kiyoshi Murata ,  Tomoyuki Sugaya

    IPC分类号： G01R31/00

    CPC分类号： G01R31/31919

    摘要： To increase the overall efficiency of a test apparatus, provided is a test module that includes an instruction information storage section that stores instruction information indicating an order in which basic patterns are expanded; a basic pattern data storage section that stores basic pattern data; a plurality of pattern generating sections that each include a temporary instruction information storage section, which temporarily stores a portion of the instruction information, and that each generate a test pattern supplied to a device under test by expanding the basic pattern data in the order indicated by the instruction information stored in the corresponding temporary instruction information storage section; and a plurality of position information storage sections that independently store position information indicating reading positions of the instruction information stored in the instruction information storage section that is common to the plurality of pattern generating sections, in association with each pattern generating section.

    摘要翻译： 为了提高测试装置的总体效率，提供了一种测试模块，其包括指示信息存储部分，其存储指示基本模式被扩展的顺序的指令信息; 基本图案数据存储部，其存储基本图案数据; 多个图案生成部，其各自包括临时存储指示信息的一部分的临时指令信息存储部，并且通过以下述顺序扩展基本图案数据，生成提供给被测设备的测试图案： 存储在相应的临时指令信息存储部分中的指令信息; 以及多个位置信息存储部分，其独立地存储指示存储在指示信息存储部分中的与多个图案生成部分共同的指令信息的读取位置的位置信息，与每个图案生成部分相关联。

    Test apparatus and testing method
    6.
    发明授权
    Test apparatus and testing method 有权
    测试仪器和测试方法

    公开(公告)号：US07500148B2

    公开(公告)日：2009-03-03

    申请号：US11180972

    申请日：2005-07-13

    申请人： Kiyoshi Murata

    发明人： Kiyoshi Murata

    IPC分类号： G06F11/00

    CPC分类号： G01R31/31928 ,  G01R31/31924

    摘要： There is provided a testing apparatus that tests a device under test. The testing apparatus includes: a command executing unit operable to sequentially execute commands included in a test program for the device under test every command cycle; a test pattern memory operable to store pattern length identifying information identifying a pattern length of a test pattern sequence being output during a command cycle period executing the command and the test pattern sequence, in association with each command; a test pattern memory reading unit operable to read a test pattern sequence of a length corresponding to the pattern length identifying information stored on the test pattern memory in association with one command from the test pattern memory when the one command is executed; and a test pattern outputting unit operable to output the test pattern sequence read by the test pattern memory reading unit in association with the one command to a terminal of the device under test during a command cycle period executing the one command.

    摘要翻译： 提供了测试被测设备的测试装置。 该测试装置包括：命令执行单元，用于对每个命令循环中的被测设备执行包含在测试程序中的命令; 测试模式存储器，用于存储识别在执行命令和测试模式序列的命令循环周期期间输出的测试模式序列的模式长度的模式长度识别信息，与每个命令相关联; 测试图形存储器读取单元，用于当执行所述一个命令时，从所述测试图形存储器读取与来自所述测试图形存储器的一个命令相关联的与存储在所述测试图案存储器上的图案长度识别信息相对应的长度的测试图案序 以及测试图案输出单元，其可操作以在执行所述一个命令的命令循环周期期间将由所述测试图案存储器读取单元读取的所述测试图案序列与所述一个命令相关联地输出到被测设备的终端。

    TEST APPARATUS AND ELECTRONIC DEVICE
    7.
    发明申请
    TEST APPARATUS AND ELECTRONIC DEVICE 失效
    测试装置和电子设备

    公开(公告)号：US20080250291A1

    公开(公告)日：2008-10-09

    申请号：US11733174

    申请日：2007-04-09

    申请人： Tatsuya Yamada ,  Kiyoshi Murata

    发明人： Tatsuya Yamada ,  Kiyoshi Murata

    IPC分类号： G01R31/3183

    CPC分类号： G01R31/31813

    摘要： A test apparatus that tests a device under test is provided.The test apparatus includes: a pattern memory that stores in a compression format a test instruction sequence to define a test sequence for testing the device under test; an expanding section mat expands in a non-compression format the test instruction sequence read from the pattern memory; an instruction cache that caches the test instruction sequence which is expanded by the expanding section; a pattern generating section that sequentially reads instructions stored in the instruction cache and executes the same to generate a test pattern for the executed instruction; and a signal output section that generate a test signal based on the test pattern and provides the same to the device under test.

    摘要翻译： 提供测试被测设备的测试设备。 测试装置包括：模式存储器，以压缩格式存储测试指令序列，以定义用于测试被测设备的测试序列; 扩展部分块以非压缩格式扩展从模式存储器读取的测试指令序列; 缓存由扩展部扩展的测试指令序列的指令高速缓存; 模式生成部，其顺序地读取存储在所述指令高速缓存中的指令，并执行所述指令，以生成所执行的指令的测试模式; 以及信号输出部，其基于测试图案生成测试信号，并将其提供给被测设备。

    Test apparatus and electronic device
    8.
    发明授权
    Test apparatus and electronic device 失效
    测试仪器和电子设备

    公开(公告)号：US07603604B2

    公开(公告)日：2009-10-13

    申请号：US11733174

    申请日：2007-04-09

    申请人： Tatsuya Yamada ,  Kiyoshi Murata

    发明人： Tatsuya Yamada ,  Kiyoshi Murata

    IPC分类号： G06F11/00

    CPC分类号： G01R31/31813

    摘要： A test apparatus that tests a device under test is provided. The test apparatus includes: a pattern memory that stores in a compression format a test instruction sequence to define a test sequence for testing the device under test; an expanding section mat expands in a non-compression format the test instruction sequence read from the pattern memory; an instruction cache that caches the test instruction sequence which is expanded by the expanding section; a pattern generating section that sequentially reads instructions stored in the instruction cache and executes the same to generate a test pattern for the executed instruction; and a signal output section that generate a test signal based on the test pattern and provides the same to the device under test.

    摘要翻译： 提供测试被测设备的测试设备。 测试装置包括：模式存储器，以压缩格式存储测试指令序列，以定义用于测试被测设备的测试序列; 扩展部分块以非压缩格式扩展从模式存储器读取的测试指令序列; 缓存由扩展部扩展的测试指令序列的指令高速缓存; 模式生成部，其顺序地读取存储在所述指令高速缓存中的指令，并执行所述指令，以生成所执行的指令的测试模式; 以及信号输出部，其基于测试图案生成测试信号，并将其提供给被测设备。

    Radiation-sensitive resin composition
    9.
    发明授权
    Radiation-sensitive resin composition 有权
    辐射敏感树脂组合物

    公开(公告)号：US06623907B2

    公开(公告)日：2003-09-23

    申请号：US09774714

    申请日：2001-02-01

    申请人： Jun Numata ,  Aki Suzuki ,  Hiromichi Hara ,  Norihiro Natsume ,  Kiyoshi Murata ,  Masafumi Yamamoto ,  Akimasa Soyano ,  Toru Kajita ,  Tsutomu Shimokawa

    发明人： Jun Numata ,  Aki Suzuki ,  Hiromichi Hara ,  Norihiro Natsume ,  Kiyoshi Murata ,  Masafumi Yamamoto ,  Akimasa Soyano ,  Toru Kajita ,  Tsutomu Shimokawa

    IPC分类号： G03F7004

    CPC分类号： G03F7/0045 ,  G03F7/038 ,  G03F7/039 ,  Y10S430/111 ,  Y10S430/128

    摘要： A positive-tone radiation-sensitive resin composition comprising: (A) a low molecular weight compound having at least one amino group in which the nitrogen atom has at least one hydrogen atom bonded thereto and at least one of the hydrogen atoms is replaced by a t-butoxycarbonyl group, (B) a photoacid generator, and (C-1) a resin insoluble or scarcely soluble in alkali which is protected by an acid-dissociable group and becomes soluble in alkali when the acid-dissociable group dissociates or (C-2) an alkali-soluble resin and an alkali solubility control agent is disclosed. Also disclosed is a negative-tone radiation-sensitive resin composition comprising the low molecular weight compound (A), the photoacid generator (B), an alkali-soluble resin (D), and a compound capable of crosslinking with the alkali-soluble resin in the presence of an acid(E). The composition are useful as a chemically amplified resist which effectively responds to various radiations, exhibits superior sensitivity and resolution, forms fine patterns at a high precision and in a stable manner even if the patterns are isolated line patterns.

    摘要翻译： 一种正色辐射敏感性树脂组合物，其包含：（A）具有至少一个氨基的低分子量化合物，其中所述氮原子具有与其键合的至少一个氢原子，并且至少一个氢原子被 叔丁氧基羰基，（B）光酸产生剂和（C-1）不溶于或几乎不溶于碱的树脂，其被酸解离基团保护并且当酸解离基解离时变得可溶于碱，或（C -2）碱溶性树脂和碱溶性控制剂。 还公开了包含低分子量化合物（A），光酸产生剂（B），碱溶性树脂（D）和能够与碱溶性树脂交联的化合物的负色辐射敏感性树脂组合物 在酸（E）的存在下。 该组合物可用作化学放大抗蚀剂，其有效地响应各种辐射，表现出优异的灵敏度和分辨率，即使图案是隔离线图案，也以高精度和稳定的方式形成精细图案。

    Radiation sensitive resin composition
    10.
    发明授权
    Radiation sensitive resin composition 有权
    辐射敏感树脂组合物

    公开(公告)号：US06403280B1

    公开(公告)日：2002-06-11

    申请号：US09558067

    申请日：2000-04-26

    申请人： Noboru Yamahara ,  Kiyoshi Murata ,  Shinichiro Iwanaga ,  Hiroyuki Ishii ,  Haruo Iwasawa

    发明人： Noboru Yamahara ,  Kiyoshi Murata ,  Shinichiro Iwanaga ,  Hiroyuki Ishii ,  Haruo Iwasawa

    IPC分类号： G03F7004

    CPC分类号： G03F7/039 ,  G03F7/0045 ,  Y10S430/115 ,  Y10S430/122

    摘要： The present invention provides a radiation sensitive resin composition which comprises (A) a resin represented by a copolymer comprising recurring units represented by the general formulae (1) or (2) as shown below, and (B) a radiation sensitive acid-generator. The radiation sensitive resin composition has an excellent storage stability and the resist produced from the composition is a chemically amplifiable type sensitive to radiations represented by fartificial ultraviolet rays. The resist has a high transparency to radiations and it is excellent in basic physical properties for resist such as durability to dry etching, sensitivity, resolution, and pattern configuration:

    摘要翻译： 本发明提供一种辐射敏感性树脂组合物，其包含（A）由下述通式（1）或（2）表示的重复单元的共聚物所表示的树脂，（B）辐射敏感性酸发生剂。 辐射敏感性树脂组合物具有优异的储存稳定性，并且由该组合物制备的抗蚀剂是对由人造紫外线表示的辐射敏感的化学可扩增型。 抗蚀剂对于辐射具有高透明度，并且对于抗蚀剂的基本物理性质如干蚀刻耐久性，灵敏度，分辨率和图案构型是优异的：