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    Induction heating furnace and bottom tapping mechanism thereof
    2.
    发明授权
    Induction heating furnace and bottom tapping mechanism thereof 失效
    感应加热炉及其底部出料机构

    公开(公告)号：US06307875B1

    公开(公告)日：2001-10-23

    申请号：US09064774

    申请日：1998-04-23

    申请人： Masanori Tsuda ,  Atsushi Okuno ,  Yasuhiro Nakai

    发明人： Masanori Tsuda ,  Atsushi Okuno ,  Yasuhiro Nakai

    IPC分类号： F27D300

    CPC分类号： F27B14/20 ,  F27B14/04 ,  F27B14/063 ,  F27B2014/102 ,  F27D3/1509 ,  F27D3/1518 ,  F27D2099/0016

    摘要： An induction heating furnace includes a furnace body having a side wall extending so obliquely as to increase in radius from the bottom to the top edge portion and formed by a plurality of longitudinally split, conductive segments arrayed circumferentially and insulated from each other, a first induction heating coil arranged at an outer periphery of the side wall for subjecting a to-be-heated material accommodated in the furnace body to induction heating and a melt-use power source for supplying AC power to the first induction heating coil.

    摘要翻译： 一种感应加热炉包括：炉体，其具有从底部到顶部边缘部分的半径方向倾斜地延伸的侧壁，并且由沿周向排列并彼此绝缘的多个纵向分开的导电段形成，第一感应 布置在侧壁的外周的加热线圈，用于使容纳在炉体中的被加热材料感应加热，以及用于向第一感应加热线圈提供交流电力的熔化用电源。

    Induction heating furnace and bottom tapping mechanism thereof
    4.
    发明授权
    Induction heating furnace and bottom tapping mechanism thereof 失效
    感应加热炉及其底部出料机构

    公开(公告)号：US06385231B2

    公开(公告)日：2002-05-07

    申请号：US09840106

    申请日：2001-04-24

    申请人： Masanori Tsuda ,  Atsushi Okuno ,  Yasuhiro Nakai

    发明人： Masanori Tsuda ,  Atsushi Okuno ,  Yasuhiro Nakai

    IPC分类号： H05B622

    CPC分类号： F27B14/20 ,  F27B14/04 ,  F27B14/063 ,  F27B2014/102 ,  F27D3/1509 ,  F27D3/1518 ,  F27D2099/0016

    摘要： An induction heating furnace includes a furnace body having a side wall extending so obliquely as to increase in radius from the bottom to the top edge portion and formed by a plurality of longitudinally split, conductive segments arrayed circumferentially and insulated from each other, a first induction heating coil arranged at an outer periphery of the side wall for subjecting a to-be-heated material accommodated in the furnace body to induction heating and a melt-use power source for supplying AC power to the first induction heating coil.

    摘要翻译： 一种感应加热炉包括：炉体，其具有从底部到顶部边缘部分的半径方向倾斜地延伸的侧壁，并且由沿周向排列并彼此绝缘的多个纵向分开的导电段形成，第一感应 布置在侧壁的外周的加热线圈，用于使容纳在炉体中的被加热材料感应加热，以及用于向第一感应加热线圈提供交流电力的熔化用电源。

    Wafer airtight keeping unit and keeping facility thereof
    6.
    发明授权
    Wafer airtight keeping unit and keeping facility thereof 失效
    晶圆密封单元及其保持设备

    公开(公告)号：US5303482A

    公开(公告)日：1994-04-19

    申请号：US826954

    申请日：1992-01-28

    申请人： Teppei Yamashita ,  Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita ,  Hitoshi Kawano ,  Atsushi Okuno ,  Masanori Tsuda ,  Mitsuhiro Hayashi ,  Hiromi Morita

    发明人： Teppei Yamashita ,  Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita ,  Hitoshi Kawano ,  Atsushi Okuno ,  Masanori Tsuda ,  Mitsuhiro Hayashi ,  Hiromi Morita

    IPC分类号： H01L21/677 ,  F26B21/06

    CPC分类号： H01L21/67769 ,  Y10S414/14

    摘要： A wafer keeping apparatus includes a closed wafer keeping space, and an arrangement for circulating an inert gas through a filter and then through the wafer keeping space. In one embodiment, several wafer keeping shelves are each provided within the space, and the inert gas is supplied through a respective filter to flow across each shelf. In another embodiment, a plurality of wafer keeping spaces are each accessible through a respective door which forms an airtight seal when it is closed, and respective filters are provided on opposite sides of the space, the inert gas being supplied to the space through one filter and exiting the space through the other filter. In a further embodiment, several of the wafer keeping spaces are provided at angularly and vertically spaced locations in a rotatable stocker body provided within a casing, and several vertically spaced doors are provided on the casing to provide access to respective wafer keeping spaces in the stocker body.

    摘要翻译： 晶片保存装置包括封闭的晶片保持空间，以及用于使惰性气体通过过滤器然后通过晶片保持空间循环的装置。 在一个实施例中，在该空间内分别提供几个晶片保持架，并且惰性气体通过相应的过滤器供应流过每个搁架。 在另一个实施例中，多个晶片保持空间各自可通过相应的门接近，门在关闭时形成气密密封，并且各个过滤器设置在空间的相对侧上，惰性气体通过一个过滤器 并通过另一个过滤器离开空间。 在另一个实施例中，几个晶片保持空间设置在设置在壳体内的可转动的储带架主体中的角度和垂直间隔的位置处，并且几个垂直间隔的门设置在壳体上以提供对存储器中的相应晶片保持空间的访问 身体。

    Segmented cold-wall induction melting crucible
    7.
    发明授权
    Segmented cold-wall induction melting crucible 失效
    分段冷壁感应熔化坩埚

    公开(公告)号：US5283805A

    公开(公告)日：1994-02-01

    申请号：US961362

    申请日：1992-10-15

    申请人： Hitoshi Kawano ,  Masanori Tsuda ,  Yasuhiro Nakai

    发明人： Hitoshi Kawano ,  Masanori Tsuda ,  Yasuhiro Nakai

    IPC分类号： F27B14/06 ,  F27B14/10 ,  H05B5/16 ,  H05B11/00

    CPC分类号： F27B14/10

    摘要： In a segmented water-cooled induction melting crucible mainly used for melting special metals such as reactive metals or alloys, two adjacent segments are coupled as a segment having two legs, one leg having an inlet water passage and the other leg having an outlet water passage, so that these water passages form a one-way water flow path when they are connected. When the two legs are connected at their top portion to form a shorted portion, the lower end of the legs are insulated from each other and from a base forming a bottom of the crucible. Alternatively the two legs can be entirely separated by elongating the slit and the water passage formed in each leg can be connected throgh an insulative, connecting member. In either case, the water pasage in each leg can be reduced to the same size as the inner tube in each segment of a conventional crucible, and by virtue of this construction, both the radial thickness and the width of each segment can be reduced which enables an increase the number of segments in a crucible with the same inner space.

    摘要翻译： 在主要用于熔化诸如反应性金属或合金的特殊金属的分段水冷感应熔炼坩埚中，两个相邻的段联接为具有两个腿的段，一个腿具有入口水通道，另一个腿具有出口水通道 使得这些水通道在连接时形成单向水流路径。 当两个腿在其顶部连接以形成短路部分时，腿部的下端彼此绝缘并形成坩埚底部的底座。 或者，两条腿可以通过延长狭缝而完全分开，并且每条腿中形成的水​​通道可以连接在绝缘的连接构件上。 在任一情况下，每个腿中的水管可以缩小成与常规坩埚的每个区段中的内管相同的尺寸，并且由于这种结构，可以减小每个区段的径向厚度和宽度， 能够增加具有相同内部空间的坩埚中的段的数量。

    ID recognizing system in semiconductor manufacturing system
    9.
    发明授权
    ID recognizing system in semiconductor manufacturing system 失效
    半导体制造系统中的识别识别系统

    公开(公告)号：US5389769A

    公开(公告)日：1995-02-14

    申请号：US037976

    申请日：1993-03-26

    申请人： Teppei Yamashita ,  Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita ,  Hitoshi Kawano ,  Atsushi Okuno ,  Masanori Tsuda ,  Mitsuhiro Hayashi

    发明人： Teppei Yamashita ,  Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita ,  Hitoshi Kawano ,  Atsushi Okuno ,  Masanori Tsuda ,  Mitsuhiro Hayashi

    IPC分类号： G06K17/00 ,  G06K19/10 ,  H01L21/02 ,  G06F15/46

    CPC分类号： G06K17/00 ,  G06K2017/0045 ,  G06K2017/0087

    摘要： An ID recognizing system for a semiconductor manufacturing system includes IC modules set in surfaces of containers which accommodate wafers and are conveyed from one device to another in the semiconductor manufacturing system. Each IC module is capable of transmitting and receiving signals from fixed stations and includes a reloadable memory. The semiconductor manufacturing system is made up of a number of devices for performing manufacturing operations on the wafers in the containers, and each of the devices include one of the fixed stations. The IC module is powered by the energy of radio waves received from the fixed station in the device in which said container has been placed for processing of the wafers therein. The radio communication is in the form of communication packets which include data on individual wafers in the cassettes so that the individual wafers can be processed separately. The position or off-set of the data within the packet indicates the position of the corresponding wafer within the container.

    摘要翻译： 用于半导体制造系统的ID识别系统包括设置在容纳晶片的容器的表面中的IC模块，并且在半导体制造系统中从一个装置传送到另一个装置。 每个IC模块能够从固定站发送和接收信号，并且包括可重新加载的存储器。 半导体制造系统由用于对容器中的晶片进行制造操作的多个装置组成，并且每个装置包括固定站之一。 IC模块由在其中已经放置所述容器用于处理其中的晶片的装置中的固定站接收的无线电波的能量供电。 无线电通信是通信分组的形式，其包括在盒中的单个晶片上的数据，使得可以单独处理各个晶片。 分组内的数据的位置或偏移指示了相应晶片在容器内的位置。