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    Cold crucible induction furnace
    2.
    发明授权
    Cold crucible induction furnace 失效
    冷坩埚感应炉

    公开(公告)号：US5892790A

    公开(公告)日：1999-04-06

    申请号：US939652

    申请日：1997-09-29

    申请人： Kenji Abiko ,  Hitoshi Kawano ,  Masanori Tsuda ,  Tadahito Nakajima

    发明人： Kenji Abiko ,  Hitoshi Kawano ,  Masanori Tsuda ,  Tadahito Nakajima

    IPC分类号： F27B14/06 ,  H05B6/24 ,  H05B6/32 ,  H05B5/16

    CPC分类号： H05B6/32 ,  F27B14/063 ,  H05B6/24

    摘要： A cold crucible induction melting furnace is provided with a plurality of segments separated by a plurality of slits that surround a bottom member which together form the melting chamber. Each lower end of each segment is overlapped with and spaced from a short part of a vertically extending side wall of the bottom member so as to form a horizontal gap there between. A radially and outwardly extending flange protrudes from the bottom member side wall below each segment lower end to form a lower gap there between. An induction coil is disposed around and spaced from an outer face of the segments with a lower end adjacent to each of the lower segment ends and an upper end adjacent to an upper part of each segment that is in turn connected with an adjacent upper segment part to form a short circuited part. The radial thickness of each segment from the upper end of the coil to the lower end of the segments is the same and the magnetic flux generated by the induction coil passing through the lower gap and the horizontal gap provides increased magnetic flux density at least adjacent to the region adjacent to the bottom member and the lower ends of the segments.

    摘要翻译： 冷坩埚感应熔炼炉设置有多个由多个狭缝隔开的段，所述多个狭缝围绕底部构件，所述底部构件一起形成熔化室。 每个段的每个下端与底部构件的垂直延伸的侧壁的短部分重叠并间隔开，从而在其之间形成水平间隙。 径向和向外延伸的凸缘从每个段下端下方的底部构件侧壁突出，以在其之间形成较小间隙。 一个感应线圈设置在该片段的外表面周围并与该片段的外表面间隔开，并具有与每个下段末端相邻的下端，以及与每个片段的上部相邻的上端，该上端又与相邻的上片段连接 形成短路部分。 从线圈的上端到段的下端的每个段的径向厚度是相同的，并且由感应线圈产生的通过下间隙和水平间隙的磁通量提供至少相邻的线圈的增加的磁通密度 邻近底部构件的区域和段的下端。

    Segmented cold-wall induction melting crucible
    4.
    发明授权
    Segmented cold-wall induction melting crucible 失效
    分段冷壁感应熔化坩埚

    公开(公告)号：US5283805A

    公开(公告)日：1994-02-01

    申请号：US961362

    申请日：1992-10-15

    申请人： Hitoshi Kawano ,  Masanori Tsuda ,  Yasuhiro Nakai

    发明人： Hitoshi Kawano ,  Masanori Tsuda ,  Yasuhiro Nakai

    IPC分类号： F27B14/06 ,  F27B14/10 ,  H05B5/16 ,  H05B11/00

    CPC分类号： F27B14/10

    摘要： In a segmented water-cooled induction melting crucible mainly used for melting special metals such as reactive metals or alloys, two adjacent segments are coupled as a segment having two legs, one leg having an inlet water passage and the other leg having an outlet water passage, so that these water passages form a one-way water flow path when they are connected. When the two legs are connected at their top portion to form a shorted portion, the lower end of the legs are insulated from each other and from a base forming a bottom of the crucible. Alternatively the two legs can be entirely separated by elongating the slit and the water passage formed in each leg can be connected throgh an insulative, connecting member. In either case, the water pasage in each leg can be reduced to the same size as the inner tube in each segment of a conventional crucible, and by virtue of this construction, both the radial thickness and the width of each segment can be reduced which enables an increase the number of segments in a crucible with the same inner space.

    摘要翻译： 在主要用于熔化诸如反应性金属或合金的特殊金属的分段水冷感应熔炼坩埚中，两个相邻的段联接为具有两个腿的段，一个腿具有入口水通道，另一个腿具有出口水通道 使得这些水通道在连接时形成单向水流路径。 当两个腿在其顶部连接以形成短路部分时，腿部的下端彼此绝缘并形成坩埚底部的底座。 或者，两条腿可以通过延长狭缝而完全分开，并且每条腿中形成的水​​通道可以连接在绝缘的连接构件上。 在任一情况下，每个腿中的水管可以缩小成与常规坩埚的每个区段中的内管相同的尺寸，并且由于这种结构，可以减小每个区段的径向厚度和宽度， 能够增加具有相同内部空间的坩埚中的段的数量。

    ID recognizing system in semiconductor manufacturing system
    5.
    发明授权
    ID recognizing system in semiconductor manufacturing system 失效
    半导体制造系统中的识别识别系统

    公开(公告)号：US5389769A

    公开(公告)日：1995-02-14

    申请号：US037976

    申请日：1993-03-26

    申请人： Teppei Yamashita ,  Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita ,  Hitoshi Kawano ,  Atsushi Okuno ,  Masanori Tsuda ,  Mitsuhiro Hayashi

    发明人： Teppei Yamashita ,  Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita ,  Hitoshi Kawano ,  Atsushi Okuno ,  Masanori Tsuda ,  Mitsuhiro Hayashi

    IPC分类号： G06K17/00 ,  G06K19/10 ,  H01L21/02 ,  G06F15/46

    CPC分类号： G06K17/00 ,  G06K2017/0045 ,  G06K2017/0087

    摘要： An ID recognizing system for a semiconductor manufacturing system includes IC modules set in surfaces of containers which accommodate wafers and are conveyed from one device to another in the semiconductor manufacturing system. Each IC module is capable of transmitting and receiving signals from fixed stations and includes a reloadable memory. The semiconductor manufacturing system is made up of a number of devices for performing manufacturing operations on the wafers in the containers, and each of the devices include one of the fixed stations. The IC module is powered by the energy of radio waves received from the fixed station in the device in which said container has been placed for processing of the wafers therein. The radio communication is in the form of communication packets which include data on individual wafers in the cassettes so that the individual wafers can be processed separately. The position or off-set of the data within the packet indicates the position of the corresponding wafer within the container.

    摘要翻译： 用于半导体制造系统的ID识别系统包括设置在容纳晶片的容器的表面中的IC模块，并且在半导体制造系统中从一个装置传送到另一个装置。 每个IC模块能够从固定站发送和接收信号，并且包括可重新加载的存储器。 半导体制造系统由用于对容器中的晶片进行制造操作的多个装置组成，并且每个装置包括固定站之一。 IC模块由在其中已经放置所述容器用于处理其中的晶片的装置中的固定站接收的无线电波的能量供电。 无线电通信是通信分组的形式，其包括在盒中的单个晶片上的数据，使得可以单独处理各个晶片。 分组内的数据的位置或偏移指示了相应晶片在容器内的位置。

    Wafer airtight keeping unit and keeping facility thereof
    8.
    发明授权
    Wafer airtight keeping unit and keeping facility thereof 失效
    晶圆密封单元及其保持设备

    公开(公告)号：US5303482A

    公开(公告)日：1994-04-19

    申请号：US826954

    申请日：1992-01-28

    申请人： Teppei Yamashita ,  Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita ,  Hitoshi Kawano ,  Atsushi Okuno ,  Masanori Tsuda ,  Mitsuhiro Hayashi ,  Hiromi Morita

    发明人： Teppei Yamashita ,  Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita ,  Hitoshi Kawano ,  Atsushi Okuno ,  Masanori Tsuda ,  Mitsuhiro Hayashi ,  Hiromi Morita

    IPC分类号： H01L21/677 ,  F26B21/06

    CPC分类号： H01L21/67769 ,  Y10S414/14

    摘要： A wafer keeping apparatus includes a closed wafer keeping space, and an arrangement for circulating an inert gas through a filter and then through the wafer keeping space. In one embodiment, several wafer keeping shelves are each provided within the space, and the inert gas is supplied through a respective filter to flow across each shelf. In another embodiment, a plurality of wafer keeping spaces are each accessible through a respective door which forms an airtight seal when it is closed, and respective filters are provided on opposite sides of the space, the inert gas being supplied to the space through one filter and exiting the space through the other filter. In a further embodiment, several of the wafer keeping spaces are provided at angularly and vertically spaced locations in a rotatable stocker body provided within a casing, and several vertically spaced doors are provided on the casing to provide access to respective wafer keeping spaces in the stocker body.

    摘要翻译： 晶片保存装置包括封闭的晶片保持空间，以及用于使惰性气体通过过滤器然后通过晶片保持空间循环的装置。 在一个实施例中，在该空间内分别提供几个晶片保持架，并且惰性气体通过相应的过滤器供应流过每个搁架。 在另一个实施例中，多个晶片保持空间各自可通过相应的门接近，门在关闭时形成气密密封，并且各个过滤器设置在空间的相对侧上，惰性气体通过一个过滤器 并通过另一个过滤器离开空间。 在另一个实施例中，几个晶片保持空间设置在设置在壳体内的可转动的储带架主体中的角度和垂直间隔的位置处，并且几个垂直间隔的门设置在壳体上以提供对存储器中的相应晶片保持空间的访问 身体。

    Self-ballasted lamp and lighting equipment
    10.
    发明授权
    Self-ballasted lamp and lighting equipment 失效
    自镇流灯和照明设备

    公开(公告)号：US08721125B2

    公开(公告)日：2014-05-13

    申请号：US12788348

    申请日：2010-05-27

    申请人： Makoto Sakai ,  Toshiya Tanaka ,  Keiichi Shimizu ,  Hitoshi Kawano

    发明人： Makoto Sakai ,  Toshiya Tanaka ,  Keiichi Shimizu ,  Hitoshi Kawano

    IPC分类号： F21V29/00 ,  F21V1/00 ,  F21V11/00

    CPC分类号： H05B33/08 ,  F21K9/232 ,  F21V3/061 ,  F21V3/062 ,  F21V29/74 ,  F21Y2115/10

    摘要： The invention provides a self-ballasted lamp having high heat radiation performance, which is lightweight and inexpensive. A substrate having LED elements mounted is provided at one edge side of the radiator, and a cap is provided at the other edge side the radiator. A lighting circuit is accommodated between the radiator and the cap. The radiator includes a cylindrical cover member and an annular radiation member fitted to the outer circumferential part of the cover member and is composed by combining the cover member and the radiation member together. The cover member and the radiation member are made of metal and are formed by press-working.

    摘要翻译： 本发明提供一种轻质且便宜的具有高散热性能的自镇流灯。 在散热器的一个边缘侧设置安装有LED元件的基板，在散热器的另一边缘侧设置有盖。 照明电路容纳在散热器和盖之间。 散热器包括圆柱形盖构件和安装到盖构件的外周部的环形辐射构件，并且通过将盖构件和辐射构件组合在一起而构成。 盖构件和辐射构件由金属制成并且通过冲压加工形成。