公开(公告)号：US4894538A

公开(公告)日：1990-01-16

申请号：US173066

申请日：1988-03-25

申请人： Masashi Iwatsuki ,  Kimio Ohi ,  Kazuma Suzuki ,  Kiyoshi Miyashita

发明人： Masashi Iwatsuki ,  Kimio Ohi ,  Kazuma Suzuki ,  Kiyoshi Miyashita

IPC分类号： G01B7/34 ,  G01N23/00 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/04 ,  G01Q60/10 ,  H01J37/28 ,  H01L41/083 ,  H01L41/09

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q10/04 ,  H02N2/028 ,  H01J2237/2818 ,  Y10S977/872

摘要： A tip-scanning mechanism for use in a scanning tunneling microscope uses three drivers for driving a probe tip in three perpendicular directions. The drivers each consist of a piezoelectric element. In accordance with the invention, these three drivers are each shaped into a sheet, and the three sheets are stacked on top of each other. Two of the three drivers produce strains parallel to both faces of the drivers when a voltage is applied across the faces of each driver. Thus, rapid scans can be made without producing distortion.

摘要翻译： 用于扫描隧道显微镜的尖端扫描机构使用三个驱动器来驱动三个垂直方向的探针尖端。 驱动器由压电元件组成。 根据本发明，这三个驱动器各自成形为片材，并且三个片材堆叠在彼此的顶部。 当在每个驱动器的表面上施加电压时，三个驱动器中的两个产生平行于驱动器的两个面的应变。 因此，可以进行快速扫描而不产生失真。

公开(公告)号：US07095024B2

公开(公告)日：2006-08-22

申请号：US10828001

申请日：2004-04-20

申请人： Tatsuya Adachi ,  Toshiaki Fujii ,  Masashi Iwatsuki ,  Mikio Naruse ,  Mike Hassel Shearer

发明人： Tatsuya Adachi ,  Toshiaki Fujii ,  Masashi Iwatsuki ,  Mikio Naruse ,  Mike Hassel Shearer

IPC分类号： H01J37/26 ,  H01J37/304

CPC分类号： H01J37/3056 ,  B01L3/545 ,  B01L2300/021 ,  B01L2300/0822 ,  G01N1/32 ,  G01N2035/00772 ,  H01J37/304 ,  H01J2237/30416

摘要： The problem of the present invention is to provide a TEM sample equipped with an identifying function for easily specifying a detailed TEM sample and to provide a system for handling the management of information relating to the TEM sample using the TEM when making observations that is constructed with the FIB device manufacturing the sample. The TEM sample of the present invention is written with a mark encoding information specifying the sample at a specified location of a peripheral part. Information relating to the sample filed taking sample specifying information as an index is supplied to a TEM as associated matter. The sample working FIB device and observation TEM device of the present invention are provided with a function enabling writing of information relating to the sample and images to the file during operation which is then read out and utilized on a display.

摘要翻译： 本发明的问题是提供一种具有识别功能的TEM样品，用于容易地指定详细的TEM样品，并提供一个系统，用于当进行观察时使用TEM处理与TEM样品有关的信息的管理， FIB设备制造样品。 本发明的TEM样品用指定样品在周边部分的指定位置处的标记编码信息进行写入。 以采样指定信息为索引的样本提供的信息作为关联事项提供给TEM。 本发明的样品工作FIB装置和观察TEM装置具有能够在操作期间将关于样品和图像的信息写入文件的功能，然后在显示器上读出并利用该功能。

公开(公告)号：US5128544A

公开(公告)日：1992-07-07

申请号：US694923

申请日：1991-05-02

申请人： Masashi Iwatsuki

发明人： Masashi Iwatsuki

IPC分类号： G01B7/34 ,  G01Q10/04 ,  G01Q60/10 ,  G01Q90/00 ,  H01J37/28 ,  H01L41/083

CPC分类号： G01Q10/04 ,  B82Y35/00 ,  G01Q70/04 ,  H01L41/0825 ,  H01L41/083 ,  Y10S977/837 ,  Y10S977/86 ,  Y10S977/863 ,  Y10S977/872

摘要： A scanning probe microscope having a tip, scanning piezoelectric units for causing the tip to scan and even-numbered z-movement piezoelectric elements for moving the tip along the z-axis. The electrodes at the outer faces of the z-movement piezoelectric elements are grounded. Thus, no AC coupling occurs between the tip and the z-axis electrode opposite to the tip. Introduction of noises into the resulting tunnel current is prevented and the image quality of the sample image is greatly improved.

摘要翻译： 具有尖端的扫描探针显微镜，用于使尖端扫描的扫描压电单元和用于沿Z轴移动尖端的偶数Z运动压电元件。 z运动压电元件外表面的电极接地。 因此，尖端和与尖端相对的z轴电极之间没有发生AC耦合。 导致噪声进入所产生的隧道电流，并且样本图像的图像质量大大提高。