公开(公告)号：US20070201018A1

公开(公告)日：2007-08-30

申请号：US11698985

申请日：2007-01-29

申请人： Masayoshi Takeda ,  Hirokazu Ito

发明人： Masayoshi Takeda ,  Hirokazu Ito

IPC分类号： G01N21/00

CPC分类号： G01N21/95607 ,  G01N2021/9513 ,  G01N2021/95676

摘要： A circuit pattern inspection apparatus and inspection method facilitate the creation of a recipe and the confirmation of a defect. The apparatus and method employ a dialogue-based operation for the creation of a recipe and the confirmation of a defect. Input items (such as contrast, calibration, etc.) for the recipe creation and their purposes are clarified. Input items (such as clustering, filtering, etc.) for the defect confirmation and their purposes are also clarified. The results obtained on the basis of these inputs are registered in the recipe.

摘要翻译： 电路图案检查装置和检查方法便于创建配方并确认缺陷。 该装置和方法采用基于对话的操作来创建配方和确认缺陷。 澄清了配方创建及其目的的输入项（如对比度，校准等）。 还明确了缺陷确认的输入项（如聚类，过滤等）及其用途。 基于这些输入获得的结果登记在配方中。

公开(公告)号：US20080162065A1

公开(公告)日：2008-07-03

申请号：US12073083

申请日：2008-02-29

申请人： Masayoshi Takeda ,  Hirokazu Ito

发明人： Masayoshi Takeda ,  Hirokazu Ito

IPC分类号： G06F19/00 ,  G01N37/00

CPC分类号： G01N21/95607 ,  G01N21/8851 ,  G01N2021/8416

摘要： The defect confirmation screen of a pattern inspection apparatus that allows the user to create a recipe and check defects easily and quickly includes a “map display part” where a wafer map is displayed, an “image display part” where a list of defect images is displayed, a “list display part” where detailed information on defects is displayed and set, and a “graph display part” where a graph is displayed for selected defect items. Those display parts cooperate with each other and change the defect images, defect information list, and defect graph according to selected map information. A classification code, a clustering condition, and a display filter entered using the information described above are registered in a recipe.

摘要翻译： 允许用户容易地快速地创建食谱和检查缺陷的图案检查装置的缺陷确认屏幕包括：显示晶片图的“地图显示部”，缺陷图像的列表的“图像显示部” 显示和显示有关缺陷的详细信息的“列表显示部分”以及显示所选择的缺陷项目的图形的“图形显示部分”。 这些显示部件相互配合，根据所选择的地图信息改变缺陷图像，缺陷信息列表和缺陷图形。 使用上述信息输入的分类代码，聚类条件和显示过滤器被登记在配方中。

公开(公告)号：US20080317330A1

公开(公告)日：2008-12-25

申请号：US12191701

申请日：2008-08-14

申请人： Masayoshi TAKEDA ,  Hirokazu Ito

发明人： Masayoshi TAKEDA ,  Hirokazu Ito

IPC分类号： G06K9/62

CPC分类号： G01N21/95607 ,  G01N2021/9513 ,  G01N2021/95676

摘要： A circuit pattern inspection apparatus and inspection method facilitate the creation of a recipe and the confirmation of a defect. The apparatus and method employ a dialogue-based operation for the creation of a recipe and the confirmation of a defect. Input items (such as contrast, calibration, etc.) for the recipe creation and their purposes are clarified. Input items (such as clustering, filtering, etc.) for the defect confirmation and their purposes are also clarified. The results obtained on the basis of these inputs are registered in the recipe.

摘要翻译： 电路图案检查装置和检查方法便于创建配方并确认缺陷。 该装置和方法采用基于对话的操作来创建配方和确认缺陷。 澄清了配方创建及其目的的输入项（如对比度，校准等）。 还明确了缺陷确认的输入项（如聚类，过滤等）及其用途。 基于这些输入获得的结果登记在配方中。

公开(公告)号：US07355693B2

公开(公告)日：2008-04-08

申请号：US11298749

申请日：2005-12-12

申请人： Masayoshi Takeda ,  Hirokazu Ito

发明人： Masayoshi Takeda ,  Hirokazu Ito

IPC分类号： G01N21/00

CPC分类号： G01N21/95607 ,  G01N21/8851 ,  G01N2021/8416

摘要： The defect confirmation screen of a pattern inspection apparatus that allows the user to create a recipe and check defects easily and quickly includes a “map display part” where a wafer map is displayed, an “image display part” where a list of defect images is displayed, a “list display part” where detailed information on defects is displayed and set, and a “graph display part” where a graph is displayed for selected defect items. Those display parts cooperate with each other and change the defect images, defect information list, and defect graph according to selected map information. A classification code, a clustering condition, and a display filter entered using the information described above are registered in a recipe.

公开(公告)号：US07599054B2

公开(公告)日：2009-10-06

申请号：US12073083

申请日：2008-02-29

申请人： Masayoshi Takeda ,  Hirokazu Ito

发明人： Masayoshi Takeda ,  Hirokazu Ito

IPC分类号： G01N21/00

CPC分类号： G01N21/95607 ,  G01N21/8851 ,  G01N2021/8416

摘要： The defect confirmation screen of a pattern inspection apparatus that allows the user to create a recipe and check defects easily and quickly includes a “map display part” where a wafer map is displayed, an “image display part” where a list of defect images is displayed, a “list display part” where detailed information on defects is displayed and set, and a “graph display part” where a graph is displayed for selected defect items. Those display parts cooperate with each other and change the defect images, defect information list, and defect graph according to selected map information. A classification code, a clustering condition, and a display filter entered using the information described above are registered in a recipe.

摘要翻译： 允许用户容易地快速地创建食谱和检查缺陷的图案检查装置的缺陷确认屏幕包括：显示晶片图的“地图显示部”，缺陷图像的列表的“图像显示部” 显示和显示有关缺陷的详细信息的“列表显示部分”以及显示所选择的缺陷项目的图形的“图形显示部分”。 这些显示部件相互配合，根据所选择的地图信息改变缺陷图像，缺陷信息列表和缺陷图形。 使用上述信息输入的分类代码，聚类条件和显示过滤器被登记在配方中。

公开(公告)号：US07423746B2

公开(公告)日：2008-09-09

申请号：US11698985

申请日：2007-01-29

申请人： Masayoshi Takeda ,  Hirokazu Ito

发明人： Masayoshi Takeda ,  Hirokazu Ito

IPC分类号： G01N21/00

CPC分类号： G01N21/95607 ,  G01N2021/9513 ,  G01N2021/95676

摘要： A circuit pattern inspection apparatus and inspection method facilitate the creation of a recipe and the confirmation of a defect. The apparatus and method employ a dialogue-based operation for the creation of a recipe and the confirmation of a defect. Input items (such as contrast, calibration, etc.) for the recipe creation and their purposes are clarified. Input items (such as clustering, filtering, etc.) for the defect confirmation and their purposes are also clarified. The results obtained on the basis of these inputs are registered in the recipe.

摘要翻译： 电路图案检查装置和检查方法便于创建配方并确认缺陷。 该装置和方法采用基于对话的操作来创建配方和确认缺陷。 澄清了配方创建及其目的的输入项（如对比度，校准等）。 还明确了缺陷确认的输入项（如聚类，过滤等）及其用途。 基于这些输入获得的结果登记在配方中。

公开(公告)号：US20060133661A1

公开(公告)日：2006-06-22

申请号：US11298749

申请日：2005-12-12

申请人： Masayoshi Takeda ,  Hirokazu Ito

发明人： Masayoshi Takeda ,  Hirokazu Ito

IPC分类号： G06K9/00

CPC分类号： G01N21/95607 ,  G01N21/8851 ,  G01N2021/8416

摘要： The defect confirmation screen of a pattern inspection apparatus that allows the user to create a recipe and check defects easily and quickly includes a “map display part” where a wafer map is displayed, an “image display part” where a list of defect images is displayed, a “list display part” where detailed information on defects is displayed and set, and a “graph display part” where a graph is displayed for selected defect items. Those display parts cooperate with each other and change the defect images, defect information list, and defect graph according to selected map information. A classification code, a clustering condition, and a display filter entered using the information described above are registered in a recipe.

公开(公告)号：US09054370B2

公开(公告)日：2015-06-09

申请号：US13431885

申请日：2012-03-27

申请人： Yasutaka Miyawaki ,  Yoshinori Ishimoto ,  Atsushi Nishida ,  Hirokazu Ito

发明人： Yasutaka Miyawaki ,  Yoshinori Ishimoto ,  Atsushi Nishida ,  Hirokazu Ito

IPC分类号： H01M2/20 ,  H01M2/34 ,  H01M2/10

CPC分类号： H01M2/34 ,  H01M2/1077 ,  H01M2/206

摘要： Each of electric cells constituting a battery assembly is provided with external terminals. The upper end of the electric cell is covered with an upper cap surrounding the external terminals whereas the lower end of the electric cell is covered with a lower cap. The electric cell is held between an upper holder and a lower holder via the upper cap and the lower cap. The upper cap includes a protector including ribs projecting along both sides of an inspecting terminal projecting through a terminal opening. The upper ends of the ribs are located above the inspecting terminal. Consequently, a metallic tool or the like cannot be brought into contact with the inspecting terminal, thereby preventing short-circuiting. Thus, it is possible to secure an excellent assembling performance while enhancing the safety of assembling work.

摘要翻译： 构成电池组的电池的每一个设置有外部端子。 电池的上端覆盖有围绕外部端子的上盖，而电池的下端覆盖有下盖。 电池通过上盖和下盖保持在上支架和下支架之间。 上盖包括保护器，其包括沿着通过端子开口突出的检查端子的两侧突出的肋。 肋骨的上端位于检查终端的上方。 因此，金属工具等不能与检查端子接触，从而防止短路。 因此，可以在提高组装作业的安全性的同时确保优异的组装性能。

公开(公告)号：US20110255773A1

公开(公告)日：2011-10-20

申请号：US13125718

申请日：2009-10-19

申请人： Hiroyuki Takahashi ,  Yasuhiro Gunji ,  Hirokazu Ito

发明人： Hiroyuki Takahashi ,  Yasuhiro Gunji ,  Hirokazu Ito

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06T7/13 ,  G06T2207/30148 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： The operation rate of a circuit pattern inspecting apparatus is prevented from deteriorating by measuring image noise of the circuit pattern inspecting apparatus and detecting the sign that the apparatus is to be in an abnormal state. Provided is the circuit pattern inspecting apparatus wherein circuit pattern abnormalities are detected by irradiating a substrate having a circuit pattern formed thereon with an electron beam and detecting generated secondary electrons or reflected electrons. The circuit pattern inspecting apparatus is provided with: an image processing section wherein an image is generated based on the signal intensities of the detected secondary electrons or those of the reflected electrons and the image is displayed for a display apparatus of the interface; and a control section which analyzes the frequency of noise included in the image.

摘要翻译： 通过测量电路图形检查装置的图像噪声并检测装置处于异常状态的符号，防止电路图形检查装置的操作速度恶化。 提供电路图案检查装置，其中通过用形成有电子束的电路图案照射基板并检测产生的二次电子或反射电子来检测电路图案异常。 电路图案检查装置具有：图像处理部，其基于检测出的二次电子的信号强度或反射电子的信号强度生成图像，并且显示用于界面的显示装置的图像; 以及分析图像中包含的噪声频率的控制部分。

公开(公告)号：US07109727B2

公开(公告)日：2006-09-19

申请号：US11227983

申请日：2005-09-16

申请人： Junji Hayakawa ,  Norio Kitao ,  Akinobu Umemura ,  Hirokazu Ito ,  Takaaki Kawai

发明人： Junji Hayakawa ,  Norio Kitao ,  Akinobu Umemura ,  Hirokazu Ito ,  Takaaki Kawai

IPC分类号： G01R27/26 ,  G01P21/00

CPC分类号： G01P15/18 ,  G01P15/125 ,  G01P2015/0814

摘要： In a capacitive physical quantity sensor, a C-V converter converts a variation in a capacitance between a movable electrode and a fixed electrode into a voltage to output the converted voltage in a first operating mode. The C-V converter also outputs a constant voltage in a second operating mode. An amplifier amplifies the converted voltage to output a first voltage, and amplifies the constant voltage to output a second voltage. A first sample and hold circuit operates in the first operating mode to sample and hold the first voltage. A second sample and hold circuit operates in the second operating mode to sample and hold the second voltage. A first differential amplifier obtains a difference voltage between the first voltage held by the first sample and hold circuit and the second voltage held by the second sample and hold circuit.

摘要翻译： 在电容物理量传感器中，C-V转换器将可移动电极和固定电极之间的电容变化转换成电压，以在第一操作模式下输出转换的电压。 C-V转换器还在第二操作模式下输出恒定电压。 放大器放大转换的电压以输出第一电压，并放大恒定电压以输出第二电压。 第一采样和保持电路在第一操作模式下工作以采样和保持第一电压。 第二采样和保持电路在第二操作模式下工作以采样和保持第二电压。 第一差分放大器获得由第一采样和保持电路保持的第一电压与由第二采样和保持电路保持的第二电压之间的差分电压。