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    Apparatus and method for e-beam dark imaging with perspective control
    1.
    发明授权
    Apparatus and method for e-beam dark imaging with perspective control 有权
    具有透视控制的电子束黑暗成像的装置和方法

    公开(公告)号：US07838833B1

    公开(公告)日：2010-11-23

    申请号：US11998502

    申请日：2007-11-30

    申请人： Matthew Lent ,  Stanislaw Marek Borowicz ,  Mehran Nasser-Ghodsi ,  Niles Kenneth MacDonald ,  Ye Yang ,  Kenneth J. Krzeczowski

    发明人： Matthew Lent ,  Stanislaw Marek Borowicz ,  Mehran Nasser-Ghodsi ,  Niles Kenneth MacDonald ,  Ye Yang ,  Kenneth J. Krzeczowski

    IPC分类号： G01N23/00

    CPC分类号： G01N23/2251 ,  H01J37/263 ,  H01J37/28 ,  H01J37/2955 ,  H01J2237/24475 ,  H01J2237/2804

    摘要： A method of imaging using an electron beam. An incident electron beam is focused onto the specimen surface, a scattered electron beam is extracted from the specimen surface, and a plurality of dark field signals are detected using a detection system. An interpolated dark field signal is generated using the plurality of dark field signals. In addition, a bright field signal may be detected using the detection system, and a final interpolated signal may be generated using the interpolated dark field signal and the bright field signal. User input may be received which determines a degree of interpolation between two adjacent dark field signals so as to generate the interpolated dark field signal and which determines an amount of interpolation between the interpolated dark field signal and the bright field signal so as to generate a final interpolated signal. Other embodiments, aspects and features are also disclosed.

    摘要翻译： 使用电子束成像的方法。 入射电子束被聚焦在样本表面上，从样本表面提取散射的电子束，并且使用检测系统检测多个暗场信号。 使用多个暗场信号产生内插暗场信号。 此外，可以使用检测系统检测亮场信号，并且可以使用内插的暗场信号和亮场信号来产生最终的内插信号。 可以接收确定两个相邻暗场信号之间的内插程度的用户输入，以产生内插的暗场信号，并确定内插暗场信号和亮场信号之间的内插量，以便产生最终的 内插信号。 还公开了其它实施例，方面和特征。

    Dynamic centering for behind-the-lens dark field imaging
    3.
    发明授权
    Dynamic centering for behind-the-lens dark field imaging 有权
    后视镜暗场成像的动态定心

    公开(公告)号：US07525090B1

    公开(公告)日：2009-04-28

    申请号：US11725022

    申请日：2007-03-16

    申请人： Kenneth J. Krzeczowski

    发明人： Kenneth J. Krzeczowski

    IPC分类号： G01N23/00

    CPC分类号： H01J37/28 ,  H01J37/222 ,  H01J37/244 ,  H01J37/263 ,  H01J37/265 ,  H01J2237/221 ,  H01J2237/226 ,  H01J2237/2446 ,  H01J2237/2448 ,  H01J2237/24495 ,  H01J2237/2803

    摘要： One embodiment relates to a method of behind-the-lens dark-field imaging using a scanning electron microscope apparatus. An incident beam is focused onto a specimen surface using an immersion objective lens, and the incident beam is deflected so as to scan the incident electron beam over a field of view of the specimen surface. A secondary electron beam is detected using a segmented detector to obtain a set of pixel data for each segment of the detector. Scan-dependent movement of the secondary electron beam over the segmented detector is compensated for by processing using a dynamic centering algorithm to generate a set of virtual pixel data for each segment of a virtual detector. At least one set of the virtual pixel data is used to generate a dark field image. Other embodiments, aspects, and features are also disclosed.

    摘要翻译： 一个实施例涉及使用扫描电子显微镜装置的镜头后暗区成像的方法。 使用浸没物镜将入射光束聚焦在样本表面上，并且入射光束被偏转，以便在被检体表面的视野上扫描入射的电子束。 使用分段检测器检测二次电子束，以获得检测器的每个段的一组像素数据。 通过使用动态中心算法的处理来补偿二次电子束在分段检测器上的扫描依赖运动，以生成虚拟检测器的每个段的一组虚拟像素数据。 使用至少一组虚拟像素数据来生成暗场图像。 还公开了其它实施例，方面和特征。