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    Microelectromechanical devices and fabrication methods
    1.
    发明申请
    Microelectromechanical devices and fabrication methods 有权
    微机电装置及制造方法

    公开(公告)号：US20080122020A1

    公开(公告)日：2008-05-29

    申请号：US11594525

    申请日：2006-11-07

    申请人： Matthias Metz ,  Zhiyu Pan ,  Brian Stark ,  Markus Ulm ,  Gary Yama

    发明人： Matthias Metz ,  Zhiyu Pan ,  Brian Stark ,  Markus Ulm ,  Gary Yama

    IPC分类号： H01L29/84 ,  H01L21/56

    CPC分类号： B81C1/00301 ,  B81B2207/015 ,  B81B2207/097 ,  B81C2203/0136 ,  B81C2203/0145 ,  H01L21/56 ,  H01L2924/0002 ,  H01L2924/00

    摘要： There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a MEMS device, and technique of fabricating or manufacturing a MEMS device, having mechanical structures encapsulated in a chamber prior to final packaging. An embodiment further includes location of a piezoelectric material as part of a semiconductor sensing structure. The semiconductor sensing structure, in conjunction with the piezoelectric material, can be used as a sensing device to provide an output signal associated with a sensed event.

    摘要翻译： 这里描述和说明了许多发明。 在一个方面，本发明涉及MEMS器件，以及制造或制造MEMS器件的技术，其具有在最终封装之前封装在腔室中的机械结构。 实施例还包括作为半导体感测结构的一部分的压电材料的位置。 结合压电材料的半导体感测结构可以用作感测装置以提供与感测到的事件相关联的输出信号。

    Microelectromechanical devices and fabrication methods
    2.
    发明授权
    Microelectromechanical devices and fabrication methods 有权
    微机电装置及制造方法

    公开(公告)号：US07671515B2

    公开(公告)日：2010-03-02

    申请号：US11594525

    申请日：2006-11-07

    申请人： Matthias Metz ,  Zhiyu Pan ,  Brian Stark ,  Markus Ulm ,  Gary Yama

    发明人： Matthias Metz ,  Zhiyu Pan ,  Brian Stark ,  Markus Ulm ,  Gary Yama

    IPC分类号： H01L41/053

    CPC分类号： B81C1/00301 ,  B81B2207/015 ,  B81B2207/097 ,  B81C2203/0136 ,  B81C2203/0145 ,  H01L21/56 ,  H01L2924/0002 ,  H01L2924/00

    摘要： There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a MEMS device, and technique of fabricating or manufacturing a MEMS device, having mechanical structures encapsulated in a chamber prior to final packaging. An embodiment further includes location of a piezoelectric material as part of a semiconductor sensing structure. The semiconductor sensing structure, in conjunction with the piezoelectric material, can be used as a sensing device to provide an output signal associated with a sensed event.

    摘要翻译： 这里描述和说明了许多发明。 在一个方面，本发明涉及MEMS器件，以及制造或制造MEMS器件的技术，其具有在最终封装之前封装在腔室中的机械结构。 实施例还包括作为半导体感测结构的一部分的压电材料的位置。 结合压电材料的半导体感测结构可以用作感测装置以提供与感测到的事件相关联的输出信号。

    Tri-axis accelerometer having a single proof mass and fully differential output signals
    3.
    发明申请
    Tri-axis accelerometer having a single proof mass and fully differential output signals 有权
    三轴加速度计具有单个检测质量和全差分输出信号

    公开(公告)号：US20080053228A1

    公开(公告)日：2008-03-06

    申请号：US11513669

    申请日：2006-08-30

    申请人： Zhiyu Pan ,  Christoph Lang ,  Gary Yama ,  Matthias Metz ,  Markus Ulm

    发明人： Zhiyu Pan ,  Christoph Lang ,  Gary Yama ,  Matthias Metz ,  Markus Ulm

    IPC分类号： G01P15/00

    CPC分类号： G01P15/09 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/084 ,  Y10T29/42

    摘要： A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.

    摘要翻译： 三轴加速度计包括证明质量块，至少四个锚点至少布置在两对相对中，第一对锚定点沿着第一轴线彼此相对布置，第二对固定点彼此相对布置 沿着第二轴线，所述第一轴线和所述第二轴线彼此垂直;以及至少四个弹簧单元，用于将所述证明物质连接到所述至少四个锚定点，所述弹簧单元各自包括一对相同的弹簧，每个弹簧 包括感测单元。

    TRI-AXIS ACCELEROMETER HAVING A SINGLE PROOF MASS AND FULLY DIFFERENTIAL OUTPUT SIGNALS
    6.
    发明申请
    TRI-AXIS ACCELEROMETER HAVING A SINGLE PROOF MASS AND FULLY DIFFERENTIAL OUTPUT SIGNALS 有权
    具有单个防伪质量和完全差异输出信号的三轴加速度计

    公开(公告)号：US20100263447A1

    公开(公告)日：2010-10-21

    申请号：US12825046

    申请日：2010-06-28

    申请人： Zhiyu Pan ,  Christoph Lang ,  Gary Yama ,  Matthias Metz ,  Markus Ulm

    发明人： Zhiyu Pan ,  Christoph Lang ,  Gary Yama ,  Matthias Metz ,  Markus Ulm

    IPC分类号： G01P15/09 ,  H04R17/00

    CPC分类号： G01P15/09 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/084 ,  Y10T29/42

    摘要： A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.

    摘要翻译： 三轴加速度计包括证明质量块，至少四个锚点至少布置在两对相对中，第一对锚定点沿着第一轴线彼此相对布置，第二对固定点彼此相对布置 沿着第二轴线，所述第一轴线和所述第二轴线彼此垂直;以及至少四个弹簧单元，用于将所述证明物质连接到所述至少四个锚定点，所述弹簧单元各自包括一对相同的弹簧，每个弹簧 包括感测单元。

    Tri-axis accelerometer having a single proof mass and fully differential output signals
    7.
    发明授权
    Tri-axis accelerometer having a single proof mass and fully differential output signals 有权
    三轴加速度计具有单个检测质量和全差分输出信号

    公开(公告)号：US07757555B2

    公开(公告)日：2010-07-20

    申请号：US11513669

    申请日：2006-08-30

    申请人： Zhiyu Pan ,  Christoph Lang ,  Gary Yama ,  Matthias Metz ,  Markus Ulm

    发明人： Zhiyu Pan ,  Christoph Lang ,  Gary Yama ,  Matthias Metz ,  Markus Ulm

    IPC分类号： G01P15/08

    CPC分类号： G01P15/09 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/084 ,  Y10T29/42

    摘要： A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.

    摘要翻译： 三轴加速度计包括证明质量块，至少四个锚点至少布置在两对相对中，第一对锚定点沿着第一轴线彼此相对布置，第二对固定点彼此相对布置 沿着第二轴线，所述第一轴线和所述第二轴线彼此垂直;以及至少四个弹簧单元，用于将所述证明物质连接到所述至少四个锚定点，所述弹簧单元各自包括一对相同的弹簧，每个弹簧 包括感测单元。

    Anti-stiction technique for electromechanical systems and electromechanical device employing same
    8.
    发明申请
    Anti-stiction technique for electromechanical systems and electromechanical device employing same 有权
    机电系统的抗静电技术和采用该机电系统的机电装置

    公开(公告)号：US20090065928A1

    公开(公告)日：2009-03-12

    申请号：US12264774

    申请日：2008-11-04

    申请人： Markus Lutz ,  Aaron Partidge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

    发明人： Markus Lutz ,  Aaron Partidge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

    IPC分类号： H01L23/12

    CPC分类号： B81C1/0096 ,  B81B3/0005 ,  B81C2201/112 ,  B82Y30/00 ,  H01L2224/13 ,  H01L2924/1461 ,  H01L2924/00

    摘要： A mechanical structure is disposed in a chamber, at least a portion of which is defined by the encapsulation structure. A first method provides a channel cap having at least one preform portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. A second method provides a channel cap having at least one portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. The at least one portion is fabricated apart from the electromechanical device and thereafter affixed to the electromechanical device. A third method provides a channel cap having at least one portion disposed over or in at least a portion of the anti-stiction channel to seal an anti-stiction channel, at least in part. The at least one portion may comprise a wire ball, a stud, metal foil or a solder preform. A device includes a substrate, an encapsulation structure and a mechanical structure. An anti-stiction layer is disposed on at least a portion of the mechanical structure. An anti-stiction channel is formed in at least one of the substrate and the encapsulation structure. A cap has at least one preform portion disposed over or in at least a portion of the anti-stiction channel to seal the anti-stiction channel, at least in part.

    摘要翻译： 机械结构设置在室中，其至少一部分由封装结构限定。 第一种方法提供了通道盖，其具有至少部分地设置在防静电通道的上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。 第二种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。 该至少一个部分与机电装置分开制造，然后固定在机电装置上。 第三种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。 所述至少一个部分可以包括线球，螺柱，金属箔或焊料预制件。 一种器件包括衬底，封装结构和机械结构。 抗静电层设置在机械结构的至少一部分上。 在基板和封装结构中的至少一个中形成抗静电通道。 帽至少部分地具有设置在抗静电通道上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。

    Anti-stiction technique for electromechanical systems and electromechanical device employing same
    9.
    发明申请
    Anti-stiction technique for electromechanical systems and electromechanical device employing same 有权

    公开(公告)号：US20060246631A1

    公开(公告)日：2006-11-02

    申请号：US11115828

    申请日：2005-04-27

    申请人： Markus Lutz ,  Aaron Partridge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

    发明人： Markus Lutz ,  Aaron Partridge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

    IPC分类号： H01L21/44

    CPC分类号： B81C1/0096 ,  B81B3/0005 ,  B81C2201/112 ,  B82Y30/00 ,  H01L2224/13 ,  H01L2924/1461 ,  H01L2924/00

    摘要： A mechanical structure is disposed in a chamber, at least a portion of which is defined by the encapsulation structure. A first method provides a channel cap having at least one preform portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. A second method provides a channel cap having at least one portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. The at least one portion is fabricated apart from the electromechanical device and thereafter affixed to the electromechanical device. A third method provides a channel cap having at least one portion disposed over or in at least a portion of the anti-stiction channel to seal an anti-stiction channel, at least in part. The at least one portion may comprise a wire ball, a stud, metal foil or a solder preform. A device includes a substrate, an encapsulation structure and a mechanical structure. An anti-stiction layer is disposed on at least a portion of the mechanical structure. An anti-stiction channel is formed in at least one of the substrate and the encapsulation structure. A cap has at least one preform portion disposed over or in at least a portion of the anti-stiction channel to seal the anti-stiction channel, at least in part.