公开(公告)号：US07626316B2

公开(公告)日：2009-12-01

申请号：US11904811

申请日：2007-09-28

Applicant: Inna Kozinsky ,  Brian Stark ,  Robert Candler

Inventor： Inna Kozinsky ,  Brian Stark ,  Robert Candler

IPC: H01L41/08

CPC classification number: H01L41/1134 ,  H02K7/1876 ,  H02K35/00 ,  H02N2/188

Abstract: The invention is a system incorporating a self-tuning resonator and method of self-tuning a resonator within a system. In one embodiment, a method of powering a system with energy harvested from a vibrating surface includes receiving a first mechanical energy at a first driving frequency from the vibrating surface, transferring the received first mechanical energy to a suspended structure within the system, vibrating the suspended structure with the transferred first mechanical energy, passively adjusting the resonant frequency of the suspended structure to a first resonant frequency associated with the first driving frequency by moving a movable mass in response to the movement of the suspended structure, vibrating the adjusted suspended structure with the transferred first mechanical energy, generating electrical energy using the vibrations of the adjusted suspended structure, and powering the system with the generated electrical energy.

公开(公告)号：US20090065928A1

公开(公告)日：2009-03-12

申请号：US12264774

申请日：2008-11-04

Applicant: Markus Lutz ,  Aaron Partidge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

Inventor： Markus Lutz ,  Aaron Partidge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

IPC: H01L23/12

CPC classification number: B81C1/0096 ,  B81B3/0005 ,  B81C2201/112 ,  B82Y30/00 ,  H01L2224/13 ,  H01L2924/1461 ,  H01L2924/00

Abstract: A mechanical structure is disposed in a chamber, at least a portion of which is defined by the encapsulation structure. A first method provides a channel cap having at least one preform portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. A second method provides a channel cap having at least one portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. The at least one portion is fabricated apart from the electromechanical device and thereafter affixed to the electromechanical device. A third method provides a channel cap having at least one portion disposed over or in at least a portion of the anti-stiction channel to seal an anti-stiction channel, at least in part. The at least one portion may comprise a wire ball, a stud, metal foil or a solder preform. A device includes a substrate, an encapsulation structure and a mechanical structure. An anti-stiction layer is disposed on at least a portion of the mechanical structure. An anti-stiction channel is formed in at least one of the substrate and the encapsulation structure. A cap has at least one preform portion disposed over or in at least a portion of the anti-stiction channel to seal the anti-stiction channel, at least in part.

Abstract translation: 机械结构设置在室中，其至少一部分由封装结构限定。 第一种方法提供了通道盖，其具有至少部分地设置在防静电通道的上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。 第二种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。 该至少一个部分与机电装置分开制造，然后固定在机电装置上。 第三种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。 所述至少一个部分可以包括线球，螺柱，金属箔或焊料预制件。 一种器件包括衬底，封装结构和机械结构。 抗静电层设置在机械结构的至少一部分上。 在基板和封装结构中的至少一个中形成抗静电通道。 帽至少部分地具有设置在抗静电通道上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。

公开(公告)号：US20080265712A1

公开(公告)日：2008-10-30

申请号：US12172369

申请日：2008-07-14

Applicant: Markus Ulm ,  Brian Stark ,  Matthias Metz

Inventor： Markus Ulm ,  Brian Stark ,  Matthias Metz

IPC: H01L41/24 ,  H04R17/00

CPC classification number: B60C23/0411 ,  H01L41/1136 ,  H01L41/331 ,  H01L41/43 ,  H02N2/186 ,  H02N2/22 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49007 ,  Y10T29/49172 ,  Y10T29/49176 ,  Y10T29/49224

Abstract: Embodiments of making an energy harvesting device are described. In one embodiment, a case and integrated piezoelectric cantilever to harvest vibration energy from an environment being sensed is produced via a print forming method injection molding method. The cantilever device consists of a piezoelectric material member, and a proof mass of high density material coupled to the piezoelectric member. The print forming method is used to build up the base and walls of the device as well as the neutral layers of the piezoelectric member. Metal layers are printed to form the electrode layers of the piezoelectric member and the electrical contact portions of the device. Passive components can also be formed as part of the layers of the device. The entire assembly can be encapsulated in plastic.

Abstract translation: 描述制造能量收集装置的实施例。 在一个实施例中，通过印刷成型方法注射成型方法产生用于从被感测环境收集振动能量的壳体和集成压电悬臂。 悬臂装置由压电材料构件和与压电构件耦合的高密度材料的检验质量组成。 印刷形成方法用于构建装置的基底和壁以及压电构件的中性层。 印刷金属层以形成压电元件的电极层和器件的电接触部分。 无源元件也可以形成为器件层的一部分。 整个组件可以封装在塑料中。

公开(公告)号：US20080122020A1

公开(公告)日：2008-05-29

申请号：US11594525

申请日：2006-11-07

Applicant: Matthias Metz ,  Zhiyu Pan ,  Brian Stark ,  Markus Ulm ,  Gary Yama

Inventor： Matthias Metz ,  Zhiyu Pan ,  Brian Stark ,  Markus Ulm ,  Gary Yama

IPC: H01L29/84 ,  H01L21/56

CPC classification number: B81C1/00301 ,  B81B2207/015 ,  B81B2207/097 ,  B81C2203/0136 ,  B81C2203/0145 ,  H01L21/56 ,  H01L2924/0002 ,  H01L2924/00

Abstract: There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a MEMS device, and technique of fabricating or manufacturing a MEMS device, having mechanical structures encapsulated in a chamber prior to final packaging. An embodiment further includes location of a piezoelectric material as part of a semiconductor sensing structure. The semiconductor sensing structure, in conjunction with the piezoelectric material, can be used as a sensing device to provide an output signal associated with a sensed event.

Abstract translation: 这里描述和说明了许多发明。 在一个方面，本发明涉及MEMS器件，以及制造或制造MEMS器件的技术，其具有在最终封装之前封装在腔室中的机械结构。 实施例还包括作为半导体感测结构的一部分的压电材料的位置。 结合压电材料的半导体感测结构可以用作感测装置以提供与感测到的事件相关联的输出信号。

公开(公告)号：US20080079333A1

公开(公告)日：2008-04-03

申请号：US11541966

申请日：2006-10-02

Applicant: Markus Ulm ,  Brian Stark ,  Matthias Metz

Inventor： Markus Ulm ,  Brian Stark ,  Matthias Metz

IPC: H01L41/113

CPC classification number: B60C23/0411 ,  H01L41/1136 ,  H01L41/331 ,  H01L41/43 ,  H02N2/186 ,  H02N2/22 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49007 ,  Y10T29/49172 ,  Y10T29/49176 ,  Y10T29/49224

Abstract: Embodiments of making an energy harvesting device are described. In one embodiment, a case and integrated piezoelectric cantilever to harvest vibration energy from an environment being sensed is produced via a print forming method injection molding method. The cantilever device consists of a piezoelectric material member, and a proof mass of high density material coupled to the piezoelectric member. The print forming method is used to build up the base and walls of the device as well as the neutral layers of the piezoelectric member. Metal layers are printed to form the electrode layers of the piezoelectric member and the electrical contact portions of the device. Passive components can also be formed as part of the layers of the device. The entire assembly can be encapsulated in plastic.

Abstract translation: 描述制造能量收集装置的实施例。 在一个实施例中，通过印刷成型方法注射成型方法产生用于从被感测环境收集振动能量的壳体和集成压电悬臂。 悬臂装置由压电材料构件和与压电构件耦合的高密度材料的检验质量组成。 印刷形成方法用于构建装置的基底和壁以及压电构件的中性层。 印刷金属层以形成压电元件的电极层和器件的电接触部分。 无源元件也可以形成为器件层的一部分。 整个组件可以封装在塑料中。

公开(公告)号：US20090085442A1

公开(公告)日：2009-04-02

申请号：US11904811

申请日：2007-09-28

Applicant: Inna Kozinsky ,  Brian Stark ,  Robert Candler

Inventor： Inna Kozinsky ,  Brian Stark ,  Robert Candler

IPC: H01L41/113 ,  H02N2/18

CPC classification number: H01L41/1134 ,  H02K7/1876 ,  H02K35/00 ,  H02N2/188

Abstract: The invention is a system incorporating a self-tuning resonator and method of self-tuning a resonator within a system. In one embodiment, a method of powering a system with energy harvested from a vibrating surface includes receiving a first mechanical energy at a first driving frequency from the vibrating surface, transferring the received first mechanical energy to a suspended structure within the system, vibrating the suspended structure with the transferred first mechanical energy, passively adjusting the resonant frequency of the suspended structure to a first resonant frequency associated with the first driving frequency by moving a movable mass in response to the movement of the suspended structure, vibrating the adjusted suspended structure with the transferred first mechanical energy, generating electrical energy using the vibrations of the adjusted suspended structure, and powering the system with the generated electrical energy.

Abstract translation: 本发明是一种结合自谐振谐振器的系统和在系统内自谐振谐振器的方法。 在一个实施例中，使用从振动表面收集的能量为系统供电的方法包括从振动表面接收第一驱动频率的第一机械能，将接收到的第一机械能转移到系统内的悬挂结构，振动悬挂 结构与被转移的第一机械能，通过响应于悬挂结构的运动移动可移动质量，将悬挂结构的谐振频率被动地调整到与第一驱动频率相关的第一谐振频率， 转移第一机械能，使用调整后的悬挂结构的振动产生电能，并且利用所产生的电能为系统供电。

公开(公告)号：US20080050845A1

公开(公告)日：2008-02-28

申请号：US11510040

申请日：2006-08-25

Applicant: Markus Ulm ,  Brian Stark ,  Matthias Metz ,  Tino Fuchs ,  Franz Laermer ,  Silvia Kronmueller

Inventor： Markus Ulm ,  Brian Stark ,  Matthias Metz ,  Tino Fuchs ,  Franz Laermer ,  Silvia Kronmueller

IPC: H01L21/00

CPC classification number: B81C1/0096 ,  B81B3/0005

Abstract: An encapsulated MEMS process including a high-temperature anti-stiction coating that is stable under processing steps at temperatures over 450 C is described. The coating is applied after device release but before sealing vents in the encapsulation layer. Alternatively, an anti-stiction coating may be applied to released devices directly before encapsulation.

Abstract translation: 描述了一种封装的MEMS工艺，其包括在高于450℃的温度下在加工步骤下稳定的高温抗静电涂层。 涂层在器件释放后，但在封装层封口之前应用。 或者，可以在封装之前将抗静电涂层直接施加到释放的装置。

公开(公告)号：US08020266B2

公开(公告)日：2011-09-20

申请号：US12172369

申请日：2008-07-14

Applicant: Markus Ulm ,  Brian Stark ,  Matthias Metz

Inventor： Markus Ulm ,  Brian Stark ,  Matthias Metz

IPC: H01G7/00

CPC classification number: B60C23/0411 ,  H01L41/1136 ,  H01L41/331 ,  H01L41/43 ,  H02N2/186 ,  H02N2/22 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49007 ,  Y10T29/49172 ,  Y10T29/49176 ,  Y10T29/49224

Abstract: Methods of making an energy harvesting device are described. A case and integrated piezoelectric cantilever to harvest vibration energy from an environment being sensed is produced via a print forming method injection molding method. The cantilever device consists of a piezoelectric material member, and a proof mass of high density material coupled to the piezoelectric member. The print forming method is used to build up the base and walls of the device as well as the neutral layers of the piezoelectric member. Metal layers are printed to form the electrode layers of the piezoelectric member and the electrical contact portions of the device. Passive components can also be formed as part of the layers of the device. The entire assembly can be encapsulated in plastic.

Abstract translation: 描述了制造能量收集装置的方法。 通过印刷成型方法注射成型方法产生用于从感测环境收集振动能的壳体和集成压电悬臂。 悬臂装置由压电材料构件和与压电构件耦合的高密度材料的检验质量组成。 印刷形成方法用于构建装置的基底和壁以及压电构件的中性层。 印刷金属层以形成压电元件的电极层和器件的电接触部分。 无源元件也可以形成为器件层的一部分。 整个组件可以封装在塑料中。

公开(公告)号：US07671515B2

公开(公告)日：2010-03-02

申请号：US11594525

申请日：2006-11-07

Applicant: Matthias Metz ,  Zhiyu Pan ,  Brian Stark ,  Markus Ulm ,  Gary Yama

Inventor： Matthias Metz ,  Zhiyu Pan ,  Brian Stark ,  Markus Ulm ,  Gary Yama

IPC: H01L41/053

CPC classification number: B81C1/00301 ,  B81B2207/015 ,  B81B2207/097 ,  B81C2203/0136 ,  B81C2203/0145 ,  H01L21/56 ,  H01L2924/0002 ,  H01L2924/00

Abstract: There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a MEMS device, and technique of fabricating or manufacturing a MEMS device, having mechanical structures encapsulated in a chamber prior to final packaging. An embodiment further includes location of a piezoelectric material as part of a semiconductor sensing structure. The semiconductor sensing structure, in conjunction with the piezoelectric material, can be used as a sensing device to provide an output signal associated with a sensed event.

Abstract translation: 这里描述和说明了许多发明。 在一个方面，本发明涉及MEMS器件，以及制造或制造MEMS器件的技术，其具有在最终封装之前封装在腔室中的机械结构。 实施例还包括作为半导体感测结构的一部分的压电材料的位置。 结合压电材料的半导体感测结构可以用作感测装置以提供与感测到的事件相关联的输出信号。

公开(公告)号：US07449355B2

公开(公告)日：2008-11-11

申请号：US11115828

申请日：2005-04-27

Applicant: Markus Lutz ,  Aaron Partridge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

Inventor： Markus Lutz ,  Aaron Partridge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

IPC: H01L21/00 ,  H01L21/461

CPC classification number: B81C1/0096 ,  B81B3/0005 ,  B81C2201/112 ,  B82Y30/00 ,  H01L2224/13 ,  H01L2924/1461 ,  H01L2924/00

Abstract: A mechanical structure is disposed in a chamber, at least a portion of which is defined by the encapsulation structure. A first method provides a channel cap having at least one preform portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. A second method provides a channel cap having at least one portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. The at least one portion is fabricated apart from the electromechanical device and thereafter affixed to the electromechanical device. A third method provides a channel cap having at least one portion disposed over or in at least a portion of the anti-stiction channel to seal an anti-stiction channel, at least in part. The at least one portion may comprise a wire ball, a stud, metal foil or a solder preform. A device includes a substrate, an encapsulation structure and a mechanical structure. An anti-stiction layer is disposed on at least a portion of the mechanical structure. An anti-stiction channel is formed in at least one of the substrate and the encapsulation structure. A cap has at least one preform portion disposed over or in at least a portion of the anti-stiction channel to seal the anti-stiction channel, at least in part.

Abstract translation: 机械结构设置在室中，其至少一部分由封装结构限定。 第一种方法提供了通道盖，其具有至少部分地设置在防静电通道的上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。 第二种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。 该至少一个部分与机电装置分开制造，然后固定在机电装置上。 第三种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。 所述至少一个部分可以包括线球，螺柱，金属箔或焊料预制件。 一种器件包括衬底，封装结构和机械结构。 抗静电层设置在机械结构的至少一部分上。 在基板和封装结构中的至少一个中形成抗静电通道。 帽至少部分地具有设置在抗静电通道上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。