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公开(公告)号：US06538730B2
公开(公告)日：2003-03-25
申请号：US09828269
申请日：2001-04-06
IPC分类号： G01N2100
CPC分类号： G01N21/956 , G01N21/21 , G01N21/9501
摘要： Scattered radiation from a sample surface is collected by means of a collector that collects radiation substantially symmetrically about a line normal to the surface. The collected radiation is directed to channels at different azimuthal angles so that information related to relative azimuthal positions of the collected scattered radiation about the line is preserved. The collected radiation is converted into respective signals representative of radiation scattered at different azimuthal angles about the line. The presence and/or characteristics of anomalies are determined from the signals. Alternatively, the radiation collected by the collector may be filtered by means of a spatial filter having an annular gap of an angle related to the angular separation of expected pattern scattering. Signals obtained from the narrow and wide collection channels may be compared to distinguish between micro-scratches and particles. Forward scattered radiation may be collected from other radiation and compared to distinguish between micro-scratches and particles. Intensity of scattering is measured when the surface is illuminated sequentially by S- and P-polarized radiation and compared to distinguish between micro-scratches and particles. Representative films may be measured using profilometers or scanning probe microscopes to determine their roughness and by the above-described instruments to determine haze in order to build a database. Surface roughness of unknown films may then be determined by measuring haze values and from the database.
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公开(公告)号：US06862096B2
公开(公告)日：2005-03-01
申请号：US10360565
申请日：2003-02-06
CPC分类号： G01N21/956 , G01N21/21 , G01N21/9501
摘要： Scattered radiation from a sample surface is collected by means of a collector that collects radiation substantially symmetrically about a line normal to the surface. The collected radiation is directed to channels at different azimuthal angles so that information related to relative azimuthal positions of the collected scattered radiation about the line is preserved. The collected radiation is converted into respective signals representative of radiation scattered at different azimuthal angles about the line. The presence and/or characteristics of anomalies are determined from the signals. Alternatively, the radiation collected by the collector may be filtered by means of a spatial filter having an annular gap of an angle related to the angular separation of expected pattern scattering. Signals obtained from the narrow and wide collection channels may be compared to distinguish between micro-scratches and particles. Forward scattered radiation may be collected from other radiation and compared to distinguish between micro-scratches and particles. Intensity of scattering is measured when the surface is illuminated sequentially by S- and P-polarized radiation and compared to distinguish between micro-scratches and particles. Representative films may be measured using profilometers or scanning probe microscopes to determine their roughness and by the above-described instruments to determine haze in order to build a database. Surface roughness of unknown films may then be determined by measuring haze values and from the database.
摘要翻译： 来自样品表面的散射辐射通过收集器收集，收集器围绕垂直于表面的线基本上对称地收集辐射。 收集的辐射被引导到不同方位角的通道，从而保持与线周围收集的散射辐射的相对方位位置有关的信息。 所收集的辐射被转换成代表围绕线路以不同方位角散射的辐射的相应信号。 异常的存在和/或特征由信号确定。 或者，由集电器收集的辐射可以通过具有与预期图案散射的角度间隔相关的角度的环形间隙的空间滤光器来过滤。 可以比较从狭窄和宽收集通道获得的信号，以区分微划痕和微粒。 可以从其他辐射收集向前散射的辐射，并进行比较以区分微划痕和微粒。 当通过S和P偏振辐射依次照射表面时，测量散射强度并进行比较以区分微划痕和微粒。 可以使用轮廓仪或扫描探针显微镜来测量代表性膜以确定其粗糙度，并且可以通过上述仪器来确定雾度以构建数据库。 然后可以通过测量雾度值和数据库来确定未知膜的表面粗糙度。
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公开(公告)号：US20050018181A1
公开(公告)日：2005-01-27
申请号：US10919600
申请日：2004-08-16
CPC分类号： G01N21/956 , G01N21/21 , G01N21/9501
摘要： Scattered radiation from a sample surface is collected by means of a collector that collects radiation substantially symmetrically about a line normal to the surface. The collected radiation is directed to channels at different azimuthal angles so- that information related to relative azimuthal positions of the collected scattered radiation about the line is preserved. The collected radiation is converted into respective signals representative of radiation scattered at different azimuthal angles about the line. The presence and/or characteristics of anomalies are determined from the signals. Alternatively, the radiation collected by the collector may be filtered by means of a spatial filter having an annular gap of an angle related to the angular separation of expected pattern scattering. Signals obtained from the narrow and wide collection channels may be compared to distinguish between micro-scratches and particles. Forward scattered radiation may be collected from other radiation and compared to distinguish between micro-scratches and particles. Intensity of scattering is measured when the surface is illuminated sequentially by S- and P-polarized radiation and compared to distinguish between micro-scratches and particles. Representative films may be measured using profilometers or scanning probe microscopes to determine their roughness and by the above-described instruments to determine haze in order to build a database. Surface roughness of unknown films may then be determined by measuring haze values and from the database.
摘要翻译： 来自样品表面的散射辐射通过收集器收集，收集器围绕垂直于表面的线基本上对称地收集辐射。 收集的辐射被引导到不同方位角的通道，以便保持与线周围收集的散射辐射的相对方位位置有关的信息。 所收集的辐射被转换成代表围绕线路以不同方位角散射的辐射的各个信号。 异常的存在和/或特征由信号确定。 或者，由集电器收集的辐射可以通过具有与预期图案散射的角度间隔相关的角度的环形间隙的空间滤光器来过滤。 可以比较从狭窄和宽收集通道获得的信号，以区分微划痕和微粒。 可以从其他辐射收集向前散射的辐射，并进行比较以区分微划痕和微粒。 当通过S和P偏振辐射依次照射表面时，测量散射强度并进行比较以区分微划痕和微粒。 可以使用轮廓仪或扫描探针显微镜来测量代表性膜以确定其粗糙度，并且可以通过上述仪器来确定雾度以构建数据库。 然后可以通过测量雾度值和数据库来确定未知膜的表面粗糙度。
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公开(公告)号：US20110008947A1
公开(公告)日：2011-01-13
申请号：US12817499
申请日：2010-06-17
申请人： KEVIN LAUGHTON CUNNINGHAM , Carl Treadwell , Tzay-Fa Su , Uday Mahajan , Sarin Sundar Jainnagar Kuppuswamy
发明人： KEVIN LAUGHTON CUNNINGHAM , Carl Treadwell , Tzay-Fa Su , Uday Mahajan , Sarin Sundar Jainnagar Kuppuswamy
CPC分类号： H01L31/18 , B23K26/0853 , B23K26/364 , B23K26/40 , B23K2103/172 , B23K2103/50
摘要： Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, bonding, testing, and sectioning processes to form one or more complete, functional, and tested solar cell devices in custom sizes and/or shapes that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system is adapted to form one or more BIPV panels in custom sizes and/or shapes from a single large substrate for shipment to an end user.
摘要翻译： 本发明的实施例一般涉及使用适于在太阳能电池器件的形成中执行一个或多个工艺的处理模块来形成太阳能电池器件的系统。 在一个实施例中，该系统适于通过接受大的未处理衬底并执行多次沉积，材料去除，清洁，结合，测试和切片过程来形成薄膜太阳能电池器件，以形成一个或多个完整的，功能性和测试的太阳能 自定义尺寸和/或形状的单元设备，然后可以运送到最终用户以安装在期望的位置以发电。 在一个实施例中，系统适于从单个大的基板形成用于装运到最终用户的定制尺寸和/或形状的一个或多个BIPV面板。
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公开(公告)号：US06177143B1
公开(公告)日：2001-01-23
申请号：US09226347
申请日：1999-01-06
申请人： Carl Treadwell , Jingjun Yang , Matthew Ross
发明人： Carl Treadwell , Jingjun Yang , Matthew Ross
IPC分类号： C08F248
CPC分类号： H01L21/02126 , B05D3/068 , C09D183/04 , H01L21/02216 , H01L21/02282 , H01L21/31058 , H01L21/3122
摘要： Electron beam cured siloxane dielectric films and to a process for their manufacture which are useful in the production of integrated circuits. A siloxane polymer having in one aspect less than 40 Mole percent carbon containing substituents, and in another aspect at least approximately 40 Mole percent carbon containing substituents is cured by a wide beam electron beam exposure.
摘要翻译： 电子束固化的硅氧烷介电膜及其制造方法，其可用于集成电路的生产。 具有一个方面的硅氧烷聚合物通过宽束电子束曝光固化，其一方面小于40摩尔％的含碳取代基，另一方面至少约40摩尔％的含碳取代基固化。
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