-
公开(公告)号：US20050274911A1
公开(公告)日：2005-12-15
申请号：US10661719
申请日：2003-09-11
申请人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatah Lehman , Doron Meshulach , Ehud Tirosh
发明人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatah Lehman , Doron Meshulach , Ehud Tirosh
CPC分类号： G03F7/70375 , G03F7/70275
摘要： A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.
摘要翻译： 用于在基板上写入主图像的方法包括将主图像分割为帧矩阵，每个帧包括在主图像内的相应帧位置中限定相应帧图像的像素阵列。 当电子束在相应的帧位置上被扫描时，电子束以光栅图案扫描在衬底上，同时响应于每个帧的各个帧图像而对电子束进行成形，使得在每个帧中，电子束 同时将多个像素写入衬底。
-
公开(公告)号：US07098468B2
公开(公告)日：2006-08-29
申请号：US10661719
申请日：2003-09-11
申请人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatah Lehman , Doron Meshulach , Ehud Tirosh
发明人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatah Lehman , Doron Meshulach , Ehud Tirosh
CPC分类号： G03F7/70375 , G03F7/70275
摘要： A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.
-
搜索结果
2 条记录 (耗时 0.022 秒)
