公开(公告)号：US20050274911A1

公开(公告)日：2005-12-15

申请号：US10661719

申请日：2003-09-11

申请人： Meir Aloni ,  Mula Friedman ,  Jimmy Vishnipolsky ,  Gilad Almogy ,  Alon Litman ,  Yonatah Lehman ,  Doron Meshulach ,  Ehud Tirosh

发明人： Meir Aloni ,  Mula Friedman ,  Jimmy Vishnipolsky ,  Gilad Almogy ,  Alon Litman ,  Yonatah Lehman ,  Doron Meshulach ,  Ehud Tirosh

IPC分类号： G03F7/20 ,  H01J37/08

CPC分类号： G03F7/70375 ,  G03F7/70275

摘要： A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.

摘要翻译： 用于在基板上写入主图像的方法包括将主图像分割为帧矩阵，每个帧包括在主图像内的相应帧位置中限定相应帧图像的像素阵列。 当电子束在相应的帧位置上被扫描时，电子束以光栅图案扫描在衬底上，同时响应于每个帧的各个帧图像而对电子束进行成形，使得在每个帧中，电子束 同时将多个像素写入衬底。

公开(公告)号：US07098468B2

公开(公告)日：2006-08-29

申请号：US10661719

申请日：2003-09-11

申请人： Meir Aloni ,  Mula Friedman ,  Jimmy Vishnipolsky ,  Gilad Almogy ,  Alon Litman ,  Yonatah Lehman ,  Doron Meshulach ,  Ehud Tirosh

发明人： Meir Aloni ,  Mula Friedman ,  Jimmy Vishnipolsky ,  Gilad Almogy ,  Alon Litman ,  Yonatah Lehman ,  Doron Meshulach ,  Ehud Tirosh

IPC分类号： G21K5/10 ,  H01J37/08 ,  A61N5/00 ,  G21G5/00

CPC分类号： G03F7/70375 ,  G03F7/70275

摘要： A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.

公开(公告)号：US07842935B2

公开(公告)日：2010-11-30

申请号：US11458043

申请日：2006-07-17

申请人： Meir Aloni ,  Mula Friedman ,  Jimmy Vishnipolsky ,  Gilad Almogy ,  Alon Litman ,  Yonatan Lehman ,  Doron Meshulach ,  Ehud Tirosh

发明人： Meir Aloni ,  Mula Friedman ,  Jimmy Vishnipolsky ,  Gilad Almogy ,  Alon Litman ,  Yonatan Lehman ,  Doron Meshulach ,  Ehud Tirosh

IPC分类号： H01J37/00

CPC分类号： G03F7/70375 ,  G03F7/70275

摘要： A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.

摘要翻译： 用于在基板上写入主图像的方法包括将主图像分割为帧矩阵，每个帧包括在主图像内的相应帧位置中限定相应帧图像的像素阵列。 当电子束在相应的帧位置上被扫描时，电子束以光栅图案扫描在衬底上，同时响应于每个帧的各个帧图像而对电子束进行成形，使得在每个帧中，电子束 同时将多个像素写入衬底。

公开(公告)号：US20060243922A1

公开(公告)日：2006-11-02

申请号：US11458052

申请日：2006-07-17

申请人： Meir Aloni ,  Mula Friedman ,  Jimmy Vishnipolsky ,  Gilad Almogy ,  Alon Litman ,  Yonatan Lehman ,  Doron Meshulach ,  Ehud Tirosh

发明人： Meir Aloni ,  Mula Friedman ,  Jimmy Vishnipolsky ,  Gilad Almogy ,  Alon Litman ,  Yonatan Lehman ,  Doron Meshulach ,  Ehud Tirosh

IPC分类号： G21K5/10

CPC分类号： G03F7/70375 ,  G03F7/70275

摘要： A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.

公开(公告)号：US07521700B2

公开(公告)日：2009-04-21

申请号：US11458052

申请日：2006-07-17

申请人： Meir Aloni ,  Mula Friedman ,  Jimmy Vishnipolsky ,  Gilad Almogy ,  Alon Litman ,  Yonatan Lehman ,  Doron Meshulach ,  Ehud Tirosh

发明人： Meir Aloni ,  Mula Friedman ,  Jimmy Vishnipolsky ,  Gilad Almogy ,  Alon Litman ,  Yonatan Lehman ,  Doron Meshulach ,  Ehud Tirosh

IPC分类号： H01J37/304 ,  G03F7/213

CPC分类号： G03F7/70375 ,  G03F7/70275

摘要： A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.

摘要翻译： 用于在基板上写入主图像的方法包括将主图像分割为帧矩阵，每个帧包括在主图像内的相应帧位置中限定相应帧图像的像素阵列。 当电子束在相应的帧位置上被扫描时，电子束以光栅图案扫描在衬底上，同时响应于每个帧的各个帧图像而对电子束进行成形，使得在每个帧中，电子束 同时将多个像素写入衬底。

公开(公告)号：US20060243918A1

公开(公告)日：2006-11-02

申请号：US11458043

申请日：2006-07-17

申请人： Meir Aloni ,  Mula Friedman ,  Jimmy Vishnipolsky ,  Gilad Almogy ,  Alon Litman ,  Yonatan Lehman ,  Doron Meshulach ,  Ehud Tirosh

发明人： Meir Aloni ,  Mula Friedman ,  Jimmy Vishnipolsky ,  Gilad Almogy ,  Alon Litman ,  Yonatan Lehman ,  Doron Meshulach ,  Ehud Tirosh

IPC分类号： A61N5/00

CPC分类号： G03F7/70375 ,  G03F7/70275

摘要： A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.

摘要翻译： 用于在基板上写入主图像的方法包括将主图像分割为帧矩阵，每个帧包括在主图像内的相应帧位置中限定相应帧图像的像素阵列。 当电子束在相应的帧位置上被扫描时，电子束以光栅图案扫描在衬底上，同时响应于每个帧的各个帧图像而对电子束进行成形，使得在每个帧中，电子束 同时将多个像素写入衬底。

公开(公告)号：US20060055911A1

公开(公告)日：2006-03-16

申请号：US10940347

申请日：2004-09-13

申请人： Ehud Tirosh ,  Gilad Almogy ,  Meir Aloni ,  Doron Meshulach

发明人： Ehud Tirosh ,  Gilad Almogy ,  Meir Aloni ,  Doron Meshulach

IPC分类号： G03B27/32 ,  G03F7/20

CPC分类号： G03F7/70291 ,  G03F7/70408

摘要： The invention provides a method and printer for printing an image that comprises at least one group of highly dense shapes, the method includes: (i) determining multiple intermediate schemes such as to allow printing corresponding intermediate images on an object; whereas at least one intermediate scheme comprises directing at least one interference pattern toward at least one location corresponding to at least one group of highly dense shapes; (ii) generating an array of light entities in response to an intermediate scheme; (iii) directing the array of light entities towards the object to form the intermediate image; and (iv) moving the object relative to the light entities while repeating the steps of generating and directing to expose the object with the image. The invention provides a system that includes: (i) means for determining multiple intermediate schemes such as to allow printing corresponding intermediate images on an object; whereas at least one intermediate scheme comprises directing at least one interference pattern towards at least one location corresponding to at least one group of highly dense shapes; (ii) a programmable optical radiation source for generating an array of light entities in response to an intermediate scheme; (iii) optics for directing the array of light entities towards the object to form the intermediate image; and (iv) a translator for moving the object relative to the light entities while repeating the steps of generating and directing to expose the object with the image.

摘要翻译： 本发明提供了一种用于打印包括至少一组高密度形状的图像的方法和打印机，所述方法包括：（i）确定多个中间方案，以允许在对象上打印相应的中间图像; 而至少一个中间方案包括将至少一个干涉图案引向至少一个对应于至少一组高度致密形状的位置; （ii）响应于中间方案产生光实体阵列; （iii）将光实体阵列引向物体以形成中间图像; 以及（iv）相对于光实体移动对象，同时重复生成并指示以图像曝光对象的步骤。 本发明提供了一种系统，其包括：（i）用于确定多个中间方案的装置，例如允许在对象上打印对应的中间图像; 而至少一个中间方案包括将至少一个干涉图案引导至对应于至少一组高密度形状的至少一个位置; （ii）可编程光辐射源，用于响应于中间方案产生光实体阵列; （iii）用于将光实体阵列引向物体以形成中间图像的光学器件; 以及（iv）用于相对于光实体移动物体的翻译器，同时重复生成并指示以图像曝光对象的步骤。

公开(公告)号：US07846649B2

公开(公告)日：2010-12-07

申请号：US10940347

申请日：2004-09-13

申请人： Ehud Tirosh ,  Gilad Almogy ,  Meir Aloni ,  Doron Meshulach

发明人： Ehud Tirosh ,  Gilad Almogy ,  Meir Aloni ,  Doron Meshulach

IPC分类号： G03C5/04

CPC分类号： G03F7/70291 ,  G03F7/70408

摘要： The invention provides a method and printer for printing an image that comprises at least one group of highly dense shapes, the method including: (i) determining multiple intermediate schemes such as to allow printing corresponding intermediate images on an object; wherein at least one intermediate scheme comprises directing at least one interference pattern toward at least one location corresponding to at least one group of highly dense shapes; (ii) generating an array of light entities in response to an intermediate scheme; (iii) directing the array of light entities towards the object to form the intermediate image; and (iv) moving the object relative to the light entities while repeating the steps of generating and directing to expose the object with the image.The invention provides a system that includes: (i) means for determining multiple intermediate schemes such as to allow printing corresponding intermediate images on an object; wherein at least one intermediate scheme comprises directing at least one interference pattern towards at least one location corresponding to at least one group of highly dense shapes; (ii) a programmable optical radiation source for generating an array of light entities in response to an intermediate scheme; (iii) optics for directing the array of light entities towards the object to form the intermediate image; and (iv) a translator for moving the object relative to the light entities while repeating the steps of generating and directing to expose the object with the image.

摘要翻译： 本发明提供了一种用于打印包括至少一组高密度形状的图像的方法和打印机，所述方法包括：（i）确定多个中间方案，以允许在对象上打印相应的中间图像; 其中至少一个中间方案包括将至少一个干涉图案引导至对应于至少一组高密度形状的至少一个位置; （ii）响应于中间方案产生光实体阵列; （iii）将光实体阵列引向物体以形成中间图像; 以及（iv）相对于光实体移动对象，同时重复生成并指示以图像曝光对象的步骤。 本发明提供了一种系统，其包括：（i）用于确定多个中间方案的装置，例如允许在对象上打印对应的中间图像; 其中至少一个中间方案包括将至少一个干涉图案引导到对应于至少一组高度致密形状的至少一个位置; （ii）可编程光辐射源，用于响应于中间方案产生光实体阵列; （iii）用于将光实体阵列引向物体以形成中间图像的光学器件; 以及（iv）用于相对于光实体移动物体的翻译器，同时重复生成并指示以图像曝光对象的步骤。

公开(公告)号：US20060197931A1

公开(公告)日：2006-09-07

申请号：US11361418

申请日：2006-02-24

申请人： Gilad Almogy ,  Haim Feldman ,  Meir Aloni

发明人： Gilad Almogy ,  Haim Feldman ,  Meir Aloni

IPC分类号： G03B27/54

CPC分类号： G03F7/70208 ,  G03F7/70275 ,  G03F7/70291 ,  G03F7/70358

摘要： A printer and method for recording a predefined multiple intensity level image on a substrate, the method includes the steps of: converting the predetermined image to multiple intensity level associated images; converting a light beam to multiple light beam arrays; modulating each light beam array to provide modulated light beam arrays, in response to a corresponding intensity level associated image to be recorded on the substrate; directing each modulated light beam array to impinge on the substrate; and repeating the steps of converting, modulating and directing while moving the substrate until the predefined image is imaged on the substrate. The printer includes a programmable optical radiation source for providing multiple modulated light beam arrays and for directing the modulated light beam arrays to impinge on the substrate, each modulated light beam array being modulated in response to an input signal corresponding to a corresponding intensity level associated image to be recorded on the substrate; whereas a superposition of the intensity level associated images forms the predefined image on the substrate, and a movable stage for moving the substrate until the predefined image is imaged on the substrate.

摘要翻译： 一种用于在基板上记录预定多重强度级图像的打印机和方法，所述方法包括以下步骤：将预定图像转换成多个强度级相关图像; 将光束转换成多个光束阵列; 调制每个光束阵列以响应于要记录在所述衬底上的对应的强度级相关图像来提供调制的光束阵列; 引导每个调制的光束阵列撞击在基底上; 并且重复在移动衬底的同时转换，调制和引导步骤，直到预定图像被成像在衬底上。 打印机包括可编程光辐射源，用于提供多个调制光束阵列并用于引导调制的光束阵列撞击衬底，每个被调制的光束阵列响应于对应于对应的亮度级相关图像的输入信号被调制 被记录在基板上; 而强度级相关图像的叠加在衬底上形成预定义的图像，以及用于移动衬底的可移动台，直到预定图像在衬底上成像为止。

公开(公告)号：US07053985B2

公开(公告)日：2006-05-30

申请号：US10615008

申请日：2003-07-07

申请人： Gilad Almogy ,  Haim Feldman ,  Meir Aloni

发明人： Gilad Almogy ,  Haim Feldman ,  Meir Aloni

IPC分类号： G03B27/54 ,  G03B27/42

CPC分类号： G03F7/70208 ,  G03F7/70275 ,  G03F7/70291 ,  G03F7/70358

摘要： A printer and method for recording a predefined multiple intensity level image on a substrate, the method includes the steps of: converting the predetermined image to multiple intensity level associated images; converting a light beam to multiple light beam arrays; modulating each light beam array to provide modulated light beam arrays, in response to a corresponding intensity level associated image to be recorded on the substrate; directing each modulated light beam array to impinge on the substrate; and repeating the steps of converting, modulating and directing while moving the substrate until the predefined image is imaged on the substrate. The printer includes a programmable optical radiation source for providing multiple modulated light beam arrays and for directing the modulated light beam arrays to impinge on the substrate, each modulated light beam array being modulated in response to an input signal corresponding to a corresponding intensity level associated image to be recorded on the substrate; whereas a superposition of the intensity level associated images forms the predefined image on the substrate, and a movable stage for moving the substrate until the predefined image is imaged on the substrate.